| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 06/28/1994 | US5324673 Method of formation of vertical transistor |
| 06/28/1994 | US5324672 Manufacturing method for bipolar transistor |
| 06/28/1994 | US5324670 Method of manufacturing a thyristor device with improved turn-off characteristics |
| 06/28/1994 | US5324619 Sensitivity, resolution, heat resistance, developability |
| 06/28/1994 | US5324618 Positive type quinonediazide photoresist composition containing select tetraphenolic additive |
| 06/28/1994 | US5324591 Deep ultraviolet photolithographically defined ultra-thin films for selective cell adhesion and outgrowth and method of manufacturing the same and devices containing the same |
| 06/28/1994 | US5324570 Microelectronics package |
| 06/28/1994 | US5324540 System and method for supporting and rotating substrates in a process chamber |
| 06/28/1994 | US5324539 Method for forming CVD thin glass films |
| 06/28/1994 | US5324536 Covering uneven substrate with layer of dielectric silicon nitride, then forming silicon dioxide second layer having apertures, filling apertures with polycrystalline silicon, differences in nucleation density give smooth surface |
| 06/28/1994 | US5324488 Continuous liquid silicon recharging process in czochralski crucible pulling |
| 06/28/1994 | US5324411 Carbon electrode plate containing holes |
| 06/28/1994 | US5324410 Device for one-sided etching of a semiconductor wafer |
| 06/28/1994 | US5324381 Semiconductor chip mounting method and apparatus |
| 06/28/1994 | US5324362 Apparatus for treating substrates in a microwave-generated gas-supported plasma |
| 06/28/1994 | US5324331 Transport system, in particular for transporting silicon monocrystals through the tank of a research reactor |
| 06/28/1994 | US5324155 Wafer handling system with bernoulli pick-up |
| 06/28/1994 | US5324087 Sucked substrate detecting apparatus |
| 06/28/1994 | US5324053 Electrostatic chuck |
| 06/28/1994 | US5324012 Holding apparatus for holding an article such as a semiconductor wafer |
| 06/28/1994 | US5323952 Bonding apparatus and testing apparatus of a bonded portion |
| 06/28/1994 | US5323948 Used in a wire bonding apparatus |
| 06/28/1994 | US5323947 Method and apparatus for use in forming pre-positioned solder bumps on a pad arrangement |
| 06/28/1994 | US5323821 Suction table apparatus of a numerical control router |
| 06/28/1994 | US5323712 Table moving apparatus |
| 06/28/1994 | US5323535 Electrical connecting member and method of manufacturing the same |
| 06/28/1994 | US5323533 Method of producing coaxial connections for an electronic component, and component package |
| 06/28/1994 | US5323520 Process for fabricating a substrate with thin film capacitor |
| 06/28/1994 | CA2018976C Doping procedures for semiconductor devices |
| 06/24/1994 | CA2112178A1 Surface potential control in plasma processing of materials |
| 06/23/1994 | WO1994014198A1 A mos transistor having a composite gate electrode and method of fabrication |
| 06/23/1994 | WO1994014197A1 Bipolar transistor |
| 06/23/1994 | WO1994014195A1 Power semiconductor switch with an integrated circuit |
| 06/23/1994 | WO1994014194A1 Void-free thermally enhanced plastic package |
| 06/23/1994 | WO1994014193A1 Electronic package sealed with a dispensable adhesive |
| 06/23/1994 | WO1994014192A1 Thin soi layer for fully depleted field effect transistors |
| 06/23/1994 | WO1994014190A1 Surface structure for soldering and non-flux soldering method using the same |
| 06/23/1994 | WO1994014189A1 Method of producing semiconductor and insulation films |
| 06/23/1994 | WO1994014188A1 Method for chemical surface passivation for in-situ bulk lifetime measurement of silicon semiconductor material |
| 06/23/1994 | WO1994014187A1 Method for anisotropically etching silicon |
| 06/23/1994 | WO1994014186A1 Substrates for the growth of 3c-silicon carbide |
| 06/23/1994 | WO1994014185A1 Wafer processing machine vacuum front end method and apparatus |
| 06/23/1994 | WO1994014183A1 Process for carrying out stable low pressure discharge processes |
| 06/23/1994 | WO1994013471A1 C-axis perovskite thin films grown on silicon dioxide |
| 06/23/1994 | DE4343934A1 Thick-film substrate mfg. method |
| 06/23/1994 | DE4343069A1 Integrated solid state circuit with internal signal propagation delay compensation |
| 06/23/1994 | DE4342702A1 Verfahren zur Erzeugung eines Durchkontaktstiftes in einem Halbleiterbauelement A method for producing a through-contact pin in a semiconductor device |
| 06/23/1994 | DE4341180A1 Process for insulating semiconductor layer on insulator |
