| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 05/18/1994 | CN1086926A Silicon chip directive bonding method |
| 05/18/1994 | CN1086744A Method and apparatus for drying of polymer protective layer which has been applyed with solution on surface of articles |
| 05/18/1994 | CA2103174A1 Semiconductor device and method of manufacturing the same |
| 05/17/1994 | US5313484 Quantum box or quantum wire semiconductor structure and methods of producing same |
| 05/17/1994 | US5313427 EEPROM array with narrow margin of voltage thresholds after erase |
| 05/17/1994 | US5313426 Semiconductor memory device |
| 05/17/1994 | US5313421 Memory structure |
| 05/17/1994 | US5313419 Self-aligned trench isolation scheme for select transistors in an alternate metal virtual ground (AMG) EPROM array |
| 05/17/1994 | US5313418 Semiconductor memory and memorizing method to read only semiconductor memory |
| 05/17/1994 | US5313367 Semiconductor device having a multilayer interconnection structure |
| 05/17/1994 | US5313366 Direct chip attach module (DCAM) |
| 05/17/1994 | US5313272 Method and apparatus for measuring deviation between patterns on a semiconductor wafer |
| 05/17/1994 | US5313158 Test system integrated on a substrate and a method for using such a test system |
| 05/17/1994 | US5313157 Probe for jesting an electrical circuit chip |
| 05/17/1994 | US5313156 Apparatus for automatic handling |
| 05/17/1994 | US5313150 Drive control apparatus for an air conditioner having a modular inverter and a control circuit mounted on a common substrate |
| 05/17/1994 | US5313119 Field programmable gate array |
| 05/17/1994 | US5313116 Semiconductor integrated circuit device having bipolar transistor and field effect transistor |
| 05/17/1994 | US5313101 Aluminum, titanium, and their intermetallic compound layers |
| 05/17/1994 | US5313100 Layers of aluminum or alloy, tungsten or silicide, and titanium nitride |
| 05/17/1994 | US5313094 Thermal dissipation of integrated circuits using diamond paths |
| 05/17/1994 | US5313092 Semiconductor power device having walls of an inverted mesa shape to improve power handling capability |
| 05/17/1994 | US5313089 Capacitor and a memory cell formed therefrom |
| 05/17/1994 | US5313087 Back-to-back diode resistor |
| 05/17/1994 | US5313086 Semiconductor device |
| 05/17/1994 | US5313085 Semiconductor integrated circuit device |
| 05/17/1994 | US5313084 Interconnect structure for an integrated circuit |
| 05/17/1994 | US5313082 High voltage MOS transistor with a low on-resistance |
| 05/17/1994 | US5313081 Solid-state imaging device with transport channels between photosensitive elements |
| 05/17/1994 | US5313077 Insulated gate field effect transistor and its manufacturing method |
| 05/17/1994 | US5313076 Thin film transistor and semiconductor device including a laser crystallized semiconductor |
| 05/17/1994 | US5313075 Thin-film transistor |
| 05/17/1994 | US5313068 Partitioning method for E-beam lithography |
| 05/17/1994 | US5313044 Method and apparatus for real-time wafer temperature and thin film growth measurement and control in a lamp-heated rapid thermal processor |
| 05/17/1994 | US5312783 Process for the preparation of a high dielectric thin film using ECR plasma CVD |
| 05/17/1994 | US5312782 SOI type vertical channel field effect transistor and process of manufacturing the same |
| 05/17/1994 | US5312781 Flash EEPROM fabrication process that uses a selective wet chemical etch |
| 05/17/1994 | US5312780 Forming anti-reflective coating by sputtering amorphous silicon on substrate |
| 05/17/1994 | US5312778 Etching |
| 05/17/1994 | US5312777 Fabrication methods for bidirectional field emission devices and storage structures |
| 05/17/1994 | US5312776 Method of preventing the corrosion of metallic wirings |
| 05/17/1994 | US5312775 Stabilizing electrical resistance in contact hole at interface between upper and lower layers of aluminum connectors |
| 05/17/1994 | US5312774 Method for manufacturing a semiconductor device comprising titanium |
| 05/17/1994 | US5312773 Method of forming multilayer interconnection structure |
| 05/17/1994 | US5312772 Method of manufacturing interconnect metallization comprising metal nitride and silicide |
| 05/17/1994 | US5312771 Optical annealing method for semiconductor layer and method for producing semiconductor device employing the same semiconductor layer |
| 05/17/1994 | US5312770 Techniques for forming isolation structures |
| 05/17/1994 | US5312769 With higher storage capacitance |
