| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 12/30/2004 | US20040262270 Apparatus for proper alignment of components in a plasma arc torch |
| 12/30/2004 | US20040262268 Plasma burner with microwave stimulation |
| 12/30/2004 | US20040262146 Controlling the power applied to the plasma to remove gas or vapor species from an semiconductor article; comprising a current monitor, a voltage monitor, a power control module and a plasma generator |
| 12/30/2004 | US20040262145 Method for producing fullerene-containing carbon and device for carrying out said method |
| 12/30/2004 | US20040261720 High-density plasma processing apparatus |
| 12/30/2004 | US20040261718 Plasma source coil for generating plasma and plasma chamber using the same |
| 12/30/2004 | US20040261717 Matching device and plasma processing apparatus |
| 12/30/2004 | DE10326424A1 Thermodynamic energy conversion facility employs microprocessor for the targeted influence of heat transmission |
| 12/29/2004 | WO2004114729A1 Plasma generating electrode, plasma generation device, and exhaust gas purifying apparatus |
| 12/29/2004 | WO2004114728A1 Plasma generating electrode, plasma generation device, and exhaust gas purifying apparatus |
| 12/29/2004 | WO2004112950A2 Plasma reactor for the production of hydrogen-rich gas |
| 12/29/2004 | WO2004082008A8 Cvd apparatus and method for cleaning cvd apparatus |
| 12/29/2004 | WO2004030426A3 Improved deposition shield in a plasma processing system,and methods of manufacture of such shield |
| 12/29/2004 | EP1492395A2 Laser-produced plasma EUV light source with isolated plasma |
| 12/29/2004 | EP1492394A2 Laser-produced plasma EUV light source with pre-pulse enhancement |
| 12/29/2004 | EP1492154A2 Coil for plasma generating source |
| 12/29/2004 | CN1559077A Procedure and device for the production of a plasma |
| 12/29/2004 | CN1558708A Pinhole type multi-plate plasma generator for air cleaning |
| 12/29/2004 | CA2529794A1 Plasma production device and method and rf driver circuit with adjustable duty cycle |
| 12/28/2004 | US6836073 Simultaneous discharge apparatus |
| 12/28/2004 | US6835944 Low vapor pressure, low debris solid target for EUV production |
| 12/28/2004 | US6835919 Uniform radial distribution of radicals emanating from a plasma source is improved; for chemical vapor deposition |
| 12/28/2004 | US6835358 Non-thermal plasma reactor for lower power consumption |
| 12/28/2004 | US6835279 Plasma generation apparatus |
| 12/28/2004 | US6835275 Reducing deposition of process residues on a surface in a chamber |
| 12/28/2004 | US6834613 Plasma-resistant member and plasma treatment apparatus using the same |
| 12/28/2004 | US6834492 Air breathing electrically powered hall effect thruster |
| 12/23/2004 | WO2004111293A1 Nitriding method and device |
| 12/23/2004 | WO2002091809A3 Method and device for generating an activated gas curtain for surface treatment |
| 12/23/2004 | US20040256365 Modular icp torch assembly |
| 12/23/2004 | US20040256056 Microwave plasma generator |
| 12/23/2004 | US20040255867 System for generating a local electron-cyclotron microwave low-pressure plasma at a predetermined location within a processing chamber |
| 12/23/2004 | US20040255864 ICP antenna and plasma generating apparatus using the same |
| 12/23/2004 | DE102004027092A1 Bildgebendes CT-System mit einer Röntgenstrahlquelle mit mehreren Scheitelwerten CT imaging system with an X-ray source with multiple peaks |
| 12/22/2004 | EP1488669A1 Atmospheric plasma surface treatment method and device for same |
| 12/22/2004 | EP1488444A1 Vacuum plasma generator |
| 12/22/2004 | EP1488443A1 Device for confinement of a plasma within a volume |
| 12/22/2004 | EP1487604A1 Contact start plasma arc torch and method of initiating a pilot arc |
| 12/22/2004 | EP1323339B1 Plasma torch, especially a plasma positive pole torch |
| 12/22/2004 | CN2664827Y Novel structure electrode for plasma cutting machine |
| 12/22/2004 | CN1557017A 等离子体处理装置 The plasma processing apparatus |
| 12/22/2004 | CN1181709C Radio frequency plasma generator |
| 12/21/2004 | US6833050 Apparatus for manufacturing semiconductor device |
| 12/16/2004 | WO2004109785A1 Impurity doping method, impurity doping apparatus and semiconductor device produced by using same |
| 12/16/2004 | WO2004109773A2 Method and system for heating a substrate using a plasma |
| 12/16/2004 | WO2004109772A2 Method and system for etching a high-k dielectric material |
| 12/16/2004 | WO2004108984A1 Method for forming thin film and article with thin film |
| 12/16/2004 | WO2004108980A1 Thin film forming device and thin film forming method |
| 12/16/2004 | WO2004108979A1 Thin film forming device and thin film forming method |
| 12/16/2004 | WO2004108589A2 Nanoparticle coated nanostructured surfaces for detection, catalysis and device applications |
