Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 7 - Micro-structural systems
Patents for B81B 7 - Micro-structural systems (8,983)
09/2012
09/26/2012EP2502876A1 Micromechanical device with a cantilever and an integrated electrical device
09/26/2012EP2501645A2 Manufacturing a mems having electrically connected front plate and back plate
09/26/2012EP2501644A1 Lid, fabricating method thereof, and mems package made thereby
09/26/2012CN202449845U Double-carrier double MEMS (micro-electromechanical system) apparatus encapsulating component
09/26/2012CN102693936A Package Interconnects
09/26/2012CN102689870A Nano porous material capable of being perfomed direct photoetching imaging and preparation method thereof
09/26/2012CN101811657B Micro-electromechanical sensor and manufacturing method
09/25/2012CA2752746C Mems device with integrated via and spacer
09/20/2012WO2012125415A1 Seal anchor structures
09/20/2012WO2012122879A1 Mems inertial sensor and forming method therefor
09/20/2012WO2012122875A1 Mems pressure sensor and manufacturing method therefor
09/20/2012WO2012122619A1 Mems-based getter microdevice
09/20/2012DE102011005676A1 Bauteil Component
09/20/2012CA2822484A1 Mems-based getter microdevice
09/19/2012CN102686508A A tri wavelength diffraction modulator and a method for modulation
09/19/2012CN102683312A Semiconductor apparatus
09/19/2012CN102680917A Micro-mechanical magnetic field sensor and preparation method thereof
09/19/2012CN102680158A Integrated micro pressure flow sensor based on silicon through-hole technology
09/19/2012CN102674237A Monolithic integrated sensor device and method thereof and method for formign the cavity structure of the monolithic integrated sensor device
09/19/2012CN102674236A Gold micro-nano composite structure array and preparation method thereof
09/19/2012CN102674235A MEMS and method of manufacturing the same
09/19/2012CN102674234A Sensor with energy-harvesting device
09/19/2012CN102674233A Package systems and manufacturing methods of the same
09/19/2012CN102072967B Gold-gold bonding process-based thermal type wind speed and direction sensor and preparation method thereof
09/19/2012CN101811656B MEMS element and method of manufacturing the same
09/19/2012CN101734608B Micro-electromechanical structure and manufacturing method thereof
09/18/2012US8269327 Vertical system integration
09/18/2012US8268660 Process for fabricating micromachine
09/13/2012DE102012202643A1 Hohlraumstrukturen für mems-bauelemente Cavity structures for mems devices
09/13/2012DE102008000261B4 Halbleitervorrichtung und Verfahren zu ihrer Herstellung Semiconductor device and process for their preparation
09/12/2012CN202433334U Piezoresistive type humidity sensor with low temperature drift
09/12/2012CN202429999U Morphology of nanopore arrays etched on metal surface
09/12/2012CN102667432A Thermal sensors having flexible substrates and uses thereof
09/12/2012CN102662235A Direct optical drive scanning micro-mirror
09/12/2012CN102662234A Light driving scanning micro-mirror
09/12/2012CN102659070A Integrated photon chip and preparation method thereof
09/12/2012CN102659069A Component having at least one MEMS element and method for the manufacture thereof
09/12/2012CN102659068A MEMS (micro-electro-mechanical system) resonant cavity structure
09/11/2012US8264054 MEMS device having electrothermal actuation and release and method for fabricating
09/06/2012DE102012202421A1 Microelectromechanical systems transducer device mounted to circuit board comprises package substrate having first coefficient of thermal expansion, and transducer substrate comprising transducer and disposed over package substrate
09/05/2012CN202415141U High-response sensitivity cantilever beam structure
09/05/2012CN102655627A Mems-microphone
09/05/2012CN102103058B Columnar electrode array structure capable of realizing stress release of sensitive biochemical films and preparation method thereof
09/05/2012CN102030301B Micro suspension structure compatible with semiconductor element and manufacturing method thereof
09/05/2012CN101858928B Capacitance-type triaxial accelerator for micromotor system
09/05/2012CN101620197B Rapid response CMOS relative humidity sensor
09/05/2012CN101551403B Integrated silicon chip for testing acceleration, pressure and temperature, and manufacturing method thereof
09/05/2012CN101549847B Micro electro mechanical system and head gimbal assembly
09/05/2012CN101471203B Flexible electrostatic actuator
09/05/2012CN101436571B Electrical device and method
08/2012
08/30/2012WO2012115077A1 Wavelength selection switch
08/30/2012WO2012113277A1 Liquid droplet measuring method and liquid droplet control method
08/30/2012WO2012113054A1 Bone and tool tracking with mems in computer-assisted surgery
08/30/2012DE10231730B4 Mikrostrukturbauelement Microstructure component
