| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 06/15/1994 | EP0601068A1 Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom |
| 06/15/1994 | EP0600897A1 Power semiconductor component and process for producing it. |
| 06/15/1994 | EP0546011B1 Method and apparatus for reducing wafer contamination |
| 06/15/1994 | EP0298126B1 Optical cvd process |
| 06/15/1994 | EP0179138B1 A method of forming a composite semiconductor structure |
| 06/15/1994 | CN1088002A Method and apparatus for manufacturing a liquid crystal display substrate, and apparatus and method for evaluating semiconductor crystals |
| 06/15/1994 | CN1025091C Method for production of delta-mixed quantum trap field effect transistor |
| 06/15/1994 | CA2111187A1 Microwave monolithic integrated circuit testing |
| 06/14/1994 | US5321786 Process for the hybridization and positioning of an optoelectronic component relative to an integrated optical guide |
| 06/14/1994 | US5321654 Semiconductor device having no through current flow in standby period |
| 06/14/1994 | US5321650 BiCMOS semiconductor memory device using load transistors formed on an insulating film |
| 06/14/1994 | US5321634 Automatic thin-film measuring apparatus |
| 06/14/1994 | US5321493 Apparatus and method for evaluating a projection lens |
| 06/14/1994 | US5321354 Method for inspecting semiconductor devices |
| 06/14/1994 | US5321306 Method for manufacturing a semiconductor device |
| 06/14/1994 | US5321303 Semiconductor device having linearly arranged semiconductor chips |
| 06/14/1994 | US5321301 Semiconductor device |
| 06/14/1994 | US5321300 Laser-broken fuse |
| 06/14/1994 | US5321298 Soi wafer fabrication by selective epitaxial growth |
| 06/14/1994 | US5321296 Semiconductor device having an interconnection layer of a polysilicon layer and a metallic layer |
| 06/14/1994 | US5321288 Nonvolatile memory array in which each cell has a single floating gate having two tunnelling windows |
| 06/14/1994 | US5321287 Semiconductor device wherein n-channel MOSFET, p-channel MOSFET and nonvolatile memory cell are formed in one chip |
| 06/14/1994 | US5321284 High frequency FET structure |
| 06/14/1994 | US5321283 High frequency JFET |
| 06/14/1994 | US5321282 Integrated circuit having a charge coupled device and MOS transistor and method for manufacturing thereof |
| 06/14/1994 | US5321281 Insulated gate semiconductor device and method of fabricating same |
| 06/14/1994 | US5321279 Base ballasting |
| 06/14/1994 | US5321278 High electron mobility transistor |
| 06/14/1994 | US5321264 Bringing internal reflection element having larger refractive index than silicon into contact with surface, introducing light of desired wavelength, measuring spectrum of emitted light, analyzing |
| 06/14/1994 | US5321260 Effusion method and an effusion cell for forming molecular beams |
| 06/14/1994 | US5321211 Integrated circuit via structure |
| 06/14/1994 | US5321210 Dielectric substrate, laminated blocks of alternating wiring layers and polyimide layers bonded to each other, electrical connections of solder pools and metal bumps on facing surfaces |
| 06/14/1994 | US5321204 Structure of charged coupled device |
| 06/14/1994 | US5320984 Method for forming a semiconductor film by sputter deposition in a hydrogen atmosphere |
| 06/14/1994 | US5320983 Spin-on glass processing technique for the fabrication of semiconductor devices |
| 06/14/1994 | US5320982 Wafer cooling method and apparatus |
| 06/14/1994 | US5320981 High accuracy via formation for semiconductor devices |
| 06/14/1994 | US5320980 Interconnection structure in semiconductor device and the method thereof |
| 06/14/1994 | US5320979 Forming insulating layer over conductive layer, connection hole on conductive layer, metal column on bottom hole, taper on sidewall by oxygen ion etching forms metal oxide layer on the surface of metal column to protect metal from etching |
| 06/14/1994 | US5320978 Selective area platinum film deposition |
| 06/14/1994 | US5320976 Transistors of cell array section are formed independently from transistol of peripheral circuit section |
| 06/14/1994 | US5320975 Doping substrate forming isolation region, delineating polysilicon lands, forming well regions on substrate, forming insulator encapsulated conductive polysilicon stud, forming self-aligned source and drain regions and contact region |
| 06/14/1994 | US5320974 Dilectric films formed on sidewalls of gate electrode are removed for self-alignment to selectively dope end portion of source and drain region of substrate, forming p-type conductivity |
| 06/14/1994 | US5320973 Method of fabricating a thin-film transistor and wiring matrix device |
| 06/14/1994 | US5320972 Method of forming a bipolar transistor |
| 06/14/1994 | US5320971 Process for obtaining high barrier Schottky diode and local interconnect |
| 06/14/1994 | US5320932 Method of forming contact holes |
| 06/14/1994 | US5320918 Optical lithographical imaging system including optical transmission diffraction devices |
