| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 02/01/2012 | CN102336386A Three-dimensional solid needle tip flexible micro-electrode array and making method thereof |
| 02/01/2012 | CN101646116B 一种电极串联式硅微压电传声器 An electrode tandem silicon micro piezoelectric microphone |
| 02/01/2012 | CN101597020B 锗窗、其制造方法以及具有该锗窗的气密性盒体 Germanium window, its manufacturing method, and has the air-tightness of the germanium window box body |
| 01/31/2012 | US8104874 Inkjet nozzle assembly with moving nozzle opening defined in roof of nozzle chamber |
| 01/31/2012 | US8104515 Microfabricated elastomeric valve and pump systems |
| 01/31/2012 | CA2543909C High temperature electronic devices |
| 01/26/2012 | WO2012011012A1 Micro optical device |
| 01/26/2012 | DE102010031767A1 Use of graphite layer for e.g. piezoresistive element obtained by heating at least one monolayer along lateral direction of interlaced low-molecular aromatics and/or low-molecular hetero aromatics under vacuum or inert gas atmosphere |
| 01/26/2012 | DE102010012607B4 HF-MEMS-Schalter RF MEMS switch |
| 01/26/2012 | DE102004010150B9 Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung RF MEMS switch with a bent switching element and method for its preparation |
| 01/25/2012 | EP2410344A2 Method for manufacturing an accelerometer |
| 01/25/2012 | EP2409163A1 Three phase capacitance-based sensing |
| 01/25/2012 | CN102331325A Pressure sensor package systems and methods |
| 01/25/2012 | CN101734607B Packaging structure of micro-electromechanical system |
| 01/25/2012 | CN101717066B Method and nano balance for weighing viruses |
| 01/25/2012 | CN101472835B Methods and systems for object identification and for authentication |
| 01/25/2012 | CN101252122B mems package for system of air-tight device and wafer-class detection |
| 01/25/2012 | CN101156242B Method for the production of enclosed electronic components, and enclosed electronic component |
| 01/19/2012 | DE102011078937A1 Drucksensorgehäusesysteme und -verfahren Pressure sensor housing systems and procedures |
| 01/19/2012 | DE102010031757A1 Mikrofluidisches System und Herstellungsverfahren für ein mikrofluidisches System Microfluidic system and manufacturing process for a microfluidic system |
| 01/19/2012 | DE102010031432A1 Pressure sensor implant e.g. foldable intraocular lens, for measuring intraocular pressure to treat Glaucoma, has strip conductors electrically connecting electrical contacts of sensor with substrate over portion of outer surfaces of sensor |
| 01/19/2012 | DE102009030281B4 Vorrichtung und Verfahren zur aktiven Abschirmung von Leitern in MEMS-Vorrichtungen Apparatus and method for active shielding of conductors in MEMS devices |
| 01/18/2012 | EP2406614A1 Apparatus for processing a biological and/or chemical sample |
| 01/18/2012 | EP2406580A2 Optical tomography system with high-speed scanner |
| 01/18/2012 | CN102320550A Raman scattering enhancing substrate of germanium-based semiconductor, and perpetration method and application of the same |
| 01/18/2012 | CN101680910B Operation method and switch arrangement for a capacitive micromechanical sensor with analog reset |
| 01/12/2012 | WO2012004339A1 Mems microphone and method for producing the mems microphone |
| 01/12/2012 | DE102010031214A1 Micromechanical sensor for measuring e.g. acceleration of electronic stability program in motor car, has control unit designed such that seismic mass is continuously subjected with periodically varying force |
| 01/12/2012 | DE102010031187A1 Schichtdicken optimierendes Jettlayout Layer thicknesses optimizing Jettlayout |
| 01/12/2012 | DE102010031103A1 Verfahren zur Herstellung eines integrierten mikrofluidischen Systems und integriertes mikrofluidisches System A method for manufacturing an integrated microfluidic system and integrated microfluidic system |
| 01/12/2012 | DE102010031055A1 Sensor module i.e. acceleration sensor, manufacturing method, for measuring e.g. acceleration, in motor car, involves applying metallic support on temporary support, and switching circuit contacting contacting area by re-wiring layer |
