| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/31/1994 | US5316794 Method for servicing vacuum chamber using non-reactive gas-filled maintenance enclosure |
| 05/31/1994 | US5316793 Multilayer element formed by vapor deposition of coatings by injection of precursor gas |
| 05/31/1994 | US5316788 Applying solder to high density substrates |
| 05/31/1994 | US5316787 Forming integrated circuits by lamination and forming apertures, hydrolysis and baking |
| 05/31/1994 | US5316620 Polishing by rotation, depositing a wafer in the cylinder, moving the wafer |
| 05/31/1994 | US5316618 Anisotropic etching multilayer element and masking |
| 05/31/1994 | US5316617 Exposing alumina covered with a patterned mask to an ion beam in an etching gas atmosphere |
| 05/31/1994 | US5316616 Dry etching with hydrogen bromide or bromine |
| 05/31/1994 | US5316610 Bonding apparatus |
| 05/31/1994 | US5316579 Using rotating turbibe blades |
| 05/31/1994 | US5316472 Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus |
| 05/31/1994 | US5316463 Encapsulating molding equipment |
| 05/31/1994 | US5316278 Clamping ring apparatus for processing semiconductor wafers |
| 05/31/1994 | US5316276 Thickness compensation actuator system |
| 05/31/1994 | US5316204 Method for bonding lead with electrode of electronic device |
| 05/31/1994 | US5316201 Bonding apparatus |
| 05/31/1994 | US5316035 Capacitive proximity monitoring device for corrosive atmosphere environment |
| 05/31/1994 | US5315793 System for precision cleaning by jet spray |
| 05/31/1994 | US5315766 Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol |
| 05/31/1994 | US5315749 Method for holding substrates |
| 05/31/1994 | CA2051174C Polyimide adhesion on reactive metals |
| 05/31/1994 | CA1329952C Multi-layer superconducting circuit substrate and process for manufacturing same |
| 05/27/1994 | CA2028696A1 Low temperature ozonolysis of silicon and ceramic oxide precursor polymers to ceramic coatings |
| 05/26/1994 | WO1994012009A1 Device for bending leads of a lead frame |
| 05/26/1994 | WO1994011944A1 Electrostatic wafer clamp |
| 05/26/1994 | WO1994011903A1 Linear voltage-controlled resistance element |
| 05/26/1994 | WO1994011902A1 Lead frame and semiconductor device using same |
| 05/26/1994 | WO1994011901A1 Apparatus for forming low-temperature oxide films and method of forming low-temperature oxide films |
| 05/26/1994 | WO1994011900A1 Single diffusion process for fabricating semiconductor devices |
| 05/26/1994 | WO1994011899A1 Heat treatment apparatus |
| 05/26/1994 | WO1994011898A1 Load lock chamber for vertical type heat treatment apparatus |
| 05/26/1994 | WO1994011889A1 Magnetoresistive structure with alloy layer |
| 05/26/1994 | WO1994011880A1 A floating gate memory array with latches having improved immunity to write disturbance, and with storage latches |
| 05/26/1994 | WO1994011788A1 Method of producing microstructures |
| 05/26/1994 | WO1994011787A1 Method of deposition |
| 05/26/1994 | WO1994011786A1 Photomask blanks |
| 05/26/1994 | WO1994011745A1 Method and apparatus for measuring film thickness |
| 05/26/1994 | WO1994011698A1 Enhanced resolution wafer thickness measurement system |
| 05/26/1994 | WO1994011274A1 Thin sheet storage container made of resin |
| 05/26/1994 | WO1994011150A1 Heat sink and method of making |
| 05/26/1994 | WO1994011117A1 Method for applying nonmetal coatings to the surface of a part |
| 05/26/1994 | DE4339481A1 Phase-shift mask for semiconductor device mfr. - has pattern contg. two transparent sections and phase reversal introduced by one section of pattern deposited as metal silicide, nitride or oxide film |
| 05/26/1994 | DE4338778A1 Prodn. of multilayered resist pattern for semiconductor substrates - by forming lower resist film on substrate, forming intermediate layer, then forming upper resist film, etc. |
| 05/26/1994 | DE4337889A1 Prodn. of capacitor in storage appts. - by depositing poly-silicon layer on substrate, forming silicon oxide layer, tantalum@ layer and then tantalum oxide layer |
| 05/26/1994 | DE4241045C1 Verfahren zum anisotropen Ätzen von Silicium A method for anisotropic etching of silicon |
| 05/26/1994 | DE4239039A1 Acquisition of control data from semiconductor component bond pads - using computer to convert video monitor and X-Y table co-ordinates into bond pad global co-ordinates |
| 05/26/1994 | CA2149645A1 Method of deposition |
| 05/26/1994 | CA2149250A1 Linear voltage-controlled resistance element |
| 05/25/1994 | EP0598711A2 MESFET source/drain structure |
| 05/25/1994 | EP0598672A1 Method of making a rim-type phase-shift mask |
| 05/25/1994 | EP0598654A1 Procedure and circuit for fuse blowing in an integrated circuit |