| 06/14/1994 | US5320907 Crystal article and method for forming same |
| 06/14/1994 | US5320880 Radio frequency vapor deposition of mixture of silicon source, titanium tetrachloride and carrier |
| 06/14/1994 | US5320868 Pyrolysis in hydrogen |
| 06/14/1994 | US5320736 Method to electrochemically deposit compound semiconductors |
| 06/14/1994 | US5320709 Method for selective removal of organometallic and organosilicon residues and damaged oxides using anhydrous ammonium fluoride solution |
| 06/14/1994 | US5320708 Plasma etching surface projections with sulfur fluorides; depositing sulfur in recesses; controlled planarization, sublimation |
| 06/14/1994 | US5320707 Dry etching method |
| 06/14/1994 | US5320706 Removing slurry residue from semiconductor wafer planarization |
| 06/14/1994 | US5320704 Plasma etching apparatus |
| 06/14/1994 | US5320680 Primary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flow |
| 06/14/1994 | US5320315 Microscope supporting mechanism |
| 06/14/1994 | US5320250 Method for rapid dispensing of minute quantities of viscous material |
| 06/14/1994 | US5320225 Apparatus and method for securely carrying a substrate |
| 06/14/1994 | US5320218 Closed container to be used in a clean room |
| 06/14/1994 | CA1330195C Method of manufacturing a semiconductor device, in which a silicon wafer is provided at its surface with field oxide regions |
| 06/14/1994 | CA1330194C Unstrained defect-free epitaxial mismatched heterostructures and method of fabrication |
| 06/14/1994 | CA1330192C Method of forming crystals |
| 06/14/1994 | CA1330191C Method for forming crystal and crystal article obtained by said method |
| 06/09/1994 | WO1994013018A1 Thin film transistor having a triple layer dielectric gate insulator, method of fabricating such a thin film transistor and an active matrix display having a plurality of such thin film transistors |
| 06/09/1994 | WO1994013015A1 Lead frame manufacturing method |
| 06/09/1994 | WO1994013010A1 Process of shaping features of semiconductor devices |
| 06/09/1994 | WO1994013009A1 Transistor fabrication methods and methods of forming multiple layers of photoresist |
| 06/09/1994 | WO1994013008A2 Forming a layer |
| 06/09/1994 | WO1994012912A1 Metal ion reduction in bottom anti-reflective coatings for photoresists |
| 06/09/1994 | WO1994012887A1 Die carrier and test socket for leadless semiconductor die |
| 06/09/1994 | WO1994005827A3 Dry contact electroplating apparatus |
| 06/09/1994 | WO1994005455A3 Modulated-structure of pzt/pt ferroelectric thin films for non-volatile random access memories |
| 06/09/1994 | DE4341177A1 Selektives, epitaxiales Silizium für eine Innen/Außen-Basisverbindung Selective, epitaxial silicon for indoor / outdoor base compound |
| 06/09/1994 | DE4340590A1 Grabenisolation unter Verwendung dotierter Seitenwände Grave insulation using doped side walls |
| 06/09/1994 | DE4340287A1 Vertikales Schiffchen Vertical boat |
| 06/09/1994 | DE4235676A1 Chamber and chamber combination for transfer of at least one component - with a component holding element swivelled through a chamber opening |
| 06/09/1994 | CA2150573A1 Thin film transistor having a triple layer dielectric gate insulator, method of fabricating such a thin film transistor and an active matrix display having a plurality of such thin film transistors |
| 06/09/1994 | CA2149538A1 Transistor fabrication methods and methods of forming multiple layers of photoresist |
| 06/09/1994 | CA2110790A1 Compound semiconductor device and method for fabricating the same |
| 06/08/1994 | EP0600851A2 Robot apparatus |
| 06/08/1994 | EP0600850A1 DRAM cell structure with capacitor over bit line and method of making the same |
| 06/08/1994 | EP0600814A1 Transistor with deep submicron channel |
| 06/08/1994 | EP0600810A1 Ovenvoltage protection device |
| 06/08/1994 | EP0600750A2 Circuit assembly having interposer lead frame |
| 06/08/1994 | EP0600747A2 Method for forming a fine pattern |
| 06/08/1994 | EP0600708A1 Reflection type mask and manufacture of microdevices using the same |
| 06/08/1994 | EP0600694A1 Improved transistor device layout |
| 06/08/1994 | EP0600693A2 Selective trenching and emitter base self alignment structure |
| 06/08/1994 | EP0600672A2 A trimming and forming machine and a die-punch set for the same |
| 06/08/1994 | EP0600664A2 A dry etching method of a silicon thin film |
| 06/08/1994 | EP0600658A2 Epitaxial magnesium oxide as a buffer layer on (111)tetrahedral semiconductors |
| 06/08/1994 | EP0600643A2 Article comprising a ballistic heterojunction bipolar transistor |
| 06/08/1994 | EP0600604A1 Apparatus and process for bare chip test and burn-in |
| 06/08/1994 | EP0600596A2 Improved bipolar transistor |
| 06/08/1994 | EP0600516A1 Diffusion furnace boat assembly and wafer support |
| 06/08/1994 | EP0600505A1 Method of manufacturing a semiconductor device comprising a titanium silicide layer |
| 06/08/1994 | EP0600503A1 Vapour generator for chemical vapour deposition systems |