| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/12/1997 | US5656811 Method for making specimen and apparatus thereof |
| 08/12/1997 | US5656798 Terminal-carrying circuit board |
| 08/12/1997 | US5656557 Process for producing various gases for semiconductor production factories |
| 08/12/1997 | US5656556 Method for fabricating planarized borophosphosilicate glass films having low anneal temperatures |
| 08/12/1997 | US5656555 Modified hydrogen silsesquioxane spin-on glass |
| 08/12/1997 | US5656554 Semiconductor chip reclamation technique involving multiple planarization processes |
| 08/12/1997 | US5656553 Method for forming a monolithic electronic module by dicing wafer stacks |
| 08/12/1997 | US5656552 Method of making a thin conformal high-yielding multi-chip module |
| 08/12/1997 | US5656550 Method of producing a semicondutor device having a lead portion with outer connecting terminal |
| 08/12/1997 | US5656549 Method of packaging a semiconductor device |
| 08/12/1997 | US5656548 Method for forming three dimensional processor using transferred thin film circuits |
| 08/12/1997 | US5656547 Method for making a leadless surface mounted device with wrap-around flange interface contacts |
| 08/12/1997 | US5656546 Self-aligned tin formation by N2+ implantation during two-step annealing Ti-salicidation |
| 08/12/1997 | US5656545 Elimination of tungsten dimple for stacked contact or via application |
| 08/12/1997 | US5656544 Process for forming a polysilicon electrode in a trench |
| 08/12/1997 | US5656543 Whereby even if via is misaligned with line, portion of via not enclosed by metal is enclosed by etch stop spacer, and via is always capped by metal |
| 08/12/1997 | US5656542 Covering substrate with dielectric film having groove, then forming layers of three different metals on film surface and removing them except in groove, annealing and alloying while controlling resistance |
| 08/12/1997 | US5656541 Low temperature P2 O5 oxide diffusion source |
| 08/12/1997 | US5656540 Forming step on semiconductor substrate, carrying out crystal growth using metal compound having alkylamino group and organometallic compound |
| 08/12/1997 | US5656538 Halide dopant process for producing semi-insulating group III-V regions for semiconductor devices |
| 08/12/1997 | US5656537 Preventing parasitic transistor from being formed in lateral end of semiconductor on insulator structure |
| 08/12/1997 | US5656536 Method of manufacturing a crown shaped capacitor with horizontal fins for high density DRAMs |
| 08/12/1997 | US5656535 Storage node process for deep trench-based DRAM |
| 08/12/1997 | US5656533 Preventing formation of projections during oxidation to eliminate areas where residual deposits of polycrystalline silicon could remain |
| 08/12/1997 | US5656532 Method for fabricating a coaxial capacitor of a semiconductor device |
| 08/12/1997 | US5656531 Method to form hemi-spherical grain (HSG) silicon from amorphous silicon |
| 08/12/1997 | US5656529 Method for manufacturing highly-integrated capacitor |
| 08/12/1997 | US5656527 Method for fabricating a non-volatile semiconductor memory device having storage cell array and peripheral circuit, and a structure therefore |
| 08/12/1997 | US5656526 Method of fabricating a display device |
| 08/12/1997 | US5656524 Selective deposition and etching yield emitter dielectric stack having reduced parasitic capacitance |
| 08/12/1997 | US5656523 Flowing photoresist to cover edges of conductive layer and act as barrier or spacer for doping |
| 08/12/1997 | US5656522 Method of manufacturing a semiconductor integrated circuit device having single-element type non-volatile memory elements |
| 08/12/1997 | US5656520 Forming gate insulating film, electrode, stopper film on semiconductor substrate, forming insulating interlayer, etching to remove, lightly doping substrate, forming sidewall spacers, heavily doping substrate, forming electrode wiring |
| 08/12/1997 | US5656519 Method for manufacturing salicide semiconductor device |
| 08/12/1997 | US5656518 Method for fabrication of a non-symmetrical transistor |
| 08/12/1997 | US5656516 Method for forming silicon oxide layer |
| 08/12/1997 | US5656515 Method of making high-speed double-heterostructure bipolar transistor devices |
| 08/12/1997 | US5656514 Controlling doping concentrations to control band gaps |
| 08/12/1997 | US5656513 Nonvolatile memory cell formed using self aligned source implant |
| 08/12/1997 | US5656512 Method of manufacturing a semiconductor accelerometer |
| 08/12/1997 | US5656511 Manufacturing method for semiconductor device |
| 08/12/1997 | US5656510 Method for manufacturing gate oxide capacitors including wafer backside dielectric and implantation electron flood gun current control |
| 08/12/1997 | US5656414 Methods of forming tall, high-aspect ratio vias and trenches in photo-imageable materials, photoresist materials, and the like |
| 08/12/1997 | US5656412 Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material |
