Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/1998
07/07/1998US5776659 Coating on a resist film forming a pattern
07/07/1998US5776657 Wet-chemical developable, etch-stable photoresist for UV radiation with a wavelength below 200 NM
07/07/1998US5776644 Photolithographic method for high resolution circle patterning utilizing calibrated opaque microspheres
07/07/1998US5776640 Photo mask for a process margin test and a method for performing a process margin test using the same
07/07/1998US5776639 Exposure mask, method of producing the same, exposure mask producing apparatus, and method of forming surface profile on material using exposure mask
07/07/1998US5776638 Projection exposure method and mask employed therein
07/07/1998US5776621 On semiconductor substrate
07/07/1998US5776599 Electronic coating materials using mixed polymers
07/07/1998US5776557 Method for forming a film on a substrate by activating a reactive gas
07/07/1998US5776556 Vacuum deposition
07/07/1998US5776551 Use of plasma activated NF3 to clean solder bumps on a device
07/07/1998US5776512 Apparatus for encapsulating electronic packages
07/07/1998US5776391 Silicon carbide carrier for wafer processing and method for making same
07/07/1998US5776356 Method for etching ferroelectric film
07/07/1998US5776323 Semiconducting diamond film with chemically modified surface
07/07/1998US5776296 Apparatus for the treatment of semiconductor wafers in a fluid
07/07/1998US5776282 Method of producing ceramic green sheets
07/07/1998US5776259 Method for final rinse/dry for critical cleaning application
07/07/1998US5776255 Chemical vapor deposition apparatus
07/07/1998US5776253 Apparatus for forming single-crystalline thin film by beam irradiator and beam reflecting device
07/07/1998US5776250 Device for recovering photoresist material exhausted from a spin coater
07/07/1998US5776235 Thick opaque ceramic coatings
07/07/1998US5775980 Polishing method and polishing apparatus
07/07/1998US5775752 Holder for semiconductor wafer cassettes
07/07/1998US5775569 Method for building interconnect structures by injection molded solder and structures built
07/07/1998US5775510 UV light sensitive die-pac for securing semiconductor dice during transport
07/07/1998US5775416 Temperature controlled chuck for vacuum processing
07/07/1998US5775403 Incorporating partially sintered preforms in metal matrix composites
07/07/1998US5775000 For gripping a substrate
07/07/1998US5774964 Apparatus for forming a profiled element
07/07/1998US5774962 Process for producing a surface acoustic wave device
07/07/1998CA2041706C Monolithic integrated optical amplifier and photodetector
07/07/1998CA2022251C Electron-detector diode biassing scheme for improved writing by an electron beam lithography machine
07/03/1998WO1998033133A1 Method and apparatus for channel-routing of an electronic device
07/02/1998WO1998028795A1 Semiconductor memory device and method for manufacturing the same
07/02/1998WO1998028794A1 Direct contact die attach
07/02/1998WO1998028793A1 Interface structures for electronic devices
07/02/1998WO1998028792A1 Surface connectable semiconductor bridge elements, devices and methods
07/02/1998WO1998028789A1 Semiconductor storage device and method for manufacturing the same
07/02/1998WO1998028788A1 Manufacture of semiconductor device
07/02/1998WO1998028786A2 Method of manufacturing a glass-covered semiconductor device and a glass-covered semiconductor device
07/02/1998WO1998028785A1 Methods for improving photoresist selectivity and reducing etch rate loading
07/02/1998WO1998028784A1 Integrated circuit electrode structure and process for fabricating same
07/02/1998WO1998028783A1 Method of nucleation used in semiconductor devices
07/02/1998WO1998028781A2 Layer with a porous layer area, an interference filter containing such a layer and a method for the production thereof
07/02/1998WO1998028665A1 Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device
07/02/1998WO1998028664A1 Two-dimensionally balanced positioning device, and lithographic device provided with such a positioning device
07/02/1998WO1998028660A1 Furnace for rapid thermal processing
07/02/1998WO1998028650A1 Beam homogenizer
07/02/1998WO1998028644A1 Reticular objective for microlithography-projection exposure installations
07/02/1998WO1998028466A1 Composition and process for fabricating metal oxide films
07/02/1998WO1998028465A1 Inductively coupled plasma cvd
