| Patents for B81B 7 - Micro-structural systems (8,983) |
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| 05/24/2012 | DE102010061909A1 Fluidischer Aktor mit verformbarer Verschlussanordnung und langer Lagerfähigkeit Fluidic actuator deformable closure assembly and long shelf life |
| 05/24/2012 | DE102010061795A1 Verfahren zum Erzeugen einer mikromechanischen Membranstruktur und MEMS-Bauelement A method of producing a micromechanical membrane structure and MEMS device |
| 05/24/2012 | DE102010061790A1 Digitale Ansteuerung für ein mikro-elektromechanisches Element Digital control for a micro-electromechanical element |
| 05/24/2012 | DE102010061759A1 Drehratensensor mit ineinander liegenden Coriolis-Elementen Angular rate sensor inside the other Coriolis elements |
| 05/24/2012 | DE102010061755A1 Drehratensensor und Verfahren zum Betrieb eines Drehratensensors Rotation rate sensor and method of operation of a rotation rate sensor |
| 05/23/2012 | EP2455330A2 Systems and methods for a four-layer chip-scale MEMS device |
| 05/23/2012 | CN102464295A 以银纳米片为基元的空心球微/纳结构阵列及其制备方法 Silver nano-piece hollow sphere primitive micro / nano-structure array and its preparation method |
| 05/23/2012 | CN102464294A 具有微机电元件的封装结构及其制造方法 With a package structure and method for manufacturing micro electromechanical components |
| 05/23/2012 | CN102464293A 一种封盖辅助装置 One kind of capping auxiliary device |
| 05/23/2012 | CN101993033B Micro electro mechanical system structure and manufacturing method |
| 05/23/2012 | CN101957200B Monocrystalline silicon MEMS gyro decoupled by symmetrically folded beam springs |
| 05/23/2012 | CN101923051B Array waveguide light-splitting based infrared spectrum MEMS (Micro-electromechanical System) gas sensitive transducer |
| 05/23/2012 | CN101870446B Multichannel carbon nanotube sensor and preparation method thereof |
| 05/23/2012 | CN101788569B Optical fiber acceleration transducer probe and acceleration transducer system |
| 05/23/2012 | CN101777882B X-band three-digital MEMS(Micro Electric Mechanical System) tunable band-pass filter |
| 05/23/2012 | CN101734610B Multilayer film for low load working condition of micro electro mechanical system and preparation method thereof |
| 05/23/2012 | CN101715429B Pressure manifold to equalize pressure in integration PCR-CE microfluidic devices |
| 05/16/2012 | CN102452636A Handling layer for transparent substrate |
| 05/15/2012 | US8179215 MEMS device with integral packaging |
| 05/10/2012 | WO2012021776A3 Method of forming monolithic cmos-mems hybrid integrated, packaged structures |
| 05/09/2012 | EP2450308A1 Method of manufacturing IC having a moisture barrier, IC and apparatus |
| 05/09/2012 | CN1791975B Manufacture method of electrical connections in substrates and the substrate |
| 05/09/2012 | CN102442632A Micro-nano multi-scale patterned anticoagulation composite biological material and method for preparing same |
| 05/09/2012 | CN102442631A Micro-electromechanical device and composite base material used in one micro-electromechanical device |
| 05/09/2012 | CN102442630A Translation rotating mechanism based on bidirectional or multidirectional electrostatic drivers |
| 05/09/2012 | CN101566643B Structure of film thermoelectric converter based on bi-material microcantilevel and fabricating method thereof |
| 05/09/2012 | CN101308803B Semiconductor device manufacture method |
| 05/09/2012 | CN101226856B Micro-switching device and method of manufacturing the same |
| 05/08/2012 | US8174082 Micromechanical component having multiple caverns, and manufacturing method |
| 05/08/2012 | US8171794 Operating method and circuit arrangement for a capacitive micromechanical sensor with analog reset |
| 05/03/2012 | WO2012057878A1 Microfluidic processing of target species in ferrofluids |
| 05/03/2012 | WO2011088217A9 Photostructured magnetic devices and methods for making same |
| 05/03/2012 | DE102010043277A1 Mikroelektromechanischer Sensor zur Messung einer Kraft sowie entsprechendes Verfahren The microelectromechanical sensor for measuring a force and corresponding method |
| 05/03/2012 | DE102010043127A1 Mikrofon Microphone |
