Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
12/2010
12/16/2010DE102006031244B4 Vorrichtung zum Verdampfen eines Materials mittels eines Elektronenstrahls und zum Abscheiden des Dampfes auf ein Substrat An apparatus for vaporizing a material by means of an electron beam and for depositing the vapor on a substrate
12/15/2010EP2262043A1 Method for manufacturing at least one micro-component with a single mask
12/15/2010EP2261948A2 Plasma discharge film-forming apparatus and method
12/15/2010EP2261904A1 Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
12/15/2010EP2261388A1 Deposition rate monitor device, evaporator, coating installation, method for applying vapor to a substrate and method of operating a deposition rate monitor device
12/15/2010EP2261387A1 Electron beam vapor deposition apparatus for depositing multi-layer coating
12/15/2010EP2261186A2 Low maintenance coating technology
12/15/2010EP1937866B1 Tube target
12/15/2010EP1861924B1 Piezoelectric thin film resonator and method for making same
12/15/2010EP1850993B1 Method for the production of a saw band
12/15/2010EP1668173B1 Method and facility for the production of a layer-like part
12/15/2010EP1517866B1 Method for production of a glazed piece provided with a multi-layer coating
12/15/2010EP1178129B1 Polycrystalline thin film and method for preparation thereof, and superconducting oxide and method for preparation thereof
12/15/2010CN201673897U Wafer fixing devoice for ion implantation
12/15/2010CN201670872U Rectangular plane magnetic control target
12/15/2010CN201670871U Novel high-efficient coater
12/15/2010CN201670870U Rotary target block and rotary target assembly
12/15/2010CN201670869U Product positioning and sputtering jig
12/15/2010CN201670868U Glow discharge current conducting rod used for vacuum aluminum plating
12/15/2010CN201670867U Evaporator for producing zinc-aluminum compound high square-resistance film
12/15/2010CN201670866U Evaporator for producing zinc-aluminum composite trapeziform sheet resistance films
12/15/2010CN1914351B Selectable dual position magnetron
12/15/2010CN1840737B Reflective and resistant coatings and methods for applying to composite structures
12/15/2010CN101918604A Thin-film solar array having molybdenum-containing rear electrode layer
12/15/2010CN101914758A Method for preparing silicon-on-insulator material by oxygen ion implantation
12/15/2010CN101914757A NiTi shape memory alloy with surface injected with metallic elements and preparation method thereof
12/15/2010CN101914756A Method for directly writing micro-nano graphic structure by laser
12/15/2010CN101914755A Manufacturing method and device of winding banded ITO conductive film
12/15/2010CN101914754A Zinc-oxide-based target
12/15/2010CN101914753A Method for preparing NbTi film by utilizing magnetron sputtering method
12/15/2010CN101914752A Film deposition method and film deposition apparatus of metal film
12/15/2010CN101914751A Preparation method of epitaxy Fe4N film by reactive sputtering with facing targets
12/15/2010CN101913907A Method for preparing ZnO nanorod/microrod crystals with accurate controllable growth position on substrate
12/15/2010CN101429648B Method for aluminum-copper-iron quasi-crystal coating preparation by three-target magnetic controlled cosputtering and use thereof
12/15/2010CN101260507B P-type semiconductor nickel-doping copper oxide target material and preparation method thereof
12/15/2010CN101175866B Apparatus and method for coating a substrate
12/15/2010CN101124164B 含镓氧化锌 Containing gallium zinc oxide
12/15/2010CN101094932B Delivering organic powder to a vaporization zone
12/15/2010CN101035924B Method of fabricating an electrochemical device using ultrafast pulsed laser deposition
12/14/2010US7851691 Thermoelectric devices and applications for the same
12/14/2010US7851075 Work piece with a hard film of ALCR-containing material, and process for its production
12/14/2010US7850829 reduce the contamination of the target surface; stress associated with the thermal expansion and contraction of the sputtering target; cathodic sputtering is used for the deposition of thin films; used in the production of semiconductor devices and display
12/14/2010US7850828 Enhanced virtual anode
12/14/2010US7850827 Double-layer shutter control method of multi-sputtering system
12/14/2010US7850819 Plasma reactor with high productivity
12/14/2010US7850791 Protective layer for an aluminum-containing alloy for high-temperature use
12/14/2010CA2551389C Asymmetric graded composites for improved drill bits
12/14/2010CA2378881C Transparent electroconductive film and process for producing same
12/09/2010WO2010141045A1 Process for synthesizing a thin film or composition layer via non-contact pressure containment
12/09/2010WO2010140959A1 Nanolaminated coated cutting tool
