| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 01/07/1993 | EP0521702A1 A semiconductor device having merged bipolar and MOS transistors and process for making the same |
| 01/07/1993 | EP0521700A1 Logic circuit using vertically stacked heterojunction field effect transistors |
| 01/07/1993 | EP0521696A1 Self-doped high performance complementary heterojunction field effect transistor |
| 01/07/1993 | EP0521690A2 Non-volatile memory and method of manufacturing the same |
| 01/07/1993 | EP0521678A1 I'ionsmplanted polysilicon resistor using an oxide screen |
| 01/07/1993 | EP0521676A1 Thin-film capacitor in semiconductor integrated circuit device, and method of manufacture thereof |
| 01/07/1993 | EP0521672A1 Integrated circuit interconnection technique |
| 01/07/1993 | EP0521670A1 Method to reduce the number of defects produced by ion implantation and local oxidation processes in semiconductor device manufacturing |
| 01/07/1993 | EP0521644A1 Method of manufacturing polysilicon film |
| 01/07/1993 | EP0521615A2 Method and apparatus for forming thin film and multilayer film |
| 01/07/1993 | EP0521558A2 Semiconductor device with means for increasing the breakdown voltage of a pn-junction |
| 01/07/1993 | EP0521483A2 Printed circuit board and semiconductor chip carrier sheet |
| 01/07/1993 | EP0521467A2 Drive control apparatus for air conditioner |
| 01/07/1993 | EP0521441A1 Insulated support for semiconductor device and method for manufacturing the same |
| 01/07/1993 | EP0521219A2 Semiconductor device and method for its fabrication |
| 01/07/1993 | EP0521163A1 Aluminum alloy wiring layer, manufacturing thereof, and aluminum alloy sputtering target |
| 01/07/1993 | EP0521102A1 Apparatus for interlayer planarization of semiconductor material. |
| 01/07/1993 | EP0521083A1 Mirrors |
| 01/07/1993 | EP0520996A1 Loading mechanisms |
| 01/07/1993 | EP0305461B1 Epitaxial installation |
| 01/07/1993 | EP0267233B1 Modular semiconductor wafer transport and processing system |
| 01/07/1993 | DE4221074A1 Halbleiter-wafer-verarbeitung mit ueberwachung kritischer dimensionen auf dem wafer unter einsatz optischer endpunktdetektion Semiconductor wafer processing with frequency monitoring of critical dimensions on the wafer by use of optical endpoint detection |
| 01/07/1993 | DE4122297A1 Electronic or optical appts. esp. semiconductor appts. - having junctions in the form of metallised bonding pads |
| 01/07/1993 | DE4122120A1 Improved seal design for crystal removal lock of a reactor - consists of protecting the seal from direct radiation from crystal and avoidance of shear action in the closure |
| 01/07/1993 | DE4121390A1 Verfahren zum herstellen einer freitragenden dickschichtstruktur A method of manufacturing a cantilever thick layer structure |
| 01/06/1993 | CN1067773A Circuit for sensing back-bias level in semiconductor memory device |
| 01/05/1993 | US5177692 Method and apparatus for processing errors occurring upon division of pattern to be transferred |
| 01/05/1993 | US5177596 Electronic component mounting structures for fpc tape carrier and methods of separation and application |
| 01/05/1993 | US5177595 Microchip with electrical element in sealed cavity |
| 01/05/1993 | US5177592 Semiconductor device |
| 01/05/1993 | US5177591 Multi-layered fluid soluble alignment bars |
| 01/05/1993 | US5177589 Refractory metal thin film having a particular step coverage factor and ratio of surface roughness |
| 01/05/1993 | US5177588 Coating flattens uneven surface; no poisoned via |
| 01/05/1993 | US5177587 Push-back junction isolation semiconductor structure and method |
| 01/05/1993 | US5177586 Cmos memory device with improved sense amplifier biasing |
| 01/05/1993 | US5177585 P-n-p diamond transistor |
| 01/05/1993 | US5177582 CMOS-compatible bipolar transistor with reduced collector/substrate capacitance and process for producing the same |
| 01/05/1993 | US5177578 Polycrystalline silicon thin film and transistor using the same |
| 01/05/1993 | US5177577 Liquid crystal display device with TFT's each including a Ta gate electrode and an anodized Al oxide film |
| 01/05/1993 | US5177576 Dynamic random access memory having trench capacitors and vertical transistors |
| 01/05/1993 | US5177575 Semiconductor memory device and manufacturing method thereof |
| 01/05/1993 | US5177574 Semiconductor memory device having a stacked type capacitor and manufacturing method therefor |
| 01/05/1993 | US5177572 Mos device using accumulation layer as channel |
| 01/05/1993 | US5177571 Ldd mosfet with particularly shaped gate electrode immune to hot electron effect |
| 01/05/1993 | US5177569 Semiconductor device having a two layered structure gate electrode |
| 01/05/1993 | US5177568 Tunnel injection semiconductor devices with schottky barriers |
