Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 7 - Micro-structural systems
Patents for B81B 7 - Micro-structural systems (8,983)
07/2012
07/04/2012CN102530826A Chip, method for producing a chip and device for laser ablation
07/04/2012CN102530825A Micro-electromechanical system device having electrical insulating structure and manufacturing methods
07/04/2012CN102530824A Package structure having mems element and fabrication method thereof
07/04/2012CN102530819A Microelectromechanical system device and semi-manufacture and manufacturing method thereof
07/04/2012CN101870445B Circuit lead structure and micro-electromechanical system
07/04/2012CN101746712B Phase-change material for compositing VO2 sheet and porous nanometer structure on silicon wafer and preparation method thereof
07/04/2012CN101746704B MEMS (micro electro mechanical system) element with function of dust prevention and manufacturing method thereof
07/04/2012CN101261965B Encapsulation structure with micro hole and its making method
07/04/2012CN101163638B Device and use thereof
07/04/2012CN101118250B Silicon MEMS piezoresistance type acceleration sensor
06/2012
06/28/2012WO2012085333A1 Sensor and a sensor system
06/28/2012WO2012084057A1 Rf device and method for tuning an rf device
06/28/2012DE102010064120A1 Bauteil und Verfahren zu dessen Herstellung Component and process for its preparation
06/28/2012DE102010064108A1 Verfahren zur Verpackung eines Sensorchips und dermaßen hergestelltes Bauteil A method for packaging a sensor chip and so produced component
06/28/2012DE102010063857A1 Mikromechanischer Sensor zur Messung von Drehraten sowie entsprechendes Verfahren Micromechanical sensor for measuring angular rate and corresponding method
06/28/2012DE102010056431A1 Bauelement und Verfahren zum Herstellen eines Bauelements Device and method for manufacturing a device
06/28/2012DE102010055935A1 Verfahren zum Verbinden mehrerer ungehäuster Substrate A method for connecting a plurality of bare substrates
06/28/2012DE102008046860B4 Akustischer Transducer mit einer Mehrschichtelektrode und Verfahren zu seiner Herstellung Acoustic transducer having a multilayer electrode and method for its preparation
06/27/2012CN102520334A Fiber array dynamic infrared scene generation apparatus based on MEMS technology
06/27/2012CN102515084A Microfluidic atom cavity, on-chip atomic clock chip and preparation method
06/27/2012CN102515083A Miniature atom cavity with light incidence plane, miniature atomic clock chip and preparation methods
06/27/2012CN102515082A Single-carrier MEMS (micro-electro-mechanical system) device package and production method thereof
06/27/2012CN101819215B Micro-mechanical finger gate capacitor accelerometer with adjustable elastic coefficients
06/27/2012CN101776483B Non-refrigerant thermopile infrared detector and manufacturing method thereof
06/27/2012CN101723304B Microstructure with flexible circuit board and manufacturing method thereof
06/27/2012CN101685119B Resonance miniature electric field sensor
06/27/2012CN101513990B 致动器 Actuator
06/27/2012CN101498596B Flow sensor with metal film resistor
06/27/2012CN101475138B Detection piezoresistance and method for ultrathin silicon micromechanical cantilever beam under torsion mode
06/27/2012CN101353153B MEMS sensor and manufacturing method thereof
06/27/2012CN101234746B Apparatus and method for housing micromechanical systems
06/26/2012US8207449 Nano-wire electronic device
06/26/2012US8206994 Method for treating drops in a microfluid circuit
06/21/2012DE102011115622A1 Mikropumpe sowie Vorrichtung und Verfahren zur Erzeugung einer Fluidströmung Micropump and apparatus and method for generating a fluid flow
06/21/2012DE102011056484A1 Verfahren zur Herstellung eines Sensors A method for producing a sensor
06/21/2012DE102010063471A1 Micro-electro-mechanical element has micro-electro-mechanical sensors that are arranged on same side surface of substrate
06/21/2012DE102010061340A1 Multi-component injection molding system e.g. acceleration or rotational rate sensor, for ball-point pen, has plastic component comprising stiff part and elastic member and coupled with elastic member of another plastic component
06/21/2012DE102010055417A1 Elektromechanischer Energiespeicher, insbesondere für integrierte Schaltungen Electromechanical energy storage, especially for integrated circuits
06/20/2012CN102509844A Micro-electromechanical disc resonator and manufacturing method thereof
06/20/2012CN102507050A Stimulation and vibration pick integrated pressure sensor of electric heating stimulation-piezoresistance vibration pick resonance beam
06/20/2012CN102502476A Electric field control-based surface tension driving method and device in microscale
06/20/2012CN102502475A Micro-scale driving method and device based on surface tension
06/20/2012CN101850942B Micro electromechanical system packaging structure
06/14/2012WO2012078139A1 Process for manufacturing electro-mechanical systems
06/14/2012WO2012037536A3 Packaging to reduce stress on microelectromechanical systems
06/14/2012DE102011087963A1 Microphone package, has housing cover connected with housing bottom by connection material that has low hardening temperature and/or requires short time for curing than another connection material connecting cover with microphone chip
06/14/2012DE102010062802A1 Sensor device for pressure measurement, has signal interface unit which outputs digital signals and receives input signals, and portion of analog components of signal interface unit is formed on sensor semiconductor component
06/14/2012DE102010062559A1 Mikroelektromechanisches Sensormodul sowie entsprechendes Herstellungsverfahren Micro-electromechanical sensor module and method of manufacture
06/14/2012DE102010062555A1 Micromechanical membrane device e.g. speaker device has silicon carbide membrane which is arranged opposite to upper and lower electrodes and is electrically isolated in movable membrane range by air gaps of upper and lower electrodes
