H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1992
12/08/1992	US5170245 Semiconductor device having metallic interconnects formed by grit blasting
12/08/1992	US5170243 Bit line configuration for semiconductor memory
12/08/1992	US5170242 One or more active ionic species implanted at interface region
12/08/1992	US5170240 Input protection structure for integrated circuits
12/08/1992	US5170235 Semiconductor integrated circuit
12/08/1992	US5170233 Method for increasing capacitive surface area of a conductive material in semiconductor processing and stacked memory cell capacitor
12/08/1992	US5170231 First contact between channel formation layer and drain region exhibits different electric characteristics from second contact between channel and source region; Schottky junction
12/08/1992	US5170230 Doped gallium arsenic antimonide carrier supply layer on intrinsic indium gallium arsenide channel layer; lattice matched to indium phosphide substrate; high electron mobility transistor
12/08/1992	US5170227 Mask rom having monocrystalline silicon conductors
12/08/1992	US5170226 Fabrication of quantum devices in compound semiconductor layers and resulting structures
12/08/1992	US5170181 Laser scanning apparatus
12/08/1992	US5170098 Plasma processing method and apparatus for use in carrying out the same
12/08/1992	US5170062 Wire bonding inspecting apparatus with moving imaging area
12/08/1992	US5170061 Method of and apparatus for measuring oscillation of the outside diameter of a melt surface
12/08/1992	US5170037 Scanning device for optically scanning a surface along a line
12/08/1992	US5170032 Radiation manufacturing apparatus and amendment
12/08/1992	US5169806 Heating; undergoes solid phase epitaxy; textured film
12/08/1992	US5169804 Method for fastening a semiconductor, body provided with at least one semiconductor component to a substrate
12/08/1992	US5169803 Method of filling contact holes of a semiconductor device
12/08/1992	US5169802 Internal bridging contact
12/08/1992	US5169801 Method for fabricating a semiconductor device
12/08/1992	US5169800 Burying metal layer in first and second openings by irradiation
12/08/1992	US5169798 At substrate temperature substantially lower than conventional methods; rapid thermal annealing in vacuo
12/08/1992	US5169797 Forming gate electrodes using high melting point metal in area of memory cells; high etching; selection ratio
12/08/1992	US5169796 Process for fabricating self-aligned metal gate field effect transistors
12/08/1992	US5169795 Method of manufacturing step cut type insulated gate SIT having low-resistance electrode
12/08/1992	US5169794 Method of fabrication of pnp structure in a common substrate containing npn or MOS structures
12/08/1992	US5169793 Method of making an insulated gate bipolar transistor having gate shield region
12/08/1992	US5169792 Memory and logic elements on same substrate; concentration of field inversion preventive layers differ
12/08/1992	US5169791 Reduction of compund with hydrogen-oxygen bond; heat treatment; diffusion of atomic hydrogen
12/08/1992	US5169740 Heat resistant, high resolution photoresist
12/08/1992	US5169684 Wafer supporting jig and a decompressed gas phase growth method using such a jig
12/08/1992	US5169680 Electroless deposition for IC fabrication
12/08/1992	US5169678 Rendering at specific laser frequency by mixing ultraviolet wavelength absorpted azo dyes with thermoplastic resins
12/08/1992	US5169491 Method of etching SiO2 dielectric layers using chemical mechanical polishing techniques
12/08/1992	US5169487 Anisotropic etch method
12/08/1992	US5169478 Apparatus for manufacturing semiconductor devices
12/08/1992	US5169472 Forming micromechanical pressure sensor: polishing, cleaning, dipping in nitric acid at room temperature, sealing wafers under vacuum, heat treating at low temperature
12/08/1992	US5169453 Wafer supporting jig and a decompressed gas phase growth method using such a jig
12/08/1992	US5169440 Silicon carbide membrane for X-ray lithography and method for the preparation thereof
12/08/1992	US5169408 Apparatus for wafer processing with in situ rinse
12/08/1992	US5169407 Method of determining end of cleaning of semiconductor manufacturing apparatus
12/08/1992	US5169340 Electrical connector
12/08/1992	US5169310 Hermetic package for an electronic device and method of manufacturing same