| 01/05/1993 | US5177559 Dark field imaging defect inspection system for repetitive pattern integrated circuits |
| 01/05/1993 | US5177528 Aligning apparatus for substrate |
| 01/05/1993 | US5177469 Safety device for an IC handler and method for its operation |
| 01/05/1993 | US5177452 Stabilized circuit of high output power transistor for microwave and milliwave |
| 01/05/1993 | US5177435 IC test equipment |
| 01/05/1993 | US5177434 IC test equipment having a horizontally movable chuck carrier |
| 01/05/1993 | US5177367 Method of exposure using an electron beam to provide uniform dosage and apparatus therefor |
| 01/05/1993 | US5177366 Ion beam implanter for providing cross plane focusing |
| 01/05/1993 | US5177326 Lead wire array for a leadless chip carrier |
| 01/05/1993 | US5177181 Diamines and photosensitive polyimides made therefrom |
| 01/05/1993 | US5177032 Heating to soften, cooling to bond |
| 01/05/1993 | US5177031 Pretreatment to remove surface oxides; coating; reliability |
| 01/05/1993 | US5177030 Method of making self-aligned vertical intrinsic resistance |
| 01/05/1993 | US5177029 Method for manufacturing static induction type semiconductor device enhancement mode power |
| 01/05/1993 | US5177028 Trench isolation method having a double polysilicon gate formed on mesas |
| 01/05/1993 | US5177027 Process for fabricating, on the edge of a silicon mesa, a MOSFET which has a spacer-shaped gate and a right-angled channel path |
| 01/05/1993 | US5177025 Doping; forming diffusion suppression region; bipolar transistors |
| 01/05/1993 | US5176969 Electrode for secondary battery |
| 01/05/1993 | US5176811 Electrodeposition, ammonium ion to reduce adhesion loss |
| 01/05/1993 | US5176792 Method for forming patterned tungsten layers |
| 01/05/1993 | US5176790 Using fluorinated hydrocarbons in the gaseous etchant |
| 01/05/1993 | US5176789 Light activation, vapor deposition, capacitors |
| 01/05/1993 | US5176783 Semiconductor substrate etching apparatus |
| 01/05/1993 | US5176782 Apparatus for photochemically ashing a photoresist |
| 01/05/1993 | US5176773 Method of manufacturing a ceramic carrier |
| 01/05/1993 | US5176772 Green tape with conductive paste is laminated on sintered ceramic substrate |
| 01/05/1993 | US5176771 Multilayer ceramic tape substrate having cavities formed in the upper layer thereof and method of fabricating the same by printing and delamination |
| 01/05/1993 | US5176756 Method for fabricating a semiconductor device including a step for cleaning a semiconductor substrate |
| 01/05/1993 | US5176493 High speed wafer handling method |
| 01/05/1993 | US5176366 Resin-encapsulated semiconductor device package with nonconductive tape embedded between outer lead portions |
| 01/05/1993 | US5176311 High yield clampless wire bonding method |
| 01/05/1993 | US5176310 Method and apparatus for wire bond |
| 01/05/1993 | US5176309 Oxidation to form copper-cuprous oxide eutectic alloy interface layer; bonding and peel strength |
| 01/05/1993 | US5176255 Lead frame for integrated circuits or the like and method of manufacture |
| 01/05/1993 | CA1312405C2 Diffusion isolation layer for maskless cladding process |
| 01/04/1993 | WO1993006618A1 Method and apparatus for forming pattern |
| 01/04/1993 | CA2072277A1 Inductance element |
| 01/03/1993 | CA2072817A1 Multi-layer circuit board |
| 12/30/1992 | EP0520841A1 Composite flip chip semi-conductor device and method for making and burning-in the same |
| 12/30/1992 | EP0520832A1 Plasma assisted diamond synthesis |
| 12/30/1992 | EP0520831A2 Gated thyristor and process for its simultaneous fabrication with an integrated circuit |
| 12/30/1992 | EP0520825A1 Process for the simultaneous fabrication of high- and low voltage semiconductor devices, integrated circuit containing the same, systems and methods |
| 12/30/1992 | EP0520817A2 Semiconductor device and reticle used for fabricating the same |
| 12/30/1992 | EP0520740A1 Electrically connectable module |
| 12/30/1992 | EP0520713A2 Process for thin film transistor device fabrication with reduced number of mask steps |
| 12/30/1992 | EP0520703A1 Method for forming field oxide regions |
| 12/30/1992 | EP0520702A2 Interconnect for integrated circuits |
| 12/30/1992 | EP0520701A1 An integrated solution to high voltage load dump conditions |
| 12/30/1992 | EP0520681A1 Electronic device interconnection technique |
| 12/30/1992 | EP0520679A2 Method of forming a premolded package assembly |
| 12/30/1992 | EP0520658A2 Structure and method for contacts in CMOS devices |
| 12/30/1992 | EP0520654A1 Deep UV light sensitive positive photoresist compositions |
| 12/30/1992 | EP0520642A1 Resist material and pattern formation process |
| 12/30/1992 | EP0520605A2 A solid-state imaging device and a method for driving same |