| 05/25/1994 | EP0598633A1 Handling and processing system for workpieces in individual boxes |
| 05/25/1994 | EP0598596A1 Non-volatile ferroelectric memory with folded bit lines and method of making same |
| 05/25/1994 | EP0598555A1 Process for forming input/output bumps |
| 05/25/1994 | EP0598495A2 Programmable logic devices with spare circuits for replacement of defects |
| 05/25/1994 | EP0598477A1 Semiconductor device and method of manufacturing the same |
| 05/25/1994 | EP0598438A1 Method for diffusing a dopant into a semiconductor |
| 05/25/1994 | EP0598422A1 Method of forming a Ti and a TiN layer on a semiconductor body by a sputtering process, comprising an additional step of cleaning the target |
| 05/25/1994 | EP0598410A1 A method of manufacturing a semiconductor device |
| 05/25/1994 | EP0598409A1 A method of manufacturing a semiconductor device |
| 05/25/1994 | EP0598406A1 Method of and apparatus for producing register mark pattern |
| 05/25/1994 | EP0598394A2 Method and apparatus for manufacturing a liquid crystal display substrate, and apparatus and method for evaluating semiconductor crystals |
| 05/25/1994 | EP0598362A1 Clamping ring and method and apparatus for using same |
| 05/25/1994 | EP0598230A2 Method of cleaning the surface of a silicon substrate |
| 05/25/1994 | EP0598190A1 Apparatus for polishing wafer |
| 05/25/1994 | EP0598182A1 Method and apparatus for rapid dispensing of minute quantities of viscous materials |
| 05/25/1994 | EP0598168A1 Formation of direct contacts in high-density MOS/CMOS processes |
| 05/25/1994 | EP0598128A1 Plasma processing apparatus |
| 05/25/1994 | EP0598124A1 System for supplying pure water and cleaning method therefor |
| 05/25/1994 | EP0598101A1 Process for forming synapses in neural networks and resistor therefor |
| 05/25/1994 | EP0598006A1 Solder plate reflow method for forming a solder bump on a circuit trace. |
| 05/25/1994 | EP0588792A4 Method and apparatus for doping silicon wafers using a solid dopant source and rapid thermal processing |
| 05/25/1994 | EP0584252A4 A process for depositing a sio x? film having reduced intrinsic stress and/or reduced hydrogen content |
| 05/25/1994 | EP0577779A4 Multichip integrated circuit module and method of fabrication |
| 05/25/1994 | EP0548108B1 Circuit arrangement for testing a semiconductor store by means of parallel tests with different test bit patterns |
| 05/25/1994 | EP0449821B1 Chemical vapor deposition reactor and method for use thereof |
| 05/25/1994 | EP0357616B1 Process and device for compensating errors of measurement |
| 05/25/1994 | EP0285668B1 Thin film formation apparatus |
| 05/25/1994 | CN1087208A Contamination removal and minority carrier lifetime improvement in silicon |
| 05/25/1994 | CN1024731C Semiconductor device comprising support and manufacturing method thereof |
| 05/24/1994 | US5315629 Ringfield lithography |
| 05/24/1994 | US5315598 Method to reduce burn-in time and inducing infant failure |
| 05/24/1994 | US5315554 Dynamic random access memory device with intermediate voltage generator interrupting power supply in test operation |
| 05/24/1994 | US5315552 Memory module, method for control thereof and method for setting fault bit table for use therewith |
| 05/24/1994 | US5315548 Column selecting circuit in semiconductor memory device |
| 05/24/1994 | US5315546 Non-volatile semiconductor memory using a thin film transistor |
| 05/24/1994 | US5315542 Bit line arrangement for integrated circuits |
| 05/24/1994 | US5315541 Segmented column memory array |
| 05/24/1994 | US5315535 Automatic router capable of searching for a new wiring with reference to connection failures |
| 05/24/1994 | US5315473 Method of electrostatically clamping a workpiece |
| 05/24/1994 | US5315349 Projection aligner |
| 05/24/1994 | US5315182 Semiconductor integrated circuit having annular power supply with plural lines |
| 05/24/1994 | US5315178 IC which can be used as a programmable logic cell array or as a register file |
| 05/24/1994 | US5315167 Voltage burn-in scheme for BICMOS circuits |
| 05/24/1994 | US5315166 Substrate voltage generator and method therefor in a semiconductor device having selectively activated internal stepped-down power supply voltages |
| 05/24/1994 | US5315157 Semiconductor integrated circuit device having voltage level converting circuits |
| 05/24/1994 | US5315156 For use in high frequency power gain circuits |
| 05/24/1994 | US5315155 Electronic package with stress relief channel |
| 05/24/1994 | US5315151 Transistor structure utilizing a deposited epitaxial base region |
| 05/24/1994 | US5315150 Semiconductor device and method of manufacturing the same |