Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
01/2011
01/04/2011US7862853 Method for manufacturing magnetic recording medium
01/04/2011US7862694 Composite coating device and method of forming overcoat on magnetic head using the same
01/04/2011CA2481111C Process of masking cooling holes of a gas turbine component
12/2010
12/30/2010US20100330813 Dielectric film and semiconductor device using dielectric film
12/30/2010US20100330800 Methods of forming layers of alpha-tantalum
12/30/2010US20100330788 Thin wafer handling structure and method
12/30/2010US20100330738 Oxide semiconductor target and manufacturing method of oxide semiconductor device by using the same
12/30/2010US20100330709 Wafer temperature correction system for ion implantation device
12/30/2010US20100330425 Passivation film for solid electrolyte interface of three dimensional copper containing electrode in energy storage device
12/30/2010US20100330394 Ccp-cpp magnetoresistive reader with high gmr value
12/30/2010US20100330303 Method of producing optical disc recording medium
12/30/2010US20100330295 Method for providing ductile environmental coating having fatigue and corrosion resistance
12/30/2010US20100330266 Method of manufacturing solar battery
12/30/2010US20100328896 Article including thermal interface element and method of preparation
12/30/2010US20100326823 Cylindrical sputtering target
12/30/2010US20100326818 Method of manufacturing semiconductor device and sputtering apparatus
12/30/2010US20100326817 Low-maintenance coatings, and methods for producing low-maintenance coatings
12/30/2010US20100326816 Low-maintenance coating technology
12/30/2010US20100326815 High Power Pulse Ionized Physical Vapor Deposition
12/30/2010US20100326699 Polymeric High Voltage Insulator with a Hard, Hydrophobic Surface
12/30/2010DE102010019913A1 Composite body with decorative high-gloss surface, comprises a substrate made of plastic or metal such as brass, aluminum, zinc or stainless steel, a coating having a metal layer and an intermediate layer
12/30/2010DE102009053756A1 Verfahren zur Beschichtung eines Substrates in einer Vakuumkammer mit einem rotierenden Magnetron A method for coating a substrate in a vacuum chamber with a rotating magnetron
12/30/2010DE102009033417A1 Verfahren und System zur Herstellung eines beschichteten Gegenstands mit Tempern A method and system for making a coated article with annealing
12/29/2010WO2010150723A1 Variable resistance element and method for manufacturing same
12/29/2010WO2010150720A1 Semiconductor device and method for manufacturing same
12/29/2010WO2010150540A1 Vacuum film forming apparatus and method for detecting position of shutter plate of vacuum film forming apparatus
12/29/2010WO2010150411A1 Hard coating film and tool coated with hard coating film
12/29/2010WO2010150335A1 Tool having coated cubic boron nitride sintered body
12/29/2010WO2010149790A2 Method for coating a substrate in a vacuum chamber having a rotating magnetron
12/29/2010WO2010149679A1 Target cooling device
12/29/2010EP2267190A1 Large area, uniformly low dislocation density gan substrate and process for making the same
12/29/2010EP2267185A1 PVD coated ruthenium featured cutting tools
12/29/2010EP2267181A1 Target exchange type plasma generator
12/29/2010EP2267180A1 Plasma generating apparatus and plasma processing apparatus
12/29/2010EP2267179A1 Target cooling device
12/29/2010EP2266709A2 Coated medical devices
12/29/2010EP2265744A1 Method for producing metal oxide layers having a pre-defined structure by way of arc evaporation
12/29/2010EP2265743A2 Transparent conducting oxides
12/29/2010EP2265742A2 Corrosion resistant object with alloying zone
12/29/2010EP1834364B1 Method and apparatus for controlling the vaporization of organic material
12/29/2010EP1627414B1 Magnetron sputter cathode comprising a cooling plate
12/29/2010EP1192050B1 Substrate treatment method
12/29/2010EP1163544B1 method of making ultraviolet filters with enhanced weatherability
12/29/2010CN201686741U Unit-type vacuum chamber for structural film coating of molecular pump
12/29/2010CN201686740U Vacuum transition room for large-area magnetic-control film coating
12/29/2010CN1875127B A steel strip coated with zirconia
12/29/2010CN101933122A Load-lock apparatus and substrate cooling method
12/29/2010CN101932749A Evaporation source and film-forming device
12/29/2010CN101932748A Method for forming deposited film
12/29/2010CN101932200A Method for producing SMT metal mask plate with novel titanium carbide composite material