08/30/2012DE102011012295A1 Microelectromechanical system microphone for mobile radio unit, has transducer element enclosed between cover and carrier, and sound inlet openings formed in carrier and cover, respectively
08/30/2012DE102011004782A1 Ablösbare Mikro- und Nanobauteile für platzsparenden Einsatz Removable micro and nanodevices for space-saving use
08/30/2012CA2827758A1 Bone and tool tracking with mems in computer-assisted surgery
08/29/2012CN101881676B Hexagonal silicon membrane piezoresistive pressure sensor for embedded monocrystal silicon cavity and method
08/29/2012CN101719575B Electrothermal-driven in-plane bistable radio frequency microswitch
08/29/2012CN101704497B Structure of single-etch tank hermetically packaged by MEMS in wafer level and method thereof
08/29/2012CN101694896B Five-bit radio-frequency MEMS phase shifter
08/29/2012CN101613073B Micro electromechanical system (MEMS)
08/29/2012CN101597021B Method for structuring a device layer of a substrate
08/23/2012WO2012072070A3 Sensor comprising a preferably multilayered ceramic substrate and method for producing it
08/23/2012DE102012101374A1 Katheterspitzenvorrichtung und Verfahren zu deren Herstellung The catheter tip apparatus and process for their preparation
08/23/2012DE102011004577A1 Bauelementträger und Bauteil mit einem MEMS-Bauelement auf einem solchen Bauelementträger Component carrier and the component with a MEMS device on such a component carrier
08/23/2012DE102011004570A1 Component carrier for e.g. microelectromechanical system component, has carrier film formed with coating, where mounting surface is formed on inner wall of film for mounting microelectromechanical system components
08/22/2012CN202390196U Single carrier MEMS (Micro Electro Mechanical System) device encapsulating piece
08/22/2012CN202390195U Double-layer MEMS device stacking encapsulation member
08/22/2012CN102645579A Four-input micro mechanical cantilever beam thermoelectric microwave power sensor and preparation method
08/22/2012CN102642804A MEMS device having variable gap width and method of manufacture
08/22/2012CN102642803A Micromechanical device and manufacturing method of same
08/22/2012CN102642802A Microelectromechanical systems (MEMS) packaging
08/22/2012CN102101636B Resonator and periodic structure
08/22/2012CN101905854B Electronic component and its manufacturing method, and an electronic system
08/22/2012CN101489170B Self-detecting silicon micromechanical microphone and production method thereof
08/22/2012CN101331079B Micromechanical component having a cap with a closure
08/16/2012WO2012108139A1 Wavelength selective switch
08/16/2012WO2012107094A1 Mems device comprising an under bump metallization
08/16/2012WO2012075272A3 Structures and methods for electrically and mechanically linked monolithically integrated transistor and mems/nems devices
08/16/2012DE102006056361B4 Modul mit polymerhaltigem elektrischen Verbindungselement und Verfahren Module with polymer-electrical connector and method
08/15/2012EP2487519A1 Variable wavelength interference filter, optical module, optical analysis device, and method for manufacturing variable wavelength interference filter
08/15/2012CN102640285A Microelectromechanical system having movable element integrated into leadframe-based package
08/15/2012CN102637935A Microwave attenuator
08/15/2012CN102633227A Film pressure damp adjustable device for MEMS (micro-electromechanical system) inertial sensor structure
08/15/2012CN102050419B Magnetic double nano-structure array material and preparation method thereof
08/15/2012CN101938862B Solenoid type heating resistor-containing three-dimensional microheater and manufacturing method thereof
08/15/2012CN101646119B Silicon condenser microphone chip with micro-honeycomb structural vibration membrane and preparation method thereof
08/09/2012WO2012106278A1 Mems sensors with closed nodal anchors for operation in an in-plane contour mode
08/08/2012EP2485243A1 Micro-reflectron for time-of-flight mass spectrometry
08/08/2012EP2484008A1 A micromechanical resonator
08/08/2012CN202369385U Nanowire, nanowire surgery expansion frame and sheet constituted by woven nanowires
08/08/2012CN102629601A Bonded stacked wafers and methods of electroplating bonded stacked wafers
08/08/2012CN102627253A Self-aligning packaging structure for micro-electromechanical system (MEMS) device and manufacture method thereof
08/08/2012CN102627252A Novel trench isolation groove for filling trench
08/08/2012CN101239698B Z-axis microelectromechanical device with improved stopper structure
08/07/2012CA2768047C Torque motor
08/02/2012WO2012100861A1 Component and method for producing a component
08/02/2012WO2012100362A1 Method for manufacturing a sensor chip
08/02/2012WO2012100361A2 Sensor protection
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