| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 07/14/1998 | US5780330 Selective diffusion process for forming both n-type and p-type gates with a single masking step |
| 07/14/1998 | US5780329 Process for fabricating a moderate-depth diffused emitter bipolar transistor in a BICMOS device without using an additional mask |
| 07/14/1998 | US5780328 Process for producing semiconductor integrated circuit |
| 07/14/1998 | US5780327 Vertical double-gate field effect transistor |
| 07/14/1998 | US5780326 Patterning and etching the blanket of insulating layer over doped substrate to define an opening, forming conductive silicon material plug within the opening, forming dielectric over plug, then semiconductor layer and doping it |
| 07/14/1998 | US5780325 Methods of making isolations including doped edge layer, for semiconductor-on-insulator substrates |
| 07/14/1998 | US5780324 Method of manufacturing a vertical semiconductor device |
| 07/14/1998 | US5780323 Fabrication method for metal-to-metal antifuses incorporating a tungsten via plug |
| 07/14/1998 | US5780322 Method for growing a II-VI compound semiconductor layer containing cadmium and method for fabricating a semiconductor laser |
| 07/14/1998 | US5780321 Forming indium-gallium-aluminum-phosphide epilayer |
| 07/14/1998 | US5780320 Method of manufacturing a semiconductor laser including two sets of dicing grooves |
| 07/14/1998 | US5780317 Apparatus for forming oxide film of semiconductor device |
| 07/14/1998 | US5780316 Linewidth control apparatus and method |
| 07/14/1998 | US5780315 Dry etch endpoint method |
| 07/14/1998 | US5780314 Depositing first high temperature superconductive layer on first region and a portion of second region of substrate, a dielectric layer covering it, then second low temperature superconductive layer on second regionsecond |
| 07/14/1998 | US5780313 Method of fabricating semiconductor device |
| 07/14/1998 | US5780311 bonded wafer processing |
| 07/14/1998 | US5780310 Method of fabricating a memory cell array area and a peripheral circuit area |
| 07/14/1998 | US5780204 Backside wafer polishing for improved photolithography |
| 07/14/1998 | US5780163 A protective covering to prevent examination and analysis by competitors comprising silica ceramic, a silicon carbide coating, an opaque material-filled porous silica ceramic, a metal layer and another opaque silica ceramic |
| 07/14/1998 | US5780162 Aluminum nitride substrate and method of producing the same |
| 07/14/1998 | US5780127 Wafer carrier |
| 07/14/1998 | US5780121 Irridation with fluorine free radicals generated from gas; avoiding reaction of charged particles with surface; blending |
| 07/14/1998 | US5780120 Method for preparing laser faces |
| 07/14/1998 | US5780115 Methods for fabricating electrode structures including oxygen and nitrogen plasma treatments |
| 07/14/1998 | US5780105 Method for uniformly coating a semiconductor wafer with photoresist |
| 07/14/1998 | US5780103 Coating a layer of divinylsiloxane-bisbenzocyclobutene on an aluminum surface, polymerizing the organodisiloxane, pyrolyzing to form silicon dioxide dielectric layer |
| 07/14/1998 | US5779958 Method for packaging electronic device |
| 07/14/1998 | US5779929 Multilayer of titanium, palladium or palladium-titanium alloy, and copper |
| 07/14/1998 | US5779928 Film dissolution method of dissolving silica-based coating film formed on surface of a substrate |
| 07/14/1998 | US5779927 Modified reflux etcher controlled by pH or conductivity sensing loop |
| 07/14/1998 | US5779926 Plasma process for etching multicomponent alloys |
| 07/14/1998 | US5779925 Plasma processing with less damage |
| 07/14/1998 | US5779922 Resistor value control technique |
| 07/14/1998 | US5779848 Corrosion-resistant aluminum nitride coating for a semiconductor chamber window |
| 07/14/1998 | US5779816 Nozzle and system for use in wafer cleaning procedures |
| 07/14/1998 | US5779807 Electrically isolating the wafer-supporting grounded electrode in a vapor deposition enclosure and applying a bias voltage to launch electrostatically the particles into a suspension of gas flow |
| 07/14/1998 | US5779799 Substrate coating apparatus |
| 07/14/1998 | US5779797 Wafer boat for vertical diffusion and vapor growth furnace |
| 07/14/1998 | US5779792 Single crystal pulling apparatus |
| 07/14/1998 | US5779790 Method of manufacturing a silicon monocrystal |
| 07/14/1998 | US5779521 Method and apparatus for chemical/mechanical polishing |
| 07/14/1998 | US5779520 Method and apparatus of polishing wafer |
| 07/14/1998 | US5779425 Procedure and facility for handling and transport of wafers in ultra-clean rooms |
| 07/14/1998 | US5779203 Adjustable wafer cassette stand |
| 07/14/1998 | US5779134 Method for surface mounting a heatsink to a printed circuit board |
| 07/14/1998 | US5778969 Apparatus for thermal treatment of thin wafers |