| 05/03/2012 | DE102010043030A1 Micro-fluidic device for processing bioparticles e.g. DNA, comprises heating devices that are located above and below chamber in which interdigitated electrodes are provided |
| 05/03/2012 | DE102010040238B4 Hochintegriertes piezoelektrisches Energieversorgungsmodul Highly integrated piezoelectric power supply module |
| 05/03/2012 | CA2814972A1 Microfluidic processing of target species in ferrofluids |
| 05/02/2012 | EP2447209A1 Microelectromechanical system (MEMS) |
| 05/02/2012 | CN102435837A Online detector for micro electro mechanical system (MEMS) coupling degree-reconfigurable microwave power and preparation method thereof |
| 05/02/2012 | CN102435647A Method for detecting heavy metal by utilizing molecular device based on graphene electrode |
| 05/02/2012 | CN102435634A OTFT (Organic Field-Effect Transistor) integrated sensor array and production method thereof |
| 05/02/2012 | CN102431966A Tubular multi-pore micron motor and preparation method and application thereof |
| 05/02/2012 | CN102431959A Method and structure for packaging semiconductor microelectromechanical system (MEMS) chip |
| 05/02/2012 | CN102431956A Monolithic integration processing method for unequal-height silicon structure and integrated circuit |
| 05/02/2012 | CN102431952A Plane surface conductive ring array and preparation method thereof |
| 05/02/2012 | CN102431951A Double-carrier and double-MEMS (micro-electro-mechanical systems) device package and production method thereof |
| 05/02/2012 | CN102431950A Double-layer MEMS (micro-electro-mechanical systems) device stacked package and production method thereof |
| 05/02/2012 | CN102430512A Integrated system on ultrasonic transducer sheet with MEMS (Micro-Electromechanical Systems) glass sphere and preparation method thereof |
| 05/02/2012 | CN101683966B Packaging structure for miniature electric field sensor and packaging method |
| 05/02/2012 | CN101610972B Protection box for a microelectromechanical system including a wiring relay |
| 04/26/2012 | WO2012037539A9 Micromachined 3-axis accelerometer with a single proof-mass |
| 04/26/2012 | DE102011112879A1 Halbleiterherstellung und Halbleiterbauelement mit Halbleiterstruktur Semiconductor fabrication, and semiconductor device having semiconductor structure |
| 04/26/2012 | DE102009037802B4 Mikrostruktur und Verfahren zum Montieren einer solchen Microstructure and method of mounting such a |
| 04/25/2012 | EP2002383B1 Semiconductor device |
| 04/25/2012 | CN102428343A 具有高速扫描器的光学层析系统 Optical tomography system with high-speed scanner |
| 04/25/2012 | CN102424354A 分形结构粗糙表面 Fractal rough surface |
| 04/25/2012 | CN101876665B 一种全解耦双轴电容式微机械加速度计 A fully decoupling capacitance micromachined accelerometer biaxial |
| 04/25/2012 | CN101717064B Bionic telescopic matrix unit |
| 04/25/2012 | CN101659388B 双向面外运动电热微驱动器 Bidirectional movement of the outer surface of the micro electric drive |
| 04/25/2012 | CN101621261B 基于u+v型的柔性复合梁电热微驱动器 Based on u + v-type micro-flexible composite beam electric drive |
| 04/24/2012 | US8164174 Microstructure component |
| 04/24/2012 | CA2507177C Image projector with flexible reflective analog modulator |
| 04/19/2012 | WO2012048424A1 Soi-based cmut device with buried electrodes |
| 04/19/2012 | WO2011162953A3 Planar cavity mems and related structures, methods of manufacture and design structures |
| 04/19/2012 | WO2011162847A3 Stress-based sensor, method and applications |
| 04/19/2012 | DE102011115780A1 Powertrain system for hybrid vehicle e.g. passenger car, has pilot valve made of microelectro mechanical system (MEMS) component that is connected with hydraulic device to steer fluid to hydraulic device |
| 04/19/2012 | DE102011115767A1 Automatic transmission for use in micro-electromechanical systems power train of e.g. motor car, has control valve directing pressure fluid to hydraulic-controlled component when hydraulic-controlled component is actuated by pilot valve |
| 04/19/2012 | DE102011115766A1 Continuous variable transmission (CVT) for motor vehicle, has pilot valve made of microelectro mechanical system (MEMS) component that is connected with hydraulic steered component to actuate hydraulic steered component |