12/29/2010CN101931053A Indium tin oxide (ITO) stereo electrode, preparation method and preparation device thereof as well as preparation method of solar battery
12/29/2010CN101931026A Method of manufacturing solar battery
12/29/2010CN101931025A Method of manufacturing solar battery
12/29/2010CN101931024A Low-cost sputter and sputtering method for manufacturing thin film solar cell
12/29/2010CN101930902A Heating cavity and semiconductor processing equipment
12/29/2010CN101930804A Surface-treated metal material and manufacturing method of the same
12/29/2010CN101930084A Coating influence resistant external detecting device and sputtering device
12/29/2010CN101928931A Film coating device and method
12/29/2010CN101928930A Vacuum coating machine
12/29/2010CN101928929A Coating umbrella
12/29/2010CN101928928A Magnetron sputtering target holder and magnetron sputtering device comprising same
12/29/2010CN101928927A Device and method for implanting ions
12/29/2010CN101928926A Manufacturing method of SMT (Surface Mounting Technology) metal mask plate for chromium nitride advanced composite material
12/29/2010CN101928925A Rectangular plane magnetic control target
12/29/2010CN101928924A Vacuum sputtering coating equipment
12/29/2010CN101928923A Vacuum sputtering coating equipment with vacuum pump protecting structure
12/29/2010CN101928922A Arc evaporation source actively controlling arc spot and equipment using same
12/29/2010CN101928921A Coating film supporting mechanism of high temperature deposition hard mask of film coating workpiece
12/29/2010CN101928920A Multilayer composite wire rotary preparation device and preparation method
12/29/2010CN101928919A Device for depositing thin film on small object
12/29/2010CN101928918A Method for preparing amorphous silicon film
12/29/2010CN101928917A Composition for forming film and optical film
12/29/2010CN101928916A Method for preparing nitrogen-yttrium-zirconium hard coating with nano structure on surface of hard alloy substrate
12/29/2010CN101928915A Method for plating boron nitride film on surface of one-dimensional nano material
12/29/2010CN101928914A Method for preparing large-area two-dimensional super-structure material
12/29/2010CN101928851A Boracic target material, manufacturing method thereof, film and magnetic recording medium
12/29/2010CN101928850A Method for preparing W-Ti alloy target material
12/29/2010CN101629276B Zirconium-yttrium alloy target preparation method
12/29/2010CN101608299B High hardness and low friction Cr/CrCN gradient coating technology applicable to surface of profiled reed
12/29/2010CN101518935B PVD nano composite ceramic coating screw and method for manufacturing same
12/29/2010CN101353779B Al-Ni-La-Si system Al-based alloy sputtering target and process for producing the same
12/29/2010CN101262016B A p type conductive transparent nickel-doped CuO film and its making method
12/29/2010CN101197443B Lithium ion battery anode thin-film material and method for producing the same
12/28/2010US7858435 Organic electro-luminance device and method for fabricating the same
12/28/2010US7858290 Phase change recording layer, a chromium oxide layer, and a gallium oxide layer; crystallization speed of the recording layer is increased while suppressing a decrease in recording sensitivity, repeated rewriting ability
12/28/2010US7858213 Hybrid electrode and method of preparing the same
12/28/2010US7858147 Interconnect structure and method of fabricating the same
12/28/2010US7857948 Method for manufacturing poorly conductive layers
12/28/2010US7857947 Unique passivation technique for a CVD blocker plate to prevent particle formation
12/28/2010US7857946 Sputtering film forming method, electronic device manufacturing method, and sputtering system
12/28/2010US7857880 Semiconductor manufacturing facility utilizing exhaust recirculation
12/23/2010WO2010148001A1 Method to synthesize graphene
12/23/2010WO2010146377A1 Production of nanoparticles
12/23/2010WO2010146151A1 Device for controlling the temperature of substrates
12/23/2010WO2010146130A1 Apparatus for depositing a thin film of material on a substrate and regeneration process for such an apparatus
12/23/2010WO2010146129A1 Molecular beam epitaxy apparatus for producing wafers of semiconductor material
12/23/2010WO2010145704A1 Protective coating, a coated member having a protective coating as well as method for producing a protective coating
12/23/2010WO2010114274A3 Apparatus for depositing film and method for depositing film and system for depositing film
12/23/2010US20100324654 Implant and method for manufacturing same
12/23/2010US20100323276 Surface treated carbon coatings for flow field plates