| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 06/08/1994 | EP0600501A1 Resin molded semiconductor device |
| 06/08/1994 | EP0600488A2 Lead frame capacitor and capacitively-coupled isolator circuit using same |
| 06/08/1994 | EP0600464A1 Apparatus and method for the turbulent mixing of gases |
| 06/08/1994 | EP0600449A2 Fabrication method of compound semiconductor integrated circuit device |
| 06/08/1994 | EP0600436A2 Semiconductor device, circuit and method of manufacture |
| 06/08/1994 | EP0600429A1 Magnetron sputtering device and method for thin film coating |
| 06/08/1994 | EP0600423A1 Contact hole filling in a semiconductor device by irradiation with plasma of inert gas ions |
| 06/08/1994 | EP0600392A2 Process for reinforcing a semiconductor wafer and a reinforced semiconductor wafer |
| 06/08/1994 | EP0600365A1 Electrode for use in plasma etching |
| 06/08/1994 | EP0600303A2 Method and apparatus for fabrication of dielectric thin film |
| 06/08/1994 | EP0600289A2 Semiconductor chip removal process and apparatus |
| 06/08/1994 | EP0600276A2 Process for production of a laterally limited monocrystal area by selective epitaxy and its application for production of a bipolar transistor as well as well as a MOS-transistor |
| 06/08/1994 | EP0600229A1 Power semiconductor device with protective means |
| 06/08/1994 | EP0600184A2 Semiconductor memory device having dual word line structure |
| 06/08/1994 | EP0600176A1 Method for forming an electrical isolation structure in an integrated circuit |
| 06/08/1994 | EP0600149A2 Method of making a self aligned static induction transistor |
| 06/08/1994 | EP0600063A1 Method of manufacturing cmos semiconductor components with local interconnects. |
| 06/08/1994 | EP0599991A1 Process for forming low resistivity titanium nitride films. |
| 06/08/1994 | EP0599937A1 Method and apparatus for cleaving semiconductor wafers. |
| 06/08/1994 | EP0585376A4 Integrated circuit chip carrier |
| 06/08/1994 | EP0543009B1 Process for purifying nitrogen trifluoride gas |
| 06/08/1994 | CN1087751A Method and structure for forming electrical isolation in an integrated circuit |
| 06/08/1994 | CN1087750A Laser process |
| 06/08/1994 | CN1024980C Non-photographic method for patterning organic polymer films |
| 06/08/1994 | CN1024929C Deposition feedstock suseful in fabrication of hydrogenated amorphous silicon alloys for photovoltaic devices and other semiconductor devices |
| 06/07/1994 | US5319658 Solid solution semiconductor laser element material and laser element |
| 06/07/1994 | US5319605 Arrangement of word line driver stage for semiconductor memory device |
| 06/07/1994 | US5319598 Nonvolatile serially programmable devices |
| 06/07/1994 | US5319594 Semiconductor memory device including nonvolatile memory cells, enhancement type load transistors, and peripheral circuits having enhancement type transistors |
| 06/07/1994 | US5319593 Memory array with field oxide islands eliminated and method |
| 06/07/1994 | US5319570 Control of large scale topography on silicon wafers |
| 06/07/1994 | US5319522 Encapsulated product and method of manufacture |
| 06/07/1994 | US5319353 Alarm display system for automatic test handler |
| 06/07/1994 | US5319319 Low drift resistor structure for amplifiers |
| 06/07/1994 | US5319318 Gain control circuit and semiconductor device |
| 06/07/1994 | US5319262 Low power TTL/CMOS receiver circuit |
| 06/07/1994 | US5319247 Multiple layers of silicon oxide to provide flattened surface |
| 06/07/1994 | US5319246 Semiconductor device having multi-layer film structure |
| 06/07/1994 | US5319245 Local interconnect for integrated circuits |
| 06/07/1994 | US5319240 Three dimensional integrated device and circuit structures |
| 06/07/1994 | US5319239 Polysilicon-collector-on-insulator polysilicon-emitter bipolar |
| 06/07/1994 | US5319238 Programmable interconnect structures and programmable integrated circuits |
| 06/07/1994 | US5319236 Semiconductor device equipped with a high-voltage MISFET |
| 06/07/1994 | US5319235 Monolithic IC formed of a CCD, CMOS and a bipolar element |
| 06/07/1994 | US5319234 C-BiCMOS semiconductor device |
| 06/07/1994 | US5319232 Transistor having a lightly doped region |
| 06/07/1994 | US5319231 Insulated gate semiconductor device having an elevated plateau like portion |
| 06/07/1994 | US5319230 Non-volatile storage device |
| 06/07/1994 | US5319229 Semiconductor nonvolatile memory with wide memory window and long data retention time |
| 06/07/1994 | US5319228 Semiconductor memory device with trench-type capacitor |
| 06/07/1994 | US5319227 Low-leakage JFET having increased top gate doping concentration |
| 06/07/1994 | US5319224 Integrated circuit device having a geometry to enhance fabrication and testing and manufacturing method thereof |
