| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 03/17/2011 | US20110065237 Apparatus and method for manufacturing multi-component oxide heterostructures |
| 03/17/2011 | US20110065236 Method for maintaining a smooth surface of crystallizable material |
| 03/17/2011 | US20110065024 STAINLESS STEEL SEPARATOR FOR FUEL CELL HAVING M/MNx AND MOyNz LAYER AND METHOD FOR MANUFACTURING THE SAME |
| 03/17/2011 | US20110064903 Method of manufacturing optical recording medium, and optical recording medium |
| 03/17/2011 | US20110064880 Vacuum processing apparatus, vacuum processing method, and electronic device manufacturing method |
| 03/17/2011 | US20110064873 Method for producing carbon nanocoils |
| 03/17/2011 | US20110064645 Carbon nanotube and method for producing the same |
| 03/17/2011 | US20110064642 Dielectric film with metallic oxynitride |
| 03/17/2011 | US20110064370 Systems and methods for preparing films using sequential ion implantation, and films formed using same |
| 03/17/2011 | US20110063601 Pellicle frame, pellicle, lithography apparatus, and method of fabricating the pellicle frame |
| 03/17/2011 | US20110062460 Organic el light emitting element, manufacturing method thereof, and display device |
| 03/17/2011 | US20110062023 Sputtering device |
| 03/17/2011 | US20110062022 rotatable sputtering magnetron with high stiffness |
| 03/17/2011 | US20110062021 Sputter-coating apparatus |
| 03/17/2011 | US20110062020 Rotary Target Assembly and Rotary Target |
| 03/17/2011 | US20110062019 Sputtering apparatus |
| 03/17/2011 | US20110062016 Method for manufacturing aluminum-containing nitride intermediate layer, method for manufacturing nitride layer, and method for manufacturing nitride semiconductor element |
| 03/17/2011 | US20110062015 Coating apparatus and coating method |
| 03/17/2011 | US20110061724 Photovoltaic Cell Module And Method Of Forming Same |
| 03/17/2011 | US20110061150 Deposition of Electronic Circuits on Fibers and Other Materials |
| 03/17/2011 | DE202010016858U1 Transportvorrichtung für Substrate Transport device for substrates |
| 03/17/2011 | DE10362259B4 Längserstreckte Vakuumanlage zur ein- oder beidseitigen Beschichtung flacher Substrate Elongate vacuum system for single or double-sided coating of flat substrates |
| 03/16/2011 | EP2296038A1 Mask defect testing apparatus |
| 03/16/2011 | EP2295616A1 Hard coating layer and method for forming the same |
| 03/16/2011 | EP2294599A1 Plasma stamp, plasma treatment device, method for plasma treatment and method for producing a plasma stamp |
| 03/16/2011 | EP2294241A1 A method to manufacture an oxide sputter target comprising a first and second phase |
| 03/16/2011 | EP2294240A2 Light induced patterning |
| 03/16/2011 | EP2294239A1 Coating method and device using a plasma-enhanced chemical reaction |
| 03/16/2011 | EP1809792B1 Common rack for electroplating and pvd coating operations |
| 03/16/2011 | EP1711643B1 Method for the production of an ultra barrier layer system |
| 03/16/2011 | EP1627095B1 METHOD FOR PRODUCING SILICON OXIDE FILM AND an OPTICAL MULTILAYER FILM |
| 03/16/2011 | EP1616694B1 Process for producing packaging laminate material |
| 03/16/2011 | EP1591556B1 METHOD FOR PRODUCTION OF Ta SPUTTERING TARGET |
| 03/16/2011 | CN201762439U Device removing metal coating on back surface of nanometer alumina template |
| 03/16/2011 | CN201762438U Electric arc ion plating device |
| 03/16/2011 | CN201762437U Electric arc evaporation source for actively controlling arc spots and device using same |
| 03/16/2011 | CN201762436U Movable type arc discharge ion plating device |
| 03/16/2011 | CN201762435U Solid lubricating film with high-temperature resistance |
| 03/16/2011 | CN101985741A Method for improving conductivity of indium-doped zinc oxide transparent conductive film |
| 03/16/2011 | CN101985740A Method for annealing aluminum-doped zinc oxide transparent conductive thin film |
| 03/16/2011 | CN101985739A Dosage control system of plasma immersion implanting device |
| 03/16/2011 | CN101985738A Method for depositing metal or hard ornament film on plastic substrate |
| 03/16/2011 | CN101985737A Vacuum magnetron sputtering coating production line system of continuous solar energy collector chip |
| 03/16/2011 | CN101985736A Multistation gradient film coating equipment |
| 03/16/2011 | CN101985735A Alumina target material and transparent conductive film prepared thereby |
| 03/16/2011 | CN101985734A Method for preparing copper-indium-gallium-selenium film |
| 03/16/2011 | CN101985733A Target, method for producing the same, memory, and method for producing the same |
| 03/16/2011 | CN101985732A Method for preparing amorphous silicon carbide film |
| 03/16/2011 | CN101748373B Preparation method of Cu (C) film with high heat stability and low resistivity |
| 03/16/2011 | CN101665902B Nickel ordered porous array film and preparation method thereof |
| 03/16/2011 | CN101591771B Device for positioning and supporting base of vacuum equipment |
| 03/16/2011 | CN101539686B Manufacturing method of liquid crystal alignment layer |
| 03/16/2011 | CN101441280B Ultra low residual reflection low stress lens coating |
