| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 05/28/1998 | DE19648999A1 High-pressure plasma surface treatment device e.g. for activating plastics surfaces |
| 05/27/1998 | EP0844313A2 Method and apparatus for sputtering in a chamber having an inductively coupled plasma |
| 05/27/1998 | EP0844042A1 Combined laser and plasma ARC welding torch and method |
| 05/26/1998 | US5756960 Detecting non-symmetrical nozzle wear in a plasma arc torch |
| 05/26/1998 | US5756959 Coolant tube for use in a liquid-cooled electrode disposed in a plasma arc torch |
| 05/26/1998 | US5756957 Tunable molten oxide pool assisted plasma-melter vitrification systems |
| 05/22/1998 | WO1998021789A1 Device for creating a three-dimensional self-maintained discharge |
| 05/20/1998 | EP0842307A2 System for the plasma treatment of large area substrates |
| 05/20/1998 | CN1182456A Fast quench reactor and method |
| 05/19/1998 | US5754581 Differential impedance discharge for plasma generation |
| 05/19/1998 | US5753886 Plasma treatment apparatus and method |
| 05/19/1998 | US5753475 Methods and compositions for regulated transcription and expression of heterologous genes |
| 05/19/1998 | US5753045 Vacuum treatment system for homogeneous workpiece processing |
| 05/19/1998 | US5753044 RF plasma reactor with hybrid conductor and multi-radius dome ceiling |
| 05/14/1998 | WO1998020499A1 Spherical inertial electrostatic confinement device as a tunable x-ray source |
| 05/14/1998 | WO1998019965A1 Microwave plasma chemical synthesis of ultrafine powders |
| 05/14/1998 | WO1998019817A1 Plasma jet source using an inertial electrostatic confinement discharge plasma |
| 05/14/1998 | DE19643925A1 Gas-discharge generator with fast voltage rise and high power flow |
| 05/14/1998 | CA2268465A1 Spherical inertial electrostatic confinement device as a tunable x-ray source |
| 05/14/1998 | CA2268456A1 Plasma jet source using an inertial electrostatic confinement discharge plasma |
| 05/13/1998 | EP0841838A1 Plasma treatment apparatus and plasma treatment method |
| 05/13/1998 | EP0841837A2 Method to measure the temperature in the combustion chamber of an engine |
| 05/13/1998 | EP0841683A2 Active shield for generating a plasma for sputtering |
| 05/13/1998 | EP0840993A1 Electrodynamic confinement |
| 05/13/1998 | EP0840941A2 Method of and apparatus for controlling reactive impedances of a matching network connected between an rf source and an rf plasma processor |
| 05/12/1998 | US5751113 Closed electron drift hall effect plasma accelerator with all magnetic sources located to the rear of the anode |
| 05/12/1998 | US5750987 Ion beam processing apparatus |
| 05/12/1998 | US5750385 Methods and compositions for regulated transcription and expression of heterologous genes |
| 05/12/1998 | US5750208 Method for plasma downstream processing |
| 05/12/1998 | US5750207 System and method for depositing coating of modulated composition |
| 05/12/1998 | US5749937 Fast quench reactor and method |
| 05/12/1998 | CA2002616C Method and apparatus for decomposing halogenated organic compound |
| 05/07/1998 | WO1998019504A1 Apparatus and method for improved assembly concentricity in a plasma arc torch |
| 05/07/1998 | WO1998018852A1 Acrylate coating methods |
| 05/07/1998 | WO1998018591A1 Plasma torch |
| 05/07/1998 | DE19748278A1 Apparatus for a plasma CVD process |
| 05/07/1998 | DE19641439A1 Electron cyclotron resonance ion source |
| 05/07/1998 | CA2269271A1 Acrylate coating methods |
| 05/06/1998 | EP0840365A2 High pressure plasma oxide etch process |
| 05/06/1998 | EP0840350A2 Plasma apparatus and process with filtering of plasma sheath-generated harmonics |
| 05/06/1998 | EP0840349A2 RF tuning method for an RF plasma reactor using frequency servoing power, voltage, current or dI/dt control |
| 05/06/1998 | EP0839930A1 Apparatus for vacuum line cleaning in substrate processing equipment |
| 05/06/1998 | EP0839929A1 Method and apparatus for minimizing deposition in an exhaust line |
| 05/06/1998 | EP0674722B1 Protective film for articles and method |
| 05/06/1998 | CN1181172A Plasma processing device and method |
| 05/05/1998 | US5748297 Endpoint detecting apparatus in a plasma etching system |
| 05/05/1998 | US5747935 Method and apparatus for stabilizing switch-mode powered RF plasma processing |
| 05/05/1998 | US5747767 Extended water-injection nozzle assembly with improved centering |
| 05/05/1998 | US5747117 Method of applying a film to a substrate |
| 05/05/1998 | US5747116 Method of forming an electrical contact to a silicon substrate |
| 05/05/1998 | US5746875 Gas injection slit nozzle for a plasma process reactor |