| 05/17/1994 | US5312768 Integrated process for fabricating raised, source/drain, short-channel transistors |
| 05/17/1994 | US5312766 Method of providing lower contact resistance in MOS transistors |
| 05/17/1994 | US5312765 Method of fabricating three dimensional gallium arsenide microelectronic device |
| 05/17/1994 | US5312764 Doping substrate, heating to modulate defect density, forming oxide on substrate, heating to modulate junction depth, removing oxide, forming epitaxial layer |
| 05/17/1994 | US5312716 Process for producing a semiconductor |
| 05/17/1994 | US5312519 Method of cleaning a charged beam apparatus |
| 05/17/1994 | US5312518 Dry etching method |
| 05/17/1994 | US5312516 Immersion of tantalum pentoxide and illumination |
| 05/17/1994 | US5312515 Dry etching method |
| 05/17/1994 | US5312512 Spin on glass or chemical metal polish with baking and curing |
| 05/17/1994 | US5312510 Apparatus for optimally scanning a two-dimensional surface of one or more objects |
| 05/17/1994 | US5312509 Manufacturing system for low temperature chemical vapor deposition of high purity metals |
| 05/17/1994 | US5312508 Attaching crimped wire mesh to an object requiring heat transfer |
| 05/17/1994 | US5312490 Gas seal for continuous chemical vapor deposition reactors |
| 05/17/1994 | US5312487 Coating apparatus |
| 05/17/1994 | US5312245 Particulate trap for vertical furnace |
| 05/17/1994 | US5312039 Electro-optic monitor for fluid spray pattern |
| 05/17/1994 | US5311893 Cleaning apparatus |
| 05/17/1994 | US5311634 Sponge cleaning pad |
| 05/17/1994 | CA2018262C Lithographic technique using laser scanning for fabrication of electronic components and the like |
| 05/11/1994 | WO1994010706A1 Flash eeprom |
| 05/11/1994 | WO1994010704A1 Integrated circuit with layered superlattice material and method of fabricating same |
| 05/11/1994 | WO1994010703A1 Chip interconnection having a breathable etch stop layer |
| 05/11/1994 | WO1994010702A1 Process for fabricating layered superlattice materials and making electronic devices including same |
| 05/11/1994 | WO1994010686A1 Flash memory system, and methods of constructing and utilizing same |
| 05/11/1994 | WO1994010648A1 Semiconductor neural circuit device |
| 05/11/1994 | WO1994010633A1 Rasterizer for a pattern generation apparatus |
| 05/11/1994 | WO1994010627A1 System for compiling algorithmic language source code into hardware |
| 05/11/1994 | WO1994010608A1 Chemically amplified photoresist |
| 05/11/1994 | WO1994010600A1 Single crystal silicon tiles for display panels |
| 05/11/1994 | WO1994010545A1 System for the controlled heating of an object |
| 05/11/1994 | WO1994010512A1 Gas heater for processing gases |
| 05/11/1994 | WO1994010084A1 Precursors and processes for making metal oxides |
| 05/11/1994 | WO1994009989A1 Improved laser pattern generation apparatus |
| 05/11/1994 | EP0596824A1 Semiconductor device and wafer structure having a planar buried interconnect prepared by wafer bonding |
| 05/11/1994 | EP0596748A2 CCD imager for obtaining a plurality of aspect ratios, making effective use of the photosensible area |
| 05/11/1994 | EP0596678A2 Vapor phase deposition of hydrogen silsesquioxane resin in the presence of nitrous oxide |
| 05/11/1994 | EP0596668A2 Process for imaging of photoresist |
| 05/11/1994 | EP0596658A1 Low-skew signal routing in a programmable array |
| 05/11/1994 | EP0596601A2 Transistors and methods for fabrication thereof |
| 05/11/1994 | EP0596596A1 Mounting for a high frequency integrated circuit |
| 05/11/1994 | EP0596593A1 Plasma etch process |
| 05/11/1994 | EP0596592A2 Method for the elimination of metal voids in metal lines of a semiconductor device |
| 05/11/1994 | EP0596582A1 Bonded ceramic-metal composite substrate and circuit board constructed therewith |
| 05/11/1994 | EP0596565A2 Novel device configuration with multiple HV-LDMOS transistors and a floating well circuit |
| 05/11/1994 | EP0596551A1 Induction plasma source |
| 05/11/1994 | EP0596537A1 Micro-environment load lock and method for coupling a micro-environment container to a process chamber |
| 05/11/1994 | EP0596536A1 Transport system and method of using same |
| 05/11/1994 | EP0596515A1 Alkaline photoresist stripping composition producing reduced metal corrosion |
| 05/11/1994 | EP0596496A1 High impedance plasma ion implantation method and apparatus |
| 05/11/1994 | EP0596473A1 Circuit for monitoring the drain current of a MOSFET |
| 05/11/1994 | EP0596468A2 MOSFET of LDD type and a method for fabricating the same |