Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
02/2005
02/23/2005EP1507892A2 High-power microwave window
02/23/2005EP1507890A1 Method and device for plasma treating workpieces
02/23/2005EP1507889A1 Method and device for plasma treating workpieces
02/23/2005CN1585853A Process and synthesizer for molecular engineering and synthesis of materials
02/23/2005CN1585588A Magnetro-plasma devices
02/23/2005CN1585093A Plasma processing system and cleaning method for the same
02/23/2005CN1584301A 排气净化装置 Exhaust gas purification apparatus
02/23/2005CN1583548A Method for preparing nanometer aluminium nitride ceramic powders
02/23/2005CN1190821C Ion beam radiator and method for triggering plasma by using such radiator
02/22/2005US6858838 Neutral particle beam processing apparatus
02/22/2005US6858446 Plasma monitoring method and semiconductor production apparatus
02/22/2005US6858112 Process depending on plasma discharges sustained by inductive coupling
02/22/2005US6857387 Multiple frequency plasma chamber with grounding capacitor at cathode
02/17/2005WO2005014877A1 New metal strip product
02/17/2005WO2005014876A1 New metal strip product
02/17/2005US20050035731 Plasma accelerator with closed electron drift
02/17/2005US20050035425 Semiconductor device, method for forming silicon oxide film, and apparatus for forming silicon oxide film
02/17/2005US20050034815 Plasma processor
02/17/2005US20050034811 Sensor array for measuring plasma characteristics in plasma processing enviroments
02/17/2005US20050034670 Multiple elliptical ball plasma apparatus
02/17/2005CA2534291A1 New metal strip product
02/16/2005EP1507281A1 Arrangement, method and electrode for generating a plasma
02/16/2005EP1506700A1 Plasma torch for microwave induced plasmas
02/16/2005EP1506699A2 Method and device for generating an activated gas curtain for surface treatment
02/16/2005EP1506564A2 Method and apparatus for vhf plasma processing
02/16/2005EP1506563A1 Capacitively coupled plasma reactor with magnetic plasma control
02/16/2005EP1506562A1 Stabilization of electronegative plasmas with feedback control of rf generator systems
02/16/2005EP1506325A2 System and apparatus for control of sputter deposition process
02/16/2005EP1506071A1 Plasma arc torch electrode
02/16/2005EP1409129A4 Magnegas, a novel, highly efficient, nonpollutant, oxygen rich and cost competitive combustible gas and associated method
02/16/2005CN2678760Y Prodn. appts. for synthetizing multi-kind of nano powders by utilizing plasma
02/16/2005CN1582485A Plasma processor coil
02/16/2005CN1582396A High frequency detection method and high frequency detection circuit
02/16/2005CN1581445A Plasma etching method and plasma treatment apparatus
02/16/2005CN1190111C Processing system with dual ion sources
02/16/2005CN1189595C Reduced impedance chamber
02/15/2005US6855943 Droplet target delivery method for high pulse-rate laser-plasma extreme ultraviolet light source
02/15/2005US6855906 Chamber with toroidal topology, and is heated inductively, a coil carries an applied alternating current which generates a magnetic flux which induces current to flow through the plasma in closed paths
02/15/2005US6855379 Method and device for surface-treating substrates
02/15/2005US6855377 Deposited film forming apparatus and deposited film forming method
02/15/2005US6855237 Pulsed carbon plasma apparatus
02/10/2005WO2005011354A2 Ring plasma jet method and apparatus for making an optical fiber preform
02/10/2005WO2004062050A3 Method and apparatus for generating a membrane target for laser produced plasma
02/10/2005US20050029954 Plasma processing apparatus and method
02/10/2005US20050028935 Device for fixing a gas showerhead or target plate to an electrode in plasma processing systems
02/10/2005CA2534525A1 Ring plasma jet method and apparatus for making an optical fiber preform
02/09/2005EP1504813A1 Submerged plasma generator, method of generating plasma in liquid and method of decomposing toxic substance with plasma in liquid
02/09/2005EP1504464A2 Plasma-assisted nitrogen surface-treatment
02/09/2005EP1503963A1 Vitrification furnace and method with dual heating means
02/09/2005EP1503880A1 Plasma arc torch tip
02/09/2005EP1503879A1 Plasma arc torch consumables cartridge
