| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/02/1994 | CA2116624A1 Radiation-sensitive mixture and the production of relief structures having improved contrast |
| 09/01/1994 | WO1994019830A1 High saturation current, low leakage current fermi threshold field effect transistor |
| 09/01/1994 | WO1994019829A1 Semiconductor device comprising deuterium atoms |
| 09/01/1994 | WO1994019828A1 Fabrication process for cmos device with jfet |
| 09/01/1994 | WO1994019827A1 Method for manufacturing anti-fuse structures |
| 09/01/1994 | WO1994019826A1 Filling of vias and contacts employing an aluminum-germanium alloy |
| 09/01/1994 | WO1994019825A1 Method for the controlled formation of voids in doped glass dielectric films |
| 09/01/1994 | WO1994019824A1 Micromachining process for making perfect exterior corner in an etchable substrate |
| 09/01/1994 | WO1994019823A1 Method of making a dual-poly non-volatile memory device using a third polysilicon layer |
| 09/01/1994 | WO1994019822A1 Laser controlled nanolithography |
| 09/01/1994 | WO1994019821A1 Process and device for transporting flat objects, in particular substrates |
| 09/01/1994 | WO1994019726A1 Apparatus and method for machining conductive structures on substrates |
| 09/01/1994 | WO1994019723A1 Resolution-enhancing optical phase structure for a projection illumination system |
| 09/01/1994 | WO1994019509A1 Film forming method and film forming apparatus |
| 09/01/1994 | WO1994019508A1 System for sputtering compositions onto a substrate |
| 09/01/1994 | DE4406282A1 Lichtempfindliche Harzzusammensetzung A photosensitive resin composition |
| 09/01/1994 | DE4403916A1 Method for producing a semiconductor chip contact point |
| 09/01/1994 | DE4306152A1 Positive-working radiation-sensitive mixture, and recording material produced therewith |
| 09/01/1994 | DE4306106A1 Method for preparing silylgermanes |
| 09/01/1994 | DE4305750A1 Device for retaining flat, circular disc-shaped substrates in the vacuum chamber of a deposition or etching system |
| 09/01/1994 | DE4305748A1 Appliance for deposition onto, and/or etching of, substrates in a vacuum chamber |
| 09/01/1994 | CA2153680A1 Filling of vias and contacts employing an aluminum-germanium alloy |
| 09/01/1994 | CA2133656A1 Micromachining process for making perfect exterior corner in an etchable substrate |
| 08/31/1994 | EP0613335A1 Socket apparatus for IC package testing |
| 08/31/1994 | EP0613333A1 Mounting/connecting method of an electronic component with patterning electrodes |
| 08/31/1994 | EP0613247A2 BICMOS reprogrammable logic |
| 08/31/1994 | EP0613189A2 Channel structure for field effect transistor and method of manufacturing the same |
| 08/31/1994 | EP0613188A1 A charge transferring device having an FDA type charge detecting section and a method for producing the same |
| 08/31/1994 | EP0613186A1 Fully depleted lateral transistor |
| 08/31/1994 | EP0613181A1 Bipolar transistor compatible with CMOS processes |
| 08/31/1994 | EP0613178A2 Integrated circuits protected from the environment by ceramic and barrier metal layers |
| 08/31/1994 | EP0613177A2 Method for fabricating tungsten local interconnections in high density CMOS circuits |
| 08/31/1994 | EP0613176A1 Process for fabricating integrated devices including nonvolatile memories and transistors with tunnel oxide protection |
| 08/31/1994 | EP0613175A2 Method for making an MOS device including boron diffusion |
| 08/31/1994 | EP0613174A2 Method for making fine-line semiconductor devices |
| 08/31/1994 | EP0613173A1 Thermal reaction chamber for semiconductor wafer processing operations |
| 08/31/1994 | EP0613170A1 Method and apparatus for fabrication of thin film semiconductor devices using non-planar, exposure beam lithography |
| 08/31/1994 | EP0613169A1 Differential virtual ground beam blanker |
| 08/31/1994 | EP0613150A2 Semiconductor memory device and data erase method for it |
| 08/31/1994 | EP0613148A2 Nonvolatile magnetoresistive storage device |
| 08/31/1994 | EP0613052A2 Photolithography test structures |
| 08/31/1994 | EP0613051A1 Method of exposing and apparatus therefor |
| 08/31/1994 | EP0613050A2 Universal negative tone photoresist |
| 08/31/1994 | EP0613013A1 Self leveling membrane test probe |
| 08/31/1994 | EP0612978A1 Method of measuring the depth of full-cut dicing grooves by using an ultrasonic detector and a dicing apparatus for carrying out the same |
| 08/31/1994 | EP0612869A1 Waferbasket for silicon wafers |
| 08/31/1994 | EP0612867A1 Inert gas rectifying/blowing apparatus for single crystal pulling device |
| 08/31/1994 | EP0612862A1 Measuring wafer temperatures |
| 08/31/1994 | EP0612861A1 Apparatus and method for magnetron-enhanced plasma-assisted chemical vapor deposition |
| 08/31/1994 | EP0612860A1 Reactive ionized cluster beam deposition method and apparatus thereof |