07/02/1998WO1998028463A1 Semiconducting devices and method of making thereof
07/02/1998WO1998028460A1 Vacuum treatment equipment
07/02/1998WO1998028395A1 Formulations including a 1,3-dicarbonyl compound chelating agent for stripping residues from semiconductor substrates
07/02/1998WO1998028320A2 Affinity based self-assembly systems and devices for photonic and electronic applications
07/02/1998WO1998028107A1 Rotatable and translatable spray nozzle
07/02/1998WO1998028104A1 Shifted wavelength laser processing of circuit links
07/02/1998WO1998006889A3 Superheated vapor dryer system
07/02/1998DE19757879A1 Verfahren zum Herstellen eines Schutzfilmes bei einem Halbleiterbauelement sowie nach dem Verfahren hergestelltes Halbleiterbauelement A method for manufacturing a protective film for a semiconductor device produced by the process, as well as semiconductor device
07/02/1998DE19757685A1 Semiconductor device production
07/02/1998DE19757269A1 Silicon on insulator semiconductor substrate
07/02/1998DE19756179A1 Semiconductor chip lead frame
07/02/1998DE19755676A1 Guard ring production in IC device
07/02/1998DE19753809A1 Thin film transistor with vertical structure
07/02/1998DE19753471A1 Wafer carrier with support and/or conveyor for wet cleaning system for semiconductors
07/02/1998DE19753276A1 Amid- oder Imid- enthaltendes Copolymer, Herstellungsverfahren für das Copolymer und dieses Copolymer enthaltendes Photoresist Amide or imide-containing copolymer manufacturing method of the copolymer and this copolymer containing photoresist
07/02/1998DE19752637A1 Metallic wiring production for semiconductor device
07/02/1998DE19748274A1 U-shaped capacitor for DRAM
07/02/1998DE19747777A1 Non-active ion implantation in semiconductor device production
07/02/1998DE19747776A1 Semiconductor memory with stacked gate structure
07/02/1998DE19747105A1 Component with stacked semiconductor chips
07/02/1998DE19743766A1 Semiconductor chip housing
07/02/1998DE19743765A1 Semiconductor component mfg. with pattern preventing cracks
07/02/1998DE19740950A1 Semiconductor memory with dummy gate lines
07/02/1998DE19740949A1 Protective circuit against electrostatic discharge for circuits internal to input and output
07/02/1998DE19733875A1 Wafer wet treatment apparatus
07/02/1998DE19730762A1 Flash memory cell
07/02/1998DE19730139A1 Highly integrated semiconductor device production
07/02/1998DE19728183A1 Chip-size package production
07/02/1998DE19726069A1 Semiconductor device e.g. DRAM cell
07/02/1998DE19724904A1 Semiconductor device e.g. DRAM production
07/02/1998DE19723060A1 Chemo-mechanical wafer polisher and process for semiconductors
07/02/1998DE19718767A1 Output contact circuit using control signal for IC chip exchange
07/02/1998DE19653107A1 Verfahren zur Herstellung einer Speicherzellenanordnung A method for fabricating a memory cell arrangement
07/02/1998DE19653097A1 Schicht mit porösem Schichtbereich, eine solche Schicht enthaltendes Interferenzfilter sowie Verfahren zu ihrer Herstellung Layer with a porous layer area, such a layer containing interference filters, as well as processes for their preparation
07/02/1998CA2275724A1 Direct contact die attach
07/02/1998CA2274564A1 Layer with a porous layer area, an interference filter containing such a layer and a method for the production thereof
07/02/1998CA2274167A1 Surface connectable semiconductor bridge elements, devices and methods
07/02/1998CA2246989A1 Interface structures for electronic devices
07/01/1998EP0851724A2 Printed circuit board and electric components
07/01/1998EP0851555A2 Integrated circuit with improved overvoltage protection
07/01/1998EP0851552A1 Protection ciruit for an electric supply line in a semiconductor integrated device
07/01/1998EP0851513A2 Method of producing semiconductor member and method of producing solar cell
07/01/1998EP0851510A2 Field effect transistor
07/01/1998EP0851508A1 Non volatile semiconductor memory device using a transistor with two floating gates and method for manufacturing it
07/01/1998EP0851507A2 Method for fabricating a DMOS transistor
07/01/1998EP0851506A2 Semiconductor device having quantum box and method of fabricating the same
07/01/1998EP0851505A2 semiconductor device having a high voltage termination structure with buried field-shaping region
07/01/1998EP0851502A2 Thin film semiconductor apparatus and production method thereof
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