| 04/29/1998 | EP0838843A2 Parallel-plate electrode plasma reactor having inductive antenna and adjustable radial distribution of plasma ion density |
| 04/29/1998 | EP0838841A2 Inductively coupled parallel-plate plasma reactor with a conical dome |
| 04/29/1998 | EP0838839A2 Plasma processing apparatus |
| 04/29/1998 | EP0722651B1 Device and method for forming a microwave plasma |
| 04/28/1998 | US5744049 Radio frequency, semiconductor etching |
| 04/28/1998 | US5743961 Thermal spray coating apparatus |
| 04/23/1998 | DE19746425A1 Insulator etching method for semiconductor manufacture |
| 04/22/1998 | EP0837622A1 Plasma generator |
| 04/22/1998 | EP0837621A1 Plasma torch with new sealing features |
| 04/22/1998 | EP0837489A2 Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna |
| 04/22/1998 | EP0837305A1 Method and assembly for controlling the coating process in thermal coating apparatus |
| 04/22/1998 | EP0836745A1 An improved method and apparatus for detecting optimal endpoints in plasma etch processes |
| 04/22/1998 | EP0656170B1 Device for measuring changes in the thrust of a plasma engine with closed electron drift |
| 04/22/1998 | CN1179694A Method and apparatus for heating metal parts by magneto-controlling arc plasma |
| 04/21/1998 | CA2218604A1 Apparatus and method for monitoring the coating process of a thermal coating apparatus |
| 04/16/1998 | WO1998016091A1 Integral spring consumables for plasma arc torch using contact starting system |
| 04/16/1998 | WO1998016090A1 Plasma arc torch and method using contact starting system |
| 04/15/1998 | EP0835518A1 Low inductance large area coil for an inductively coupled plasma source |
| 04/15/1998 | CN1179172A Tunable, self-powered integrated arc plasma-melter vitrification system for waste treatment and resource recovery |
| 04/14/1998 | US5738756 Sampling signals produced by photosensitive equipment, digitally filtering and cross-correlating data, normalizing data |
| 04/09/1998 | WO1998014980A1 Particle controlling method and plasma processing chamber |
| 04/09/1998 | WO1998014636A1 Apparatus for reducing polymer deposition on substrate support |
| 04/09/1998 | WO1998014634A1 Improved plasma jet system |
| 04/08/1998 | CN2278330Y 陶瓷电容型等离子体发生片 Ceramic chip capacitor-type plasma generator |
| 04/07/1998 | US5736818 Resonant radiofrequency wave plasma generating apparatus with improved stage |
| 04/07/1998 | US5736708 Plasma torch head with nozzle providing an improved cut and plasma torch including the same |
| 04/07/1998 | US5735993 Plasma processing apparatus for dry etching of semiconductor wafers |
| 04/02/1998 | WO1998014036A1 Fluorine assisted stripping and residue removal in sapphire downstream plasma asher |
| 04/02/1998 | WO1998013856A1 Plasma processing apparatus |
| 04/01/1998 | EP0833367A2 Inductively coupled plasma reactor with symmetrical parallel multiple coils having a common RF terminal |
| 04/01/1998 | EP0832310A1 Electrically tunable coatings |
| 03/31/1998 | US5734143 Microwave plasma torch having discretely positioned gas injection holes and method for generating plasma |
| 03/31/1998 | US5733821 Downflow plasma treatment |
| 03/31/1998 | US5733662 Method for depositing a coating onto a substrate by means of thermal spraying and an apparatus for carrying out said method |
| 03/31/1998 | US5733511 Power distribution for multiple electrode plasma systems using quarter wavelength transmission lines |
| 03/31/1998 | US5733405 Plasma processing apparatus |
| 03/25/1998 | EP0831679A1 Power supply for multielectrode discharge |
| 03/25/1998 | EP0831516A2 Device and method for processing a plasma to alter the surface of a substrate using neutrals |
| 03/25/1998 | EP0830708A1 Plasma processing system with reduced particle contamination |
| 03/25/1998 | EP0830707A1 Plasma sputter etching system with reduced particle contamination |
| 03/25/1998 | CN1177271A Method for increasing ion source beam flow strength |
| 03/24/1998 | US5731872 Device for emission spectrum analysis |
| 03/24/1998 | US5731564 Method of operating a centrifugal plasma arc furnace |
| 03/19/1998 | WO1998011594A1 Thin film electrostatic shield for inductive plasma processing |
| 03/19/1998 | WO1998011557A1 Process for preparing metallic beryllium pebbles |
| 03/19/1998 | WO1998011556A1 Metallic beryllium pebbles for nuclear fusion reactors |
| 03/19/1998 | WO1998011388A1 Diagnostic methods and apparatus for laser ignition system |
| 03/18/1998 | EP0829185A1 Slow-wave high-power discharge cavity operating in the radiofrequency range |
| 03/18/1998 | EP0829184A1 Microwave-driven plasma spraying apparatus and method for spraying |