| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/03/1994 | EP0608890A1 Machining error correction apparatus |
| 08/03/1994 | EP0608875A1 System for pulling-up monocrystal and method of exhausting silicon oxide |
| 08/03/1994 | EP0608745A2 Method of producing MOS devices |
| 08/03/1994 | EP0608657A1 Apparatus and method for preparing shape data for proximity correction |
| 08/03/1994 | EP0608639A1 Ion implant devices |
| 08/03/1994 | EP0608633A2 Method for multilayer CVD processing in a single chamber |
| 08/03/1994 | EP0608628A2 Method of manufacturing semiconductor device having multilevel interconnection structure |
| 08/03/1994 | EP0608620A1 Vacuum Processing apparatus having improved throughput |
| 08/03/1994 | EP0608603A1 Improved copper-based metallizations for hybrid integrated circuits |
| 08/03/1994 | EP0608602A2 Reprogrammable electronic assemblies |
| 08/03/1994 | EP0608551A1 Method of forming ohmic contact by sputtering a TiN layer for LSI circuit and LSI circuit |
| 08/03/1994 | EP0608503A2 A semiconductor device and its manufacturing method |
| 08/03/1994 | EP0608376A1 Voltage variable capacitor |
| 08/03/1994 | EP0608335A1 Structure for suppression of field inversion caused by charge build-up in the dielectric |
| 08/03/1994 | CN1090427A Semiconductor device and method for forming the same |
| 08/03/1994 | CN1090426A Semiconductor device and method for manufacturing the same |
| 08/03/1994 | CN1090344A Vertical boat and wafer support |
| 08/02/1994 | US5335259 X-ray exposure apparatus |
| 08/02/1994 | US5335219 Homogeneous composition of microcrystalline semiconductor material, semiconductor devices and directly overwritable memory elements fabricated therefrom, and arrays fabricated from the memory elements |
| 08/02/1994 | US5335203 Semiconductor integrated circuit device with internal voltage drop circuits |
| 08/02/1994 | US5335138 High dielectric constant capacitor and method of manufacture |
| 08/02/1994 | US5334874 Electronic device package |
| 08/02/1994 | US5334873 Semiconductor packages with centrally located electrode pads |
| 08/02/1994 | US5334872 Encapsulated semiconductor device having a hanging heat spreading plate electrically insulated from the die pad |
| 08/02/1994 | US5334871 Field effect transistor signal switching device |
| 08/02/1994 | US5334870 Complementary MIS transistor and a fabrication process thereof |
| 08/02/1994 | US5334869 Semiconductor memory device |
| 08/02/1994 | US5334868 Sidewall charge-coupled device with trench isolation |
| 08/02/1994 | US5334867 Image sensor device with insulation film |
| 08/02/1994 | US5334866 Integrated circuit device with functions selectable by changing interconnection pattern |
| 08/02/1994 | US5334865 MODFET structure for threshold control |
| 08/02/1994 | US5334864 Semiconductors |
| 08/02/1994 | US5334863 Semiconductor memory device having a meshlike grounding wiring |
| 08/02/1994 | US5334862 Thin film transistor (TFT) loads formed in recessed plugs |
| 08/02/1994 | US5334860 Panel having thin film element formed thereon |
| 08/02/1994 | US5334859 Thin-film transistor having source and drain electrodes insulated by an anodically oxidized film |
| 08/02/1994 | US5334858 Semiconductor device of tab structure, capable of ensuring ease of testing of same in final form |
| 08/02/1994 | US5334857 Semiconductor device with test-only contacts and method for making the same |
| 08/02/1994 | US5334846 Correction of charged particle beam exposure deflection by detecting stage position and a position detection mark |
| 08/02/1994 | US5334844 Optical illumination and inspection system for wafer and solar cell defects |
| 08/02/1994 | US5334829 Package for solid state imager with heating means to repair imager lattice defect |
| 08/02/1994 | US5334804 Wire interconnect structures for connecting an integrated circuit to a substrate |
| 08/02/1994 | US5334803 Semiconductor device and method of producing the same |
| 08/02/1994 | US5334556 Method for improving gate oxide integrity using low temperature oxidation during source/drain anneal |
| 08/02/1994 | US5334555 Controlling flow rate of silane gas and level of high frequency electricity yields film which gives preferred ultra violet absorption and transmission rates |
| 08/02/1994 | US5334554 Forming dielectric silicon dioxide layer over patterned metal layer, heating during nitrogen exposure, then spinning on glass layer, curing, for miniaturized integrated circuits |
| 08/02/1994 | US5334552 Forming wiring layer over dielectric film on substrate surface covering with silicon dioxide film, then forming fluorine-containing silicon dioxide and flattening films, dry etching of flattening film |
| 08/02/1994 | US5334550 Method of producing a self-aligned window at recessed intersection of insulating regions |
| 08/02/1994 | US5334549 Forming both bipolar and p-channel transistors in same recess |
| 08/02/1994 | US5334548 Forming dynamic random access memory cells having both storage capicator and access transistor along sides of semiconductor pillar |
