Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2013
06/05/2013CN103137461A Forming method and device of high gate K dielectric layer and forming method of transistor
06/05/2013CN103137460A Method for forming and controlling molecular scale interface SiO2
06/05/2013CN103137459A Methods of patterning features in structure by using multiple sidewall image transfer technique
06/05/2013CN103137458A Manufacturing method of high dielectric layer metal gate
06/05/2013CN103137457A Manufacturing method of FinFET contact structure
06/05/2013CN103137456A Manufacturing method for P-channel metal oxide semiconductor (PMOS) transistor metal grid
06/05/2013CN103137455A Manufacturing method of chip with low-voltage logic component and high-voltage component
06/05/2013CN103137454A Structure of groove type power metal oxide semiconductor (MOS) transistor and manufacture method thereof
06/05/2013CN103137453A Method for growing thick gate oxide layer for high-voltage metal oxide semiconductor (MOS) device
06/05/2013CN103137452A Method for controlling substitute gate structure height
06/05/2013CN103137451A Production method of semiconductor device
06/05/2013CN103137450A Trench type power metal oxide semiconductor (MOS) device and manufacturing process thereof
06/05/2013CN103137449A Production methods of grid and transistor
06/05/2013CN103137448A Doping method, PN structure, solar cell and manufacture method of solar cell
06/05/2013CN103137447A Ion implanter
06/05/2013CN103137446A Gallium nitride growth method on silicon substrate
06/05/2013CN103137445A Method of forming finfet doping fins
06/05/2013CN103137444A Method for improving evenness of thickness of germanium-silicon membrane
06/05/2013CN103137443A Formation method and etching method for amorphous carbon hard mask layer
06/05/2013CN103137442A Method of manufacturing slender type isolated line patterns in semiconductor technology
06/05/2013CN103137441A Method for manufacturing elongated isolated line pattern in semiconductor process
06/05/2013CN103137440A Photoresist removing method
06/05/2013CN103137439A Recovery method of gyrocompass automatic navigation (GaN)-based epitaxial wafer substrate
06/05/2013CN103137438A Method for forming functional part in minute space
06/05/2013CN103137437A Method for manufacturing light absorber layer of bismuth-doped IB-IIIA-VIA compound and solar cell including the same
06/05/2013CN103137436A Method for improving partial exposure of wafer
06/05/2013CN103137435A Dielectric antireflection coating forming method and photoetching method
06/05/2013CN103137434A Manufacture method of silica-based GaN film
06/05/2013CN103137433A Remedy method of wafer after over-soaking in ultra-pure water
06/05/2013CN103137415A Apparatus and method for manufacturing semiconductor devices
06/05/2013CN103137414A Semiconductor chip etching device
06/05/2013CN103136416A Simulation method, simulation program, and semiconductor manufacturing apparatus
06/05/2013CN103135338A Nanoscale soft mold manufacturing method and device
06/05/2013CN103135303A Thin film transistor (TFT) pixel structure and point defect restoring method thereof
06/05/2013CN103135302A Thin film transistor-liquid crystal display in mode of plane switch control and manufacturing method thereof
06/05/2013CN103135298A Thin film transistor (TFT) - liquid crystal display (LCD) array substrate and manufacturing method thereof, and display screen
06/05/2013CN103135297A Thin film transistor liquid crystal display device and disconnected data line repairing method thereof
06/05/2013CN103135282A Display substrate, display panel and manufacture method of display substrate
06/05/2013CN103134806A Inspecting device of substrate membrane-forming
06/05/2013CN103132121A Anodizing apparatus, an anodizing system having the same, and a semiconductor wafer
06/05/2013CN103131421A Impregnation liquid, impregnation method before wafer etching, and silicon dioxide wet etching method
06/05/2013CN103131355A Under-fill material and method for producing semiconductor device
06/05/2013CN103129076A Method for forming laminate and laminating device
06/05/2013CN103128650A Chemical mechanical polishing method
06/05/2013CN103128449A Processing method for substrate with LED patterns, and processing system for substrate with LED patterns
06/05/2013CN103128073A Wafer washing method, wafer washing device and wafer
06/05/2013CN103128062A Test handler and method for operating the same
06/05/2013CN102473362B Method for manufacturing thin film transistor substrate
06/05/2013CN102445838B Method for reforming photo-resist pattern
06/05/2013CN102420252B Ultrahigh cell density deep trench power metal oxide semiconductor (MOS) device and manufacturing method thereof