12/09/2010WO2010140958A1 Nanolaminated coated cutting tool
12/09/2010WO2010140548A1 Oxide sintered body, method for producing same, and starting material powder for producing oxide sintered body
12/09/2010WO2010140410A1 Method for manufacturing scintillator panel, scintillator panel, and radiological image detector
12/09/2010WO2010140362A1 Film-formed article and method for manufacturing film-formed article
12/09/2010WO2010139908A1 Method for depositing a thin film, and resulting material
12/09/2010US20100311249 Multi-gas flow diffuser
12/09/2010US20100311103 Solid support coated with at least one metal film and with at least one transparent conductive oxide layer for detection by spr and/or by an electrochemical method
12/09/2010US20100310902 Dry etching method, magneto-resistive element, and method and apparatus for manufacturing the same
12/09/2010US20100310899 Method for making housing and housing thereof
12/09/2010US20100310895 Polycrystalline aluminum thin film and optical recording medium
12/09/2010US20100310884 Composite material and process for preparing a composite material
12/09/2010US20100310863 Transparent electroconductive film and method for producing the same
12/09/2010US20100310783 Barrier for doped molybdenum targets
12/09/2010US20100309584 Magnetic recording medium and manufacturing method of the same
12/09/2010US20100309572 Periodic dimple array
12/09/2010US20100308717 Organic Electroluminescence Element and Method for Manufacturing the Same
12/09/2010US20100307915 Barrier for doped molybdenum targets
12/09/2010US20100307914 Cu-Ga ALLOY, SPUTTERING TARGET, Cu-Ga ALLOY PRODUCTION METHOD, AND SPUTTERING TARGET PRODUCTION METHOD
12/09/2010US20100307911 Forming an aluminum alloy oxynitride underlayer and a diamond-like carbon overcoat to protect a magnetic recording head and media
12/09/2010US20100307812 Transparent plastic film for shielding electromagnetic waves and method for producing a plastic film of this type
12/09/2010US20100307804 Method for connecting a precious metal surface to a polymer
12/09/2010US20100307553 Engineering light manipulation in structured films or coatings
12/09/2010US20100307414 Take-Up Type Vacuum Deposition Apparatus
12/09/2010DE102009003223A1 Barrier film, useful in e.g. packing industry and display technology, comprises a weather resistant carrier layer and a barrier layer, where the carrier layer is a coextrudate of (meth)acrylate and polyolefin or polyester
12/09/2010DE102009003218A1 Halogen-free barrier film useful in packaging industries and display technologies, comprises a weather-stable carrier layer, and an inorganic oxide layer, where the carrier layer is applied on an inorganic transparent barrier layer
12/09/2010DE10105778B4 Verfahren zur Oberflächenbeschichtung von Polymethylmethacrylat-Substraten A method for surface coating of polymethyl methacrylate substrates
12/09/2010CA2762312A1 Method for depositing a thin film, and resulting material
12/08/2010EP2259663A2 Plasma generator, plasma control method and method of producing substrate
12/08/2010EP2258889A1 Thermal barrier coatings and methods
12/08/2010EP2258888A1 Cvi apparatus and method
12/08/2010EP2257986A1 Process for making solar cells
12/08/2010EP2257964A1 Reactive sputtering with hipims
12/08/2010EP2257653A2 Spinulose surfaces
12/08/2010EP2257430A1 Packaging laminate, method for manufacturing of the packaging laminate and packaging container produced therefrom
12/08/2010EP1949406B1 Plasma etching method and etching chamber
12/08/2010CN201665707U Light shield component and vacuum chamber with the same
12/08/2010CN201665706U Magnetic control enhanced ion aluminum-plating device
12/08/2010CN201665705U Drum-type sample stage
12/08/2010CN201665704U Ultrasonic specimen stage applied to magnetron sputtering coating of powder
12/08/2010CN201665703U Evaporation coating cavity body mechanism and evaporation coating device comprising same
12/08/2010CN1986213B Antiwear magnetic coating and its making process
12/08/2010CN1921069B Laser processing apparatus utilizing laser beam to irradiate semiconductor layer
12/08/2010CN1901053B Silver alloy reflective films for optical information recording media, silver alloy sputtering targets therefor, and optical information recording media
12/08/2010CN1856591B Sputtering target and process for producing Si oxide film therewith
12/08/2010CN1842612B Film-forming apparatus and firm-forming method thereof
12/08/2010CN1789479B Molecule supply source for use in thin-film forming
12/08/2010CN1582071B Depositing device and its making device
12/08/2010CN101911308A Method for manufacturing solar cell, and solar cell
12/08/2010CN101911275A Vacuum processing device, vacuum processing method, and computer-readable storage medium
12/08/2010CN101911266A Semiconductor device manufacturing method, semiconductor manufacturing apparatus and storage medium