| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/24/1994 | US5315147 Monolithic focal plane array |
| 05/24/1994 | US5315146 Semiconductor memory device having specific layout configuration of n-MOS memory cells |
| 05/24/1994 | US5315145 Charge monitoring device for use in semiconductor wafer fabrication for unipolar operation and charge monitoring |
| 05/24/1994 | US5315144 Reduction of bipolar gain and improvement in snap-back sustaining voltage in SOI field effect transistor |
| 05/24/1994 | US5315142 High performance trench EEPROM cell |
| 05/24/1994 | US5315141 Semiconductor memory device having a double-stacked capacitor structure |
| 05/24/1994 | US5315140 Semiconductor device having a polysilicon capacitor with large grain diameter |
| 05/24/1994 | US5315139 Power semiconductor integrated circuit device without concentration of electric field |
| 05/24/1994 | US5315137 Charge transfer device, process for its manufacture, and method of driving the device |
| 05/24/1994 | US5315135 Semiconductor device having I2 L gate with heterojunction |
| 05/24/1994 | US5315133 Compound semiconductor structure including p-type and n-type regions doped with carbon |
| 05/24/1994 | US5315132 Semiconductors |
| 05/24/1994 | US5315123 Electron beam lithography apparatus |
| 05/24/1994 | US5315121 Metal ion source and a method of producing metal ions |
| 05/24/1994 | US5315119 Electron beam irradiating apparatus and electric signal detecting apparatus |
| 05/24/1994 | US5315101 Method of manufacturing a large area active matrix array |
| 05/24/1994 | US5315092 Apparatus for heat-treating wafer by light-irradiation and device for measuring temperature of substrate used in such apparatus |
| 05/24/1994 | US5314931 Resist compositions |
| 05/24/1994 | US5314848 Flattening surface of substrate by reflowing borophosphosilica glass insulating film containing impurities formed thereon |
| 05/24/1994 | US5314847 Applying flame formed of mixture of hydrogen and oxygen gases so only substrate surface is heated |
| 05/24/1994 | US5314846 Method for processing a semiconductor wafer |
| 05/24/1994 | US5314845 Vapor deposition by flowing gaseous mixture of oxygen source and tetraethylorthosilicate across wafer surface under reduced pressure, then repeating with lower pressure |
| 05/24/1994 | US5314844 Forming a groove in parallel to the crystal plane by grinding-cutting, breaking along the scribe line and the groove |
| 05/24/1994 | US5314843 Integrated circuit polishing method |
| 05/24/1994 | US5314842 Resin-sealed type semiconductor device and method for manufacturing the same |
| 05/24/1994 | US5314841 Method of forming a frontside contact to the silicon substrate of a SOI wafer |
| 05/24/1994 | US5314840 Forming a low electrical resistant connection of good mechanical and thermal properties by heating adjacent bodies of aluminum and germanium and alloying |
| 05/24/1994 | US5314839 Solid state device fabrication method including a surface treatment step with a neutral particle beam with an energy between 10ev and 100ev |
| 05/24/1994 | US5314836 Method of making a single electrode level CCD |
| 05/24/1994 | US5314835 Semiconductor memory device |
| 05/24/1994 | US5314834 Field effect transistor having a gate dielectric with variable thickness |
| 05/24/1994 | US5314833 Vapor depositing a silicon thin film on substrate surfaces, diffused into the substrate by heat treatment, doping silicon in contact area |
| 05/24/1994 | US5314832 Process for the production of a high voltage MIS integrated circuit |
| 05/24/1994 | US5314831 Method of and apparatus for evaluating crystal rate in silicon thin film |
| 05/24/1994 | US5314788 Matrix printed board and process of forming the same |
| 05/24/1994 | US5314783 Photosensitive quinone diazide and resin composition having high absorbency for a wavelength of 365 nm containing a benzotriazole ultraviolet absorbing compound |
| 05/24/1994 | US5314782 Deep UV sensitive resistant to latent image decay comprising a diazonaphthoquinone sulfonate of a nitrobenzyl derivative |
| 05/24/1994 | US5314768 Thin film mask for use in an x-ray lithographic process and its method of manufacture by forming opaque pattern of ions in a diamond layer |
| 05/24/1994 | US5314724 Insulation film for multilayer interconnection of a semiconductor device |
| 05/24/1994 | US5314710 Insulation layer forming method |
| 05/24/1994 | US5314709 Unzippable polymer mask for screening operations |
| 05/24/1994 | US5314608 Nickel-cobalt-boron alloy, implement, plating solution and method for making same |
| 05/24/1994 | US5314606 Leadless ceramic package with improved solderabilty |
| 05/24/1994 | US5314597 Sputtering apparatus with a magnet array having a geometry for a specified target erosion profile |
| 05/24/1994 | US5314578 Controlled etching of semiconductors by reaction of oxygen released from silicon dioxide layer |
| 05/24/1994 | US5314576 Dry etching method using (SN)x protective layer |
| 05/24/1994 | US5314575 Etching method and apparatus |
