| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 02/15/2011 | US7887677 plasma enhanced chemical vapor deposition and forming silicon dots; thin film transistor switch materials, or for production of integrated circuits, solar cells |
| 02/15/2011 | US7887385 Organic EL light emitting element, manufacturing method thereof, and display device |
| 02/15/2011 | US7886808 Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus |
| 02/15/2011 | US7886686 Installation for the vacuum treatment in particular of substrates |
| 02/15/2011 | CA2588035C Scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s), and method of making article using combustion cvd |
| 02/10/2011 | WO2011016488A1 Coated member |
| 02/10/2011 | WO2011016471A1 Apparatus for producing a thin-film lamination |
| 02/10/2011 | WO2011016388A1 Oxide sinter, method for producing same, target and transparent conductive film |
| 02/10/2011 | WO2011016387A1 Tablet for ion plating, method for producing same, and transparent conductive film |
| 02/10/2011 | WO2011016365A1 Inorganic particle-dispersed sputtering target |
| 02/10/2011 | WO2011016297A1 Tablet for vapor deposition and process for producing same |
| 02/10/2011 | WO2011016015A2 Method for producing a metallised fabric, and resulting fabric |
| 02/10/2011 | WO2011015550A1 Evaporator system for organic coatings and components |
| 02/10/2011 | WO2011014974A1 Tribology combined with corrosion resistance: a new family of pvd- and pacvd coatings |
| 02/10/2011 | US20110034993 Coated medical implants |
| 02/10/2011 | US20110034338 CRITICAL CURRENT DENSITY ENHANCEMENT VIA INCORPORATION OF NANOSCALE Ba2(Y,RE)TaO6 IN REBCO FILMS |
| 02/10/2011 | US20110034336 CRITICAL CURRENT DENSITY ENHANCEMENT VIA INCORPORATION OF NANOSCALE Ba2(Y,RE)NbO6 IN REBCO FILMS |
| 02/10/2011 | US20110033784 Electrode with a coating, method in production thereof and use of a material |
| 02/10/2011 | US20110033728 Method and System for Repairing Cracks in Structures |
| 02/10/2011 | US20110033674 Structures with Three Dimensional Nanofences Comprising Single Crystal Segments |
| 02/10/2011 | US20110033267 Lock device for adding and removing containers to and from a vacuum treatment chamber |
| 02/10/2011 | US20110032640 Multi-layer, thin film overcoat for magnetic media disk |
| 02/10/2011 | US20110031640 Process for Making Angstrom Scale and High Aspect Functional Platelets |
| 02/10/2011 | US20110031486 Evaporation mask, method of fabricating organic electroluminescent device using the same, and organic electroluminescent device |
| 02/10/2011 | US20110031218 Method for making thermoacoustic device |
| 02/10/2011 | US20110031119 Plastic potentiometric ion-selective sensor and fabrication thereof |
| 02/10/2011 | US20110031117 Sputtering target apparatus |
| 02/10/2011 | US20110031116 Magnetron sputtering target assembly and coating apparatus having same |
| 02/10/2011 | US20110031111 Substrate processing apparatus, positioning method and focus ring installation method |
| 02/10/2011 | US20110031110 Methods of Making, and, Analyte Sensor |
| 02/10/2011 | US20110031109 Design and use of dc magnetron sputtering systems |
| 02/10/2011 | US20110031108 Sputtering deposition method and apparatus |
| 02/10/2011 | US20110031107 Method of burying metal and apparatus of depositing metal in concave portion |
| 02/10/2011 | US20110031106 Method for fabricating lead frame of light emitting diode |
| 02/10/2011 | US20110030794 Apparatus And Method For Depositing A CIGS Layer |
| 02/10/2011 | DE10320133B4 Verfahren zur Herstellung von einkristallinen oder quasi-einkristallinen Diamantschichten und auf einem Körper angeordnete einkristalline oder quasi-einkristalline Diamantschicht A process for the production of single crystalline or quasi-single-crystalline diamond layers and arranged on a body monocrystalline or quasi-monocrystalline diamond layer |
| 02/10/2011 | DE102010038804A1 Producing a transparent conductive layer, useful as contact layers in photovoltaic devices, comprises applying an output layer with first layer thickness, and generating light scattering property with a characteristic haze-value by etching |
| 02/10/2011 | DE102009036355A1 Producing a thin-film solar module, comprises depositing sublayers of microcrystalline sublayer containing semiconductor layer on transparent front electrode layer by vapor deposition, and coating module with additional layers in vacuum |
| 02/10/2011 | CA2769870A1 Method for producing a metallised fabric, and resulting fabric |
| 02/09/2011 | EP2281919A1 Sputtering target and non-crystalline optical thin film |
| 02/09/2011 | EP2281918A1 Thin film deposition apparatus |
| 02/09/2011 | EP2281917A2 Thin film depositon apparatus and method of manufacturing organic light-emitting display device by using the same |
| 02/09/2011 | EP2281915A1 WATER-REACTIVE Al COMPOSITE MATERIAL, WATER-REACTIVE Al FILM, PROCESS FOR PRODUCTION OF THE Al FILM, AND CONSTITUENT MEMBER FOR FILM DEPOSITION CHAMBER |
| 02/09/2011 | EP2281914A1 PROCESS FOR PRODUCTION OF WATER-REACTIVE Al FILM AND CONSTITUENT MEMBERS FOR FILM DEPOSITION CHAMBERS |
| 02/09/2011 | EP2281696A1 Article-surface decorative structure and method of processing for the same |
