Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1996
12/10/1996US5583071 Image sensor with improved output region for superior charge transfer characteristics
12/10/1996US5583070 Process to form rugged polycrystalline silicon surfaces
12/10/1996US5583069 Method for making a fine annular charge storage electrode in a semiconductor device using a phase-shift mask
12/10/1996US5583068 Process for forming a capacitor having a metal-oxide dielectric
12/10/1996US5583067 Inverse T-gate semiconductor device with self-aligned punchthrough stops and method of fabrication
12/10/1996US5583066 Method of fabricating nonvolatile semiconductor memory element having elevated source and drain regions
12/10/1996US5583065 Method of making a MOS semiconductor device
12/10/1996US5583064 Semiconductor device and process for formation thereof
12/10/1996US5583063 Method of forming T-shaped, cross-sectional pattern using two layered masks
12/10/1996US5583062 Self-aligned twin well process having a SiO2 -polysilicon-SiO2 barrier mask
12/10/1996US5583061 PMOS transistors with different breakdown voltages formed in the same substrate
12/10/1996US5583060 Method for manufacturing field effect controlled semiconductor components
12/10/1996US5583059 Fabrication of vertical SiGe base HBT with lateral collector contact on thin SOI
12/10/1996US5582971 Method of forming submicron contacts
12/10/1996US5582880 Supplying silicon containing gas into film forming space, applying high frequency power between electrodes at specified distance, discharging under specified pressure to form silicon-containing film by plasma chemical vapor deposition
12/10/1996US5582866 For cleaning semiconductor substrates
12/10/1996US5582858 Adhesive layer in multi-level packaging and organic material as a metal diffusion barrier
12/10/1996US5582772 Copper oxide-filled polymer die attach adhesive composition for semiconductor package
12/10/1996US5582746 Real time measurement of etch rate during a chemical etching process
12/10/1996US5582745 Method of making circuit boards with locally enhanced wiring density
12/10/1996US5582679 Enhanced metal etch process
12/10/1996US5582649 Wafer transfer apparatus for use in a film deposition furnace
12/10/1996US5582648 For formation of amorphous silicon film on substrate, the film being used as photosensitive member for electrography
12/10/1996US5582647 Material supplying apparatus
12/10/1996US5582641 Crystal article and method for forming same
12/10/1996US5582640 Semiconductor device and its fabricating method
12/10/1996US5582536 Apparatus and method for manufacturing wafer
12/10/1996US5582534 Orbital chemical mechanical polishing apparatus and method
12/10/1996US5582215 Ceramic die for cutting and shaping lead frames and method of cleaning the same
12/10/1996US5581877 Method of fabrication of a circuit board adapted to receive a single in-line module
12/10/1996US5581876 Method of adhering green tape to a metal support substrate with a bonding glass
12/10/1996US5581874 Method of forming a bonding portion
12/10/1996US5581837 Brush cleaning apparatus and cleaning system for disk-shaped objects using same
12/08/1996CA2177219A1 Method and apparatus for fabricating self-assembling microstructures
12/08/1996CA2154048A1 Wafer support structure for a wafer backplane with a curved surface
12/05/1996WO1996038861A1 Raised tungsten plug antifuse and fabrication process
12/05/1996WO1996038859A1 Surface conditioning insulating layer for fine line conductive pattern
12/05/1996WO1996038858A2 Method and probe card for testing semiconductor devices
12/05/1996WO1996038857A2 Magnetically enhanced radio frequency reactive ion etching method and apparatus
12/05/1996WO1996038767A1 Positioning device with a vibration-free object table
12/05/1996WO1996038766A1 Positioning device with a force actuator system for compensating centre-of-gravity displacements
12/05/1996WO1996038764A1 Lithographic device with a three-dimensionally positionable mask holder
12/05/1996WO1996038763A1 Process for producing a structured mask
12/05/1996WO1996038395A1 Process for producing electrically insulating, low mechanical stress and permanent bonds
12/05/1996WO1996038311A1 Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure
12/05/1996WO1996030938A3 Process for fabricating layered superlattice materials and making electronic devices including same
12/05/1996WO1996029631A3 Magnification correction for small field scanning
