Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/1993
02/17/1993EP0527372A1 Manufacturing method for a bipolar transistor
02/17/1993EP0527370A1 Procedure for implementing localised catalytic reactions with or on solid state surfaces on a nanometric or subnanometric scale
02/17/1993EP0527342A1 Differential capacitor structure and fabricating method
02/17/1993EP0527337A1 Semiconductor integrated circuit
02/17/1993EP0527290A1 Device for implementing a thin film process for the treatment of large area substrates
02/17/1993EP0527242A1 Inspection apparatus and method for inspection of substrates
02/17/1993EP0527194A1 High density local interconnect in a semiconductor circuit using metal silicide
02/17/1993EP0527166A1 Illumination device.
02/17/1993EP0527133A1 Plasma reaction chamber having conductive diamond-coated surfaces.
02/17/1993EP0353271B1 Analog-to-digital converter made with focused ion beam technology
02/17/1993CN1069157A Method for forming vias in multilayer circuits
02/17/1993CN1069146A Lamellar ceramic aluminium diffusion sources
02/16/1993US5187771 Heat processing apparatus utilizing a plurality of stacked heater holders
02/16/1993US5187726 High resolution X-ray lithography using phase shift masks
02/16/1993US5187715 Quantum well optical device
02/16/1993US5187683 Method for programming EEPROM memory arrays
02/16/1993US5187638 Barrier layers for ferroelectric and pzt dielectric on silicon
02/16/1993US5187637 Monolithic high-voltage capacitor
02/16/1993US5187636 Having high permittivity; capacitors; silicon, silica and silicon nitride layers
02/16/1993US5187602 Liquid crystal display apparatus
02/16/1993US5187566 Semiconductor memory and method of manufacturing the same
02/16/1993US5187562 Input protection structure for integrated circuits
02/16/1993US5187561 Metal single crystal line having a particular crystal orientation
02/16/1993US5187560 Ohmic electrode for n-type cubic boron nitride and the process for manufacturing the same
02/16/1993US5187559 Semiconductor device and process for producing same
02/16/1993US5187557 Having chemical resistance, low resistance and no leakage current increases
02/16/1993US5187555 Semiconductor integrated circuit of standard cell system
02/16/1993US5187552 Shielded field-effect transistor devices
02/16/1993US5187550 Semiconductor device
02/16/1993US5187549 Dynamic random access memory device including stacked capacitors each having a lower electrode aligned with an upper electrode without tolerance and process of fabrication thereof
02/16/1993US5187548 Stacked capacitor of a dram cell with fin-shaped electrodes having supporting layers
02/16/1993US5187454 Electronically tuned matching network using predictor-corrector control system
02/16/1993US5187431 Universal multicontact connection between an ews probe card and a test card of a "test-on-wafer" station
02/16/1993US5187429 Reference voltage generator for dynamic random access memory
02/16/1993US5187387 Overcurrent detecting apparatus
02/16/1993US5187379 Field effect transistor and manufacturing method therefor
02/16/1993US5187372 Apparatus for and a method of transverse position measurement in proximity lithographic systems
02/16/1993US5187123 Method for bonding a semiconductor device to a lead frame die pad using plural adhesive spots
02/16/1993US5187122 Process for fabricating an integrated circuit using local silicide interconnection lines
02/16/1993US5187121 Process for fabrication of a semiconductor structure and contact stud
02/16/1993US5187120 Selective deposition of metal on metal nitride to form interconnect
02/16/1993US5187119 Depositing conductor layer on substrate, coating with resist, patterning, etching
02/16/1993US5187118 Method of manufacturing semiconductor devices
02/16/1993US5187117 Eliminates all but one diffusion step, no intervening high temperature step
02/16/1993US5187116 Process for preparing electroluminescent device of compound semiconductor
02/16/1993US5187114 Method of making SRAM cell and structure with polycrystalline P-channel load devices
02/16/1993US5187113 Field oxide termination and gate oxide formation
02/16/1993US5187112 Depositing insulating film on substrate, removing part of film to form side wall, depositing metal, etching, doping, asymmetrical electrodes
02/16/1993US5187111 Forming metal film on substrate, doping, forming molybdenum film, doping, activating doped regions