| 08/02/1994 | US5334545 Covering silicon oxide barrier layer with polysilicon and masking layers with openings which expose barrier regions, then depositing cobalt on masking layer and heating to react cobalt with polysilicon |
| 08/02/1994 | US5334544 Forming electroconductive thin aluminum film over dielectric transparent substrate, then metallic(other than aluminum) film and anodic oxidation of it yields dielectric, then covering with silicon nitride film |
| 08/02/1994 | US5334542 Method of forming T-shaped electrode |
| 08/02/1994 | US5334541 Method of fabricating an integrated circuit with lines of critical width extending in the astigmatically preferred direction of the lithographic tool |
| 08/02/1994 | US5334484 Photopolymerizable composition and photopolymerizable element |
| 08/02/1994 | US5334467 Gray level mask |
| 08/02/1994 | US5334423 Controlled glow discharge deposition |
| 08/02/1994 | US5334422 Electrical connector having energy-formed solder stops and methods of making and using the same |
| 08/02/1994 | US5334332 Mixture of hydroxylamine, alkanolamine and chelate compound |
| 08/02/1994 | US5334306 Metallized paths on diamond surfaces |
| 08/02/1994 | US5334284 Etching with aqueous solution of nitric acid and cerium ammonium nitrate, roughening with solution of acetic acid, nitric acid, hydrobromic acid |
| 08/02/1994 | US5334283 Using oxygen to contert graphitic areas to gas |
| 08/02/1994 | US5334282 Forming plurality of unit patterns by shaping electron beam by means of an aperture; varying transmittance with second aperture to selectively control exposure intensity |
| 08/02/1994 | US5334281 Method of forming thin silicon mesas having uniform thickness |
| 08/02/1994 | US5334280 Suppression of graphite formation during laser etching of diamond |
| 08/02/1994 | US5334278 Controlling solution concentration by proper temperature profile |
| 08/02/1994 | US5334273 Wafer bonding using trapped oxidizing vapor |
| 08/02/1994 | US5334257 Treatment object supporting device |
| 08/02/1994 | US5334251 Method of and apparatus for controlling temperature in the processing of a substrate |
| 08/02/1994 | US5334250 Vapor deposition apparatus for using solid starting materials |
| 08/02/1994 | US5333986 Transfer apparatus |
| 08/02/1994 | US5333413 Automatic wafer lapping apparatus |
| 08/02/1994 | US5333375 Substrate lead strip mounting machine and method |
| 08/02/1994 | CA2010480C Method and apparatus for facilitating loading of a panel processing machine and positioning of artwork on a work surface thereon |
| 08/02/1994 | CA1331163C Multiple-processing and contamination-free plasma etching system |
| 07/28/1994 | DE4402216A1 Halbleiterbauelement mit Kondensatoren und zu seiner Herstellung geeignetes Verfahren A semiconductor device comprising capacitors and suitable method for its preparation |
| 07/27/1994 | EP0608090A1 Semiconductor device which can be applied to liquid crystal display apparatus and method of manufacturing such a semiconductor device |
| 07/27/1994 | EP0608075A2 Non-volatile semiconductor memories |
| 07/27/1994 | EP0607967A1 Production of thin films of a lead titanate system |
| 07/27/1994 | EP0607962A1 Photosensitive resin composition |
| 07/27/1994 | EP0607940A2 Method of surface protection of a semiconductor wafer during polishing |
| 07/27/1994 | EP0607936A1 Electrical junction device with lightly doped buffer region to precisely locate a P-N junction |
| 07/27/1994 | EP0607935A2 Heterojunction bipolar transistor fabrication method with low temperature base growth |
| 07/27/1994 | EP0607899A2 Positive photoresist composition |
| 07/27/1994 | EP0607874A1 Solid state image sensor |
| 07/27/1994 | EP0607838A2 Integrated power resistor device |
| 07/27/1994 | EP0607836A2 Process for manufacturing silicon-germanium bipolar heterojunction transistors |
| 07/27/1994 | EP0607820A2 Method for producing semiconductor device having metal silicide layer on diffusion region |
| 07/27/1994 | EP0607808A2 Method of etching semiconductor substrate |
| 07/27/1994 | EP0607797A1 An apparatus and method for enhanced inductive coupling to plasmas with reduced sputter contamination |
| 07/27/1994 | EP0607732A2 Structure and method for a superbarrier to prevent diffusion between a noble and a non-noble metal |
| 07/27/1994 | EP0607730A1 Method of direct transferring of electrically conductive elements into a substrate |
| 07/27/1994 | EP0607729A2 High performance MESFET with multiple quantum wells |
| 07/27/1994 | EP0607691A2 Method for forming an insulating layer |
| 07/27/1994 | EP0607684A2 Elimination of local loading effect in dielectric planarization |
| 07/27/1994 | EP0607680A2 Formation of microstructures using a preformed photoresist sheet |
| 07/27/1994 | EP0607674A1 Optical lithographical imaging system including optical transmission diffraction devices |
| 07/27/1994 | EP0607662A1 Method for selectively etching GaAs over AlGaAs |
| 07/27/1994 | EP0607658A2 MOSFET manufacture |
| 07/27/1994 | EP0607657A1 Programmable logic device and method of operation |