06/14/2012DE102009020570B4 Monolithischer Schaltkreis mit integrierten Sensoren und diesen Schaltkreis umfassende Vorrichtung zur Materialprüfung Monolithic integrated circuit with sensors and this circuit device including material testing
06/14/2012DE102006061886B4 Ultraschallsensor Ultrasonic sensor
06/14/2012DE102005040081B4 Ultraschallsensor Ultrasonic sensor
06/13/2012CN202274956U 压力传感器及半导体装置 Pressure sensors and semiconductor device
06/13/2012CN102496611A Structure used for integrated circuit (IC) metal interconnection reliability test or micro-electro-mechanical system (MEMS) electrode layer
06/13/2012CN102496470A Asymmetric miniature ultracapacitor based on MEMS technology and manufacturing method thereof
06/13/2012CN102495119A Multi-parameter water quality monitoring integrated microarray electrodes and preparation method
06/13/2012CN102052985B MEMS cylinder-type high-temperature and superhigh-pressure resistant sensor
06/13/2012CN101924542B Capacitive mems switch and method of fabricating the same
06/13/2012CN101837944B Method for forming a gyroscope and accelerometer
06/13/2012CN101509888B Method for making silicone base integrable miniature glucose sensor
06/13/2012CN101164863B Mems device and fabrication method thereof
06/09/2012CA2759920A1 Method and apparatus for handheld device airflow
06/07/2012WO2012075272A2 Structures and methods for electrically and mechanically linked monolithically integrated transistor and mems/nems devices
06/07/2012WO2012072070A2 Sensor comprising a preferably multilayered ceramic substrate and method for producing it
06/07/2012WO2012040245A3 Through silicon via with reduced shunt capacitance
06/07/2012WO2012037492A3 Multi-die mems package
06/06/2012DE102008032319B4 Verfahren zur Herstellung eines MST Bauteils A method for producing a component MST
06/06/2012CN101898745B Method of fabricating Mems device
06/06/2012CN101774530B Microbolometer and preparation method thereof
05/2012
05/31/2012WO2012068798A1 Micro-mechanical thermopile infrared sensor by cmos technology
05/31/2012WO2012037186A3 Non-contact sensing system having mems-based light source
05/31/2012US20120132527 Use of microfluidic systems in the electrochemical detection of target analytes
05/31/2012DE102011083962A1 Method for fabricating semiconductor substrate for micro-electromechanical system (MEMS) sensor device, involves singulating structure at the chip singulation trench
05/31/2012DE102011005963B3 Micromechanical device, has sense element and sensor chip that are arranged with each other, where electrical contact takes place by solder connection between contact surfaces of sense element and sensor chip
05/31/2012DE102010062127A1 Method for manufacturing micromechanical component that is utilized as e.g. inertial sensor in automobile industry, involves performing chemical vapor etching process for removal of conductive sacrificial layer
05/31/2012DE102010062118A1 Abdeckvorrichtung für ein mikro-opto-mechanisches Bauteil und Herstellungsverfahren für eine derartige Abdeckvorrichtung Covering device for a micro-opto-mechanical device and manufacturing method for such a covering device
05/31/2012DE102010062062A1 Verfahren zum Herstellen von MEMS-Strukturen und MEMS-Struktur A process for the manufacture of MEMS structures and MEMS structure
05/31/2012DE102010062056A1 Mikromechanisches Bauteil Micromechanical element
05/31/2012DE102010062016A1 Verfahren und Vorrichtung zur Ermittlung von Bewegungsparametern bewegter Objekte Method and apparatus for determining motion parameters of moving objects
05/31/2012DE102010060906A1 Sensormodul mit Weckeinrichtung Sensor module with alarm
05/30/2012CN202246042U Tube shell for vacuum encapsulation of MOEMS (micro-optical-electronic-mechanic system)
05/30/2012CN102482072A 具有应力隔离的mems器件及其制造方法 Mems device and its manufacturing method having a stress isolation
05/30/2012CN102476786A 加速度和压力传感器单硅片集成芯片及制作方法 Acceleration and pressure sensors integrated single silicon chip and production methods
05/30/2012CN102082105B Thermal wind sensor based on anodic bonding technology and preparation method thereof
05/30/2012CN101927977B Fabrication method of cmos microelectromechanical system (mems) device
05/30/2012CN101852770B Quick-response surface acoustic wave gas sensor and method for preparing same
05/30/2012CN101817496B Micro-electro-mechanical systems interconnection pins and method for forming the same
05/30/2012CN101792112B Micro fluid control detection device based on surface-enhanced Raman scattering active substrate
05/30/2012CN101694989B Monolithic filter component based on acoustic interface waves and integrated with MEMS switches and manufacture method thereof
05/30/2012CN101646115B Silicon micro piezoelectric microphone based on inn-plane polarization of ferroelectric PZT film and manufacture method thereof
05/30/2012CN101613074B Micro electro mechanical systems element for measuring three-dimensional vectors
05/30/2012CN101544348B Composite micro-nano structure array on high light-transmission substrate and method and application thereof
05/30/2012CN101526659B Driving device and shot module using same
05/30/2012CN101298315B Preparation of nano-tube contilever beam array
05/29/2012US8187894 Method and apparatus for controlling the flow resistance of a fluid on nanostructured or microstructured surfaces
05/24/2012WO2012067858A1 Actuator motion control features
05/24/2012WO2012067850A1 Mounting flexure contacts
05/24/2012WO2011129855A9 Wide-bandwidth mems-scale piezoelectric energy harvesting device
05/24/2012DE10351719B4 Prozessorbaustein Processor module
05/24/2012DE102010061910A1 Mikrofluidvorrichtung und Verfahren zum Herstellen derselben Microfluidic device and methods for manufacturing the same
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