Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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12/30/2014 | US8920560 Method for manufacturing epitaxial wafer |
12/30/2014 | US8920107 Substrate support apparatus and vacuum processing apparatus |
12/30/2014 | US8920103 Multi-cell rotary end effector mechanism with slip ring |
12/30/2014 | US8920097 Wafer handling system for a loadlock |
12/30/2014 | US8920027 Assessing thermal mechanical characteristics of complex semiconductor devices by integrated heating systems |
12/30/2014 | US8919756 Substrate processing system, carrying device, and coating device |
12/30/2014 | US8919755 Hi-fix board clamping apparatus for use in test handler |
12/30/2014 | US8919563 Methods and apparatus for large diameter wafer handling |
12/30/2014 | US8919528 Nozzled device to align a substrate on a surface |
12/30/2014 | US8919412 Apparatus for thermal-slide debonding of temporary bonded semiconductor wafers |
12/30/2014 | US8919358 Substrate processing apparatus |
12/30/2014 | US8919279 Processing system having magnet keeper |
12/30/2014 | US8919277 Coating applicator, coating application method and electronic device |
12/30/2014 | US8918989 Device for aligning and pre-fixing a wafer |
12/30/2014 | US8918988 Methods for controlling wafer curvature |
12/30/2014 | US8918971 Method of manufacturing packages |
12/25/2014 | US20140378804 Insulation of micro structures |
12/25/2014 | US20140378032 Polishing pad |
12/25/2014 | US20140378031 Polishing pad |
12/25/2014 | US20140377966 Microwave plasma device |
12/25/2014 | US20140377965 Directed self-assembly (dsa) formulations used to form dsa-based lithography films |
12/25/2014 | US20140377964 Apparatus for oxidation and annealing processes and method for the same |
12/25/2014 | US20140377963 Patterning for selective area deposition |
12/25/2014 | US20140377962 Photo resist trimmed line end space |
12/25/2014 | US20140377961 Thin film deposition apparatus with multi chamber design and film deposition methods |
12/25/2014 | US20140377960 Plasma etching method |
12/25/2014 | US20140377959 Methods for forming three dimensional nand structures atop a substrate |
12/25/2014 | US20140377958 Plasma processing method and vacuum processing apparatus |
12/25/2014 | US20140377957 Method for manufacturing semiconductor device using silicon-containing resist underlayer film forming composition for solvent development |
12/25/2014 | US20140377956 Pattern forming method |
12/25/2014 | US20140377955 Substrate preparation for selective area deposition |
12/25/2014 | US20140377954 Method and apparatus for improving cmp planarity |
12/25/2014 | US20140377953 Method and apparatus for simultaneously removing multiple conductive materials from microelectronic substrates |
12/25/2014 | US20140377952 Wiring film and active matrix substrate using the same, and method for manufacturing wiring film |
12/25/2014 | US20140377951 Apparatus and Method for Removing Challenging Polymer Films and Structures from Semiconductor Wafers |
12/25/2014 | US20140377950 Method of manufacturing a semiconductor device |
12/25/2014 | US20140377949 Method of depositing copper using physical vapor deposition |
12/25/2014 | US20140377948 Method of depositing copper using physical vapor deposition |
12/25/2014 | US20140377947 Method for manufacturing semiconductor device |
12/25/2014 | US20140377946 Bonded Structures for Package and Substrate |
12/25/2014 | US20140377945 Floating gate forming process |
12/25/2014 | US20140377944 FinFETs with Multiple Threshold Voltages |
12/25/2014 | US20140377943 Four terminal transistor fabrication |
12/25/2014 | US20140377942 Method for manufacturing semiconductor device |
12/25/2014 | US20140377941 Method of manufacturing semiconductor device |
12/25/2014 | US20140377940 Transient voltage suppressor circuit, and diode device therefor and manufacturing method thereof |
12/25/2014 | US20140377939 Carrier for flexible substrate, substrate processing apparatus including the carrier, and method of manufacturing flexible display apparatus |
12/25/2014 | US20140377938 Method for producing semiconductor device |
12/25/2014 | US20140377937 Method of coating water soluble mask for laser scribing and plasma etch |
12/25/2014 | US20140377936 Method for Forming a Strained Semiconductor Structure |
12/25/2014 | US20140377935 Selective Amorphization for Signal Isolation and Linearity |
12/25/2014 | US20140377934 Method of Manufacturing Semiconductor Device Having Embedded Conductive Line |
