Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 7 - Micro-structural systems
Patents for B81B 7 - Micro-structural systems (8,983)
11/2012
11/21/2012CN101303363B Multipurpose micro-flow liquid comprehensive processing system
11/15/2012WO2012154688A2 Methods and devices to control fluid volumes, reagent and particle concentration in arrays of microfluidic drops
11/15/2012DE102011084020A1 Sensorelement Sensor element
11/15/2012DE102008012826B4 Verfahren zur Erzeugung einer dreidimensionalen mikromechanischen Struktur aus zweidimensionalen Elementen und mikromechanisches Bauelement A method for generating a three-dimensional micro structure from two-dimensional mechanical elements and micromechanical component
11/15/2012CA2836061A1 Bio-nano-chips for on-site drug screening
11/14/2012CN102779809A Chip package and method for forming the same
11/14/2012CN102778503A Surface acoustic wave gas sensor and its manufacturing method
11/14/2012CN102774805A Wafer packaging body and formation method thereof
11/14/2012CN102774804A Package having MEMS element and fabrication method thereof
11/14/2012CN101774529B MEMS atom cavity chip and preparation method thereof
11/14/2012CN101680792B Hot film-type air flow meter and production method thereof
11/14/2012CN101279712B Method for generating a micromechanical structure
11/08/2012US20120279773 Arrangement comprising a carrier and a layer
11/08/2012DE102011104843A1 Micro-mirror structure of micro-mirror device, has contact region that is formed between mirror portions by coating process during deposition of one mirror portion on another mirror portion
11/08/2012DE102011075260A1 MEMS-Mikrofon MEMS microphone
11/07/2012EP2520541A2 Systems and methods for three-axis sensor chip packages
11/07/2012EP2519970A2 Leadframe-based premolded package having acoustic air channel for microelectromechanical system (mems) device
11/07/2012CN101833017B Wireless calibration system of centrifugal micro-machine acceleration transducer
10/2012
10/31/2012EP2517480A1 Microelectromechanical transducer and corresponding assembly process
10/31/2012EP2516977A2 Thermal sensor using a vibrating mems resonator of a chip interconnect layer
10/31/2012EP2516321A2 Sensor comprising a preferably multilayered ceramic substrate and method for producing it
10/31/2012DE102011018588A1 Method for manufacturing integrated pressure sensor of highly integrated switching circuit, involves forming diaphragm by formation of depression of substrate by back corrosion of substrate
10/31/2012CN202508874U Wafer level micro electronics mechanical system (MEMS) inertial device stacked package structure by means of through silicon via (TSV) technique
10/31/2012CN102762490A Micro electromechanical systems (mems) having a gap stop and method therefor
10/31/2012CN102762489A Lid, fabricating method thereof, and mems package made thereby
10/31/2012CN102757010A A micro-electromechanical system (MEMS) device
10/31/2012CN101628705B Substrate bonding method and electronic component thereof
10/26/2012WO2012145485A2 Implantation of gaseous chemicals into cavities formed in intermediate dielectric layers for subsequent thermal diffusion release
10/26/2012WO2012145301A2 Single-layer pcb microfluidics
10/26/2012WO2012144794A2 Method for manufacturing a microvalve device mounted on a lab-on-a-chip, and microvalve device manufactured by same
10/25/2012US20120267239 Single-layer pcb microfluidics
10/25/2012DE102011007805A1 Micro-electro-mechanical sensor for use in gyroscope of vehicle for determining x-component of rotational speed vector, has drive elements movable in z-direction during occurrence of x-component of rotational speed vector
10/24/2012EP2514713A1 A micro-electromechanical system (MEMS) device
10/24/2012CN102754172A Variable capacitance element
10/24/2012CN102753471A System and method for manufacturing a display device having an electrically connected front plate and back plate
10/24/2012CN102749167A Pressure sensor encapsulation structure containing silicon through holes
10/24/2012CN102745642A Integration getter MEMS (micro-electro-mechanical systems) film packaging structure and manufacturing method thereof
10/24/2012CN102745641A MEMS device with central anchor for stress isolation
10/24/2012CN102745640A Covering member for micro electro mechanical device and manufacturing method thereof
10/24/2012CN102745639A Micro electro mechanical bearing piece and manufacturing method thereof
10/23/2012US8295027 MEMS device with integral packaging
10/18/2012WO2012141854A1 Mems package or sensor package with intra-cap electrical via and method thereof
10/18/2012WO2012141484A2 Bowl-shaped structure, method for manufacturing same, and bowl array
10/18/2012WO2012139214A1 Shape memory materials by surface modification
10/18/2012DE102011016934A1 Micro electro mechanical system sensor, has membrane comprising base surface provided with two major axes, where major axes have different diameters, and base surface of membrane is elliptical in shape
10/18/2012DE102011007328A1 Vorrichtung und Verfahren zum Beeinflussen einer Abstrahlcharakteristik einer lichtemittierenden Diode Apparatus and method for influencing a radiation characteristic of a light emitting diode
10/17/2012CN102742301A Microelectromechanical transducer and corresponding assembly process
10/17/2012CN102741154A Semiconductor component and corresponding production method
10/17/2012CN102740206A Dual cell mems assembly
10/17/2012CN102735712A Micro-well based gas sensor array and its making method
10/17/2012CN102735280A Sensor module and method for manufacturing a sensor module
10/17/2012CN102730626A Carrier and method for fabricating thereof
10/17/2012CN102730624A Real-time dynamic color regulation and control micro device, method for preparing micro device and real-time dynamic color regulation and control method
10/17/2012CN102730623A Micro-electro-mechanical system sensing device and method for manufacturing same
10/17/2012CN102730622A Integrated chip of micro thermal conductive detector and manufacturing method for same