| 08/31/1994 | EP0612438A1 Process for fabricating insulation-filled deep trenches in semiconductor substrates |
| 08/31/1994 | EP0476014B1 Very large scale immobilized polymer synthesis |
| 08/31/1994 | EP0401314B1 Cryogenic process for metal lift-off |
| 08/31/1994 | EP0296249B1 Method and apparatus for recovering and reusing resist composition |
| 08/31/1994 | CN1091552A Method for forming a contact plug of a semiconduct or device |
| 08/31/1994 | CN1091551A Method for fabricating thin film transistor |
| 08/30/1994 | US5343479 Semiconductor integrated circuit having therein circuit for detecting abnormality of logical levels outputted from input buffers |
| 08/30/1994 | US5343434 Nonvolatile semiconductor memory device and manufacturing method and testing method thereof |
| 08/30/1994 | US5343431 Semiconductor memory apparatus, test apparatus therefor and method for relieving semiconductor memory apparatus from short circuit |
| 08/30/1994 | US5343430 Method and circuitry for screening a dynamic memory device for defective circuits |
| 08/30/1994 | US5343428 Memory having a latching BICMOS sense amplifier |
| 08/30/1994 | US5343424 Split-gate flash EEPROM cell and array with low voltage erasure |
| 08/30/1994 | US5343423 FET memory device |
| 08/30/1994 | US5343422 Nonvolatile magnetoresistive storage device using spin valve effect |
| 08/30/1994 | US5343353 Forming dielectric film by heating and decomposing an organometallic complex |
| 08/30/1994 | US5343293 Ellipsometer |
| 08/30/1994 | US5343290 Surface particle detection using heterodyne interferometer |
| 08/30/1994 | US5343271 Exposure apparatus for drawing patterns on substrates |
| 08/30/1994 | US5343099 Output device capable of high speed operation and operating method thereof |
| 08/30/1994 | US5343087 Semiconductor device having a substrate bias generator |
| 08/30/1994 | US5343083 Analog/digital hybrid masterslice IC |
| 08/30/1994 | US5343073 Lead frames having a chromium and zinc alloy coating |
| 08/30/1994 | US5343072 Method and leadframe for making electronic components |
| 08/30/1994 | US5343071 Semiconductor structures having dual surface via holes |
| 08/30/1994 | US5343070 Mesa type PIN diode |
| 08/30/1994 | US5343069 Electronic switch with a definite breakdown voltage |
| 08/30/1994 | US5343068 Integrated bipolar power device and a fast diode |
| 08/30/1994 | US5343067 High breakdown voltage semiconductor device |
| 08/30/1994 | US5343063 Dense vertical programmable read only memory cell structure and processes for making them |
| 08/30/1994 | US5343062 Semiconductor memory having a memory cell including a capacitor with a two-layer lower electrode |
| 08/30/1994 | US5343059 Method and apparatus for reducing blooming in output of a CCD image sensor |
| 08/30/1994 | US5343057 Stacks; mobile electric charge donor |
| 08/30/1994 | US5343056 Compound semiconductor device |
| 08/30/1994 | US5343055 Graded guard ring formed by diffusion from an organometallic source |
| 08/30/1994 | US5343053 SCR electrostatic discharge protection for integrated circuits |
| 08/30/1994 | US5343051 Thin-film SOI MOSFET |
| 08/30/1994 | US5342992 Pin grid array package with pin through plating |
| 08/30/1994 | US5342808 Aperture size control for etched vias and metal contacts |
| 08/30/1994 | US5342807 Soft bond for semiconductor dies |
| 08/30/1994 | US5342806 Method for fabricating a semiconductor device having a conductor structure with a plated layer |
| 08/30/1994 | US5342805 Method of growing a semiconductor material by epilaxy |
| 08/30/1994 | US5342804 Method of fabrication of devices with different operating characteristics through a single selective epitaxial growth process |
| 08/30/1994 | US5342803 Implanting ions of impurity to prevent inversion of the conductive type of the substrate just under field insulator film to form channel stop region |
| 08/30/1994 | US5342802 Method of manufacturing a complementary MIS transistor |
| 08/30/1994 | US5342801 Controllable isotropic plasma etching technique for the suppression of stringers in memory cells |
| 08/30/1994 | US5342800 Method of making memory cell capacitor |
| 08/30/1994 | US5342798 Doping integrated circuit to form source and drain region, heating to form oxide layer, depositing metal layer over oxide, annealing to form metal-silicide. stripping unreacted metal |
| 08/30/1994 | US5342797 Method for forming a vertical power MOSFET having doped oxide side wall spacers |
| 08/30/1994 | US5342796 Reducing effective junction depth of channel regions without dependence on sequential impurity doping and heat treatment processes |
| 08/30/1994 | US5342795 Forming n-type drain/source layer over substrate, patterning to form channel, forming p-type carbon doped gate structure, forming n-type second drain/source layer over gate, forming n-ohmic source and drain contact |