02/09/2005CN1579000A Non-thermal plasma slit discharge apparatus
02/09/2005CN1578680A In situ sterilization and decontamination system using a non-thermal plasma discharge
02/09/2005CN1578583A Plasma source coil for generating plasma and plasma chamber using the same
02/09/2005CN1578545A Arc furnace rotary plasma operation
02/09/2005CN1577730A Apparatus using hybrid coupled plasma
02/09/2005CN1577703A Electron beam processing apparatus
02/09/2005CN1577097A Laser produced plasma radiation system with contamination barrier
02/09/2005CN1576392A Surface wave plasma treatment apparatus using multi-slot antenna
02/09/2005CN1188541C Electric arc evaporimeter, method for driving electric arc evaporimeter and ion electroplating equipment
02/08/2005US6853141 Capacitively coupled plasma reactor with magnetic plasma control
02/08/2005US6852944 Retractable electrode coolant tube
02/08/2005US6852943 Strain relief mechanism for a plasma arc torch
02/08/2005US6852942 Controlled fusion in a field reversed configuration and direct energy conversion
02/08/2005US6852277 A sterilization system that applies low frequency power to a plasma within a vacuum chamber to remove gas or vapor from the article
02/03/2005WO2005010938A2 Impedance matching network with termination of secondary rf frequencies
02/03/2005WO2005010232A1 Method of manufacturing vacuum plasma treated workpieces and system for vacuum plasma treating workpieces
02/03/2005US20050026001 Shielded ceramic thermal spray coating
02/03/2005US20050025282 Apparatus with a rotationally driven rotary body
02/03/2005US20050022935 Apparatus for improved low pressure inductively coupled high density plasma reactor
02/03/2005US20050022934 Plasma etching apparatus
02/03/2005US20050022932 Disturbance-free, recipe-controlled plasma processing system and method
02/03/2005US20050022740 Plasma processing system and cleaning method for the same
02/03/2005US20050022561 Ring plasma jet method and apparatus for making an optical fiber preform
02/03/2005DE10332569B3 Verfahren und Anordnung zur Versorgung eines Plasmabrenners mit einem Plasmagasgemisch aus mindestens zwei verschiedenen Gasen oder Mischgasen oder mindestens einem Gas und mindestens einem Mischgas A method and arrangement for supplying a plasma torch with a plasma gas mixture of at least two different gases or gas mixtures or at least one gas and at least a mixed gas
02/03/2005DE10324926B3 Vorrichtung zur Behandlung eines lebende Zellen enthaltenden biologischen Materials mit einem durch eine Gasentladung erzeugten Plasma An apparatus for treating a biological material containing living cells with a plasma generated by a gas discharge
02/02/2005EP1502694A2 Nozzle for cutting or welding
02/02/2005EP1502490A1 Plasma-assisted joining
02/02/2005EP1502489A1 Plasma generation and processing with multiple radiation sources
02/02/2005EP1502488A1 Plasma-assisted decrystallization
02/02/2005EP1502487A1 Plasma-assisted coating
02/02/2005EP1502486A1 Plasma catalyst
02/02/2005EP1502485A1 Method of generating extreme ultraviolet radiation
02/02/2005EP1502480A1 Plasma-assisted heat treatment
02/02/2005EP1502291A1 Exposure apparatus and device fabrication method using the same
02/02/2005EP1502287A2 Plasma-assisted processing in a manufacturing line
02/02/2005EP1502274A1 Plasma-assisted gas production
02/02/2005EP1502012A1 Plasma-assisted engine exhaust treatment
02/02/2005EP1501959A1 Plasma-assisted enhanced coating
02/02/2005EP1501911A1 Plasma-assisted doping
02/02/2005EP1501649A1 Plasma-assisted sintering
02/02/2005EP1501632A1 Plasma-assisted carburizing
02/02/2005EP1501631A1 Plasma-assisted formation of carbon structures
02/02/2005EP1218763A4 Electron density measurement and control system using plasma-induced changes in the frequency of a microwave oscillator
02/02/2005EP1033068B1 Plasma processing apparatus having rotating magnets
02/02/2005CN1575405A Method and apparatus for wall film monitoring
02/02/2005CN1574211A Method for replacing electrode assembly of plasma reaction chamber
02/02/2005CN1574199A High-density plasma processing apparatus
02/02/2005CN1573538A Attenuated phase shifting mask having embedded bi-layer structure for and method for making same
02/01/2005US6850012 Plasma processing apparatus