Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
02/2011
02/24/2011DE112009000280T5 Polykristalliner MgO-Sinterkörper, Verfahren zu seiner Herstellung und MgO-Sputtertarget The polycrystalline MgO sintered body, method of producing the sputtering target and MgO
02/24/2011DE102005057359B4 Verfahren und Vorrichtung zur Innenbeschichtung von Glas-Hohlkörpern Method and apparatus for the internal coating of hollow glass bodies
02/23/2011EP2287356A1 Sputter target, method and apparatus for manufacturing sputter targets
02/23/2011EP2287355A1 Fine grained cemented carbide with refined structure
02/23/2011EP2287354A1 WATER-REACTIVE Al COMPOSITE MATERIAL, WATER-REACTIVE Al FILM, PROCESS FOR PRODUCTION OF THE Al FILM, AND CONSTITUENT MEMBER FOR FILM DEPOSTION CHAMBER
02/23/2011EP2286000A1 Method and system for manufacturing nanostructures
02/23/2011EP1996744B1 Antimicrobial coating methods
02/23/2011EP1612853B1 Cooling device for vacuum treatment device
02/23/2011CN201751428U Vacuum evaporation device with heating mantle
02/23/2011CN201751427U Linear evaporation source
02/23/2011CN101981718A Piezoelectric thin film, method for manufacturing the same, angular velocity sensor, method for measuring angular velocity by the angular velocity sensor, piezoelectric element, and method for generating electricity by piezoelectric element
02/23/2011CN101981224A Sputtering target of nonmagnetic-in-ferromagnetic dispersion type material
02/23/2011CN101981223A Vacuum deposition apparatus and method for adjusting temperature
02/23/2011CN101981222A Coating process, workpiece or tool and its use
02/23/2011CN101980986A Transparent conductive oxide coating for thin film photovoltaic applications and methods of making the same
02/23/2011CN101980935A Method and device for fixing and transporting impact-sensitive sheets in sputter feed systems
02/23/2011CN101979706A Vaporizer
02/23/2011CN101979705A 改进的pvd靶 Improved pvd target
02/23/2011CN101979704A Method for preparing ZnS/SnS double-layer membrane by vacuum evaporation
02/23/2011CN101979703A Method for performing surface treatment on golf head by aluminium -titanium nitride composite coating
02/23/2011CN101231431B Indium tin oxide target, method of manufacturing the same and transparent electrode manufactured by using the same
02/22/2011US7892979 Columnar structured material and method of manufacturing the same
02/22/2011US7892917 Method for forming bismuth titanium silicon oxide thin film
02/22/2011US7892660 Wetting resistant materials and articles made therewith
02/22/2011US7892457 Sputtering target, thin film for optical information recording medium and process for producing the same
02/22/2011US7892406 Ionized physical vapor deposition (iPVD) process
02/22/2011US7892405 Methods and apparatus for magnetron sputtering
02/22/2011US7892367 Tantalum sputtering target
02/22/2011US7891537 Sputter target and backing plate assembly
02/22/2011CA2538081C Heat treatable coated article with niobium zirconium inclusive ir reflecting layer and method of making same
02/22/2011CA2505027C Method for vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide
02/17/2011WO2011019566A2 Process kit for rf physical vapor deposition
02/17/2011WO2011019040A1 Substrate having transparent conductive film attached thereto, and substrate for plasma display panel
02/17/2011WO2011019039A1 Substrate having transparent conductive film attached thereto, and substrate for plasma display panel
02/17/2011WO2011018971A1 Tantalum sputtering target
02/17/2011WO2011018970A1 Tantalum sputtering target
02/17/2011WO2011018895A1 Sputtering target and method for manufacturing a sputtering target
02/17/2011WO2011017758A1 Reflective heatshrinkable film
02/17/2011WO2010127866A3 Sanitary objects
02/17/2011WO2010096327A3 Cutting tool components with wear-resistant cladding layer
02/17/2011US20110039403 Method for Implanting Ions In Semiconductor Device
02/17/2011US20110039116 Colored plating structure and method thereof
02/17/2011US20110039112 Optical component using composite substrate and process for producing same
02/17/2011US20110039071 METHOD OF MANUFACTURING A Si(1-v-w-x)CwAlxNv SUBSTRATE, METHOD OF MANUFACTURING AN EPITAXIAL WAFER, Si(1-v-w-x)CwAlxNv SUBSTRATE, AND EPITAXIAL WAFER
02/17/2011US20110039039 Wetting a surface of a solid substrate with a liquid metal
02/17/2011US20110039038 Method for decorating perfume bottle, and decorating device
02/17/2011US20110039035 Tunable variable emissivity materials and methods for controlling the temperature of spacecraft using tunable variable emissivity materials
02/17/2011US20110039034 Pulsed deposition and recrystallization and tandem solar cell design utilizing crystallized/amorphous material
02/17/2011US20110039026 Film deposition apparatus, film deposition method, and computer readable storage medium
02/17/2011US20110039020 Magnetic Materials Having Superparamagnetic Particles
02/17/2011US20110038052 Prismatic Laminate and Method for Making The Same
