| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 01/12/2011 | CN101942641A Evaporation source device of OLED (Organic Light Emitting Diode) evaporator |
| 01/12/2011 | CN101942640A Canister for deposition apparatus, deposition apparatus using the same and method of depositing |
| 01/12/2011 | CN101942639A Vacuum vapor deposition apparatus |
| 01/12/2011 | CN101942638A Preparation method of bionic controllable adhesive hydrophobic gold surface |
| 01/12/2011 | CN101942637A Cover plate on coating process chamber |
| 01/12/2011 | CN101942636A Multilayered composite coated film, manufacturing method thereof and substrate with same |
| 01/12/2011 | CN101941315A Method for preparing fluorescence detection membrane containing dual-bandgap photonic crystals for fluorescence detection of explosives |
| 01/12/2011 | CN101941309A Superlattice multilayer film and preparation method thereof |
| 01/12/2011 | CN101941085A Coated cutting tool insert |
| 01/12/2011 | CN101487121B Diamond / W-C gradient structure composite coating and preparing method thereof |
| 01/12/2011 | CN101464528B DLC infrared anti-refiection protective film and method for producing the same |
| 01/12/2011 | CN101457058B Ultraviolet cured primer special for vacuum coating |
| 01/12/2011 | CN101451231B Magnetron sputtering cathode mechanism |
| 01/12/2011 | CN101409347B Lithium ion battery cathode sheet and preparation method thereof |
| 01/12/2011 | CN101370959B Sputtering method and sputtering system |
| 01/12/2011 | CN101215689B Method for preparing (002) texture Fe thin film |
| 01/12/2011 | CN101200797B PVD nano multiple-layer coating for cutting stainless steel and preparation method thereof |
| 01/12/2011 | CN101188207B Electrostatic sucking electrode, substrate processing apparatus and manufacturing method for electrostatic sucking electrode |
| 01/12/2011 | CN101100963B Piston ring for internal combustion engines |
| 01/11/2011 | US7868458 Semiconductor device with epitaxial C49-titanium silicide (TiSi2) layer and method for fabricating the same |
| 01/11/2011 | US7867847 Method of manufacturing dielectric film that has hafnium-containing and aluminum-containing oxynitride |
| 01/11/2011 | US7867633 Coatings for glass molding dies and forming tools |
| 01/11/2011 | US7867472 Insulating target material, method of manufacturing insulating target material, conductive complex oxide film, and device |
| 01/11/2011 | US7867366 Coaxial plasma arc vapor deposition apparatus and method |
| 01/11/2011 | US7867356 Apparatus for reducing polymer deposition on a substrate and substrate support |
| 01/11/2011 | US7866278 Thin-film deposition system |
| 01/11/2011 | CA2493988C Installation for the vacuum treatment notably of substrates |
| 01/11/2011 | CA2442460C Method for selective surface protection of a gas turbine blade which has previously been in service |
| 01/11/2011 | CA2430666C Separator of a fuel cell and a manufacturing method thereof |
| 01/06/2011 | WO2011002688A1 System and method for selectively controlling ion composition of plasmas |
| 01/06/2011 | WO2011002058A1 Method for depositing thin film |
| 01/06/2011 | WO2011002036A1 Divided annular rib-shaped plasma processing device |
| 01/06/2011 | WO2011002028A1 Manufacturing method of piezoelectric-body film, and piezoelectric-body film manufactured by the manufacturing method |
| 01/06/2011 | WO2011001974A1 Cu-ga target and method for producing same |
| 01/06/2011 | WO2011001968A1 Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter |
| 01/06/2011 | WO2011001739A1 Multi-split anode wall plasma generating device and plasma treating device |
| 01/06/2011 | WO2011001689A1 Thin film manufacturing method and silicon material which can be used in the method |
| 01/06/2011 | WO2011001631A1 Transparent conductive film |
| 01/06/2011 | WO2011001065A1 Method for treating a painted or unpainted composite material using an ion beam |
| 01/06/2011 | WO2011000676A1 Method for producing thermoelectric layers |
| 01/06/2011 | WO2011000357A2 Method and device for the deposition of thin layers, particularly for producing multi-layer coatings, nanolayers, nanostructures and nanocomposites |
| 01/06/2011 | WO2011000211A1 Method for preparing high density sputtering coating target by nb-doped nano indium tin oxide powder |
| 01/06/2011 | WO2011000068A1 Piston ring |
| 01/06/2011 | WO2010094212A3 Antibacterial surface and method of fabrication |
| 01/06/2011 | US20110003228 Sealing arrangement for high-temperature fuel cell stack |
| 01/06/2011 | US20110003173 Silver alloy, sputtering target material thereof, and thin film thereof |
| 01/06/2011 | US20110003168 Reflective film and semi-transmissive reflective film of optical information recording medium, sputtering target for manufacturing them, as well as optical information recording medium |
| 01/06/2011 | US20110003075 Process and apparatus for depositing a ceramic coating |
| 01/06/2011 | US20110003072 Bending fixture for homogenous and smooth operation of an evaporation source |
| 01/06/2011 | US20110001079 Method for producing nanoparticles for magnetic fluids by electron-beam evaporation and condensation in vacuum, a magnetic fluid producing method and magnetic fluid produced according to said method |
