Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1987
10/13/1987US4699689 Removing charged particles from plasma, exposing photoresist to effluent and uv rad
10/13/1987US4699688 Vapor deposition of arsine with triethylgallium
10/13/1987US4699556 Object handling apparatus
10/13/1987US4699555 Module positioning apparatus
10/13/1987US4699505 Exposure method and exposure apparatus
10/13/1987US4699085 For growth on a semiconductor wafer
10/13/1987US4699083 Molecular beam generator using thermal decomposition for manufacturing semiconductors by epitaxy
10/13/1987US4698901 Mesa semiconductor device
10/13/1987US4698900 Method of making a non-volatile memory having dielectric filled trenches
10/13/1987US4698899 Field effect transistor
10/13/1987CA1228180A1 Method of making a high performance small area, thin film transistor
10/13/1987CA1228178A1 Cmos integrated circuit technology
10/13/1987CA1228177A1 Integrated semiconductor structure
10/13/1987CA1228175A1 Integrated circuit filter with reduced die area
10/12/1987EP0128159A4 Apparatus and method for thermally treating a semiconductor substrate.
10/08/1987WO1987006061A1 A process for the manufacture of iii-v semiconductor devices
10/08/1987WO1987006060A1 Method for joining two or more wafers and the resulting structure
10/08/1987WO1987006059A1 Process for forming a fuse programmable read-only memory device
10/08/1987WO1987006058A1 Method for the surface passivation of an indium phosphide substrate and new product obtained
10/08/1987WO1987006057A1 INSTALLATION AND METHOD FOR PROCESSING SEMI-CONDUCTOR WAFERS (Si or GaAs WAFERS) FOR INTEGRATED CIRCUITS
10/08/1987WO1987006029A2 Pattern transfer process for fabricating integrated-circuit devices
10/07/1987EP0240435A1 Resistor integrated on a semiconductor substrate
10/07/1987EP0240433A2 Single bonding shelf, multi-row, wire-bond finger layout for integrated circuit package
10/07/1987EP0240314A1 Method for forming deposited film
10/07/1987EP0240309A2 Method for forming crystal and crystal article obtained by said method
10/07/1987EP0240307A2 Bipolar transistor and method of producing the same
10/07/1987EP0240306A1 Method for forming deposited film
10/07/1987EP0240305A2 Method for forming a deposited film
10/07/1987EP0240273A2 Programmable transistors
10/07/1987EP0240070A2 Process for manufacturing semi-conductor devices
10/07/1987EP0240058A1 Positioning device comprising a Z-manipulator and a O-manipulator
10/07/1987EP0239980A2 Electric-electronic device including polyimide thin film
10/07/1987EP0239978A2 Charge transfer device
10/07/1987EP0239977A2 Charge transfer device
10/07/1987EP0239960A2 Power transistor device
10/07/1987EP0239958A2 Thin film semiconductor device and method of manufacturing the same
10/07/1987EP0239833A2 Integrated circuit device with an improved interconnection line
10/07/1987EP0239825A1 Method for producing a bipolar transistor structure for very high speed switchings
10/07/1987EP0239794A1 Process for making silicium crystals for photovoltaic applications
10/07/1987EP0239782A2 Light-sensitive registration element
10/07/1987EP0239756A1 Process for forming planar chip-level wiring
10/07/1987EP0239746A2 Method for manufacturing a semiconductor device
10/07/1987EP0239669A2 Method and apparatus of treating photoresists
10/07/1987EP0239664A1 Process for producing layers containing silicon and oxide
10/07/1987EP0239652A1 Method of producing a monolithic integrated circuit with at least one bipolar planar transistor
10/06/1987US4698822 Apparatus for exciting a plasma in a column of gas by means of microwaves, in particular for providing an ion laser
10/06/1987US4698807 Self repair large scale integrated circuit
10/06/1987US4698787 Single transistor electrically programmable memory device and method
10/06/1987US4698720 Dynamic protection integrated device, in particular for MOS input stages integrated circuits
10/06/1987US4698659 Stacked complementary metal oxide semiconductor inverter
10/06/1987US4698656 Output detector of a charge coupled device
10/06/1987US4698654 Field effect transistor with a submicron vertical structure and its production process
10/06/1987US4698653 Semiconductor devices controlled by depletion regions
10/06/1987US4698652 FET with Fermi level pinning between channel and heavily doped semiconductor gate
10/06/1987US4698526 Source follower CMOS input buffer
10/06/1987US4698486 Method of heating semiconductor wafers in order to achieve annealing, silicide formation, reflow of glass passivation layers, etc.