12/08/1992	US5169272 Method and apparatus for transferring articles between two controlled environments
12/08/1992	US5169196 Non-contact pick-up head
12/08/1992	US5169192 Electronic article pickup tool
12/08/1992	US5169132 Workpiece handler
12/08/1992	US5169056 Connecting of semiconductor chips to circuit substrates
12/08/1992	US5168995 Pinch clip lid for non-hermetic packages
12/08/1992	US5168993 Optical pellicle holder
12/08/1992	US5168926 Heat sink design integrating interface material
12/08/1992	US5168887 Single wafer processor apparatus
12/08/1992	US5168886 Single wafer processor
12/08/1992	CA2102405A1 Fabricating metal articles from printed images
12/08/1992	CA1311276C Laser bonding apparatus and method
12/07/1992	CA2069348A1 Diamines and photosensitive polyimides made therefrom
12/06/1992	CA2069521A1 Process for coating a substrate with a silica precursor
12/03/1992	DE4217420A1 Trench storage capacitor for high density DRAM(s) - uses rectangular trench with (100) walls and bottom plane to improve oxide thickness and threshold control with die oriented parallel to (110) planes
12/03/1992	DE4127795A1 Herstellungsverfahren und aufbau eines mos-transistors Production method and structure of a MOS transistor
12/02/1992	EP0516516A1 Memory with capacitive EEPROM cell and process for reading such a memory cell
12/02/1992	EP0516480A2 Method for surface treatment with extra-low-speed ion beam
12/02/1992	EP0516427A1 Resist compositions
12/02/1992	EP0516426A1 Resist compositions
12/02/1992	EP0516408A2 Method of forming T-gate structure on microelectronic device substrate
12/02/1992	EP0516405A1 Process module dispense arm
12/02/1992	EP0516402A1 Substrate provided with electric lines and its manufacturing method
12/02/1992	EP0516364A2 Semiconductor memory device having burn-in test circuit
12/02/1992	EP0516344A1 Method to fill a cavity in a substrate
12/02/1992	EP0516338A2 Self aligned polysilicon gate contact
12/02/1992	EP0516335A2 Fabrication method in vertical transistor integration
12/02/1992	EP0516334A2 Method of etching a window in a dielectric layer on an integrated circuit and planarization thereof
12/02/1992	EP0516308A1 Vapor phase deposition of hydrogen silsesquioxane resin
12/02/1992	EP0516279A2 An interconnection structure of a semiconductor device and a method of manufacturing thereof
12/02/1992	EP0516170A2 Semiconductor chip mounted circuit board assembly and method for manufacturing the same
12/02/1992	EP0516149A1 Electronic device
12/02/1992	EP0516146A1 Semiconductor integrated circuit having improved protection element
12/02/1992	EP0516142A2 Photo-stimulated etching of CaF2
12/02/1992	EP0516136A2 Semiconductor manufacturing apparatus
12/02/1992	EP0516098A1 High accuracy beam blanker
12/02/1992	EP0516096A2 Semiconductor device unit having holder and method of mounting semiconductor devices using holder
12/02/1992	EP0516053A2 Dry etching method
12/02/1992	EP0516043A2 Dry etching method
12/02/1992	EP0515859A1 Low defect density/arbitrary lattice constant hetero-epitaxial layers
12/02/1992	EP0515850A2 Lateral collector heterojunction bipolar transistor
12/02/1992	EP0515833A1 Semiconductor integrated circuit device having wells biased with different voltage levels
12/02/1992	EP0515809A2 Sub-layer contact technique using in situ doped amorphous silicon and solid phase recrystallization
12/02/1992	EP0515577A1 Making and testing an integrated circuit using high density probe points
12/02/1992	EP0515488A1 Improved installation for wafer transfer and processing
12/02/1992	EP0514407A4 High temperature diffusion furnace
12/02/1992	CN1066748A Etching liquid for etching porous silion, etching process use same and method making semiconductor substrate for such etching liquid
12/01/1992	US5168543 For a high vacuum deposition chamber
12/01/1992	US5168513 X-ray metrology and alignment detection system
12/01/1992	US5168512 Method of manufacture of semiconductor devices
12/01/1992	US5168465 Highly compact EPROM and flash EEPROM devices
12/01/1992	US5168462 Sense amplifier having reduced coupling noise
12/01/1992	US5168454 Formation of high quality patterns for substrates and apparatus therefor
12/01/1992	US5168425 Mounting arrangements for high voltage/high power semiconductors
12/01/1992	US5168420 Ferroelectrics epitaxially grown on superconducting substrates
12/01/1992	US5168368 Lead frame-chip package with improved configuration

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