| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/05/1994 | US5326649 X-ray transmitting membrane for mask in x-ray lithography and method for preparing the same |
| 07/05/1994 | US5326643 Terminally unsaturated polyimide |
| 07/05/1994 | US5326490 Cleaning solution, fluoroalkylsulfonamide surfactant |
| 07/05/1994 | US5326431 Dry etching method utilizing (SN)x polymer mask |
| 07/05/1994 | US5326428 Method for testing semiconductor circuitry for operability and method of forming apparatus for testing semiconductor circuitry for operability |
| 07/05/1994 | US5326427 Method of selectively etching titanium-containing materials on a semiconductor wafer using remote plasma generation |
| 07/05/1994 | US5326426 Undercut membrane mask for high energy photon patterning |
| 07/05/1994 | US5326424 Cubic boron nitride phosphide films |
| 07/05/1994 | US5326406 Method of cleaning semiconductor substrate and apparatus for carrying out the same |
| 07/05/1994 | US5326404 Plasma processing apparatus |
| 07/05/1994 | US5326316 Coupling type clean space apparatus |
| 07/05/1994 | US5326170 Wireless temperature calibration device and method |
| 07/05/1994 | US5326035 For delivering a flow of ultra pure water to the surface of an object |
| 07/05/1994 | US5326015 Wire bonder tail length monitor |
| 07/05/1994 | US5326014 Head of ultrasonic wire bonding apparatus and bonding method |
| 07/05/1994 | EP0619872A4 Piezoresistive cantilever for atomic force microscopy. |
| 07/05/1994 | CA1330601C Apparatus for semiconductor process including photo-excitation process |
| 06/30/1994 | DE4344278A1 Semiconductor device with insulated gate |
| 06/30/1994 | DE4341302A1 Implanting deep buried impurity zone in semiconductor and resist compsn. |
| 06/29/1994 | EP0604407A2 Photonic-integrated-circuit fabrication process |
| 06/29/1994 | EP0604393A2 Diluted anhydrous hydrogen fluoride gas generator for use in dry etching apparatus |
| 06/29/1994 | EP0604392A1 Insulated gate semiconductor device |
| 06/29/1994 | EP0604348A2 A method for thinning SOI films having improved thickness uniformity |
| 06/29/1994 | EP0604347A2 Electrostatic discharge protection device |
| 06/29/1994 | EP0604344A1 Method and apparatus for optical emission end point detection in plasma etching processes |
| 06/29/1994 | EP0604343A1 X-Ray beam scanning method for producing low distortion or constant distortion in X-ray Proximity printing |
| 06/29/1994 | EP0604342A2 Fabrication method for vacuum microelectronic devices |
| 06/29/1994 | EP0604234A2 Semiconductor device manufacturing method |
| 06/29/1994 | EP0604231A1 Semiconductor device applicable for liquid crystal display device, and process for its fabrication |
| 06/29/1994 | EP0604205A2 Lead frame and method for manufacturing it |
| 06/29/1994 | EP0604194A2 Structure to provide junction breakdown stability for deep trench devices |
| 06/29/1994 | EP0604163A2 Transistor structure for improved base-collector junction characteristics |
| 06/29/1994 | EP0604096A1 Fused quartz diffusion tubes for semiconductor manufacture |
| 06/29/1994 | EP0604066A1 Fluid flow control method and apparatus for an ion implanter |
| 06/29/1994 | EP0604061A1 Semiconductor fabrication |
| 06/29/1994 | EP0604054A1 Electron beam lithography with reduced charging effects |
| 06/29/1994 | EP0604038A2 Plasticized polyetherimide adhesive compositions |
| 06/29/1994 | EP0604036A2 Method for depositing aluminum layers on insulating oxide substrates |
| 06/29/1994 | EP0604011A1 Ion implantation apparatus and method |
| 06/29/1994 | EP0603973A2 Method of manufacturing a semiconductor device provided with a number of pn junctions separated each time by depression, and semiconductor device provided with a number of pn junctions separated each time by a depression. |
| 06/29/1994 | EP0603972A1 Imaging device with an electrostatic protection circuit |
| 06/29/1994 | EP0603971A2 Method of manufacturing a semiconductor device with passivated side and semiconductor device with passivated side |
| 06/29/1994 | EP0603928A1 Hybrid circuit |
| 06/29/1994 | EP0603864A2 Surface potential control in plasma processing of materials |
| 06/29/1994 | EP0603849A2 Method for producing a semiconducteur substrate by using a bonding process, and semiconductor stubstrate produced by the same |
| 06/29/1994 | EP0603835A1 Piezoelectric actuator having strain gage |
| 06/29/1994 | EP0603782A2 Method for producing a thin film resistor |
| 06/29/1994 | EP0603780A2 Method of growing compound semiconductor on silicon wafer |
| 06/29/1994 | EP0603737A2 Hybrid bipolar/field-effect power transistor in group III-V material system |
| 06/29/1994 | EP0603711A2 IPG transistor and semiconductor integrated device; production methods thereof |