10/06/1987US4698316 Apertured oxide mask on single crystal exposed to dichlorosilane and hydrogen chloride
10/06/1987US4698285 Method for producing deep-etch, X-ray lithography masks
10/06/1987US4698240 Applying fluoropolymer dissolved in noncombustible low boiling orgainc solvent
10/06/1987US4698238 Pattern-forming method
10/06/1987US4698235 Siting a film onto a substrate including electron-beam evaporation
10/06/1987US4698234 Vapor deposition of semiconductor material
10/06/1987US4698132 Method of forming tapered contact openings
10/06/1987US4698131 Abutted composite assembly gives document-width scanning and ease of repair
10/06/1987US4698129 Focused ion beam micromachining of optical surfaces in materials
10/06/1987US4698128 Sloped contact etch process
10/06/1987US4698127 Process for fabricating a self-aligned bipolar transistor
10/06/1987US4698126 Anisotropic etching with chlorine gas and tetrachloromethane
10/06/1987US4698125 Method of producing a layered structure
10/06/1987US4698122 Method of diffusion of impurities
10/06/1987US4698104 Vapor deposition then controlled annealing
10/06/1987US4697974 Pallet-loading system
10/06/1987US4697333 Ion penetration prevention;
10/06/1987US4697332 Method of making tri-well CMOS by self-aligned process
10/06/1987US4697331 Method of fabrication of a control transistor for a flat-panel display screen
10/06/1987US4697330 High specific capacitance, high integrity
10/06/1987US4697328 Elimination of gate electrode overlap; size reduction
10/06/1987CA1227888A1 Wafer transfer apparatus
10/06/1987CA1227887A1 Method of bonding semiconductor devices to heatsinks
10/01/1987DE3610157A1 Method for producing at least one pn transition
09/1987
09/30/1987EP0239494A1 Integrated circuit housing
09/30/1987EP0239489A2 A process for forming vias on integrated circuits
09/30/1987EP0239488A2 Tri-level resist process for fine resolution photolithography
09/30/1987EP0239389A2 Ball bonding of aluminum bonding wire
09/30/1987EP0239384A2 Process for isolating semiconductor devices on a substrate
09/30/1987EP0239329A2 Preservation of surface features on semiconductor surfaces
09/30/1987EP0239266A2 Transfer system in a clean room
09/30/1987EP0239260A2 Grading orientation errors in crystal specimens
09/30/1987EP0239217A2 Method of forming doped wells in integrated circuits and its use in the production of a bipolar transistor in such circuits
09/30/1987EP0239216A2 CMOS compatible bipolar transistor
09/30/1987EP0239187A2 Semiconductor memory device
09/30/1987EP0239151A1 Charge-coupled device
09/30/1987EP0239140A2 Process for producing structured epitaxial films on a substrate
09/30/1987EP0239085A2 Device for micro-movement of objects
09/30/1987EP0239060A2 Method for manufacturing semiconductor integrated circuits including cmos and high-voltage electronic devices
09/30/1987EP0238836A2 Method of making a contact to a trench isolated device
09/30/1987EP0238830A1 Epitaxial growth method and apparatus therefor
09/30/1987EP0238751A2 Semiconductor processing system
09/30/1987EP0238749A2 Groove gate unipolar and bipolar MOS devices and method of manufacturing the same
09/30/1987EP0238694A1 Method of forming identically positioned alignment marks on opposite sides of a semiconductor wafer
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