H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1994
08/23/1994	US5340755 Method of making planar heterobipolar transistor having trenched isolation of the collector terminal
08/23/1994	US5340754 Method for forming a transistor having a dynamic connection between a substrate and a channel region
08/23/1994	US5340753 Method for fabricating self-aligned epitaxial base transistor
08/23/1994	US5340752 Using single drive step to form emitter and base
08/23/1994	US5340751 Vapor deposition, etching, doping, patterning, insulating
08/23/1994	US5340702 Coating photoresist with light shielding film; exposure and development
08/23/1994	US5340700 Method for improved lithographic patterning in a semiconductor fabrication process
08/23/1994	US5340697 Negative type photoresist composition
08/23/1994	US5340688 Containing mixture of 1,2-naphthoquinonediazidosulfonate esters of polyhydroxy compounds and alkali soluble resin
08/23/1994	US5340686 Alkali soluble phenol novolak resin, 1,2-quinone diazide compound and low molecular weight novolak compound
08/23/1994	US5340684 Photosensitive composition and resin-encapsulated semiconductor device
08/23/1994	US5340682 Positive-working radiation-sensitive mixture and copying material produced therefrom comprising an α-carbonyl-α-sulfonyl diazomethane, a water-insoluble binder and an acid cleavable compound
08/23/1994	US5340621 Plasma CVD method
08/23/1994	US5340617 Electrostatic patterning of multi-layer module lamina
08/23/1994	US5340459 Reactive sputtering system
08/23/1994	US5340438 Low temperature insitu image reversal process for microelectric fabrication
08/23/1994	US5340437 Process and apparatus for etching semiconductor wafers
08/23/1994	US5340435 Bonded wafer and method of manufacturing it
08/23/1994	US5340410 Method for manufacturing polycrystalline silicon thin-film solar cells
08/23/1994	US5340370 Slurries for chemical mechanical polishing
08/23/1994	US5340261 Load-lock unit and wafer transfer system
08/23/1994	US5340011 Adjustable height work holder for bonding semiconductor dies
08/23/1994	US5340010 Bonding apparatus
08/23/1994	US5339952 Transfer container for transferring flimsy circuit panels under clean room conditions
08/23/1994	US5339844 Low cost equipment for cleaning using liquefiable gases
08/23/1994	US5339842 Methods and apparatus for cleaning objects
08/23/1994	US5339539 Spindrier
08/23/1994	US5339518 Method for making a quad leadframe for a semiconductor device
08/23/1994	CA2116088A1 Field effect transistor and method of manufacturing the same
08/23/1994	CA2080931C Bonding method using solder composed of multiple alternating gold and tin layers
08/23/1994	CA2024133C Photoluminescence spectroscopy control of plasma processing of iii-v semiconductors
08/23/1994	CA2013478C Method of forming coatings containing amorphous silicon carbide
08/23/1994	CA1331650C Avalanche photodiode structure
08/20/1994	CA2115944A1 Semiconductor device and a manufacturing method therefor
08/18/1994	WO1994018709A1 Graded composition ohmic contact for p-type ii-vi semiconductors
08/18/1994	WO1994018707A1 Thermally conductive integrated circuit package with radio frequency shielding
08/18/1994	WO1994018706A1 Active matrix substrate and thin film transistor, and method of its manufacture
08/18/1994	WO1994018703A1 Ultra-high-density alternate metal virtual ground rom
08/18/1994	WO1994018702A1 A thin film semiconductor device and method
08/18/1994	WO1994018699A1 Method of bonding semiconductor chips to a substrate
08/18/1994	WO1994018698A1 METHOD FOR ELECTRICALLY CONDUCTIVE CONNECTING AND MECHANICAL FASTENING OF ICs ON CONDUCTING PATTERNS OF SUBSTRATES AND THE APPLICATION THEREOF
08/18/1994	WO1994018697A1 Microstructures and single mask, single-crystal process for fabrication thereof
08/18/1994	WO1994018696A1 Wet-etching composition for semiconductors excellent in wettability
08/18/1994	WO1994018695A1 Apparatus for heat treatment
08/18/1994	WO1994018677A1 Improvements in a very large scale integrated planar read only memory
08/18/1994	WO1994018606A1 Sulphonic acid esters, radiation-sensitive mixtures made therewith, and their use