| 03/16/2011 | CN101441279B Ultra low residual reflection low stress lens coating |
| 03/16/2011 | CN101418431B Multi-chamber vacuum coating film device |
| 03/15/2011 | US7906032 Method for conditioning a process chamber |
| 03/15/2011 | US7905995 Alternating current rotatable sputter cathode |
| 03/15/2011 | US7905991 Vacuum treatment system |
| 03/15/2011 | US7905199 Method and system for directional growth using a gas cluster ion beam |
| 03/15/2011 | CA2585187C Hydrogen separation membrane, sputtering target for forming said hydrogen separation membrane, and manufacturing method thereof |
| 03/10/2011 | WO2011028867A1 Organic vapor jet printing device with a chiller plate |
| 03/10/2011 | WO2011027894A1 Semiconductor substrate, method for producing semiconductor substrate, substrate for semiconductor growth, method for producing substrate for semiconductor growth, semiconductor element, light-emitting element, display panel, electronic element, solar cell element, and electronic device |
| 03/10/2011 | WO2011027886A1 Tape base for superconducting wire, and superconducting wire |
| 03/10/2011 | WO2011027691A1 Sputtering device |
| 03/10/2011 | WO2011027206A1 Method and apparatus for the multi-layer and multi-component coating of thin films on substrates, and multi-layer and multi-component coatings |
| 03/10/2011 | WO2011027035A1 Process and apparatus for controlling coating deposition |
| 03/10/2011 | WO2011026971A1 Method and device for coating substrates from the vapor phase |
| 03/10/2011 | WO2011026914A1 Activation of electrode surfaces by means of vacuum deposition techniques in a continuous process |
| 03/10/2011 | WO2011026674A1 Evaporator, arrangement of evaporators, and coating system |
| 03/10/2011 | WO2011026455A1 Method for producing and structuring a zinc oxide layer and zinc oxide layer |
| 03/10/2011 | WO2010116112A3 Production method with thermal projection of a target |
| 03/10/2011 | US20110059334 Adhesiveless copper clad laminates and method for manufacturing thereof |
| 03/10/2011 | US20110059149 Process for depositing calcium phosphate therapeutic coatings with different release rates and a prosthesis coated via the process |
| 03/10/2011 | US20110058912 THERMALLY STABILIZED (Ti,Si)N LAYER FOR CUTTING TOOL INSERT |
| 03/10/2011 | US20110058279 Overcoat having a low silicon/carbon ratio |
| 03/10/2011 | US20110056912 Plasma processing apparatus and plasma processing method |
| 03/10/2011 | US20110056909 Methods of making medical devices |
| 03/10/2011 | US20110056830 Sputtering deposition apparatus |
| 03/10/2011 | US20110056829 Cathode unit and sputtering apparatus provided with the same |
| 03/10/2011 | US20110056828 Monolithic aluminum alloy target and method of manufacturing |
| 03/10/2011 | US20110056825 Dielectric-layer-coated substrate and installation for production thereof |
| 03/10/2011 | US20110056824 Method of preparing positive active material for lithium battery |
| 03/10/2011 | US20110056812 Nano-electro-mechanical switches using three-dimensional sidewall-conductive carbon nanofibers and method for making the same |
| 03/10/2011 | DE4412541B4 Gaseinlassanlage und -verfahren Gas inlet system and method |
| 03/10/2011 | DE102009040086A1 Verfahren und Vorrichtung zur Beschichtung von Substraten aus der Dampfphase Method and apparatus for coating substrates from the vapor phase |
| 03/10/2011 | DE102009029236A1 Verdampfer, Anordnung von Verdampfern sowie Beschichtungsanlage Evaporator arrangement of evaporators and coating plant |
| 03/10/2011 | DE102009026340A1 Cell for effusion of materials at specified temperature, comprises a crucible, a heater and a contact element electrically connected to the heater, where a portion of the contact element is formed by electrical insulating material |
| 03/10/2011 | DE102005020666B4 Schichtbildungsquelle, vakuumunterstützte Vorrichtung zur Schichtbildung, Verfahren zur Herstellung eines organischen elektrolumineszierenden Bauelements Film forming source, vacuum-assisted apparatus for film formation, method of manufacturing an organic electroluminescent device |
| 03/10/2011 | CA2769818A1 Activation of electrode surfaces by means of vacuum deposition techniques in a continuous process |
| 03/09/2011 | EP2293340A2 Thin-film solar module and method for its production |
| 03/09/2011 | EP2293320A2 Sputtering targets and methods for depositing a film containing tin and niobium |
| 03/09/2011 | EP2292810A2 Coating of vitrified ceramic articles by pvd method |
| 03/09/2011 | EP2291876A2 Thin film batteries and methods for manufacturing same |
| 03/09/2011 | EP2291692A1 Method of making thin film structure and compositions thereof |
| 03/09/2011 | EP1863948B1 Device and method for the transport of a tube from a first chamber into a second chamber |
| 03/09/2011 | EP1712367B1 Phase-change information recording medium, process for producing the same and sputtering target. |
| 03/09/2011 | EP1033068B2 Plasma processing apparatus having rotating magnets |
| 03/09/2011 | CN201758134U Device for preparing back electrode film of solar battery |
| 03/09/2011 | CN101984135A Film-forming substrate clamp and film-forming device thereof |
| 03/09/2011 | CN101984134A Transmission roller of solar coated furnace |