H05H 1 - Generating plasma; Handling plasma

Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
12/1997
12/30/1997	US5702530 Distributed microwave plasma reactor for semiconductor processing
12/29/1997	EP0814495A2 Adjusting DC bias voltage in plasma chamber
12/29/1997	EP0792462A4 Probe card assembly and kit, and methods of using same
12/29/1997	EP0667921A4 Microwave apparatus for depositing thin films.
12/29/1997	EP0621815B1 Nozzle and method of operation for a plasma arc torch
12/23/1997	US5701057 Method of obtaining electric discharge and device for effecting same
12/23/1997	US5700989 Combined laser and plasma arc welding torch
12/17/1997	EP0813227A2 RF plasma processors
12/17/1997	EP0595968B1 Plasma disintegration for waste material
12/16/1997	US5698168 Cylindrical bulb constructed of pyrolytic boron nitride, baffle, connector of refractory metal, non-boron nitride tube, radio frequency source
12/16/1997	US5698164 Glassy ceramic coating on electric rod conductors made by applying surface treatment agent and thermally decomposing in air
12/10/1997	EP0811172A1 Electron beam stop analyzer
12/10/1997	EP0799557A4 High frequency induction plasma method and apparatus
12/10/1997	CN2270341Y Multipurpose plasma torch for film making equipment
12/10/1997	CA2207154A1 Inductively coupled source for deriving substantially uniform plasma flux
12/09/1997	US5696429 Method for charge neutralization of surface in space with space-charge neutral plasma
12/09/1997	US5695664 Plasma torch with a substantially axi-symmetrical general structure
12/09/1997	US5695662 Dual gas flow to keep splattered molten metal away from torch
12/09/1997	US5695597 Plasma reaction apparatus
12/04/1997	WO1997046057A1 Plasma treatment apparatus and plasma treatment method
12/04/1997	WO1997046056A1 Apparatus for generating and deflecting a plasma jet
12/04/1997	WO1997037517A3 A hall effect plasma accelerator
12/03/1997	EP0810816A1 Balanced source for plasma system
12/03/1997	EP0810624A1 Method and apparatus for ion formation in an ion implanter
12/03/1997	EP0810053A1 Plasma torch
12/03/1997	EP0810052A1 Plasma cutting method
12/03/1997	EP0809719A1 Apparatus and method for a reliable return current path for sputtering processes
12/03/1997	EP0809659A1 Plasma deposited film networks
12/03/1997	EP0507885B1 A low frequency inductive rf plasma reactor
12/03/1997	EP0503058B1 Device for radio frequency powered glow discharge spectrometry with external sample mount geometry
12/03/1997	CN2269694Y Plasma torch for inner hole quenching or fused hardening
12/02/1997	US5693241 Atmospheric pressure method and apparatus for removal of organic matter with atomic and ionic oxygen
12/02/1997	US5693238 Method for improving the rate of a plasma enhanced vacuum treatment
12/02/1997	US5693196 Providing glow discharge within lumen to modify and improve slip characteristics of inner surface
11/1997
11/30/1997	CA2207773A1 Method and apparatus for ion formation in an ion implanter
11/27/1997	WO1997044812A1 Method of and apparatus for controlling reactive impedances of a matching network connected between an rf source and an rf plasma processor
11/27/1997	WO1997044141A1 Method and apparatus for dual-frequency plasma-enhanced cvd
11/26/1997	EP0809274A1 Apparatus and method for manufacturing an electronic device
11/26/1997	EP0808918A2 Plasma processing apparatus and processing method
11/25/1997	US5691058 Sheet material for electrical insulation, prepreg and electrically insulated coil using the same
11/25/1997	US5691009 Method of reducing carbon incorporation into films produced by chemical vapor deposition involving organic precursor compounds
11/25/1997	US5690745 Apparatus for plasma treatment of the inside surface of a fuel tank
11/25/1997	US5690050 Plasma treating apparatus and plasma treating method
11/25/1997	US5689951 Method and apparatus for pressure pulse arcjet starting
11/25/1997	CA2110650C Plasma spray apparatus
11/20/1997	DE19654866A1 Chamber for high voltage discharge through gas for production of ozone
11/19/1997	EP0807964A1 Device for treating planar elements with a plasma jet
11/19/1997	EP0807953A1 Inductively coupled RF plasma reactor having an overhead solenoidal antenna
