B81B 7 - Micro-structural systems

Patents for B81B 7 - Micro-structural systems (8,983)
12/2011
12/15/2011	WO2011153837A1 Inertial micro electromechanical sensor and manufacturing method thereof
12/15/2011	DE102011007217A1 Erfassungsvorrichtung für eine physikalische Größe und Verfahren zum Herstellen derselben Detecting apparatus for a physical quantity, and methods for manufacturing the same
12/15/2011	DE102010030034A1 Actuator for use in e.g. automobile industry, has electrodes, and groups of nanotubes, which are in parallel connection between force transmission elements in mechanical manner, where groups are electrically subjected opposite to each other
12/15/2011	DE102010029936A1 Micro-mechanical component for micro-electro-mechanical-system-microp hone, has functional layer formed under hollow chamber, where hollow chamber is formed with ventilation opening for microphone structure
12/14/2011	EP2394951A2 Modifying the Electro-Static Behavior of Devices
12/14/2011	EP2393424A2 Analyte sensor and fabrication methods
12/14/2011	CN1854061B 一种微型组件、与微型连接器装配的插座及其装配方法 A miniature components, and miniature connector socket assembly and assembly method
12/14/2011	CN102279414A Mems模拟检波器机芯 Mems simulate movement detector
12/14/2011	CN102279220A 制造芯片的方法、气体传感器装置、在芯片上镀碳纳米管的方法 Chip manufacturing method, a gas sensor device, the plating method of carbon nanotubes on the chip
12/14/2011	CN102275862A 微机电封装结构及其制造方法 MEMS package structure and its manufacturing method
12/14/2011	CN102275861A 半导体装置及传声器 Semiconductor device and microphone
12/14/2011	CN102275860A 惯性微机电传感器及其制造方法 MEMS inertial sensor and its manufacturing method
12/14/2011	CN102275859A Mems微传感器的封装结构及其制造方法 Mems package structure and method of manufacturing the micro-sensors
12/14/2011	CN101362585B 半导体装置、引线框架及传声器封装结构 The semiconductor device, lead frame and the microphone package
12/08/2011	WO2011153259A2 Curved multimorph microactuators that bend and/or twist
12/08/2011	WO2011151099A1 Shock-protected mems component, device comprising the same and method for shock-protecting an mems component
12/08/2011	US20110298065 Electromechanical system having a controlled atmosphere, and method of fabricating same
12/08/2011	DE102011015184A1 Vorrichtung für den Transport kleiner Volumina eines Fluids, insbesondere Mikropumpe oder Mikroventil A device for the transport of small volumes of a fluid, in particular micropump or microvalve
12/08/2011	DE102010029709A1 Mikromechanisches Bauelement Micromechanical component
12/08/2011	DE102010029708A1 Mikromechanisches System Micromechanical System
12/08/2011	DE102010029707A1 Microsystem i.e. microelectromechanical system, for use in e.g. mobile phone, has evaluating device determining response of mass structure and reducing amplitude of oscillation if force lies during preset period below preset threshold
12/08/2011	DE102010029645A1 Mikromechanisches Bauelement mit einer Teststruktur zur Bestimmung der Schichtdicke einer Abstandsschicht und Verfahren zum Herstellen einer solchen Teststruktur Micromechanical component with a test structure for determining the layer thickness of a spacer layer and method for manufacturing such a test structure
12/08/2011	DE102010029632A1 MEMS Bauteil mit Schock-Schutz, Vorrichtung damit und Verfahren zum Schock-Schutz eines MEMS Bauteils MEMS component with shock protection device and method for so shock protection of a MEMS component
12/07/2011	EP2393307A2 Semiconductor device and microphone
12/07/2011	CN102273229A 具有集成解耦线圈的微型换能器组件 Miniature transducer assembly with integrated decoupling coil
12/07/2011	CN102268256A 一种蓝光激发发射红绿光的荧光材料及其制备方法 A blue light-emitting fluorescent material and method for red green
12/07/2011	CN101923052B 基于滤波结构分光的红外光谱式mems气敏传感器 Based on the IR spectral filter structure type gas sensor mems
