Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1992
12/01/1992US5168366 Dynamic semiconductor memory device comprising a switching transistor and storage capacitor
12/01/1992US5168346 Method and apparatus for isolation of flux materials in flip-chip manufacturing
12/01/1992US5168345 Semiconductor device having a universal die size inner lead layout
12/01/1992US5168343 Semiconductor integrated circuit device having improved trench isolation
12/01/1992US5168341 Bipolar-cmos integrated circuit having a structure suitable for high integration
12/01/1992US5168336 Dynamic random access memory device with trench type memory cell
12/01/1992US5168335 Electrically programmable, electrically erasable memory array cell with field plate
12/01/1992US5168334 Non-volatile semiconductor memory
12/01/1992US5168332 Semiconductor device having salicide structure, method of manufacturing the same, and heating apparatus
12/01/1992US5168331 Power metal-oxide-semiconductor field effect transistor
12/01/1992US5168175 Semiconductor integrated circuit using junction field effect transistor as current control element
12/01/1992US5168166 Charged particle beam projection aligner having position detector using light beam
12/01/1992US5168089 Covering silicon substrate with a mask having apertures to expose substrate to flow of hydrogen, hydrochloric acid and a silicon source gas while heating and pressurization
12/01/1992US5168077 Method of manufacturing a p-type compound semiconductor thin film containing a iii-group element and a v-group element by metal organics chemical vapor deposition
12/01/1992US5168076 Method of fabricating a high resistance polysilicon load resistor
12/01/1992US5168075 Random access memory cell with implanted capacitor region
12/01/1992US5168073 Method for fabricating storage node capacitor having tungsten and etched tin storage node capacitor plate
12/01/1992US5168072 Method of fabricating an high-performance insulated-gate field-effect transistor
12/01/1992US5168071 Method of making semiconductor devices
12/01/1992US5168070 Electronic component, especially a permeable base transistor
12/01/1992US5168069 Molecular beam deposition of group 3 and 5 fluexes on a substrate, heat treatment on non-stoichiometric film and forming conductors on the layer to produce a detector
12/01/1992US5167913 Sintering without forming metal oxide
12/01/1992US5167794 Heat-diffusion of plated silver into copper or copper alloy matrix
12/01/1992US5167778 Electrochemical etching method
12/01/1992US5167762 Anisotropic etch method
12/01/1992US5167761 Low speed; accuracy
12/01/1992US5167760 Etchback process for tungsten contact/via filling
12/01/1992US5167759 Noncontamination; high quality, for semiconductors
12/01/1992US5167744 Method of hermetically sealing a space
12/01/1992US5167717 Apparatus and method for processing a semiconductor wafer
12/01/1992US5167716 Method and apparatus for batch processing a semiconductor wafer
12/01/1992US5167697 Substrate material for mounting semiconductor device thereon and manufacturing method thereof
12/01/1992US5167326 Carriers for integrated circuits and the like
12/01/1992CA2062134A1 Low defect densiry/arbitrary lattice constant heteroepitaxial layers
12/01/1992CA1311053C Nonvolatile memory element
12/01/1992CA1310822C Surface treatment/deposit reactor
11/1992
11/29/1992CA2068353A1 Vapor phase deposition of hydrogen silsequioxane resin
11/26/1992WO1992021222A1 Device for producing an electric circuit, especially for a measuring probe, and a measuring probe
11/26/1992WO1992021220A1 Apparatus for the treatment of a solid body
11/26/1992WO1992021170A2 Blue-green laser diode
11/26/1992WO1992021154A1 Amorphous silicon antifuses and methods for fabrication thereof
11/26/1992WO1992021150A1 Integrated circuit chip carrier
11/26/1992WO1992021149A1 System for encapsulating a lead frame with chips
11/26/1992WO1992021148A1 Method of manufacturing a repairable multi-chip module
11/26/1992WO1992021146A1 Tilt box
11/26/1992WO1992021145A1 Single wafer robotic package
11/26/1992WO1992021142A1 Method and device for processing and cleaning wafers using a central reactor
11/26/1992WO1992020985A1 Semiconductor processor with extendible receiver for handling multiple discrete wafers without wafer carriers
11/26/1992WO1992020984A1 Vacuum drying apparatus
11/26/1992WO1992020833A1 A PROCESS FOR DEPOSITING A SIOx FILM HAVING REDUCED INTRINSIC STRESS AND/OR REDUCED HYDROGEN CONTENT