| 01/12/2012 | DE102010030960A1 Method for manufacturing e.g. electronic stability control sensor that is installed in e.g. prefabricated injection molded base housing, involves applying attenuation mass on micro or nano-structured component |
| 01/12/2012 | DE102010026519A1 Micro-electro-mechanical system microphone for use in mobile telephone, has sound inlet port arranged in cover or in carrier, and sealing structure attached around sound inlet port on microphone |
| 01/11/2012 | CN102315094A Optimized jettlayout design layer thickness |
| 01/11/2012 | CN102313821A Physical quantity sensor and electronic apparatus |
| 01/11/2012 | CN102311092A Method for producing a vibration-damped component |
| 01/11/2012 | CN102311091A Production process for a microneedle arrangement and corresponding microneedle arrangement and use |
| 01/11/2012 | CN101792109B Micro inertial sensor with embedded transversely movable electrodes and manufacturing method thereof |
| 01/11/2012 | CN101786593B Processing method of differential type high-precision accelerometer |
| 01/11/2012 | CN101767820B Multi-facet spherical micro-nano-structure titanium dioxide and preparation method thereof |
| 01/05/2012 | WO2012000556A1 A mems micro-mirror device |
| 01/05/2012 | WO2011100593A3 Microelectromechanical system with reduced speckle contrast |
| 01/05/2012 | DE10303263B4 Mikrophonanordnung Microphone array |
| 01/05/2012 | DE102010030864A1 Herstellungsverfahren für eine Mikronadelanordnung und entsprechende Mikronadelanordnung und Verwendung Manufacturing method of a microneedle array and corresponding microneedle array and use |
| 01/04/2012 | EP2401288A1 Digital microfluidic liquid-liquid extraction device and method of use thereof |
| 01/04/2012 | CN1654310B Microconnectors ,microconnector sockets, microassembly and as well as assemby and manufacture method thereof |
| 01/04/2012 | CN102308131A Fluid flow control assembly |
| 01/04/2012 | CN102305825A Micro electro mechanical magnetic biosensor comprising asymmetric biological active regions |
| 01/04/2012 | CN101985348B Manufacturing method of micron-scale grid structure made of monocrystalline silicon material |
| 01/04/2012 | CN101561275B Suspension rotor micro gyro by utilizing electromagnetism and charge relaxation to work |
| 01/04/2012 | CN101218503B Micromechanical sensor, sensor array and method |
| 01/04/2012 | CN101151207B Display device and method of image formation |
| 12/29/2011 | WO2011163608A2 Pressure sensitive microparticles for measuring characteristics of fluid flow |
| 12/29/2011 | WO2011162953A2 Planar cavity mems and related structures, methods of manufacture and design structures |
| 12/29/2011 | WO2011162847A2 Stress-based sensor, method and applications |
| 12/29/2011 | WO2011161717A1 Electronic device and method for manufacturing electronic device |
| 12/29/2011 | DE102011001304A1 Bauelement und Verfahren zur Herstellung eines Bauelements Device and method for manufacturing a device |
| 12/29/2011 | DE102010030457A1 Method for manufacturing fragile microelectromechanical system structure of packaged microelectromechanical system components for e.g. laptop, involves coating substrate with plastic material to produce chip packaging |
| 12/29/2011 | DE102004010150B4 Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung RF MEMS switch with a bent switching element and method for its preparation |
| 12/28/2011 | EP2398733A1 Device for grasping and active release of micro and nano objects |
| 12/28/2011 | CN102300801A 接合式微机电组件 Joining micro-electromechanical components |
| 12/28/2011 | CN102297737A 压力传感器空腔结构及其制作方法 Pressure sensor cavity structure and manufacturing method thereof |
| 12/28/2011 | CN102297689A 静电驱动压电检测闭环控制微固体模态陀螺 Electrostatic detection loop control to drive the piezoelectric micro modal solid gyro |
| 12/28/2011 | CN101785103B 低阻抗晶圆穿孔 Low impedance wafer perforation |
| 12/28/2011 | CN101659391B 一种圆滑曲面微结构的制作方法 A method of making smooth the surface microstructure of |
| 12/22/2011 | WO2011159351A2 Electrodes to improve reliability of nanoelectromechanical systems |
| 12/22/2011 | WO2011156856A1 Microfluidic thermal bend actuated surface tension valve |