02/16/1993US5187109 Forming on surface of substrate a layer of semiconductor material of opposite conductivity type, forming insulator layer, depositing polycrystalline silicon, doping, annealing
02/16/1993US5187108 Method of manufacturing a bipolar transistor
02/16/1993US5187048 Photoresists formed by polymerization of di-unsaturated monomers
02/16/1993US5187020 Compliant contact pad
02/16/1993US5187007 Adhesive sheets
02/16/1993US5186975 Process and machinery for step-and-repeat vacuum-deposition of large-area thin-film-electronics matrix-circuits on monolithic glass panes through small perforated metal masks
02/16/1993US5186789 Method of making a cantilever stylus for use in an atomic force microscope
02/16/1993US5186786 Method for determining the complete elimination of a thin layer on a non planar substrate
02/16/1993US5186785 Zone melted recrystallized silicon on diamond
02/16/1993US5186750 Vacuum chamber having substrate holder, laser source and controller, vibration-proof base, for organometallic molecular beam epitaxy
02/16/1993US5186745 Teos based spin-on-glass and processes for making and using the same
02/16/1993US5186719 Apparatus for conveying semiconductor lead frame strip using guide rails
02/16/1993US5186718 Staged-vacuum wafer processing system and method
02/16/1993US5186597 Apparatus for servicing of semiconductor manufacturing equipment
02/16/1993US5186594 Dual cassette load lock
02/16/1993US5186383 Low and high melting alloys, cooling, resolidifying
02/16/1993US5186381 Semiconductor chip bonding process
02/16/1993US5186378 Method and apparatus for transducer heating in low temperature bonding
02/16/1993US5186238 Liquid film interface cooling chuck for semiconductor wafer processing
02/16/1993US5186192 Apparatus for cleaning silicon wafer
02/16/1993US5186040 Method for measuring the viscosity of a material
02/16/1993US5185956 Wafer slicing and grinding system
02/16/1993CA1313612C Etching solutions containing ammonium fluoride
02/11/1993DE4203557A1 Resist pattern coating on substrate by deep UV lithography - comprises coating substrate with anti-reflection coating contg. new organo:silane cpd., applying resist, and selectively exposing
02/10/1993EP0527058A1 Apparatus for controlling a developing solution
02/10/1993EP0527018A1 Method and apparatus for measuring positional deviation
02/10/1993EP0527015A2 Low power signaling using output impedance delay
02/10/1993EP0526996A2 Test head manipulator
02/10/1993EP0526982A1 Fine structure evaluation apparatus and method
02/10/1993EP0526939A1 Semiconductor lateral insulated gate bipolar transistor
02/10/1993EP0526897A2 Three terminal tunnel device
02/10/1993EP0526889A2 Method of depositing a metal or passivation fabric with high adhesion on an insulated semiconductor substrate
02/10/1993EP0526870A2 Composite semiconductor structure for reducing scattering of carriers by optical phonons and a semiconductor device that uses such a composite semiconductor structure
02/10/1993EP0526843A1 Holder for a sample insertable in an apparatus using a transfer mechanism
02/10/1993EP0526790A2 A folded bitline dynamic random access memory
02/10/1993EP0526779A1 Pulsed gas plasma-enhanced chemical vapor deposition of silicon
02/10/1993EP0526650A1 Photosensitive polymer composition and pattern formation
02/10/1993EP0526646A1 Semiconductor device having an isolation region enriched in oxygen and a fabrication process thereof.
02/10/1993EP0526644A1 Semiconductor manufacturing equipment
02/10/1993EP0526468A1 Diamond-on-a-substrate for electronic applications
02/10/1993EP0526450A1 Multilayer thin film wiring process featuring self-alignment of vias
02/10/1993EP0442952B1 Positive-working photoresists employing a selected mixture of ethyl lactate and ethyl 3-ethoxy propionate as casting solvent
02/10/1993CA2074437A1 Performance of location-selective catalytic reactions with or on the surfaces of solids in the namometer or subnanometer range
02/09/1993US5185706 Programmable gate array with logic cells having configurable output enable
02/09/1993US5185689 First and second electrode with dielectric between
02/09/1993US5185653 O-ring package
02/09/1993US5185651 Integrated circuit with current detection
02/09/1993US5185649 Circuital arrangement for preventing latchup in transistors with insulated collectors
02/09/1993US5185625 Exposure apparatus for forming pattern on printed-wiring board
02/09/1993US5185601 Active matrix liquid crystal display apparatus and method of producing the same
02/09/1993US5185571 Process and system for the asynchronous measurement of signal courses