10/17/2012CN102730621A Silicon-based micro-heating plate provided with embedded heating wire, and processing method thereof
10/17/2012CN102730620A Systems and methods for enhancing reliability of mems devices
10/17/2012CN102730619A Covering member for micro-electro mechanical device and method for manufacturing covering member
10/17/2012CN102730618A Encapsulating structure and encapsulating method for integrating acceleration sensor and magnetic sensor
10/17/2012CN102730617A Packaging structure of integrated magnetic and accelerometer and packaging method thereof
10/17/2012CN101513989B Functional device and manufacturing method thereof
10/11/2012WO2012138035A1 Micropump
10/11/2012WO2012138006A1 Mems resonator, sensor having the same and manufacturing method for mems resonator
10/11/2012DE102011016554A1 Waferlevel-Package und Verfahren zur Herstellung Wafer level package and method for producing
10/11/2012DE102011007168A1 Micro-electro-mechanical sensor for determining movements of substrate, has fixing arrangement provided with two spring beams, which run between anchor and mass in parallel manner
10/10/2012CN202488883U Installing structure of vertical gyroscope and circuit board
10/10/2012CN102721829A Capacitive micro acceleration sensor and uni-wafer manufacturing method thereof
10/10/2012CN102718180A Concentric ring core nano silicon micro-disk micro-cavity device and preparation method thereof
10/10/2012CN102718179A Mems device and manufacturing process thereof
10/10/2012CN102062662B Monolithic integrated SiC MEMS (Micro-Electro-Mechanical Systems) pressure sensor and production method thereof
10/10/2012CN102042832B Micro electro mechanical system (MEMS) gyroscope, chip level temperature control method thereof and processing method thereof
10/10/2012CN101993030B Micro movable device and method for manufacturing the same
10/10/2012CN101694494B Method for manufacturing micro-cantilever modified with antibody
10/10/2012CN101152955B Method of making microstructure device, and microstructure device made by the same
10/08/2012DE202012103703U1 Bolometer Bolometer
10/04/2012DE102012102727A1 Systeme und Verfahren zur Erhöhung der Betriebssicherheit von MEMS-Vorrichtungen Systems and methods for increasing the reliability of MEMS devices
10/04/2012DE102011006598A1 Bauteil mit einem verstellbaren Teil und Verfahren zum Betreiben eines Bauteils mit einem verstellbaren Teil Component with an adjustable part, and method of operating a component having an adjustable sub-
10/04/2012DE102011006596A1 Micro-mechanical arrangement for manufacturing thin polysilicon layer utilized as e.g. strip conductor, has hole pairs connected with micro-mechanical functional area over contact plugs and disconnected from area by gap
10/04/2012DE102011006595A1 Micromechanical optical component e.g. micro mirror actuator device has lever elements that are connected to piezoelectric element such that voltage is applied to piezoelectric element and lever elements are moved to move mirror element
10/04/2012DE102011006594A1 Sensormodul und Verfahren zur Herstellung eines Sensormoduls Sensor module and method of manufacturing a sensor module
10/04/2012DE102011006422A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component
10/04/2012DE102011006412A1 Manufacturing method for micromechanical system involves removing a portion of sacrificial layers in region of cavity structure with etch channels through trenches while not removing remaining portion of sacrificial layers
10/04/2012DE102011006403A1 Mikromechanische Anordnung und entsprechendes Herstellungsverfahren Micromechanical device and manufacturing method thereof
10/04/2012DE102011006399A1 Oscillating device for inertial sensor, particularly micromechanical inertial sensor, has substrate suspension for suspending oscillating mass to substrate, and adjusting unit is arranged for adjusting nonlinearity of oscillation
10/04/2012DE102011006394A1 Drehratensensor Rotation rate sensor
10/04/2012DE102007035633B4 Verfahren zur Herstellung mikromechanischer Strukturen sowie mikromechanische Struktur A process for producing micromechanical structures and micromechanical structure
10/03/2012EP2504711A2 Combining redundant inertial sensors to create a virtual sensor output
10/03/2012CN102714200A Leadframe-based premolded package having acoustic air channel for microelectromechanical system device
10/03/2012CN102707435A Bipolar electromagnetic scanning micro lens
10/03/2012CN102701143A Lithography process with micro-nano lens for auxiliary light condensation for preparing ordered micro-nano structure
10/03/2012CN102701137A Anti-overload MEMS (Micro Electro Mechanical Systems) device with three-dimensional stop structure and machining method thereof
10/03/2012CN102701136A Electrical bypass structure for MEMS device
10/03/2012CN101957532B Display device and micro electro mechanical system (MEMS) array substrate thereof
10/02/2012CA2771648A1 Dual cell mems assembly
09/2012
09/27/2012DE10311795B4 Mikromechanischer Druckschalter sowie Verfahren zur Herstellung des Mikromechanischen Druckschalters Micromechanical pressure switch and to processes for producing the micro mechanical pressure switch
09/27/2012DE102011001496A1 Micro electrical mechanical sensor has substrate and plate that is fixed with substrate for movement around drive axis and elastically connected to sensor axis
09/27/2012DE102011001422A1 Sensor module has three sensors electrically connected with electric wires that are provided at mounting substrate and sensors are mounted at mounting substrate
09/27/2012DE102010056431B4 Bauelement und Verfahren zum Herstellen eines Bauelements Device and method for manufacturing a device
09/27/2012DE102009019029B4 Verfahren zur Herstellung eines Sensormoduls A process for producing a sensor module
09/27/2012DE102008034546B4 Brennstoffzelle mit einer Bipolarplatte mit einer hydrophil/hydrophob gemusterten Oberfläche Fuel cell with a bipolar plate with a hydrophilic / hydrophobic patterned surface
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