08/18/1994	WO1994018605A1 Process for producing micro-structure components on a substrate
08/18/1994	WO1994018544A1 Sensors employing interference of electromagnetic waves passing through waveguides having functionalized surfaces
08/18/1994	WO1994018356A1 Method of manufacturing a glass substrate for a thin film
08/18/1994	WO1994017957A1 Apparatus and method for polishing
08/18/1994	WO1994015355A3 Wafer transport module with rotatable and horizontally extendable wafer holder
08/18/1994	WO1992022820A3 Semiconductor accelerometer and method of its manufacture
08/18/1994	DE4404931A1 Method and device for direct connection of two bodies
08/18/1994	DE4404445A1 Integrated semiconductor circuit and method for testing the same
08/18/1994	DE4404290A1 Built-in filter for pipe strings
08/18/1994	DE4404129A1 Conducting structure prodn. on topography of substrate
08/18/1994	DE4341698A1 Semiconductor component and method for its production
08/18/1994	DE4304301A1 Transport system and method for objects to be aligned with one another
08/18/1994	CA2155513A1 Sensors employing interference of electromagnetic waves passing through waveguides having functionalized surfaces
08/17/1994	EP0611274A1 Holder for disc-like articles
08/17/1994	EP0611273A1 Holder for disc-like articles
08/17/1994	EP0611129A2 Embedded substrate for integrated circuit modules
08/17/1994	EP0611121A2 Systems for patterning dielectrics and structures therefrom
08/17/1994	EP0611091A1 Process for making metallized vias in diamond substrates
08/17/1994	EP0611067A2 Coating electronic substrates with silica derived from silazane polymers
08/17/1994	EP0611062A1 Electromagnetic alignment apparatus
08/17/1994	EP0611052A1 Apparatus and method for cooling semiconductor processing equipment
08/17/1994	EP0610969A2 Active matrix panel
08/17/1994	EP0610949A2 Static semiconductor memory device having increased soft error immunity
08/17/1994	EP0610927A2 SRAM memory structure and manufacturing method thereof
08/17/1994	EP0610922A2 Semiconductor memory device
08/17/1994	EP0610899A2 Methods for the formation of a silicon oxide film
08/17/1994	EP0610830A1 Method and apparatus for producing a Czochralski growth semiconductor single-crystal
08/17/1994	EP0610771A1 Semiconductor arrangement with CMOS basic cells
08/17/1994	EP0610728A1 Process for the formation of metallic or metalloid coatings by micro-wave assisted plasma CVD
08/17/1994	EP0610709A1 Process of manufacturing tri-dimensional circuit devices
08/17/1994	EP0610657A2 Integrated partial sawing process
08/17/1994	EP0610643A1 EEPROM cell and peripheral MOS transistor
08/17/1994	EP0610599A1 High voltage transistor with drift region
08/17/1994	EP0610563A2 Semiconductor ingot machining method
08/17/1994	EP0610430A1 Analog-to-digital converter and method of fabrication
08/17/1994	EP0610425A1 Process for preparing a polyimide film with a preselected value for cte.
08/17/1994	EP0610344A1 Positive photoresists containing solubility enhancers
08/17/1994	EP0610207A1 Method and device for processing and cleaning wafers using a central reactor
08/17/1994	EP0610193A1 Electron beam exposure method
08/17/1994	EP0610184A1 Light exposure device.
08/17/1994	EP0610183A1 Exposure device.
08/17/1994	EP0603198A4 Moisture relief for chip carriers.
08/17/1994	EP0360804B1 Heterojunction bipolar transistor
08/17/1994	EP0188431B2 Gate-array with bidirectional symmetry
08/17/1994	CN1090946A 电子电路 Electronic circuit
08/17/1994	CA2089583A1 Field-effect transistor and process for fabricating the same
08/16/1994	US5339346 Device fabrication entailing plasma-derived x-ray delineation
08/16/1994	US5339260 Apparatus for checking size of a work
08/16/1994	US5339180 Flat display
08/16/1994	US5339128 Resist processing method
08/16/1994	US5339027 Rigid-flex circuits with raised features as IC test probes
08/16/1994	US5338986 Latch-up resistant CMOS output circuit
08/16/1994	US5338978 Full swing power down buffer circuit with multiple power supply isolation
08/16/1994	US5338973 Carrier for film carrier type semiconductor device

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