Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2014
12/09/2014US8906738 Oxide semiconductor thin film transistor with an aluminum oxide protective film made using a continuous deposition process of aluminum oxide laminated with an aluminum film
12/09/2014US8906737 Method for manufacturing semiconductor device
12/09/2014US8906731 Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
12/09/2014US8906729 Method of manufacturing a device with a cavity
12/09/2014US8906728 Method for manufacturing a photodetector having a bandwidth tuned honeycomb cell photodiode structure
12/09/2014US8906727 Heteroepitaxial growth using ion implantation
12/09/2014US8906725 Crystallization processing for semiconductor applications
12/09/2014US8906724 Color stable red-emitting phosphors
12/09/2014US8906723 Donor substrate, method for fabricating the donor substrate, and method for forming transfer pattern using the donor substrate
12/09/2014US8906720 Device having an optical element and an ambient light sensor integrated on a single substrate and a process for making same
12/09/2014US8906719 Thin film transistor and display device using the same and method for manufacturing the same
12/09/2014US8906718 Method for forming vapor deposition film, and method for producing display device
12/09/2014US8906715 Light emitting diode package having fluorescent film directly coated on light emitting diode die and method for manufacturing the same
12/09/2014US8906714 Method of manufacturing light emitting device
12/09/2014US8906713 LED lamp using blue and cyan LEDs and a phosphor
12/09/2014US8906712 Light emitting diode and method of fabrication thereof
12/09/2014US8906711 Method for preparing titania pastes for use in dye-sensitized solar cells
12/09/2014US8906710 Monitor test key of epi profile
12/09/2014US8906709 Combinatorially variable etching of stacks including two dissimilar materials for etch pit density inspection
12/09/2014US8906708 Method for checking ion implantation condition and method for manufacturing semiconductor wafer
12/09/2014US8906707 Device having a multilayered structure and method of fabricating thereof
12/09/2014US8906706 Method of fabricating a mask structure for patterning a workpiece by ions
12/09/2014US8906705 Semiconductor device with pads of enhanced moisture blocking ability
12/09/2014US8906627 Apparatuses and methods for manipulating droplets
12/09/2014US8906598 Pattern forming method, method for manufacturing semiconductor device, and material for forming coating layer of resist pattern
12/09/2014US8906584 Photomask and method for forming pattern of semiconductor device using the same
12/09/2014US8906487 Base material with single-crystal silicon carbide film, method of producing single-crystal silicon carbide film, and method of producing base material with single-crystal silicon carbide film
12/09/2014US8906459 Method of forming organic layer and method of manufacturing organic light emitting device having the same
12/09/2014US8906455 Low temperature deposition of silicon-containing films
12/09/2014US8906446 Apparatus and method for electroless deposition of materials on semiconductor substrates
12/09/2014US8906249 Plasma processing apparatus and plasma processing method
12/09/2014US8906248 Silicon on insulator etch
12/09/2014US8906247 Patterning process for oxide film
12/09/2014US8906246 Film deposition apparatus and film deposition method
12/09/2014US8906197 Plasma processing chamber having electrodes for cleaning chamber
12/09/2014US8906196 Plasma processing apparatus and method for controlling the same
12/09/2014US8906195 Tuning hardware for plasma ashing apparatus and methods of use thereof
12/09/2014US8906194 Ultra-high aspect ratio dielectric etch
12/09/2014US8906193 Gas supply unit, substrate processing apparatus and supply gas setting method
12/09/2014US8906175 Room temperature bonding apparatus
12/09/2014US8906165 Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus
12/09/2014US8906164 Methods for stabilizing contact surfaces of electrostatic chucks
12/09/2014US8906162 Metal organic chemical vapor deposition equipment
12/09/2014US8906161 Semiconductor producing device and semiconductor device producing method
12/09/2014US8906158 Method for producing compound semiconductor epitaxial substrate having PN junction
12/09/2014US8906153 Product of polysiloxane condensation
12/09/2014US8906123 CMP slurry/method for polishing ruthenium and other films
12/09/2014US8905772 Stretchable and foldable electronic devices