| 07/14/1998 | US5778968 For stabilizing the temperature of semiconductor wafers |
| 07/14/1998 | US5778947 Bent lead repair tool for electronic components |
| 07/14/1998 | US5778913 Cleaning solder-bonded flip-chip assemblies |
| 07/14/1998 | US5778911 Liquid supplying apparatus |
| 07/14/1998 | US5778751 Mounting structure for cutting blade of dicing apparatus |
| 07/14/1998 | US5778682 Reactive PVD with NEG pump |
| 07/14/1998 | US5778554 Wafer spin dryer and method of drying a wafer |
| 07/14/1998 | US5778529 Method of making a multichip module substrate |
| 07/14/1998 | US5778485 Probe card cleaning apparatus, probe apparatus with the cleaning apparatus, and probe card cleaning method |
| 07/14/1998 | US5778481 Silicon wafer cleaning and polishing pads |
| 07/14/1998 | CA2089240C Method and apparatus for fabrication of thin film semiconductor devices using non-planar, exposure beam lithography |
| 07/09/1998 | WO1998030073A1 Method and device for mounting electronic component on circuit board |
| 07/09/1998 | WO1998030072A1 Ceramic composite wiring structures for semiconductor devices and method of manufacture |
| 07/09/1998 | WO1998029908A1 Ferroelectric memory device and method for manufacturing the same |
| 07/09/1998 | WO1998029905A1 N2o nitrided-oxide trench sidewalls to prevent boron outdiffusion and decrease stress |
| 07/09/1998 | WO1998029904A1 Bump-bonded semiconductor imaging device |
| 07/09/1998 | WO1998029903A1 Resin-encapsulated semiconductor device and method for manufacturing the same |
| 07/09/1998 | WO1998029902A1 Method for restoring the resistance of indium oxide semiconductors after heating while in sealed structures |
| 07/09/1998 | WO1998029901A1 Method and device for treating a semiconductor surface |
| 07/09/1998 | WO1998029897A2 Well boosting threshold voltage rollup |
| 07/09/1998 | WO1998029881A1 Device comprising an integrated coil |
| 07/09/1998 | WO1998029748A1 Micromechanical semiconductor array and method for the production thereof |
| 07/09/1998 | WO1998029704A1 Thermally conductive chuck for vacuum processor |
| 07/09/1998 | WO1998029515A1 Composition for oxide cmp |
| 07/09/1998 | WO1998029428A1 Stabilization of triplexes by water structure-making substances |
| 07/09/1998 | WO1998029261A1 Semiconductor device and method of manufacturing the same |
| 07/09/1998 | WO1998021751A3 Optimizing the power connection between chip and circuit board for a power switch |
| 07/09/1998 | DE19756929A1 Cell array and read-out amplifier structure for semiconductor memory |
| 07/09/1998 | DE19700049A1 Exposure equipment for semiconductor device |
| 07/09/1998 | CA2275972A1 Ceramic composite wiring structures for semiconductor devices and method of manufacture |
| 07/08/1998 | EP0852416A1 Semiconductor material, method of producing the semiconductor material, and semiconductor device |
| 07/08/1998 | EP0852403A1 Method of making an organic thin film transistor |
| 07/08/1998 | EP0852402A1 A GaAsP epitaxial wafer and a method for manufacturing it |
| 07/08/1998 | EP0852400A2 A bistable SCR-like switch for ESD protection of silicon-on-insulator integrated circuits |
| 07/08/1998 | EP0852396A2 Memory cell that includes a vertical transistor and a trench capacitor |
| 07/08/1998 | EP0852395A2 Method of multiplexed joining of solder bumps to a substrate during assembly of an integrated circuit package |
| 07/08/1998 | EP0852394A2 Method for making very shallow junctions in silicon devices |
| 07/08/1998 | EP0852393A2 Thermal reaction chamber for semiconductor wafer processing operations |
| 07/08/1998 | EP0852392A2 Closed-loop dome thermal control apparatus for a semiconductor wafer processing system |
| 07/08/1998 | EP0852389A2 Magnetically enhanced plasma chamber with non-uniform magnetic field |
| 07/08/1998 | EP0852229A2 Precursor with (methoxy) (methyl) silylolefin ligands to deposit copper and method for the same |
| 07/08/1998 | EP0852068A1 Device with a p-n junction and a means of reducing the risk of breakdown of the junction |
| 07/08/1998 | EP0852067A1 Low rc interconnection |
| 07/08/1998 | EP0852066A1 Process for generating the source regions of a flash-eeprom storage cell field |
| 07/08/1998 | EP0852065A1 Interconnect scheme for integrated circuits |
| 07/08/1998 | EP0852064A2 Method of producing very small structural widths on a semiconductor substrate |
| 07/08/1998 | EP0852063A1 Method of modifying an exposed surface of a semiconductor wafer |
| 07/08/1998 | EP0852062A2 Doping process for producing homojunctions in semiconductor substrates |
| 07/08/1998 | EP0852029A1 Avoidance of pattern shortening by using an off axis illumination with twisting dipole and polarizing apertures |
| 07/08/1998 | EP0800720A4 Substrate clamp for non-isolated integrated circuits |
| 07/08/1998 | EP0742994B1 Plasma-generating device |
| 07/08/1998 | EP0739531B1 Particle beam optic reproduction system |
| 07/08/1998 | EP0676091B1 Tab testing of area array interconnected chips |