Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
06/2007
06/06/2007EP1791986A1 Cutting tool with wear resistant coating and method of making the same
06/06/2007EP1791667A2 Radiopaque coating for biomedical devices
06/06/2007DE10348281B4 Vakuum-Behandlungsanlage für ebene rechteckige oder quadratische Substrate Vacuum treatment installation for flat rectangular or square substrates
06/06/2007DE102005057563A1 Injection valve comprises an axially movable member, a fixed seat and a nozzle element
06/06/2007DE102005057220A1 Behälter zur Verdampfung von Metall und Verfahren zur Herstellung desselben Of the same container for the evaporation of metal and methods for preparing
06/06/2007DE102004020404B4 Trägerplatte für Sputtertargets, Verfahren zu ihrer Herstellung und Einheit aus Trägerplatte und Sputtertarget Backing plate for sputtering targets, processes for their preparation and assembly of the carrier plate and sputtering target
06/06/2007CN2908530Y IW metal mosaic target
06/06/2007CN2908529Y Vacuum film coating machine with anti-leakage device
06/06/2007CN1977070A Phosphorus effusion cell arrangement and method for producing molecular phosphorus
06/06/2007CN1977067A Method for producing a metal wire coated with a layer of brass
06/06/2007CN1977066A Substrate dome
06/06/2007CN1977065A Film supporting apparatus
06/06/2007CN1976880A Method for producing a hydrophobic coating, device for implementing said method and support provided with a hydrophobic coating
06/06/2007CN1976055A Organic light emitting display and a deposition method
06/06/2007CN1975944A Thin-film laminate, and electronic parts
06/06/2007CN1975214A Sliding member and production process thereof
06/06/2007CN1975188A 轴承元件 Bearing elements
06/06/2007CN1974838A Process of growing self-organized Ge quantum dot by means of ion beam sputtering in low growth beam flux
06/06/2007CN1974837A Prepn process of low temperature double ion beam sputtered multilayer Ge/Si film with self-organized Ge quantum dots
06/06/2007CN1974664A Metallically coated light-reflecting components based on thermoplastic molding compounds
06/06/2007CN1974235A Vacuum coating apparatus, method and product with laser pattern formed on substrate surface
06/06/2007CN1320542C Optical recording medium, method for manufacturing the same and target used for sputtering process
06/06/2007CN1320156C manufacturing method of film and sputtering device
06/06/2007CN1320155C Sputtering target for high resistance transparent conductive membrane and mfg. method of high resistance transparent conductive membrane
06/06/2007CN1320154C Method of depositing film on cantilever and its needle tip of microscope
06/05/2007US7227159 Ion implantation apparatus and ion implanting method
06/05/2007US7226795 Semiconductor-ferroelectric storage devices and processes for producing the same
06/05/2007US7226672 Turbine components with thermal barrier coatings
06/05/2007US7226670 Uniform thickness; milling tools; injection molding dies
06/05/2007US7226659 High wear resistant hard film
06/05/2007US7226528 Methods of making coated articles by sputtering silver in oxygen inclusive atmosphere
06/05/2007CA2261425C Method and apparatus for three-dimensional micro-fabrication and processing on flexible filamentary substrates
05/2007
05/31/2007WO2007062089A1 Fabrication of ruthenium and ruthenium alloy sputtering targets with low oxygen content
05/31/2007WO2007061282A1 Method to produce adhesiveless metallized polyimide film
05/31/2007WO2007061012A1 Metal, process for producing metal, metal producing apparatus and use thereof
05/31/2007WO2007060877A1 Transparent oxide semiconductor junction
05/31/2007WO2007060814A1 Scintillator plate for radiation
05/31/2007WO2007060062A1 Layered system comprising a gadolinium mixed crystal pyrochlore phase
05/31/2007WO2007059749A1 Separating device for process chambers of vacuum coating installations and vacuum coating installation
05/31/2007WO2007059640A1 Diaphragm arrangement for a vacuum measurement cell
05/31/2007WO2007038368B1 Reactive dual magnetron sputtering device with synchronised gas supply
05/31/2007WO2006118677A3 HIGHLY ORDERED L10 FePT NANOMAGNETS FOR DATA STORAGE AND MAGNETIC SENSING AND METHOD OF MAKING
05/31/2007US20070122700 Anode material for secondary battery, anode for secondary battery and secondary battery therewith
05/31/2007US20070122649 Thin film transistor substrate for display
05/31/2007US20070122560 Solid-free-form fabrication process including in-process component deformation
05/31/2007US20070122541 Method for preparation of bioactive ceramic-coated composite
05/31/2007US20070119705 Back-biased face target sputtering based memory data sensing technique
05/31/2007US20070119704 Method for sputtering a multilayer film on a sheet workpiece at a low temperature
05/31/2007US20070119703 Depositing adhesive layer on surface of mold preform using radio frequency sputtering, depositing densified layer, amorphous nitrogen-doped diamond-like carbon layer, amorphous nitrogen-hydrogen-doped diamond-like carbon layer, amorphous hydrogen-doped diamond-like carbon layer; wear resistance
05/31/2007US20070119702 Method for sputtering a multilayer film on a sheet workpiece at a low temperature
05/31/2007US20070119701 High-Power Pulsed Magnetron Sputtering
05/31/2007US20070119700 Apparatus and method for manufacturing a multilayer film
05/31/2007DE112005001599T5 Eine Magnetron-Zerstäubungsvorrichtung, in der zwischen zwei Magnetflußverteilungsmodi (ausgeglichener Modus/nicht-ausgeglichener Modus) umgestellt werden kann, ein Filmbildungsverfahren zur Bildung eines Films aus einem anorganischen Filmbildungsmaterial unter Verwendung der Vorrichtung und eine Dualmodus-Magnetron-Zerstäubungsvorrichtung und ein Filmbildungsverfahren zur Bildung eines Films aus einem anorganischen Filmbildungsmaterial bei einer niedrigen Temperatur unter Verwendung der Vorrichtung A magnetron sputtering device in which between two Magnetflußverteilungsmodi (balanced mode / non-balanced mode) can be switched over, a film forming method for forming a film of an inorganic film forming material, using the apparatus and a dual-mode magnetron sputtering apparatus and a film forming method for forming a film of an inorganic film forming material at a low temperature using the apparatus
05/31/2007DE102005063123B3 Piston ring for sealing chamber in cylinder has running-in layer containing hydrogen and nanocrystalline carbide phases
05/31/2007DE102005055255A1 Verfahren zum Herstellen eines Targets A method of manufacturing a target
05/30/2007EP1790756A1 Thin-film forming apparatus
05/30/2007EP1790755A2 Method of vaporisation of phosphor precursor raw materials.