12/09/2014US8905700 Transfer and inspection devices of object to be inspected
12/09/2014US8905680 Ultrathin wafer transport systems
12/09/2014US8905296 Wireless integrated circuit device and method of manufacturing the same
12/09/2014US8905239 Magazine for loading a lead frame
12/09/2014US8905224 Clamping mechanism and carrying device and transferring apparatus with the same
12/09/2014US8905124 Temperature controlled loadlock chamber
12/09/2014US8905111 Device for releasing an interconnect layer that provides connection between a carrier and a wafer
12/09/2014US8905051 Liquid processing apparatus and liquid processing method
12/09/2014US8904957 Plasma processor and plasma processing method
12/09/2014US8904956 Plasma stamp, plasma treatment device, method for plasma treatment and method for producing a plasma stamp
12/09/2014US8904955 Substrate processing apparatus
12/09/2014US8904627 Method for sealing package
12/04/2014US20140358465 Yield analysis system and method using sensor data of fabrication equipment
12/04/2014US20140357093 Process for stabilizing a bonding interface, located within a structure which comprises an oxide layer and structure obtained
12/04/2014US20140357092 Chamber wall of a plasma processing apparatus including a flowing protective liquid layer
12/04/2014US20140357091 Semiconductor fabrication process
12/04/2014US20140357090 Cyclic aluminum nitride deposition in a batch reactor
12/04/2014US20140357089 Apparatus for advanced packaging applications
12/04/2014US20140357088 Precursor for Planar Deprocessing of Semiconductor Devices using a Focused Ion Beam
12/04/2014US20140357086 Methods of Forming a Substrate Opening
12/04/2014US20140357085 Etching method and non-transitory storage medium
12/04/2014US20140357084 Mitigation of asymmetrical profile in self aligned patterning etch
12/04/2014US20140357083 Directed block copolymer self-assembly patterns for advanced photolithography applications
12/04/2014US20140357082 High-Rate Chemical Vapor Etch of Silicon Substrates
12/04/2014US20140357081 Method of forming a conductive image on a non-conductive surface
12/04/2014US20140357080 Method for preferential shrink and bias control in contact shrink etch
12/04/2014US20140357079 Methods of forming conductive structures using a sacrificial material during a metal hard mask removal process
12/04/2014US20140357078 Methods of forming conductive structures using a sacrificial material during an etching process that is performed to remove a metal hard mask
12/04/2014US20140357077 Methods for fabricating semiconductor devices having through electrodes
12/04/2014US20140357076 Semiconductor device with air gaps and method for fabricating the same
12/04/2014US20140357074 Semiconductor apparatus and method of fabricating the same
12/04/2014US20140357073 Systems and methods for fabricating gate structures for semiconductor devices
12/04/2014US20140357072 Methods and structures for split gate memory
12/04/2014US20140357071 Method of manufacturing semiconductor device having doped layer
12/04/2014US20140357070 Method of improving the yield of a semiconductor device
12/04/2014US20140357069 Aluminum dopant compositions, delivery package and method of use
12/04/2014US20140357068 Plasma doping apparatus, plasma doping method, semiconductor device manufacturing method and semiconductor device
12/04/2014US20140357067 Method of manufacturing nitride substrate, and nitride substrate
12/04/2014US20140357066 Methods of crystallising thin films
12/04/2014US20140357065 Amorphous silicon thickness uniformity improved by process diluted with hydrogen and argon gas mixture
12/04/2014US20140357064 Tensile stressed doped amorphous silicon
12/04/2014US20140357063 Manufacturing methods of semiconductor substrates
12/04/2014US20140357062 Fabricating method of semiconductor device
12/04/2014US20140357060 Method for the formation of fin structures for finfet devices
12/04/2014US20140357059 Schottky rectifier
12/04/2014US20140357058 Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium
12/04/2014US20140357057 Structure for iii-v devices on silicon
12/04/2014US20140357056 Method of forming sigma-shaped trench
12/04/2014US20140357055 Method for processing a semiconductor workpiece
12/04/2014US20140357054 Methods for fabricating semiconductor devices
12/04/2014US20140357052 Substrate detergent composition
12/04/2014US20140357051 Method for forming radio frequency device
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