| 05/24/1994 | US5314574 Remove oxides from a semiconductor wafer |
| 05/24/1994 | US5314573 Dry etching polysilicon using a bromine-containing gas |
| 05/24/1994 | US5314572 Integrated circuits, bridge supported by four corner posts |
| 05/24/1994 | US5314571 Crystallization from high temperature solutions of Si in copper |
| 05/24/1994 | US5314564 Apparatus for attaching bar codes to reticle cases |
| 05/24/1994 | US5314541 Reduced pressure processing system and reduced pressure processing method |
| 05/24/1994 | US5314538 Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device |
| 05/24/1994 | US5314509 Vacuum processing apparatus and operating method therefor |
| 05/24/1994 | US5314298 Automatic lead frame feeding device for a TO-220 semiconductor manufacturing apparatus |
| 05/24/1994 | US5314294 Semiconductor substrate transport arm for semiconductor substrate processing apparatus |
| 05/24/1994 | US5314175 Wire clamping device and wire clamping method |
| 05/24/1994 | US5314107 Automated method for joining wafers |
| 05/24/1994 | US5314105 Wire bonding ultrasonic control system responsive to wire deformation |
| 05/24/1994 | US5314068 Container for a plate-like article |
| 05/24/1994 | US5313966 Immersion cleaning device |
| 05/24/1994 | US5313841 Die adhesion testing method and apparatus |
| 05/24/1994 | US5313818 For detecting bubbles in a liquid prior to applying to a surface |
| 05/24/1994 | US5313741 Method of and an apparatus for slicing a single crystal ingot using an ID saw slicing machine therein |
| 05/24/1994 | US5313693 Device for the mounting of very wide-band microwave integrated circuits |
| 05/24/1994 | CA2109661A1 Apparatus and method for degolding or tinning conductive portions of a microelectronic device |
| 05/24/1994 | CA1329756C Method for forming crystalline deposited film |
| 05/24/1994 | CA1329739C Multilayer ceramic coatings from silicate esters and metal oxides |
| 05/24/1994 | CA1329738C Multilayer ceramics from silicate esters |
| 05/24/1994 | CA1329737C Multilayer ceramics from hydrogen silsesquioxane |
| 05/24/1994 | CA1329736C Multilayer ceramic coatings from metal oxides for protection of electronic devices |
| 05/19/1994 | DE4339184A1 Planar III-V semiconductor structure mfr. by vapour phase epitaxy - involves etching of epitaxial active layer prior to organic chemical vapour deposition of Gp.III and V elements for enclosure layer |
| 05/19/1994 | DE4338432A1 Plastics encapsulated IC module mfr. - comprises forming external electrodes by photolithography and cleaning by polishing of hardened resin barrier layer |
| 05/19/1994 | DE4319437C1 BiCMOS monolithic IC mfr. - avoids need for epitaxial and buried layers |
| 05/19/1994 | DE4238749A1 Prodn. of semiconductor fine structure - used to mfr. MOSFETs and MESFETs |
| 05/19/1994 | DE4238586A1 Appts. for finely cleaning surfaces of semiconductor wafers - comprising lighting source arranged in vacuum chamber contg. substrate |
| 05/19/1994 | DE4238137A1 Hybrid semiconductor structure mfg. system - with semiconductor chips incorporating semiconductor components attached to semiconductor carrier substrate |
| 05/18/1994 | EP0597792A2 Device and method for accurate etching and removal of thin film |
| 05/18/1994 | EP0597745A1 Fusible circuit for integrated circuit |
| 05/18/1994 | EP0597637A1 System and method for automated positioning of a substrate in a processing chamber |
| 05/18/1994 | EP0597634A2 Method of opening windows in dielectric layers of an integrated circuit |
| 05/18/1994 | EP0597620A1 Color imaging charge-coupled array and method of imaging |
| 05/18/1994 | EP0597603A2 Trench isolation planarization using a hard mask |
| 05/18/1994 | EP0597587A1 Multilayer contacts for semiconductor devices, comprising impurities |
| 05/18/1994 | EP0597585A2 Method of writing data into and erasing the same from semiconductor nonvolatile memory |
| 05/18/1994 | EP0597514A2 A vertical PMP semiconductor device |
| 05/18/1994 | EP0597497A1 Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits |
| 05/18/1994 | EP0597397A2 Tramsistor having a base ballast impedance |
| 05/18/1994 | EP0597302A2 Etching method for silicon substrate |
| 05/18/1994 | EP0597266A2 Process of manufacturing an isolation structure on a substrate |
| 05/18/1994 | EP0597124A1 Semiconductor nonvolatile storage device, semiconductor device, and its manufacture method |
| 05/18/1994 | EP0597103A1 Apparatus for neutralizing charged body |
| 05/18/1994 | EP0597100A1 Developing solution and developing method |
| 05/18/1994 | EP0597053A1 Device for heat-treating a magazine for lead frames with electronic components. |
| 05/18/1994 | EP0597052A1 Transport robot for a machining or processing line for lead frames. |
| 05/18/1994 | EP0597015A1 Anti-fuse structures and methods for making same. |
| 05/18/1994 | EP0537306A4 Process for forming extremely thin integrated circuit dice |
| 05/18/1994 | EP0172192B1 Process for forming slots of different types in self-aligned relationship using a mask |
| 05/18/1994 | CN1086940A Charges coupling comb filter |