05/30/2007EP1790754A1 Coating system including a mixed Gadolinium pyrochlor phase.
05/30/2007EP1790224A1 Antimicrobial layered material
05/30/2007EP1789622A1 Improved breathable low-emissivity metallized sheets
05/30/2007EP1789620A1 Metal-coated textile
05/30/2007EP1789607A2 Cutting tool with oxide coating
05/30/2007EP1789603A1 Metal product, method of manufacturing a metal product and use thereof
05/30/2007EP1718460A4 Coated article with low-e coating including ir reflecting layer(s) and corresponding method
05/30/2007EP1392200A4 Method and system for improving the effectiveness of artificial joints by the application of gas cluster ion beam technology
05/30/2007EP1373388B1 Release films
05/30/2007EP1309733B1 Chromium-containing cemented carbide body having a surface zone of binder enrichment
05/30/2007EP1261752B1 Method for repairing lithography masks using a charged particle beam system
05/30/2007EP1212777B1 Ion beam vacuum sputtering apparatus and method
05/30/2007CN2906916Y Faraday device
05/30/2007CN2906915Y Fixed Faraday cage device for beam sampling and measurement
05/30/2007CN1973059A Vacuum film forming apparatus
05/30/2007CN1973058A Reinforcing structure of vacuum tank for preventing deformation
05/30/2007CN1973057A High chromium ferritic steel with 0.5 atomic % hafnium, part of which is ion implanted
05/30/2007CN1972759A Antisoiling coatings for antireflective substrates
05/30/2007CN1970882A Anti-UV fabric capable of shielding electromagnetic wave and its producing method
05/30/2007CN1970830A Flexible conveying device and its using method
05/30/2007CN1970829A Method for manufacturing nontoxic tablewares, tea set, and medical vessels by using binary method and products therefrom
05/30/2007CN1970828A Method and apparatus for forming multilayer coating on die
05/30/2007CN1970827A Method for making die with multilayer diamond-like carbon film
05/30/2007CN1970826A Vacuum deposition device and method therefor
05/30/2007CN1970176A Dry ice cleaning method for apparatus of coating by vaporization
05/30/2007CN1969721A Plastic dishware having surface coating
05/30/2007CN1319355C Inner noise immunizing data communication scheme
05/30/2007CN1319116C Film forming device and film forming method, and method for forming EL device
05/30/2007CN1319114C Electronic device having electrode made by carbon-affinity metal
05/30/2007CN1318892C Substrate with ITO coating film and manufacture thereof
05/30/2007CN1318646C Method of making nickel-coated copper substrate and thin film composite containing same
05/30/2007CN1318642C Porous getter devices with reduced particle loss and method for manufacturing same
05/30/2007CN1318641C Product with antibacterial and wear-resistant surface
05/30/2007CN1318640C Robotic manipulation system utilizing patterned granular motion
05/30/2007CN1318626C Metallic material for electronic part, electronic part, electronic equipment, method of working metallic material, process for producing electronic part and electronic optical part
05/29/2007US7223676 Very low temperature CVD process with independently variable conformality, stress and composition of the CVD layer
05/29/2007US7223627 Memory element and its method of formation
05/29/2007US7223449 Film deposition method
05/29/2007US7223446 Plasma CVD apparatus and dry cleaning method of the same
05/29/2007US7223322 closed loop magnet arrangement received within a magnet receiving chamber and coupled to the drive unit; at least one of the plurality of magnets is a profiled magnet having a contoured top portion; higher target material utilization
05/24/2007WO2007059347A2 Flexible magnetron including partial rolling support and centering pins
05/24/2007WO2007058767A1 Sputtering target
05/24/2007WO2007058720A1 Method for fabricating controlled stress silicon nitride films