| 01/06/2011 | US20110000785 Electrical patterns for biosensor and method of making |
| 01/06/2011 | US20110000783 Rotary magnet sputtering apparatus |
| 01/06/2011 | US20110000541 Method for deposition a film onto a substrate |
| 01/05/2011 | EP2270819A1 Conductor and manufacturing method therefor |
| 01/05/2011 | EP2270253A1 Bending fixture for homogenous and smooth operation of an evaporation source |
| 01/05/2011 | EP2270252A1 Sintered target and method for production of sintered material |
| 01/05/2011 | EP2270251A1 Vacuum vapor deposition apparatus |
| 01/05/2011 | EP2269966A2 Turbine engine components |
| 01/05/2011 | EP2269752A1 Surface coated cutting tool |
| 01/05/2011 | EP2268845A1 Mask support, mask assembly, and assembly comprising a mask support and a mask |
| 01/05/2011 | EP2268844A1 Apparatus for sputtering and a method of fabricating a metallization structure |
| 01/05/2011 | EP2268843A1 Coating process, workpiece or tool and its use |
| 01/05/2011 | EP1930451B1 High-purity hafnium, target and thin film comprising high-purity hafnium, and process for producing high-purity hafnium |
| 01/05/2011 | DE102009031302A1 Verfahren zur Herstellung von thermoelektrischen Schichten A process for producing thermoelectric layers |
| 01/05/2011 | DE102009030876A1 Verfahren zum Beschichten eines Substrats A method for coating a substrate |
| 01/05/2011 | DE102009030814A1 Arrangement for coating the substrates, comprises coating source and substrate support in vacuum chamber, where coating source is arranged to the support on one-side and the support has rear side pointing towards the coating source |
| 01/05/2011 | DE102009017305A1 Device for transporting substrates, e.g. glass, through a vacuum installation comprises fixing units which move over the substrates perpendicular to their surfaces and act on the substrate surfaces with a defined pressure |
| 01/05/2011 | CN201695085U Horizontal high-temperature vacuum coating production line |
| 01/05/2011 | CN201695084U Magnetic steering device of substrate frame of vacuum coating production line |
| 01/05/2011 | CN201695083U Insertion plate valve for vacuum film coating production line |
| 01/05/2011 | CN201695082U Transmission friction wheel regulator of vacuum film coating machine |
| 01/05/2011 | CN201695081U Substrate delivery mechanism of horizontal vacuum coating machine |
| 01/05/2011 | CN201695080U Magnetic control sputtering coating machine |
| 01/05/2011 | CN201695079U Target door rotating mechanism of horizontal vacuum coating machine |
| 01/05/2011 | CN201695078U Non-target door turnover mechanism of horizontal vacuum coating machine |
| 01/05/2011 | CN101939813A Multiple grooved vacuum coupling |
| 01/05/2011 | CN101939464A Lock device for adding and removing containers to and from a vacuum treatment chamber |
| 01/05/2011 | CN101939463A Vaporization apparatus with precise powder metering |
| 01/05/2011 | CN101937864A Filling method of contact hole |
| 01/05/2011 | CN101937732A Nano cable made of magnetic material and half-metallic material and preparation method thereof |
| 01/05/2011 | CN101937170A Method for manufacturing phase shift mask, method for manufacturing flat panel display, and phase shift mask |
| 01/05/2011 | CN101936899A Long-range surface plasma resonance sensor and preparation method thereof |
| 01/05/2011 | CN101935842A Treatment process of stainless steel forming mold before PVD coating |
| 01/05/2011 | CN101935824A Ion injection method, equipment and method for forming light-dope structure |
| 01/05/2011 | CN101935823A Magnetic control sputtering target for use in ultrahigh vacuum |
| 01/05/2011 | CN101935822A Rectangular planar magnetic control target with alternate electromagnetic field |
| 01/05/2011 | CN101935821A Preparation method of polymaleic anhydride film |
| 01/05/2011 | CN101935820A Production method of electrode of dielectric barrier discharge plasma generator |
| 01/05/2011 | CN101934608A Giant Hall effect film material for magnetic field measurement and preparation method thereof |
| 01/05/2011 | CN101665905B Aluminum-induced low temperature preparation method of large grain size polysilicon film |
| 01/05/2011 | CN101661971B Method for preparing light absorption layer of CuInSe2 (CIS) based thin film solar cell |
| 01/05/2011 | CN101654769B Vacuum ion plating method |
| 01/05/2011 | CN101575695B Laser coating device and method based on transparent material |
| 01/05/2011 | CN101545093B Fixed loop for sputtering apparatus and sputtering apparatus |
| 01/05/2011 | CN101509125B Method for producing copper sputtering target material |
| 01/05/2011 | CN101497986B Apparatus for preparing extension ferriferrous oxide film by facing-target reactive sputtering and operation method |
| 01/05/2011 | CN101033561B Method of manufacturing abnormity spinneret |
| 01/04/2011 | US7863547 Microwave chamber |
| 01/04/2011 | US7863200 Process of vapor depositing glass layers for wafer-level hermetic encapsulation of electronic modules |
| 01/04/2011 | US7862927 Sputter depositing a cathode film on a substrate, annealing to reduce surface contaminants and water of crystallization; depositing and oxidizing a nonconductive, metallic adhesion film, successively depositing and annealing an overlying stack of cathode films; higher energy density; minimal delamination |