| 06/29/1994 | EP0603623A2 Joining of layers and multi-layer circuit boards |
| 06/29/1994 | EP0603622A1 Thin-film transistor array and method of fabricating the same |
| 06/29/1994 | EP0603588A2 Process for coating organic polymeric substrate with copper |
| 06/29/1994 | EP0603514A2 Method for thinning a semiconductor wafer |
| 06/29/1994 | EP0603477A1 Method of forming a dielectric layer |
| 06/29/1994 | EP0603461A2 Formation of 3-Dimensional silicon silicide structures |
| 06/29/1994 | EP0603438A1 Suction tables for a numerical control router |
| 06/29/1994 | EP0603437A1 Semiconductor device having reduced parasitic capacitance and method of fabrication |
| 06/29/1994 | EP0603360A1 Methods of forming a local interconnect and a high resistor polysilicon load |
| 06/29/1994 | EP0603358A1 Thermal treatment of a semiconductor wafer |
| 06/29/1994 | EP0603296A1 Solder bump fabrication method and solder bumps formed thereby. |
| 06/29/1994 | EP0603282A1 Method of making co-fired, multilayer substrates |
| 06/29/1994 | EP0603198A1 Moisture relief for chip carriers |
| 06/29/1994 | CN1088712A Semiconductor device and method for forming the same |
| 06/29/1994 | CN1025261C Semiconductor integrated circuit chip having identification circuit therein |
| 06/28/1994 | US5325476 Method of converting area data into path data |
| 06/28/1994 | US5325338 Dual port memory, such as used in color lookup tables for video systems |
| 06/28/1994 | US5325327 Non-volatile memory, semiconductor memory device having the non-volatile memory |
| 06/28/1994 | US5325261 Electrostatic chuck with improved release |
| 06/28/1994 | US5325180 Apparatus for identifying and distinguishing temperature and system induced measuring errors |
| 06/28/1994 | US5325074 Oscillator with supply voltage changeover according to activated and disabled states of a microcomputer |
| 06/28/1994 | US5325054 Method and system for screening reliability of semiconductor circuits |
| 06/28/1994 | US5324984 Semiconductor device with improved electrode structure |
| 06/28/1994 | US5324983 Semiconductor device |
| 06/28/1994 | US5324981 Semiconductor device |
| 06/28/1994 | US5324978 Semiconductor device having an improved breakdown voltage-raising structure |
| 06/28/1994 | US5324974 Silicon nitride layer of critical thickness to block undesiredion diffusion |
| 06/28/1994 | US5324972 Semiconductor non-volatile memory device and method of manufacturing the same |
| 06/28/1994 | US5324971 Power semiconductor device having over voltage protection |
| 06/28/1994 | US5324970 Interconnection structure in semiconductor device |
| 06/28/1994 | US5324969 High-breakdown voltage field-effect transistor |
| 06/28/1994 | US5324967 Turn off type semiconductor device, method of producing the same and the power conversion apparatus employing the same |
| 06/28/1994 | US5324960 Dual-transistor structure and method of formation |
| 06/28/1994 | US5324953 Reduced-projection exposure system with chromatic aberration correction system including diffractive lens such as holographic lens |
| 06/28/1994 | US5324920 Heat treatment apparatus |
| 06/28/1994 | US5324804 Positive photoresists, high resolution, good contrast |
| 06/28/1994 | US5324690 Semiconductor device having a ternary boron nitride film and a method for forming the same |
| 06/28/1994 | US5324689 Critical dimension control with a planarized underlayer |
| 06/28/1994 | US5324688 Method of fabricating a semiconductor acceleration sensor |
| 06/28/1994 | US5324687 Method for thinning of integrated circuit chips for lightweight packaged electronic systems |
| 06/28/1994 | US5324686 Method of manufacturing semiconductor device using hydrogen as a diffusion controlling substance |
| 06/28/1994 | US5324685 Method for fabricating a multilayer epitaxial structure |
| 06/28/1994 | US5324684 Gas phase doping of semiconductor material in a cold-wall radiantly heated reactor under reduced pressure |
| 06/28/1994 | US5324683 Method of forming a semiconductor structure having an air region |
| 06/28/1994 | US5324682 Method of making an integrated circuit capable of low-noise and high-power microwave operation |
| 06/28/1994 | US5324681 Method of making a 3-dimensional programmable antifuse for integrated circuits |
| 06/28/1994 | US5324679 Method for manufacturing a semiconductor device having increased surface area conductive layer |
| 06/28/1994 | US5324676 Method for forming a dual thickness dielectric floating gate memory cell |
| 06/28/1994 | US5324675 Method of producing semiconductor devices of a MONOS type |
| 06/28/1994 | US5324674 Fabrication method for a self-aligned thin film transistor having reduced end leakage and device formed thereby |