11/19/1997	EP0807951A2 Magnetic neutral line discharged plasma type surface cleaning apparatus
11/19/1997	EP0807315A1 Multi-phase dc plasma processing system
11/19/1997	EP0807154A2 Tunable, self-powered integrated arc plasma-melter vitrification system for waste treatment and resource recovery
11/19/1997	CN1165066A Method and apparatus for contact start plasma cutting process
11/18/1997	US5689215 Method of and apparatus for controlling reactive impedances of a matching network connected between an RF source and an RF plasma processor
11/18/1997	US5688417 DC arc plasma torch, for obtaining a chemical substance by decomposition of a plasma-generating gas
11/18/1997	US5688416 Stabilized plasma arc injector
11/18/1997	US5688382 Vacuum deposition with microwaves for targets, magnets on targets, ionizing material and sputtering
11/13/1997	WO1997042648A1 Recessed coil for generating a plasma
11/13/1997	WO1997042647A1 Pulsed direct current power supply configurations for generating plasmas
11/12/1997	EP0806126A1 Methods and apparatus for generating plasma
11/11/1997	US5686796 Ion implantation helicon plasma source with magnetic dipoles
11/11/1997	US5685997 Plasma oscillator water heater/steam boiler
11/11/1997	US5685949 Plasma treatment apparatus and method
11/11/1997	US5685941 Inductively coupled plasma reactor with top electrode for enhancing plasma ignition
11/11/1997	US5685914 Focus ring for semiconductor wafer processing in a plasma reactor
11/06/1997	WO1997041587A1 Sputtering installation with two longitudinally placed magnetrons
11/06/1997	DE19710464A1 Plasma torch nozzle protection arrangement
11/06/1997	DE19617057A1 Sputteranlage mit zwei längserstreckten Magnetrons Sputtering system with two elongated magnetron
11/05/1997	EP0755461B1 Process and device for ion-supported vacuum coating
11/05/1997	EP0619694B1 Method of monitoring atmospheric pressure glow discharge plasma
11/05/1997	CN1164125A Plasma processing method and apparatus
11/04/1997	US5684581 Torch for inductively coupled plasma spectrometry
11/04/1997	US5683599 Mounting scheme for a plasma arc torch
11/04/1997	US5683548 Inductively coupled plasma reactor and process
11/04/1997	US5683539 Inductively coupled RF plasma reactor with floating coil antenna for reduced capacitive coupling
11/04/1997	US5683537 Plasma processing apparatus
10/1997
10/30/1997	WO1997040650A1 Method and apparatus for generating x-ray or euv radiation
10/30/1997	WO1997033458A3 Device for plasma cutting of metals
10/29/1997	CN1163581A Pulsed ion beam assisted deposition
10/28/1997	US5681489 Plasma arc torch including means for disabling power source
10/28/1997	US5681434 Plasma processor wuth multiple containment vessels
10/28/1997	US5681393 Plasma processing apparatus
10/23/1997	WO1997039607A1 Plasma treatment device
10/23/1997	WO1997039472A1 Use of a cleaning process, a cleaning process, a connecting process and work piece pair
10/23/1997	DE19706136A1 Nuclear fusion reactor
10/22/1997	EP0802704A1 Plasma torch
10/22/1997	EP0801882A1 Alignment device and method for a plasma arc torch system
10/22/1997	EP0480034B1 Plasma torch
10/21/1997	US5680014 Method and apparatus for generating induced plasma
10/21/1997	US5680013 Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces
10/21/1997	US5679167 Plasma gun apparatus for forming dense, uniform coatings on large substrates
10/15/1997	EP0801413A1 Inductively coupled plasma reactor with faraday-sputter shield
10/14/1997	US5677597 Electron flow accelerating method and apparatus which can generate a high-power beam
10/14/1997	US5676864 Metallic holder having emissive insert mounted in cavity with surrounding sleeve and aluminum face plate to protect against arc eroding away sleeve
10/14/1997	US5676863 Induction plasma torch
10/09/1997	WO1997037519A1 Plasma accelerator
10/09/1997	WO1997037518A1 Methods and apparatuses for controlling phase difference in plasma processing systems
10/09/1997	WO1997037517A2 A hall effect plasma accelerator
10/09/1997	WO1997037127A1 A hall effect plasma accelerator
10/09/1997	WO1997037126A1 A hall effect plasma thruster
10/09/1997	DE19610253A1 Sputtering apparatus for coating glass, packaging material, tools etc.

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