11/26/1992WO1992020506A1 Process and device for manufacturing plastic mouldings having wall regions of reduced thickness
11/26/1992WO1992020464A1 Method and apparatus for plasma deposition
11/26/1992DE4217085A1 Automatic conductor frame feeding device for transistor outline semiconductor mfr. - has successive loading, transfer and feeding sections and does not require separate storage magazine
11/26/1992DE4216888A1 Patterned resist, esp. useful for integrated circuit prodn. - by forming and exposing single resist layer, followed by repeated silylation and etching steps to prevent side corrosion
11/26/1992DE4126877C1 Plastic microstructure prodn. for high temp. resistance - by forming poly:methyl methacrylate] mould unit, filling with plastic resin and dissolving in solvent, for high accuracy moulds
11/26/1992DE4126046A1 Herstellungsverfahren und struktur eines dram-speicherzellenkondensators Production method and structure of a DRAM memory cell capacitor
11/26/1992CA2443497A1 Method and apparatus for plasma deposition
11/25/1992EP0515352A1 Ion source
11/25/1992EP0515212A1 A method for forming a resist pattern
11/25/1992EP0515181A2 Method for preparing semiconductor member
11/25/1992EP0515148A2 Field effect transistors on spinel substrates
11/25/1992EP0515113A1 Process for apparatus for localized soldering to a ceramic substrate
11/25/1992EP0515093A1 Selective epitaxy of silicon in silicon dioxide apertures with suppression of unwanted formation of facets
11/25/1992EP0515079A1 Resist materials and processes of their use
11/25/1992EP0515061A1 Process of producing aluminum nitride multiple-layer circuit board
11/25/1992EP0515043A2 Direct interconnect for functional circuit module array
11/25/1992EP0515039A2 A complementary low power non-volatile reconfigurable eecell
11/25/1992EP0515036A2 An apparatus for chamfering the peripheral edge of a wafer to specular finish
11/25/1992EP0514905A1 Semiconductor memory device and manufacturing method thereof
11/25/1992EP0514889A1 Light-emitting device, optical recording printer head utilizing said device, and optical printer utilizing said optical recording head
11/25/1992EP0514888A1 Method of forming a contact pad by selective deposition of a metal film
11/25/1992EP0514850A2 Method for producing a MIS type semiconductor device
11/25/1992EP0514845A2 Multiplexer circuit less liable to malfunction
11/25/1992EP0514723A1 Electronic parts loaded module
11/25/1992EP0514679A2 Semiconductor integrated memory device
11/25/1992EP0514602A1 MOSFET channel structure and method of fabrication
11/25/1992EP0514547A1 SEMICONDUCTOR MEMORY HAVING A FERROELECTRIC CAPACITOR AND A TiON BARRIER FILM
11/25/1992EP0514407A1 High temperature diffusion furnace.
11/25/1992EP0514393A1 Process and device for automatic monitoring of space-shape data in the manufacture of semiconductor components
11/25/1992EP0514384A1 Device for treating substrates in a gas-based plasma produced by microwaves.
11/25/1992CN1066539A Common bias circuit for plurality of discrete ic's each having their own bias circuitry
11/25/1992CN1066530A Method of manufacturing semiconductor device, and semiconductor device obtained by this method
11/25/1992CN1066512A Dry etching method and its application
11/25/1992CN1019250B Electric device and mfg. method of same
11/25/1992CA2069228A1 Method for forming a resist pattern
11/24/1992US5166962 X-ray mask, method of manufacturing the same, and exposure method using the same
11/24/1992US5166904 EEPROM cell structure and architecture with increased capacitance and with programming and erase terminals shared between several cells
11/24/1992US5166902 SRAM memory cell
11/24/1992US5166888 Fabrication of particle beam masks
11/24/1992US5166884 Intelligent system for processing and storing articles
11/24/1992US5166856 Electrostatic chuck with diamond coating
11/24/1992US5166852 Electronic circuit device for protecting electronic circuits from unwanted removal of ground terminal
11/24/1992US5166774 Selectively releasing conductive runner and substrate assembly having non-planar areas
11/24/1992US5166771 Self-aligning contact and interconnect structure
11/24/1992US5166770 Silicided structures having openings therein
11/24/1992US5166769 Passitvated mesa semiconductor and method for making same
11/24/1992US5166768 Compound semiconductor integrated circuit device with an element isolating region
11/24/1992US5166762 Dynamic RAM having 3-dimensional memory cell structure
11/24/1992US5166758 Electrically erasable phase change memory
11/24/1992US5166757 Diodes