12/25/2014 | US20140377930 Method of forming electronic components with increased reliability |
12/25/2014 | US20140377928 Method for finfet integrated with capacitor |
12/25/2014 | US20140377927 Self-aligned contact structure for replacement metal gate |
12/25/2014 | US20140377926 Method for fabricating semiconductor device |
12/25/2014 | US20140377923 Method to form finfet/trigate devices on bulk semiconductor wafers |
12/25/2014 | US20140377920 Method of manufacturing semiconductor device with offset sidewall structure |
12/25/2014 | US20140377919 Cmos fabrication |
12/25/2014 | US20140377916 Methods to prevent filler entrapment in microelectronic device to microelectronic substrate interconnection structures |
12/25/2014 | US20140377914 Single Layer Coreless Substrate |
12/25/2014 | US20140377912 Microelectronic flip chip packages with solder wetting pads and associated methods of manufacturing |
12/25/2014 | US20140377911 Package configurations for low emi circuits |
12/25/2014 | US20140377909 Semiconductor packages having through electrodes and methods for fabricating the same |
12/25/2014 | US20140377908 Methods for the Formation of a Trap Rich Layer |
12/25/2014 | US20140377907 Semiconductor device and method for manufacturing the same |
12/25/2014 | US20140377906 Methods for manufacturing thin film transistors |
12/25/2014 | US20140377904 Precursor composition of oxide semiconductor and thin film transistor substrate including oxide semiconductor |
12/25/2014 | US20140377892 Method of forming an integrated inductor by dry etching and metal filling |
12/25/2014 | US20140377891 Charged particle beam irradiation apparatus and methods related thereto |
12/25/2014 | US20140377889 Semiconductor device manufacturing method |
12/25/2014 | US20140377888 Method of detecting and measuring contact alignment shift relative to gate structures in a semicondcutor device |
12/25/2014 | US20140377887 Method for planarizing semiconductor devices |
12/25/2014 | US20140377886 Method of manufacturing semiconductor device including grinding semiconductor wafer |
12/25/2014 | US20140377885 Process flow for replacement metal gate transistors |
12/25/2014 | US20140377040 Elevator linear motor drive |
12/25/2014 | US20140377039 Unit and method for cooling, and apparatus and method for treating substrate |
12/25/2014 | US20140376898 Absorbing reflector for semiconductor processing chamber |
12/25/2014 | US20140376897 Light pipe window structure for thermal chamber applications and processes |
12/25/2014 | US20140376148 Electrostatic chuck device |
12/25/2014 | US20140375972 Lithographic apparatus and device manufacturing method |
12/25/2014 | US20140375971 Lithographic apparatus and device manufacturing method |
12/25/2014 | US20140375370 Methods and apparatus for an isfet |
12/25/2014 | US20140375367 Pseudo-cml latch and divider having reduced charge sharing between output nodes |
12/25/2014 | US20140375341 Die Fracture Detection and Humidity Protection with Double Guard Ring Arrangement |
12/25/2014 | US20140375299 Non-intrusive measurement of a wafer dc self-bias in semiconductor processing equipment |
12/25/2014 | US20140374925 Component assembly using a temporary attach material |
12/25/2014 | US20140374924 Heterogeneous Integration Process Incorporating Layer Transfer in Epitaxy Level Packaging |
12/25/2014 | US20140374916 Tsv interconnect structure and manufacturing method thereof |
12/25/2014 | US20140374915 Integration of optical components in integrated circuits |
12/25/2014 | US20140374914 Stress compensation patterning |
12/25/2014 | US20140374911 Device having reduced pad peeling during tensile stress testing and a method of forming thereof |
12/25/2014 | US20140374910 Semiconductor device and manufacturing method thereof |
12/25/2014 | US20140374909 Method for filling trench with metal layer and semiconductor structure formed by using the same |
12/25/2014 | US20140374908 Semiconductor Device and Manufacturing Method Thereof |
12/25/2014 | US20140374907 Ultra-thin copper seed layer for electroplating into small features |
12/25/2014 | US20140374906 Method for processing a carrier and an electronic component |
12/25/2014 | US20140374905 Formation of conductive circuit, conductive circuit, and conductive ink composition |
12/25/2014 | US20140374904 Semiconductor device, semiconductor device manufacturing method, and semiconductor manufacturing apparatus |
12/25/2014 | US20140374899 Package with Solder Regions Aligned to Recesses |