| Patents for B81B 7 - Micro-structural systems (8,983) |
|---|
| 04/04/2012 | CN102398888A 晶圆级封装 Wafer Level Packaging |
| 04/04/2012 | CN102398886A 具微机电元件的封装结构及其制法 Jiqizhifa package structure with micro-electromechanical components |
| 04/04/2012 | CN102398885A 微机电传感器装置 MEMS sensor device |
| 04/04/2012 | CN101006748B Silicon condenser microphone and manufacturing method |
| 03/29/2012 | WO2012040245A2 Through silicon via with reduced shunt capacitance |
| 03/29/2012 | WO2012040194A1 Inertial sensor mode tuning circuit |
| 03/28/2012 | EP2434297A1 Structure having chip mounted thereon and module provided with the structure |
| 03/28/2012 | EP2432727A2 Substrate with multiple encapsulated pressures |
| 03/28/2012 | CN101804960B Ultra-fine cone electrode array and method for manufacturing same |
| 03/28/2012 | CN101301991B Micromechanical component, device for designing micromechanical component, procedures for manufacturing micromechanical component, and micro-mechanical system |
| 03/28/2012 | CN101284642B Micromechanical device with tilted electrodes |
| 03/27/2012 | CA2425795C Method and system for propelling and controlling displacement of a microrobot in a blood vessel |
| 03/22/2012 | WO2012037539A1 Micromachined 3-axis accelerometer with a single proof-mass |
| 03/22/2012 | WO2012037537A2 Sealed packaging for microelectromechanical systems |
| 03/22/2012 | WO2012037536A2 Packaging to reduce stress on microelectromechanical systems |
| 03/22/2012 | WO2012037492A2 Multi-die mems package |
| 03/22/2012 | WO2012037186A2 Non-contact sensing system having mems-based light source |
| 03/22/2012 | DE102010041129A1 Multifunktionssensor als PoP-mWLP Multifunction sensor as PoP mWLP |
| 03/22/2012 | DE102010041101A1 Bauelement mit einer Durchkontaktierung Component with a via |
| 03/22/2012 | DE102010040908A1 Drehratensensor Rotation rate sensor |
| 03/21/2012 | EP1488270B1 Micro light modulator arrangement |
| 03/21/2012 | CN102387746A Analyte sensor and fabrication methods |
| 03/21/2012 | CN102386238A Sensor apparatus and method for mounting semiconductor sensor device |
| 03/21/2012 | CN102385001A Three-channel micro-mechanical cantilever beam indirect-type microwave power sensor and preparation method |
| 03/21/2012 | CN102381678A MEMS device assembly and method of packaging same |
| 03/21/2012 | CN102381677A Composite wafer semiconductor |
| 03/15/2012 | US20120066800 Fluid delivery for scanning probe microscopy |
| 03/15/2012 | US20120060937 Method and apparatus for controlling the flow resistance of a fluid on nanostructured or microstructured surfaces |
| 03/15/2012 | DE102010045056A1 Verfahren und Vorrichtung zum Herstellen von Chip-Bauelementen sowie mittels des Verfahrens hergestelltes Chip-Bauelement Method and apparatus for the manufacture of chip components as well as produced by the method of chip component |
| 03/15/2012 | DE102010040768A1 Spectral dispersion device e.g. transform spectrometer, for analyzing sample, has exit-side construction element fixed at substrate stack such that exit window is partially covered and optical exit diaphragm is defined |
| 03/14/2012 | EP2428486A2 Compression and cold weld sealing methods and devices |
| 03/14/2012 | CN102375090A Micromechanical cantilever beam switch online microwave power detector and manufacturing method thereof |
| 03/14/2012 | CN101817495B Micro fluid control chip and preparation method and application thereof |
| 03/14/2012 | CN101646117B Soft support bridge type silicon micro-piezoelectric microphone chip and prepration method thereof |
| 03/08/2012 | DE102010040370A1 MEMS-Mikrofon-Package MEMS microphone package |