| 02/09/2011 | EP2281072A1 Tool having a metal oxide coating |
| 02/09/2011 | EP2280737A2 Magnetic microstructures for magnetic resonance imaging |
| 02/09/2011 | EP1828071B1 Process for the production of antimicrobial glass type substrate |
| 02/09/2011 | CN201738000U Baseplate retainer used for ECR(electronic convolution resonance) plasma sputtering device |
| 02/09/2011 | CN201737999U Cylindrical electrode target device |
| 02/09/2011 | CN1800970B Forming method of mask pattern |
| 02/09/2011 | CN101971369A Compound semiconductor light-emitting element and illumination device using the same, and method for manufacturing compound semiconductor light-emitting element |
| 02/09/2011 | CN101970714A Multi-pass vacuum coating systems |
| 02/09/2011 | CN101970713A Rotary magnet sputtering apparatus |
| 02/09/2011 | CN101970712A Sputtering device |
| 02/09/2011 | CN101970711A Target exchange type plasma generator |
| 02/09/2011 | CN101970710A Plasma generating apparatus and plasma processing apparatus |
| 02/09/2011 | CN101970709A Method for depositing metal oxide films |
| 02/09/2011 | CN101970708A Thin film of aluminum nitride and process for producing the thin film of aluminum nitride |
| 02/09/2011 | CN101970707A Processing apparatus and method of manufacturing electron emission element and organic el display |
| 02/09/2011 | CN101969105A Substrate and evaporation method thereof |
| 02/09/2011 | CN101967625A Method for depositing TiO2 oxide film on NiTiV substrate surface by controlling magnetron sputtering power |
| 02/09/2011 | CN101967624A Preparation method of Cu2ZnSnS4 photovoltaic film |
| 02/09/2011 | CN101967623A Hard alloy cutter with two structural coatings |
| 02/09/2011 | CN101654771B Method for preparing anti-attrition MoS2/C/Ti composite film by magnetron sputtering |
| 02/09/2011 | CN101624695B Heat treatment method of target blank |
| 02/09/2011 | CN101497424B Nano cable composed of semimetal bismuth and metallic copper and method for synthesizing the same |
| 02/09/2011 | CN101310972B Codeposition gradient Ni-base superalloy coating preparation technique |
| 02/09/2011 | CN101283122B ZnO crystal, method for growing the crystal, and method for manufacture of light-emitting element |
| 02/09/2011 | CN100999388B Preparation method of polycrystalline silicon film by surface modifying solution for inducing crystallization |
| 02/08/2011 | US7884302 Plasma processing installation, influenced by a magnetic field, for processing a continuous material or a workpiece |
| 02/08/2011 | US7883998 Vapor phase growth method |
| 02/08/2011 | US7883632 Plasma processing method |
| 02/08/2011 | US7883607 Methods of ion milling for magnetic heads and systems formed thereby |
| 02/08/2011 | US7883600 RF supply system and plasma processing apparatus |
| 02/08/2011 | US7882946 Guide arrangement with at least on guide roller for the guidance of webs in webs treatment installations |
| 02/03/2011 | WO2011013939A2 Roll-to-roll sputter apparatus for carrying out continuous sputtering, and continuous sputtering method |
| 02/03/2011 | WO2011013936A2 Roll-to-roll sputter system comprising a plurality of chambers, and method for using same |
| 02/03/2011 | WO2011013648A1 Vapor deposition device for optical lenses |
| 02/03/2011 | WO2011013525A1 Plasma processing device and printed wiring board manufacturing method |
| 02/03/2011 | WO2011013471A1 Sintered cu-ga sputtering target and method for producing the target |
| 02/03/2011 | WO2011013374A1 Semiconductor device and manufacturing method therefor |
| 02/03/2011 | WO2011013261A1 Electrode material for electrolysis, electrode for electrolysis, and method for producing same |
| 02/03/2011 | WO2011012818A1 Part comprising a substrate supporting a ceramic coating layer |
| 02/03/2011 | WO2011012255A1 Plasma stamp and method for plasma treating a surface |
| 02/03/2011 | WO2011012093A1 Method for reactive sputtering |
| 02/03/2011 | WO2010132611A3 Textured metal nanopetals |
| 02/03/2011 | WO2010123802A3 Electrochemical biosensor electrode strip and preparation method thereof |
| 02/03/2011 | US20110029068 Drug delivery system and method of manufacturing thereof |
| 02/03/2011 | US20110027618 Fabrication of magnetoresistive sensors and electronic lapping guides |
| 02/03/2011 | US20110027597 Target, method for producing the same, memory, and method for producing the same |
| 02/03/2011 | US20110027481 Device and method for organic vapor jet deposition |
| 02/03/2011 | US20110027471 Method of making heat treated coated article using diamond-like carbon (DLC) coating and protective film |
| 02/03/2011 | US20110027459 Methods and Devices for Monitoring and Controlling Thin Film Processing |
| 02/03/2011 | US20110027402 Process for Making Angstrom Scale and High Aspect Functional Platelets |
| 02/03/2011 | US20110026891 Single mode optical fibers and modular method of making same |
| 02/03/2011 | US20110026187 Conductive Seal Ring Electrostatic Chuck |
| 02/03/2011 | US20110024715 Method of fabricating ag-doped te-based nano-material and memory device using the same |
| 02/03/2011 | US20110024290 Magnetic device and magnetron sputtering device using the same |
| 02/03/2011 | US20110024285 Method for alkali doping of thin film photovoltaic materials |