| 06/23/1994 | DE4243637A1 Component handling device for automatic testing system |
| 06/23/1994 | DE4242566A1 Verfahren zur Montage von Halbleiterbauelementen in Gehäusen durch mechanisches Klemmen Method for mounting of semiconductor components in housings, by mechanical clamps |
| 06/23/1994 | DE3990432C1 Bonding wire for connecting electrode of semiconductor element |
| 06/23/1994 | CA2150569A1 Electronic package sealed with a dispensable adhesive |
| 06/23/1994 | CA2150473A1 Wafer processing machine vacuum front end method and apparatus |
| 06/23/1994 | CA2111788A1 Hybrid bipolar/field-effect power transistor in group iii-v material system |
| 06/22/1994 | EP0603106A2 Method to reduce stress from trench structure on SOI wafer |
| 06/22/1994 | EP0603105A1 Antifuse element with electrical or optical programming |
| 06/22/1994 | EP0603104A1 Large scale IC personalization method employing air dielectric structure for extended conductor |
| 06/22/1994 | EP0603102A2 Low-temperature MOSFET source drain structure with ultra-short channel |
| 06/22/1994 | EP0603101A1 A self protective decoupling capacitor structure |
| 06/22/1994 | EP0603097A2 Nitride polish stop for forming SOI wafers |
| 06/22/1994 | EP0603008A1 Method and apparatus for cleaning by megasonics |
| 06/22/1994 | EP0602995A2 Process and apparatus for manufacturing MOS device |
| 06/22/1994 | EP0602923A1 Exposure apparatus using a catadioptric projection system |
| 06/22/1994 | EP0602855A1 Active neural network control of wafer attributes in a plasma etch process |
| 06/22/1994 | EP0602844A1 Projection electron lithographic procedure |
| 06/22/1994 | EP0602842A2 Control of time-dependent haze in the manufacture of integrated circuits |
| 06/22/1994 | EP0602841A2 Integrated circuit fabrication method |
| 06/22/1994 | EP0602837A1 Integrated circuit process using a hard mask |
| 06/22/1994 | EP0602836A1 Self-aligned vertical antifuse |
| 06/22/1994 | EP0602833A1 Processes for electron lithography |
| 06/22/1994 | EP0602798A2 Structure for using a portion of an integrated circuit die |
| 06/22/1994 | EP0602671A2 Heterojunction field effect transistor having an improved transistor characteristic |
| 06/22/1994 | EP0602662A1 Hollow plastic molded package for semiconductor device and process for manufacturing same |
| 06/22/1994 | EP0602633A2 Method of clean up of a patterned metal layer |
| 06/22/1994 | EP0602607A1 Method for fabricating multi-level interconnection structure for semiconductor device |
| 06/22/1994 | EP0602595A1 Vaporizing reactant liquids for CVD |
| 06/22/1994 | EP0602569A2 Method of making two-phase buried channel planar gate CCD |
| 06/22/1994 | EP0602568A2 A multilayer structure having a (111)-oriented buffer layer |
| 06/22/1994 | EP0602532A2 A multilayer structure having an epitaxial metal electrode |
| 06/22/1994 | EP0602525A1 Process for the manufacture of a high density cell array of gain memory cells |
| 06/22/1994 | EP0602506A1 Plasma pressure control assembly |
| 06/22/1994 | EP0602376A1 N,N-Disbustituted sulfonamides and radiation-sensitive composition produced therewith |
| 06/22/1994 | EP0602328A2 Wire interconnect structures for connecting an integrated circuit to a substrate |
| 06/22/1994 | EP0602315A2 Method of making thin film transistors |
| 06/22/1994 | EP0602278A1 High frequency bipolar transistor |
| 06/22/1994 | EP0602271A1 Wafer testing process of a semiconductor device having a redundancy circuit |
| 06/22/1994 | EP0602257A1 Printed circuits with local higher wiring density and method for manufacturing such printed circuits |
| 06/22/1994 | EP0602250A1 Thin film transistor, solid-state device, display device, and method for manufacturing thin film transistor |
| 06/22/1994 | EP0602200A1 System for detecting a latent image using an alignment apparatus |
| 06/22/1994 | EP0602187A1 Photocurable polyimide coated glass fiber |
| 06/22/1994 | EP0523042B1 Ultrafast electro-dynamic x, y and theta positioning stage |
| 06/22/1994 | EP0348477B1 Vacuum deposition process |
| 06/22/1994 | CN1088352A Coil molded into magnetic stator |
| 06/22/1994 | CN1088272A New device and method for accurate etching and removal of thin film |
| 06/22/1994 | CN1088178A Fluid transport system for transporting articles |
| 06/22/1994 | CN1088177A Article-handling system |
| 06/22/1994 | CA2110009A1 Fused quartz diffusion tubes for semiconductor manufacture |
| 06/21/1994 | US5323484 Heating apparatus with multilayer insulating structure |
| 06/21/1994 | US5323440 Semiconductor device manufacturing exposure method |
| 06/21/1994 | US5323375 Information storage apparatus |