| 03/08/2012 | DE102010040243A1 Piezoelectric energy converter for integrated power generation system used in industrial automation field, has piezoelectric element which is excited to mechanical vibration, and is provided with electrically passive carrier layer |
| 03/08/2012 | DE102010040238A1 Hochintegriertes piezoelektrisches Energieversorgungsmodul Highly integrated piezoelectric power supply module |
| 03/07/2012 | EP2427040A1 Electronic component mounting device and method for producing the same |
| 03/07/2012 | EP2426083A2 Mems sensor package |
| 03/07/2012 | EP2425450A2 Novel bonding process and bonded structures |
| 03/07/2012 | CN102369101A Film for resin spacer, light-receiving device and method for manufacturing same, and MEMS device and method for manufacturing same |
| 03/07/2012 | CN102367164A One-dimensional microstructural array and preparation method thereof |
| 03/06/2012 | US8129802 Integrated micro electro-mechanical system and manufacturing method thereof |
| 03/06/2012 | US8129255 Firm, insulating and electrically conducting connection of processed semiconductor wafers |
| 03/01/2012 | DE102010035248A1 Kapazitiver MEMS-HF-Demodulator für Ultra-Low-Power-Einsatz Capacitive MEMS RF demodulator for ultra-low-power applications |
| 03/01/2012 | DE102010035247A1 Dielektrischer kapazitiver MEMS Energiewandler Dielectric capacitive MEMS energy converter |
| 03/01/2012 | DE102006020716B4 Mikrofluidik-Prozessor Microfluidic processor |
| 03/01/2012 | DE102004062992B4 Schaltbares Hochfrequenz-MEMS-Element mit bewegbarem Schaltelement und Verfahren zu seiner Herstellung Switchable RF MEMS element with movable switching element and method for its preparation |
| 02/29/2012 | CN102365229A Sensor device with reduced parasitic-induced error |
| 02/29/2012 | CN101987719B Sensing element structure and manufacturing method |
| 02/28/2012 | US8124423 Method and apparatus for controlling the flow resistance of a fluid on nanostructured or microstructured surfaces |
| 02/23/2012 | US20120043629 Surface Mount Silicon Condenser Microphone Package |
| 02/23/2012 | DE10206711B4 Mikromechanisches Bauelement Micromechanical component |
| 02/22/2012 | EP2420470A1 MEMS Microphone |
| 02/22/2012 | EP2019810B1 Chip housing with reduced coupling-in of vibrations |
| 02/22/2012 | CN102360039A Five-port micromachine cantilever-based capacitance type microwave power sensor and manufacturing method thereof |
| 02/22/2012 | CN102359981A Resistance type gas sensor with two support suspension beams and six-layer structure, and method thereof |
| 02/22/2012 | CN102359980A Resistance-type gas sensor with two support suspension beams and four-layer structure and method |
| 02/22/2012 | CN102358609A System and method for display device with integrated desiccant |
| 02/21/2012 | US8121331 Surface mount silicon condenser microphone package |
| 02/21/2012 | US8120160 Integrated circuit device including a bifunctional core material in a chamber |
| 02/21/2012 | CA2545213C Planar electronebulization sources modeled on a calligraphy pen and the production thereof |
| 02/16/2012 | WO2012021776A2 Method of forming monolithic cmos-mems hybrid integrated, packaged structures |
| 02/16/2012 | DE102011079232A1 Struktur und verfahren zur anordnung eines schwingungsisolierten targets Structure and process for the formation of a vibration-isolated targets |
| 02/16/2012 | DE102009021244B4 MEMS-Bauelement, Halbleiterchip und Verfahren zu dessen Herstellung MEMS device, semiconductor chip and process for its preparation |
| 02/16/2012 | DE102007027127B4 Sensor für eine physikalische Grösse Sensor for a physical quantity |