02/17/2011US20110037976 Flexible surface enhanced raman spectroscopy (sers) substrates, methods of making, and methods of use
02/17/2011US20110037658 Multi-layer thin film internal antenna, terminal having the same, and method for manufacturing multi-layer thin film internal antenna
02/17/2011US20110036711 Sputtering device
02/17/2011US20110036710 Ge-Cr Alloy Sputtering Target
02/17/2011US20110036709 Process kit for rf physical vapor deposition
02/17/2011US20110036708 Magnetron sputtering device
02/17/2011US20110036707 Sputtering method
02/17/2011US20110036395 Methods for forming nanostructures and photovoltaic cells implementing same
02/17/2011US20110036392 Thin-film solar cell module and a manufacturing method thereof
02/17/2011DE112009000123T5 Substratauflage, mit dieser versehene Zerstäubungsvorrichtung, und Dünnschichtbildungsverfahren Substrate support provided with this sputtering apparatus and film formation method
02/17/2011DE102009049954A1 Einrichtung zur Temperaturführung von Substraten Means for controlling the temperature of substrates
02/17/2011DE102009037326A1 Method for the vacuum deposition of substrates comprises forming an active electrode surface of an electrode of an electrode arrangement in the process chamber whilst the electrode surface is added and removed
02/17/2011DE102009036982A1 Apparatus for plasma-enhanced deposition of amorphous layer on silicon photovoltaic substrate from gas phase, comprises partially transparent electrode for components of plasma disposed between photovoltaic substrate and another electrode
02/17/2011DE102007019982B4 Anordnung zur Ausbildung von Beschichtungen auf Substraten im Vakuum Arrangement for the formation of coatings on substrates in vacuum
02/16/2011EP2284297A1 Method for achieving improved epitaxy quality (surface texture and defect density) on free-standing (aluminium, indium, gallium) nitride ((AI, In,Ga)N) substrates for opto-electronic and electronic devices
02/16/2011EP2284293A1 Sintered-oxide target for sputtering and process for producing the same
02/16/2011EP2284292A1 Vacuum vapor deposition apparatus
02/16/2011EP2284291A1 WATER-REACTIVE Al COMPOSITE MATERIAL, WATER-REACTIVE Al FILM, METHOD FOR PRODUCTION OF THE AL FILM, AND STRUCTURAL MEMBER FOR FILM-FORMING CHAMBER
02/16/2011EP2284290A1 Water-reactive al composite material, water-reactive al film, method for production of the al film, and structural member for film-forming chamber
02/16/2011EP2284289A1 Tungsten sintered material sputtering target
02/16/2011EP2167699B1 Method for masking cooling holes and device for using in a masking process for masking cooling holes
02/16/2011EP1771602B1 Highly oxidation resistant hard coating materials for cutting tools
02/16/2011EP1584706B1 Copper alloy sputtering target and semiconductor element wiring
02/16/2011EP1307907B1 Method for depositing a fluorine-doped silica film
02/16/2011CN201746585U Rotating cathode driving device for vacuum magnetron sputtering coating
02/16/2011CN201746584U Novel vacuum coating equipment
02/16/2011CN201746583U Penning discharge ion source flexible material vacuum coating electrode
02/16/2011CN1776524B Method of descaling a mask
02/16/2011CN101978431A Electric conductor and process for its production
02/16/2011CN101978095A Coaxial microwave assisted deposition and etch systems
02/16/2011CN101978094A Magnetron sputtering apparatus and magnetron sputtering method
02/16/2011CN101978093A Deposition apparatus and electronic device manufacturing method
02/16/2011CN101978092A Vaporizor body
02/16/2011CN101978091A Reel-to-reel reaction of a precursor film to form solar cell absorber
02/16/2011CN101976725A SiO2/Sb80Te20 nano composite multi-layered phase-change film material with adjustable crystallization temperature and preparation method thereof
02/16/2011CN101975384A Manufacturing method of radiating structure of LED (Light Emitting Diode) lamp
02/16/2011CN101974733A Rotary mechanism for vacuum continuous coating production line
02/16/2011CN101974732A System and method for controlling ion density and energy using modulated power signals
02/16/2011CN101974731A Vacuum magnetic control coating process
02/16/2011CN101974730A Method for plating easily-oxidized film on micro-size granules through magnetic control sputtering
02/16/2011CN101974729A Adjustable film plating die
02/16/2011CN101591754B High-obdurability low-alloy cold stamping die steel and hot chemical treatment process
02/16/2011CN101410931B Coating apparatus
02/16/2011CN101294270B Equipment and method for producing nichrome composite plate with vacuum arc ion plating
02/16/2011CN101148329B Low radiation coated glass with double-silver composite structure and technique
02/15/2011US7890220 Low overhead closed loop control system
02/15/2011US7890217 Integrated real-time power and solar farm control system
02/15/2011US7887934 Wetting resistant materials and articles made therewith
02/15/2011US7887890 Method of manufacturing plastic substrate using plasma process and plastic substrate manufactured using the method