| 12/16/2004 | WO2004070744A3 Reaction enhancing gas feed for injecting gas into a plasma chamber |
| 12/16/2004 | US20040253523 Embedded bi-layer structure for attenuated phase shifting mask |
| 12/16/2004 | US20040251424 Ion source apparatus and electronic energy optimized method therefor |
| 12/16/2004 | US20040251240 Method and apparatus for treating a surface using a plasma discharge |
| 12/15/2004 | EP1485515A2 Evaluation of chamber components having textured coatings chamber components |
| 12/15/2004 | CN1555568A Method and apparatus for producing uniform process rates |
| 12/14/2004 | US6831963 EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions |
| 12/14/2004 | US6831421 Shunt-induced high frequency excitation of dielectric barrier discharges |
| 12/14/2004 | US6831021 Plasma method and apparatus for processing a substrate |
| 12/14/2004 | US6830653 Generating plasma in vacuum; controlling distribution |
| 12/09/2004 | WO2004107824A2 Koshkin ion engine |
| 12/09/2004 | WO2004107394A2 Plasma processing apparatus, method for producing reaction vessel for plasma generation, and plasma processing method |
| 12/09/2004 | WO2004105810A1 Treatment of biological material containing living cells using a plasma generated by a gas discharge |
| 12/09/2004 | WO2004036612A3 A dense plasma focus radiation source |
| 12/09/2004 | WO2004027816A3 A method and apparatus for the compensation of edge ring wear in a plasma processing chamber |
| 12/09/2004 | US20040248391 Lifting and supporting device |
| 12/09/2004 | US20040247886 Thin film forming method and thin film forming substance |
| 12/09/2004 | US20040247082 Ct imaging system with multiple peak x-ray source |
| 12/09/2004 | US20040245509 Method for processing polymeric positive temperature coefficient conductive materials |
| 12/09/2004 | US20040245085 Process and synthesizer for molecular engineering and synthesis of materials |
| 12/09/2004 | US20040244691 Slotted electrostatic shield modification for improved etch and CVD process uniformity |
| 12/09/2004 | US20040244690 Surface treatment system and method thereof |
| 12/09/2004 | US20040244688 Plasma processing apparatus |
| 12/09/2004 | US20040244685 Pretreated gas distribution plate |
| 12/08/2004 | EP1484788A1 High-frequency power supply structure and plasma cvd device using the same |
| 12/08/2004 | EP1484486A2 Fuel reformer with cap and associated method |
| 12/08/2004 | EP1483773A2 Device for activating gases in a vacuum |
| 12/08/2004 | EP1016489B1 Arc-plasma method for welding metals |
| 12/08/2004 | CN2662593Y Discharge device for cutting torch of plasma cutting machine |
| 12/08/2004 | CN2662592Y Cutting torch of plasma internal turbulence type cutting machine |
| 12/08/2004 | CN1554114A Plasma treatment device and plasma treatment method |
| 12/08/2004 | CN1554106A Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processing |
| 12/07/2004 | US6829261 Method for the stabilization of the radiation output of a gas discharge-coupled radiation source in pulsed operation |
| 12/07/2004 | US6828249 System and method for enhanced monitoring of an etch process |
| 12/07/2004 | US6827972 Heterogeneous structure from amorphous carbon material with a polymer tendency applied as a coating on a substrate of polymer material |
| 12/07/2004 | US6827823 Nano-carbon and composite material or mixed material containing nano-carbon and metal fine particle and methods for producing and patterning the same |
| 12/02/2004 | WO2004105450A1 Cascade source and a method for controlling the cascade source |
| 12/02/2004 | WO2004105078A2 A high density plasma reactor |
| 12/02/2004 | WO2004103693A2 Floor tile coating method and system |
| 12/02/2004 | WO2004076052A3 Method and apparatus for non-thermal pasteurization of living-mammal-instillable liquids |
| 12/02/2004 | US20040243269 Performance evaluation method for plasma processing apparatus |
| 12/02/2004 | US20040240613 Device and method for generating an x-ray point source by geometric confinement |
| 12/02/2004 | US20040238456 Method and apparatus for underwater decomposition of organic content of electrically conductive aqueous waste solutions |
| 12/02/2004 | US20040238349 Having portion of upper electrode positioned in interior region |
| 12/02/2004 | US20040238345 Method of producing powder with composite grains and the device for carrying out said method |
| 12/02/2004 | US20040238126 Plasma processing apparatus with reduced parasitic capacity and loss in RF power |
| 12/02/2004 | US20040238125 Plasma processing device |
| 12/02/2004 | US20040237948 Fuel vaporization systems for vaporizing liquid fuel |
| 12/02/2004 | US20040237897 High-Frequency electrostatically shielded toroidal plasma and radical source |
| 12/02/2004 | DE10322367A1 High frequency plasma storage battery for direct energy conversion has cavity resonator with radiation and thermal shield and high frequency magnetic field |