| 02/16/2012 | DE102005043906B4 Sensor vom kapazitiven Typ für eine physikalische Größe, der einen Sensorchip und einen Schaltkreischip aufweist The capacitance type sensor for a physical quantity that has a sensor chip and a circuit chip |
| 02/15/2012 | EP2417054A2 Sensor device with reduced parasitic-induced error |
| 02/15/2012 | CN102356324A Vertically integrated mems acceleration transducer |
| 02/15/2012 | CN102356323A Three phase capacitance-based sensing |
| 02/15/2012 | CN102354052A Digital micro-mirror device and forming method thereof |
| 02/15/2012 | CN102350694A Flexible ultrasonic radiometric force clamp based on microscopic visual servo |
| 02/15/2012 | CN101583559B 微机械结构和制造微机械结构的方法 The method of micro-mechanical structure and manufacturing micromechanical structures |
| 02/15/2012 | CN101233619B 微电子部件的封装及其制造方法 Package and method for manufacturing microelectronic components |
| 02/09/2012 | WO2012017024A1 Microscale or nanoscale magnetic tweezers and process for fabricating such tweezers |
| 02/09/2012 | WO2011156856A9 Microfluidic thermal bend actuator surface tension valve |
| 02/09/2012 | WO2011098187A3 Semiconductor component and corresponding production method |
| 02/09/2012 | DE102010039063A1 Sensormodul mit einem elektromagnetisch abgeschirmten elektrischen Bauteil Sensor module with an electromagnetically shielded electrical component |
| 02/09/2012 | DE102010039057A1 Sensormodul Sensor module |
| 02/09/2012 | DE102010038919A1 Mikromechanisches System Micromechanical System |
| 02/09/2012 | DE102008019585B4 Vorrichtung zum Flüssigkeitstransport durch Elektrobenetzung mittels effektiver Elektrodenanordnung Apparatus for fluid transport through electrowetting through effective electrode assembly |
| 02/09/2012 | DE102008013098B4 Mikromechanisches System mit Temperaturstabilisierung The micromechanical system with temperature stabilization |
| 02/08/2012 | EP2415592A1 Film for resin spacer, light-receiving device and method for manufacturing same, and mems device and method for manufacturing same |
| 02/08/2012 | EP2414275A2 Mems cavity-coating layers and methods |
| 02/08/2012 | EP2165362B1 Low resistance through-wafer via |
| 02/08/2012 | CN102344111A A process for manufacturing a micromechanical structure having a buried area provided with a filter |
| 02/08/2012 | CN102344110A Quad flat non-leaded package structure and method of micro electro mechanical system device |
| 02/08/2012 | CN102344109A Packaging structure and manufacturing method thereof |
| 02/08/2012 | CN101153820B 测量装置和测量方法 Measuring apparatus and methods of measurement |
| 02/02/2012 | WO2012015584A1 Reduced footprint microphone system with spacer member having through-hole |
| 02/02/2012 | WO2012013416A1 Module and production method |
| 02/02/2012 | WO2012012939A1 Cmos compatible mems microphone and method for manufacturing the same |
| 02/02/2012 | WO2011088217A3 Photostructured magnetic devices and methods for making same |
| 02/02/2012 | DE102010038461A1 Drehratensensor und Verfahren zur Herstellung eines Masseelements Rotation rate sensor and method for producing a mass element |
| 02/02/2012 | DE102010038445A1 Verfahren zur Herstellung eines mikrofluidischen Systems A process for preparing a microfluidic system |
| 02/02/2012 | DE102010032506A1 Modul und Herstellungsverfahren Module and manufacturing method |
| 02/01/2012 | EP2413146A1 Systems and methods for mounting inertial sensors |
| 02/01/2012 | EP2411817A2 Vertically integrated mems acceleration transducer |
| 02/01/2012 | EP2411321A2 Display device with openings between sub-pixels and method of making same |
| 02/01/2012 | CN102336387A Quartz micro-needle array tip spherical shell microstructure and preparation method thereof |