12/07/2011	CN101351399B 电子部件密封用基板、可取多个形态的电子部件密封用基板、及使用了电子部件密封用基板的电子装置及其制法 Electronic component sealing substrate, preferably a plurality of electronic component sealing substrate morphology, and using the electronic component sealing substrate of the electronic device and its preparation method
12/01/2011	WO2011149503A1 In-plane electromagnetic mems pump
12/01/2011	DE102011005471A1 Mikro-Ejektor und Verfahren für dessen Herstellung Micro-ejector and method for its preparation
12/01/2011	DE102010029541A1 Combined micromechanical rotation rate-and magnetic field sensor, has elastically deflectable suspended vibrating structure, and detection structure detecting deflection of vibrating structure caused by Coriolis-force and Lorentz-force
12/01/2011	DE102010029539A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component
12/01/2011	DE102010029504A1 Bauelement mit einer Durchkontaktierung und Verfahren zu dessen Herstellung Component with a plated-through hole and process for its preparation
12/01/2011	DE102010021498A1 Rigidity measurement system for object e.g. arm, of industrial worker, during e.g. assembling of products, has loading system fastened to object to apply predefined force and/or impulse to object to move object
11/2011
11/30/2011	EP2389337A2 Substrate bonding with metal germanium silicon material
11/30/2011	CN102265184A 用于地震采集系统的基于mems的电容传感器 Mems based capacitive sensors for seismic acquisition systems
11/30/2011	CN102261979A 用于真空测量的低量程压阻式压力传感器及其制造方法 Low range piezoresistive pressure sensor and manufacturing method for vacuum measurement
11/30/2011	CN102259829A 隔离腔体及其制造方法 Isolation cavity and manufacturing method thereof
11/30/2011	CN102259821A Mems杠杆式片状互锁机构 Mems leveraged sheet interlock mechanism
11/30/2011	CN101871951B 微加速度传感器 Micro-accelerometer
11/30/2011	CN101608962B 一种微型皮拉尼计 A miniature Pirani gauge
11/30/2011	CN101108720B 微机电装置以及其制造方法 Micro-electromechanical device and a manufacturing method thereof
11/29/2011	US8067249 Method for functionalizing biosensor chips
11/24/2011	WO2011087565A3 Thermal sensors having flexible substrates and uses thereof
11/24/2011	WO2010138931A3 Mechanical isolation for mems electrical contacts
11/24/2011	DE102010029074A1 Anbindungsstruktur für Mikroschwingeneinrichtungen Connection structure for micro swing facilities
11/24/2011	DE102010029072A1 Micro-electromechanical translation vibrator system, has acoustic resonator arranged such that resonance frequency of acoustic resonator is adapted to natural frequency of micro-electromechanical translation vibrator
11/24/2011	DE102010022204A1 Elektrisches Bauelement mit flacher Bauform und Herstellungsverfahren Electrical component with a flat design and manufacturing processes
11/24/2011	DE102008049647B4 Mikromechanisches Element und Verfahren zum Betreiben eines mikromechanischen Elements Micromechanical element and method for operating a micromechanical element
11/24/2011	DE102004064163B4 Switchable, high-frequency, micro-electromechanical system component, combines signal line and switching component in common plane on substrate
11/23/2011	CN202049130U Capacitive relative humidity sensor based on graphene oxide
11/23/2011	CN1899951B Semiconductor device and manufacturing method thereof
11/23/2011	CN102257609A Microelectromechanical device with isolated microstructures and method of producing same
11/23/2011	CN102257374A Device and method for producing a device
11/23/2011	CN102253645A Micro-electro-mechanical system circuit and the method for controlling the same
11/23/2011	CN102253091A Capacitive relative humidity sensor based on graphene oxide
11/23/2011	CN102252665A Packaging structure for all-solid-state oscillating micro gyroscope
11/23/2011	CN102249183A CuO/TiO2 nanotube array and preparation method and application method thereof
11/23/2011	CN102249178A Solid-state image pickup apparatus, method for manufacturing same, and electronic device