| 04/19/2012 | DE102011115765A1 Drying dual clutch gear for vehicle, has control valve functionally connected with pilot valve and hydraulic component to guide fluid to hydraulic component if control valve is operated by pilot valve |
| 04/19/2012 | DE102010042399A1 Micromechanical component for sensing pressure in nonlinear and reversible printer socket, has sensor element to generate signal, when physical/chemical property of one medium is changed with respect to pressure/force in another medium |
| 04/19/2012 | DE102010006773B4 Wellenlängensensitives plasmonisch aktives Modul zur spektral aufgelösten Detektion von Licht Wavelength-sensitive plasmonic active module for spectrally resolved detection of light |
| 04/19/2012 | DE102009045404B4 Abmesskanal und mikrofluidische Struktur und Verfahren zum Abmessen und/oder Positionieren eines Volumens einer Flüssigkeit Abmesskanal and microfluidic structure and method for measuring and / or positioning a volume of a liquid |
| 04/19/2012 | DE102007022959B4 Verfahren zur Herstellung von Halbleitervorrichtungen A process for the manufacture of semiconductor devices |
| 04/19/2012 | CA2814123A1 Soi-based cmut device with buried electrodes |
| 04/18/2012 | CN102422143A 处理生物样品和/或化学样品的装置 Means for processing the biological sample and / or chemical samples |
| 04/18/2012 | CN102419236A 一种用于微器件真空度测量的标定盒及使用方法 Calibration method for the use of the cartridge and the degree of vacuum measured by the micro device |
| 04/18/2012 | CN102417154A Multiple bonding in wafer level packaging |
| 04/18/2012 | CN102101637B 嵌入横向可动电极的微惯性传感器 Transversely movable electrode embedded micro inertial sensors |
| 04/18/2012 | CN101704498B 静电致动器及其制备方法、抗瞬时扰动方法 Electrostatic actuator and its preparation method, anti-transient perturbation method |
| 04/18/2012 | CN101359645B Semiconductor device, premolding packaging structure and manufacture method |
| 04/18/2012 | CN101214918B 用于微机电封盖制程的封装结构 MEMS package structure for the process of closure |
| 04/12/2012 | WO2012046896A1 Method for forming micro- or nanoscale patterns using liquid crystal phase and defect structures |
| 04/12/2012 | WO2011163608A3 Pressure sensitive microparticles for measuring characteristics of fluid flow |
| 04/12/2012 | WO2011159351A3 Electrodes to improve reliability of nanoelectromechanical systems |
| 04/12/2012 | WO2011153259A3 Curved multimorph microactuators that bend and/or twist |
| 04/12/2012 | DE102010042113A1 Semiconductor component for use in micro-electromechanical system in microsystems technology, has dielectric closure layer attached on structured dielectric layer, where surface of layer comprises depth profile in direction of chip interior |
| 04/11/2012 | CN102411086A Five-port capacitance type microwave power sensor based on micro mechanical clamped beam |
| 04/11/2012 | CN102408092A Semiconductor manufacturing and semiconductor device with semiconductor structure |
| 04/11/2012 | CN102408091A 一种改进的微机电系统平台圆片级封装结构 An improved MEMS wafer level package structure of the platform |
| 04/11/2012 | CN102408090A Microstructure with enhanced anchor |
| 04/11/2012 | CN101788605B 无线接收式微电子机械微波频率检测系统及其制备方法 Wireless receiver type MEMS microwave frequency detection system and its preparation method |
| 04/11/2012 | CN101618848B 扭转式微机电元件 Reversing the decline of electromechanical components |
| 04/10/2012 | CA2721172C Microfabricated elastomeric valve and pump systems |
| 04/05/2012 | WO2012040861A1 Digital microfluidic devices and methods incorporating a solid phase |
| 04/05/2012 | US20120080360 Manipulation of particles in channels |
| 04/05/2012 | DE102011075428A1 Winkelgeschwindigkeitssensor Angular velocity sensor |
| 04/05/2012 | CA2813090A1 Digital microfluidic devices and methods incorporating a solid phase |
| 04/04/2012 | EP2435355A2 Mechanical isolation for mems electrical contacts |
| 04/04/2012 | CN102404676A MEMS microphone package |
| 04/04/2012 | CN102401854A 微电子机械导热介质填充终端式微波功率传感器及制备方法 MEMS thermal media filled terminal microwave power sensors and preparation methods |