| 06/07/1994 | US5319223 Electron supply layer of indium-aluminum-arsenic alloy and schottky contact layer of indium-gallium-aluminum phosphide |
| 06/07/1994 | US5319212 Method of monitoring ion beam current in ion implantation apparatus for use in manufacturing semiconductors |
| 06/07/1994 | US5319197 Process for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the same |
| 06/07/1994 | US5319158 Coil integrated semi-conductor device and method of making the same |
| 06/07/1994 | US5318928 Method for the surface passivation of sensors using an in situ sputter cleaning step prior to passivation film deposition |
| 06/07/1994 | US5318927 Methods of chemical-mechanical polishing insulating inorganic metal oxide materials |
| 06/07/1994 | US5318926 Chips having a cavity which exposes the lead frame |
| 06/07/1994 | US5318925 Method of manufacturing a self-aligned interlayer contact in a semiconductor device |
| 06/07/1994 | US5318924 Nitridation of titanium-tungsten interconnects |
| 06/07/1994 | US5318923 Method for forming a metal wiring layer in a semiconductor device |
| 06/07/1994 | US5318922 Method for manufacturing a semiconductor device |
| 06/07/1994 | US5318921 Having closely spaced conductive lines |
| 06/07/1994 | US5318920 Method for manufacturing a capacitor having a rough electrode surface |
| 06/07/1994 | US5318919 Manufacturing method of thin film transistor |
| 06/07/1994 | US5318917 Method of fabricating semiconductor device |
| 06/07/1994 | US5318916 Vertical heterojunction bipolar transistors |
| 06/07/1994 | US5318915 Method for forming a p-n junction in silicon carbide |
| 06/07/1994 | US5318877 An imageable layer on facings comprising a hydrosilated silicon-incorporated polystyrene-diene copolymer which forming silicon oxide to resist etching; oxidation resistance |
| 06/07/1994 | US5318876 Radiation-sensitive mixture containing acid-labile groups and production of relief patterns |
| 06/07/1994 | US5318868 Photomask and method for manufacturing semiconductor device using photomask |
| 06/07/1994 | US5318857 Low temperature ozonolysis of silicon and ceramic oxide precursor polymers to ceramic coatings |
| 06/07/1994 | US5318809 Apparatus for depositing a material on a substrate by chemical vapor deposition |
| 06/07/1994 | US5318800 Method of forming high temperature thermally stable micron metal oxide coatings on substrates and improved metal oxide coated products |
| 06/07/1994 | US5318761 Process for preparing silicon carbide powder for use in semiconductor equipment |
| 06/07/1994 | US5318744 Process for producing ceramic sintered body having metallized via hole |
| 06/07/1994 | US5318706 Purifying by diffusion through a resin membrane |
| 06/07/1994 | US5318687 Controlling grain size of gold layer by inclusion of arsenic |
| 06/07/1994 | US5318668 Etching silicon nitride layer with mixed gas of hydrogen bromide and chlorine trifluoride; preventing deposition of silicon tetrabromide by producing volatile silicon dibromide difluoride |
| 06/07/1994 | US5318667 Method and apparatus for dry etching |
| 06/07/1994 | US5318666 Forming n-p junction; dry reactive etching to form via |
| 06/07/1994 | US5318665 Method for etching polysilicon film |
| 06/07/1994 | US5318663 Providing ultra-thin silicon on insulator films having self-aligned isolation regions between active device regions |
| 06/07/1994 | US5318662 Masking copper layer, introducing halogen radical, activating with non-pulsed light, converting copper to halide product, washing to remove |
| 06/07/1994 | US5318661 Process for growing crystalline thin film |
| 06/07/1994 | US5318654 Apparatus for cleaning a substrate with metastable helium |
| 06/07/1994 | US5318652 Wafer bonding enhancement technique |
| 06/07/1994 | US5318651 Applying light-sensitive adhesive, selectively exposing, removing portions, heat treating to impact bond, thermo compressing to form single circuit board |
| 06/07/1994 | US5318634 Substrate supporting apparatus |
| 06/07/1994 | US5318632 Wafer process tube apparatus and method for vertical furnaces |
| 06/07/1994 | US5318362 Non-contact techniques for measuring temperature of radiation-heated objects |
| 06/07/1994 | US5317836 Apparatus for polishing chamfers of a wafer |
| 06/07/1994 | US5317801 Method of manufacture of multilayer circuit board |
| 06/07/1994 | US5317778 Automatic cleaning apparatus for wafers |
| 06/07/1994 | CA2020237C Device manufacture involving lithographic processing |
| 06/07/1994 | CA2014285C Device fabrication and resulting devices |
| 06/05/1994 | CA2110632A1 Overvoltage protection circuit |
| 06/04/1994 | CA2109654A1 Vertical boat and wafer support |
| 06/03/1994 | WO1994014191A1 System for transferring wafer |