11/17/2011	DE102011050040A1 Capacitive micro-microphone system i.e. micro-electro-mechanical systems microphone, has membrane whose central portion is supported by supporting portion in order to derive residual stress of membrane outwardly from supporting portion
11/16/2011	EP2386521A2 Acoustic sensor having protective film and method of manufacturing the same
11/16/2011	CN102246299A Method for making via interconnection
11/16/2011	CN102241388A MEMS (micro electro mechanical system) wafer-level three-dimensional mixing integration packaging structure and method
11/16/2011	CN101718667B Density sensor chip based on micro electro mechanical system technology and preparation method thereof
11/16/2011	CN101712449B Double-corrosion groove capable of realizing MEMS wafer-level airtight encapsulation of glass slurry and method
11/16/2011	CN101692099B Piezoresistive double-shaft micro-accelerometer with on-chip zero offset compensation and manufacturing method thereof
11/16/2011	CN101566502B Thermo-optical infrared detector and preparation method thereof
11/16/2011	CN101409266B Package structure
11/10/2011	WO2011084229A3 Embedded mems sensors and related methods
11/10/2011	WO2011082214A3 Leadframe-based premolded package having acoustic air channel for microelectromechanical system (mems) device
11/10/2011	DE102007051715B4 Elektrostatisch angetriebener Mikroaktor Electrostatically driven microactuator
11/09/2011	CN202033147U Pressure detection module of electric pressure cooker based on MEMS (Micro Electro Mechanical System) technology
11/09/2011	CN102239436A Digital micro-mirror device
11/09/2011	CN102236029A Novel silicon-based optical waveguide acceleration sensor
11/09/2011	CN102234097A Semiconductor structure, manufacturing method of semiconductor structure and semiconductor device
11/09/2011	CN102234096A Semiconductor structure and manufacturing method of semiconductor structure
11/09/2011	CN101837943B Sensor for quantitatively measuring mechanical and electrical properties and microstructure and manufacturing method thereof
11/09/2011	CN101575083B Micromachined thermopile infrared detector
11/03/2011	WO2011134167A1 Air cavity package configured to electrically couple to a printed circuit board and method of providing same
11/03/2011	WO2011087598A3 Thermal sensor using a vibrating mems resonator of a chip interconnect layer
11/02/2011	EP2382151A2 Bonded microelectromechanical assemblies
11/02/2011	CN102230799A Microelectromechanical gyroscope with calibrated synchronization of actuation and method for actuating a microelectromechanical gyroscope
11/02/2011	CN101492149B Electrical device for structuring to semiconductor integrated circuit
11/01/2011	US8050011 Process for sealing and connecting parts of electromechanical, fluid and optical microsystems and device obtained thereby
11/01/2011	US8048766 Integrated circuit on high performance chip
11/01/2011	US8047829 Method for forming polymerized microfluidic devices
10/2011
10/27/2011	WO2011133189A1 Microreactors
10/27/2011	WO2011132636A1 Ferroelectric device
10/27/2011	WO2011132099A1 Microphone
10/27/2011	DE102010028012A1 Flüssigkeitssteuerung für Mikrodurchflusssystem Fluid control for micro flow system
10/26/2011	EP2381699A1 Microphone
10/26/2011	EP2381698A1 Microphone
10/26/2011	EP2381289A1 MEMS device
10/26/2011	EP2380012A2 Method and apparatus for chemical detection and release
10/26/2011	EP2379998A1 Device and method for producing a device
10/26/2011	CN102226715A Visible photoelectrochemical detector based on one-dimensional silicon nanostructure array
10/26/2011	CN101670998B Point-plane electrode system and method for micro-fluid drive by using the system
10/26/2011	CN101572253B Packaging housing of humidity-sensitive electronic device, substrate and leakproof structure thereof
10/26/2011	CN101520351B Heat-variable surface shearing stress sensor
10/20/2011	WO2011129855A2 Wide-bandwidth mems-scale piezoelectric energy harvesting device

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