| 12/22/2011 | WO2011156855A1 Microfluidic device with reagent mixing proportions determined by number of active outlet valves |
| 12/22/2011 | WO2011156854A1 Microfluidic device with conductivity sensor |
| 12/22/2011 | WO2011156853A1 Microfluidic test module with flexible membrane for internal microenvironment pressure-relief |
| 12/22/2011 | WO2011156852A1 Genetic analysis loc with non-specific nucleic acid amplification section and subsequent specific amplification of particular sequences in a separate section |
| 12/22/2011 | WO2011156848A1 Microfluidic device with flow-channel structure having active valve for capillary-driven fluidic propulsion without trapped air bubbles |
| 12/22/2011 | WO2011156847A1 Microfluidic device for genetic and mitochondrial analysis of a biological sample |
| 12/22/2011 | WO2011156846A1 Microfluidic device for simultaneous detection of multiple conditions in a patient |
| 12/22/2011 | WO2011156845A1 Loc device with parallel incubation and parallel dna and rna amplification functionality |
| 12/22/2011 | WO2011156844A1 Loc device for genetic analysis which performs nucleic acid amplification before removing non-nucleic acid constituents in a dialysis section |
| 12/22/2011 | WO2011156843A1 Loc device for genetic analysis which performs nucleic acid amplification after sample preparation in a dialysis section |
| 12/22/2011 | WO2011156841A1 Loc device for pathogen detection with dialysis, thermal lysis, nucleic acid amplification and prehybridization filtering |
| 12/22/2011 | WO2011156840A1 Loc device for pathogen detection and genetic analysis with chemical lysis, incubation and tandem nucleic acid amplification |
| 12/22/2011 | WO2011156839A1 Loc device for genetic analysis with dialysis, chemical lysis and tandem nucleic acid amplification |
| 12/22/2011 | WO2011156838A1 Loc device for pathogen detection with dialysis, chemical lysis and tandem nucleic acid amplification |
| 12/22/2011 | WO2011156837A1 Loc device for pathogen detection with dialysis, thermal lysis, nucleic acid amplification and prehybridization filtering |
| 12/22/2011 | WO2011129855A3 Wide-bandwidth mems-scale piezoelectric energy harvesting device |
| 12/22/2011 | DE102011050895A1 Mikrosensor Microsensor |
| 12/22/2011 | DE102011050839A1 Sensor und Verfahren zur Herstellung desselben Of the same sensor and process for producing |
| 12/22/2011 | DE102011050837A1 Sensor und Verfahren zur Herstellung desselben Of the same sensor and process for producing |
| 12/22/2011 | DE102010024266A1 Micro-optical interferometer i.e. optical delay interferometer, for e.g. refraction index measurement, has monolithic molded bodies with optical boundary surfaces having entry point, beam splitter, reflection point and interference point |
| 12/22/2011 | DE102005054177B4 Verfahren zum Herstellen einer Vielzahl von gehäusten Sensormodulen A method of manufacturing a plurality of sensor modules packaged |
| 12/21/2011 | CN102292280A 与金属锗硅材料接合的衬底 Metal substrate material bonded silicon germanium |
| 12/21/2011 | CN102288926A 微机电磁传感器 Computer electromagnetic sensor |
| 12/21/2011 | CN102285627A 有机花状微纳结构及其制备方法 Organic flower-like micro-nano structure and preparation method |
| 12/21/2011 | CN102285626A 电子器件和电子模块 Electronic devices and electronic modules |
| 12/21/2011 | CN102285625A 电子部件 Electronic components |
| 12/21/2011 | CN102285624A 带有热应力释放结构的键合晶圆及激光划片工艺 Wafer bonding and laser thermal stress relief structure with the dicing process |
| 12/21/2011 | CN101792108B 一种基于滑膜阻尼的大电容微惯性传感器及其制作方法 Large capacitive micro inertial sensor and its production method based on synovial damping |
| 12/21/2011 | CN101774528B 具有跨尺度仿生微纳米分支结构阵列及其制备方法 Bionic micro and nano-scale cross-branch structure array and its preparation method |
| 12/21/2011 | CN101691201B 一种基于微燃烧产生电能和推力的新型动力装置 A new micro-burning power plant to produce electricity and thrust based |
| 12/21/2011 | CN101659389B 光读出红外图像传感器像元芯片的光刻方法 Optical readout pixel infrared image sensor chip lithography method |
| 12/21/2011 | CN101276691B 驱动控制微机械装置的设备和方法 Drive control apparatus and method for micro-mechanical devices |
| 12/20/2011 | US8080442 Vertical system integration |