| 08/12/1997 | US5656402 Method for alignment of manufacturing semiconductor apparatus |
| 08/12/1997 | US5656400 Photomask and pattern forming method employing the same |
| 08/12/1997 | US5656399 Process for making an x-ray mask |
| 08/12/1997 | US5656382 Oriented conductive film and process for preparing the same |
| 08/12/1997 | US5656342 Free of dust particles |
| 08/12/1997 | US5656339 Method of and arrangement for applying a fluid to a surface using a vibrating needle |
| 08/12/1997 | US5656337 Method of forming a dielectric layer |
| 08/12/1997 | US5656330 Hydrogenated amorphous silicon film |
| 08/12/1997 | US5656329 Surface-mediated reaction between two precursors releases a volatile ester and deposits an intermediate compound film; annealing; crystallization; perovskite-phase film |
| 08/12/1997 | US5656182 Process for fabricating a device in which the process is controlled by near-field imaging latent features introduced into energy sensitive resist materials |
| 08/12/1997 | US5656147 Using anodizing interconnection of lines which connect joint points to input points of pattern so formation voltages at respective input points are equal to each other |
| 08/12/1997 | US5656139 Electroplating apparatus |
| 08/12/1997 | US5656128 Reduction of reflection by amorphous carbon |
| 08/12/1997 | US5656123 Dual-frequency capacitively-coupled plasma reactor for materials processing |
| 08/12/1997 | US5656122 Shadow clamp |
| 08/12/1997 | US5656113 Slurrying aluminum nitride, sintering aid and dielectric increasing compound, molding sheets, degreasing and sintering them |
| 08/12/1997 | US5656110 Process and apparatus for producing a laminated strip of a metal foil and a plastic film |
| 08/12/1997 | US5656097 Cleaning solution containing ammonium hydroxide, hydrogen peroxide and water |
| 08/12/1997 | US5656093 Wafer spacing mask for a substrate support chuck and method of fabricating same |
| 08/12/1997 | US5656092 Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter |
| 08/12/1997 | US5656088 Apparatus for dipping substrates in processing fluid |
| 08/12/1997 | US5656082 Liquid applying apparatus utilizing centrifugal force |
| 08/12/1997 | US5656076 Method for growing III-V group compound semiconductor crystal |
| 08/12/1997 | US5655954 Polishing apparatus |
| 08/12/1997 | US5655871 Device for transferring plate-like objects |
| 08/12/1997 | US5655869 Device for coupling loading and unloading devices with semiconductor processing machines |
| 08/12/1997 | US5655703 Solder hierarchy for chip attachment to substrates |
| 08/12/1997 | US5655700 Ultrasonic flip chip bonding process and apparatus |
| 08/12/1997 | US5655290 Method for making a three-dimensional multichip module |
| 08/12/1997 | CA2069038C Method for preparing semiconductor member |
| 08/12/1997 | CA2064146C Schottky barrier diode and a method of manufacturing thereof |
| 08/07/1997 | WO1997028673A1 Polymer based circuit and method of making same |
| 08/07/1997 | WO1997028669A1 Model-based predictive control of thermal processing |
| 08/07/1997 | WO1997028668A1 Thin film fabrication technique for implantable electrodes |
| 08/07/1997 | WO1997028564A1 Facet etch for improved step coverage of integrated circuit contacts |
| 08/07/1997 | WO1997028563A1 Manufacturing process for borderless vias |
| 08/07/1997 | WO1997028562A1 Contact bump structure and method for fabricating contact bumps |
| 08/07/1997 | WO1997028561A1 Reducing fixed charge in semiconductor device layers |
| 08/07/1997 | WO1997028560A1 Method for forming ultra-thin gate oxides |
| 08/07/1997 | WO1997028555A1 Electromagnetic high-frequency or microwave apparatus |
| 08/07/1997 | WO1997028420A1 Lead inspection apparatus of ic package |
| 08/07/1997 | WO1997027977A1 Robot for handling |
| 08/07/1997 | WO1997023808A3 A mixed solvent system for positive photoresists |
| 08/07/1997 | DE19707180A1 Oxidising and doping silicon surfaces |
| 08/07/1997 | DE19703620A1 Single crystal pulling apparatus |
| 08/07/1997 | DE19653219A1 High voltage semiconductor integrated circuit, e.g. IGBT and CMOS logic with SOI substrate |
| 08/07/1997 | DE19640225A1 Semiconductor module with housing for integrated circuit |
| 08/07/1997 | DE19633914C1 Thin film transistor device |
| 08/07/1997 | DE19630913A1 Burn-in sensor circuit for semiconductor memory |
| 08/07/1997 | DE19630609A1 Production of transistor |
| 08/07/1997 | DE19604260A1 Festwert-Speicherzellenvorrichtung und Verfahren zu deren Herstellung Read-only memory cell apparatus and method for producing them |
| 08/07/1997 | DE19604242A1 Herstellung von schrägen Galvanikstrukturen Production of oblique galvanic structures |
| 08/07/1997 | DE19604043A1 Vertical MOS field effect transistor device |
| 08/07/1997 | CA2244956A1 Electromagnetic high-frequency or microwave apparatus |
| 08/06/1997 | EP0788228A2 Semiconductor integrated circuit chip |
| 08/06/1997 | EP0788170A2 Source-follower amplifier employing a fully depleted well structure |