Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/1997
06/19/1997WO1997022141A1 Method of manufacturing thin film semiconductor device, and thin film semiconductor device
06/19/1997WO1997022140A2 Method for purging a multi-layer sacrificial etched silicon substrate
06/19/1997WO1997022139A2 Read-only storage cell arrangement and method for producing the same
06/19/1997WO1997022138A2 Flip-chip process for producing a multi-chip module
06/19/1997WO1997021525A1 Wide wrist articulated arm transfer device
06/19/1997WO1997017721A3 Method for making a circuit structure having a flip-mounted matrix of devices
06/19/1997WO1997016866A3 Chip interconnection carrier and methods of mounting spring contacts to semiconductor devices
06/19/1997WO1997015949A3 Electronic device manufacture
06/19/1997WO1997015068A3 Improved metal-to-metal via-type antifuse and methods of programming
06/19/1997WO1997015067A3 A method of biaxially aligning crystalline material
06/19/1997WO1997010088A3 Process for improving the contrast in the structuring of 3-dimensional surfaces
06/19/1997DE19652789A1 Connection contacts test method for flip chip during mfr.
06/19/1997DE19651554A1 Semiconductor component with electronic circuit
06/19/1997DE19625846A1 Vakuumgreifer zum Tragen eines Halbleiterwafers Vacuum gripper for supporting a semiconductor wafer
06/19/1997DE19546988A1 Semiconductor material treatment with grinding and ultrasonic cleaning
06/19/1997CA2238533A1 Method of characterizing group iii-v epitaxial semiconductor wafers incorporating an etch stop layer
06/19/1997CA2211397A1 Method for purging a multi-layer sacrificial etched silicon substrate
06/18/1997EP0779773A1 Copper conductor paste and production method of copper conductor film
06/18/1997EP0779666A2 Semiconductor device and method of fabricating semiconductor device
06/18/1997EP0779664A2 Apparatus comprising a heterojunction bipolar transistor
06/18/1997EP0779663A2 Epitaxial-base bipolar transistor and method of manufacturing the same
06/18/1997EP0779662A2 Semiconductor device with bipolar structure and method of fabricating the same
06/18/1997EP0779656A2 Method of producing capacitors in a semiconductor device
06/18/1997EP0779655A2 A method of chemically-mechanically polishing an electronic component
06/18/1997EP0779654A2 Process for forming openings within a passivation layer of a semiconductor device
06/18/1997EP0779653A2 Flip chip silicone pressure sensitive conductive adhesive
06/18/1997EP0779652A2 Method for making a heterojunction bipolar transistor
06/18/1997EP0779651A2 Method and apparatus for plasma processing
06/18/1997EP0779650A2 Fabrication process of SOI substrate
06/18/1997EP0779649A2 Fabrication process and fabrication apparatus of SOI substrate
06/18/1997EP0779648A2 Vacuum processing method and apparatus
06/18/1997EP0779647A1 Method and apparatus for treatment of semiconductor material
06/18/1997EP0779646A1 Method of fabricating EEPROM memory devices, and EEPROM memory devices so formed
06/18/1997EP0779645A2 Plasma reactors for processing work pieces
06/18/1997EP0779558A2 Projection-exposure apparatus
06/18/1997EP0779556A2 Method of fabricating a semiconductor device
06/18/1997EP0779552A2 Photoresist composition
06/18/1997EP0779551A2 Frame-supported dustproof pellicle for photolithographic photomask
06/18/1997EP0779528A2 High numerical aperture ring field optical reduction system
06/18/1997EP0779380A1 III-V Semiconductor material and electronic device incorporating this material
06/18/1997EP0779099A2 Ultrasonic wave assisted contact hole filling
06/18/1997EP0778934A1 Apparatus for weighing a grown crystal
06/18/1997EP0778857A2 Thermosetting resin compositions containing maleimide and/or vinyl compounds
06/18/1997EP0778838A1 Formation of a metalorganic compound for growing epitaxial semiconductor layers
06/18/1997EP0778837A1 Preparation of metalorganic compounds
06/18/1997EP0720756B1 Process for producing microstructure bodies
06/18/1997EP0560925B1 High frequency oscillator comprising cointegrated thin film resonator and active device
06/18/1997CN1152262A Hydrogen torch