06/05/2013CN102420230B Manufacturing method of structure of MOS capacitor
06/05/2013CN102420110B Method for improving metal-insulation-metal (MIM) capacitance density in semiconductor device and device
06/05/2013CN102420108B Process for manufacturing metal-insulator-metal capacitor by adopting copper damascene process, and structure
06/05/2013CN102412163B Multipurpose semiconductor bending mould
06/05/2013CN102375413B Advanced process control system and method utilizing virtual metrology with reliance index
06/05/2013CN102290447B Columnar diamond Schottky diode and production method thereof
06/05/2013CN102263048B Carrier for chip packages and carrier assembly
06/05/2013CN102263034B High pressure MOS transistor structure in BCD technology and manufacturing method thereof
06/05/2013CN102254795B Preparation method of one-dimensional scale limited graphene nano band
06/05/2013CN102237408B Method for fabricating a field effect transistor and a semiconductor device
06/05/2013CN102237374B Transmission solar cell module and method for manufacturing same
06/05/2013CN102237359B Semiconductor device
06/05/2013CN102237341B Electrostatic discharge protection component and manufacturing method thereof
06/05/2013CN102237246B Exhaust plate and plasma processing equipment
06/05/2013CN102222661B Electrical alignment mark set and using method thereof
06/05/2013CN102208365B Manufacturing method of film transistor array base plate
06/05/2013CN102194657B Device for cleaning and treating substrate
06/05/2013CN102191502B Gas shower structure and substrate processing apparatus
06/05/2013CN102184865B 薄膜晶体管及其制造方法 A thin film transistor and manufacturing method thereof
06/05/2013CN102165568B Method and apparatus for forming silicon oxide film
06/05/2013CN102165563B 碳化硅单晶基板 Silicon carbide single crystal substrate
06/05/2013CN102148311B LED (light-emitting diode) packaging method
06/05/2013CN102136414B Gallium nitride semiconductor structure for reducing semiconductor epitaxy dislocation and method
06/05/2013CN102136411B UV curing system
06/05/2013CN102129994B Method of manufacturing heterojunction bipolar transistor and heterojunction bipolar transistor
06/05/2013CN102129981B Manufacturing methods of nanowire and nanowire transistor
06/05/2013CN102117736B Substrate treating device, substrate conveying device, substrate grasping device, and chemical solution treating device
06/05/2013CN102113106B Apparatus for detecting micro-cracks in wafers and method therefor
06/05/2013CN102105964B Deposition methods for releasing stress buildup
06/05/2013CN102099900B Method and device for cleaning a substrate, and storage medium
06/05/2013CN102097476B Integrated circuit structure and formation method thereof
06/05/2013CN102097370B Method for processing precision patterns
06/05/2013CN102089819B Magnetic device manufacturing method
06/05/2013CN102084484B Semiconductor devices with non-punch-through semiconductor channels having enhanced conduction and methods of making
06/05/2013CN102084027B Surface treatment method for treating surface of substrate to be highly hydrophobic
06/05/2013CN102077144B Resin composition for making insoluble resist pattern, and method for formation of resist pattern by using the same
06/05/2013CN102074637B Method and structure for encapsulating solid-state luminous chips and light source device using encapsulation structure
06/05/2013CN102067302B 静电夹头 Electrostatic chuck
06/05/2013CN102054773B Transflective thin film transistor panel and manufacturing method thereof
06/05/2013CN102054655B Method for monitoring temperature of annealing machine bench
06/05/2013CN102047406B Vacuum processing apparatus, vacuum processing method, and manufacturing method of an electronic device
06/05/2013CN102044566B Semiconductor element and its manufacturing method
06/05/2013CN102037576B Semiconductor light emitting element, method for manufacturing semiconductor light emitting element, and lamp
06/05/2013CN102037563B Semiconductor device and manufacturing method thereof
06/05/2013CN102034746B Manufacturing method of active matrix organic light-emitting display array base plate
06/05/2013CN102034689B Method of forming integrated circuit structure
06/05/2013CN102034679B Wafer cleaning method
06/05/2013CN102020923B Method for preparing surface chemical mechanical polishing liquid for indium antimonide material
06/05/2013CN102017072B Stage apparatus, patterning apparatus, exposure apparatus, stage drive method, exposure method, and device fabrication method
06/05/2013CN102010663B Method for preparing chemical mechanical polishing solution of silicon dioxide dielectric