12/05/1996WO1996029630A3 Scanning lithography system having double pass wynne-dyson optics
12/05/1996WO1996028806A3 Electronic devices comprising an array
12/05/1996DE19622038A1 Thermo-compression contacting appts. for fixing TCP on liquid crystal element fixed via ACF film
12/05/1996DE19622037A1 Semiconductor photomask defect determination
12/05/1996DE19619921A1 Mfg. semiconductor device having capped element
12/05/1996DE19618866A1 Component insulating method for LOCOS semiconductor memory module
12/05/1996DE19531699A1 Thermo-Waferhaltevorrichtung vom Kontakttyp und Verfahren zu ihrer Herstellung Thermo-wafer holding device of the contact type and methods for their preparation
12/05/1996DE19520034A1 Verfahren zur Herstellung elektrisch isolierender, mechanisch spannungsarmer und permanenter Verbindungen A process for producing electrically insulating, mechanical low-stress and permanent connections
12/05/1996CA2222620A1 Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure
12/05/1996CA2196557A1 Raised tungsten plug antifuse and fabrication process
12/04/1996EP0746105A2 Programmable array clock/reset resource
12/04/1996EP0746104A1 Programmable array interconnect network
12/04/1996EP0746103A2 Programmable logic array integrated circuits
12/04/1996EP0746102A2 Programmable logic array integrated circuits
12/04/1996EP0746045A2 Arrangement for mounting an optoelectronic device on a carrier
12/04/1996EP0746042A2 Bidirectional blocking trench power MOSFET
12/04/1996EP0746041A2 Channel region of MOSFET and method for producing the same
12/04/1996EP0746039A1 PNP type bipolar transistor
12/04/1996EP0746038A2 Isolated vertical PNP transistor and a process for fabricating the same
12/04/1996EP0746037A2 N-type HIGFET and method
12/04/1996EP0746036A2 Higfet and method
12/04/1996EP0746035A2 Quarternary collector InA1As-InGaA1As heterojunction bipolar transistor
12/04/1996EP0746033A2 Improvements in or relating to semiconductor processing
12/04/1996EP0746032A2 Semiconductor integrated circuit comprising bipolar transistors and MOS transistors and associated fabrication method
12/04/1996EP0746031A2 Silicon on insulator type semiconductor device
12/04/1996EP0746030A2 Trench-gated power MOSFET with protective diode
12/04/1996EP0746028A2 Integrated inductor arrangement
12/04/1996EP0746027A2 Polysilicon/tungsten silicide multilayer composite formed on an integrated circuit structure, and improved method of making same
12/04/1996EP0746026A2 Improvements in or relating to semiconductor products
12/04/1996EP0746025A2 Improved fuse link structures through the addition of dummy structures
12/04/1996EP0746024A2 Semiconductor device with built-in AC coupling circuitry
12/04/1996EP0746023A2 Multichip press-contact type semiconductor device
12/04/1996EP0746021A2 Compression bonded type semiconductor element and manufacturing method for the same
12/04/1996EP0746020A2 Scaled adaptive lithography
12/04/1996EP0746019A2 A silicide process for sub-micron silicon and polysilicon lines
12/04/1996EP0746018A2 Process for forming a refractory metal silicide film having a uniform thickness
12/04/1996EP0746017A2 Method of forming connection hole
12/04/1996EP0746016A2 Process for the active removal of silicum dioxide
12/04/1996EP0746015A2 Silicon etching method
12/04/1996EP0746014A2 Method for dry-etching
12/04/1996EP0746013A2 Method of cleaning and treating a micromechanical device
12/04/1996EP0746012A2 Improvements relating to silicide formation
12/04/1996EP0746011A2 Method of producing single crystal thin film
12/04/1996EP0746010A2 Sealing device and method useful in semiconductor processing apparatus for bridging materials having a thermal expansion differential
12/04/1996EP0746009A1 Multi-layer susceptor for rapid thermal process reactors
12/04/1996EP0745997A2 Charge coupled device with high charge transfer efficiency
12/04/1996EP0745995A1 Nonvolatile, in particular flash-EEPROM, memory device
12/04/1996EP0745955A2 Method and device for making a smart card
12/04/1996EP0745935A1 Improvements relating to output boundary scan cells
12/04/1996EP0745886A2 An active matrix liquid crystal device and manufacturing method
12/04/1996EP0745885A2 An integrated dark matrix for an active matrix liquid crystal display and manufacturing method
12/04/1996EP0745830A2 System and method for controlling growth of a silicon crystal
12/04/1996EP0745707A1 Method for the growth of large single crystals
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