06/18/1997CN1152192A Method of manufacturing semiconductor devices
06/18/1997CN1152191A Semiconductor device and manufacturing method thereof
06/18/1997CN1152190A Systems interconneted by bumps of joining material
06/18/1997CN1152189A Grid oxidizing technology of MOSFET
06/18/1997CN1152188A Temp controlling method for semiconductor device power-ageing euipment
06/18/1997CN1152187A Semiconductor substrate and fabrication method for the same
06/18/1997CN1152186A Method for detecting phase error of phase shift mask
06/18/1997CN1152173A System with method power and signal buses on cell array
06/18/1997CN1152136A Apparatus for projection exposure and method thereof
06/17/1997US5640440 Substrate conveying system
06/17/1997US5640367 Semiconductor memory device and method of fabricating the same
06/17/1997US5640362 Lead frame clock distribution for integrated circuit memory devices
06/17/1997US5640359 Word driver circuit and a memory circuit using the same
06/17/1997US5640346 Electrically programmable memory cell
06/17/1997US5640344 Programmable non-volatile bidirectional switch for programmable logic
06/17/1997US5640343 Magnetic memory array using magnetic tunnel junction devices in the memory cells
06/17/1997US5640329 Method of estimating heat generated in chip
06/17/1997US5640299 Electrostatic discharge protection in integrated circuits, systems and methods
06/17/1997US5640243 Position detection method
06/17/1997US5640238 Method of inspecting particles on wafers
06/17/1997US5640237 Method and apparatus for detecting non-uniformities in reflective surafaces
06/17/1997US5640199 Automated optical inspection apparatus
06/17/1997US5640137 Polysilicon resistor cooling
06/17/1997US5640099 Method and apparatus for detecting short circuit point between wiring patterns
06/17/1997US5640097 Test pattern for separately determining plug resistance and interfactial resistance
06/17/1997US5640090 Sensor IC
06/17/1997US5640052 Interconnection structure of electronic parts
06/17/1997US5640051 Chip package, a chip carrier, a terminal electrode for a circuit substrate and a chip package-mounted complex
06/17/1997US5640044 Semiconductor device and method of producing said semiconductor device
06/17/1997US5640043 High voltage silicon diode with optimum placement of silicon-germanium layers
06/17/1997US5640041 Stress relaxation in dielectric before metallization
06/17/1997US5640040 High breakdown voltage semiconductor device
06/17/1997US5640038 Integrated circuit structure with self-planarized layers
06/17/1997US5640037 Cell with self-aligned contacts
06/17/1997US5640036 High voltage cut-off semiconductor device
06/17/1997US5640035 Semiconductor device
06/17/1997US5640034 Top-drain trench based resurf DMOS transistor structure
06/17/1997US5640033 MOSFET having fine gate electrode structure
06/17/1997US5640031 Spacer flash cell process
06/17/1997US5640029 Field-effect transistor and method of producing same
06/17/1997US5640027 Static random access memory device and manufacturing method thereof
06/17/1997US5640026 Compound semiconductor device including implanted isolation regions
06/17/1997US5640024 Compression-type power semiconductor device
06/17/1997US5640023 Spacer-type thin-film polysilicon transistor for low-power memory devices
06/17/1997US5640022 Quantum effect device
06/17/1997US5640020 Ion generation device, ion irradiation device, and method of manufacturing a semiconductor device
06/17/1997US5639698 Low temperature crystallization of amorphous silicon film
06/17/1997US5639697 Dummy underlayers for improvement in removal rate consistency during chemical mechanical polishing
06/17/1997US5639696 Microelectronic integrated circuit mounted on circuit board with solder column grid array interconnection, and method of fabricating the solder column grid array
06/17/1997US5639693 Semiconductor device and process for fabricating the same
06/17/1997US5639692 Non-etch back SOG process using a metal via stud
06/17/1997US5639691 Copper pellet for reducing electromigration effects associated with a conductive via in a semiconductor device