Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1998
08/06/1998WO1998034268A2 Fabrication method for reduced-dimension integrated circuits
08/06/1998WO1998034266A1 Digital direct write electron beam lithography
08/06/1998WO1998034234A1 Method and apparatus for producing extreme ultra-violet light for use in photolithography
08/06/1998WO1998034233A1 A scalable flash eeprom memory cell, method of manufacturing and operation thereof
08/06/1998WO1998034231A1 Mram with aligned magnetic vectors
08/06/1998WO1998034159A1 Photosensitive resin composition, method for producing pattern therefrom, electronic devices produced by using the same, and method for production thereof
08/06/1998WO1998033950A1 METHOD OF LOW TEMPERATURE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF TiN FILM OVER TITANIUM FOR USE IN VIA LEVEL APPLICATIONS
08/06/1998WO1998033645A1 Die adhesive or encapsulant of epoxy siloxane and polyepoxy resin
08/06/1998WO1998025293A3 Method of operating a particle-optical apparatus
08/06/1998DE19802056A1 IC especially static RAM cell of reduced size
08/06/1998DE19739922A1 Etching, crystal growth and semiconductor device production processes
08/06/1998DE19704351A1 Lead frame, for subsequent chip mounting and bonding to chip housing
08/06/1998DE19703639A1 Component connection method for electronic assembly group
08/06/1998CA2279297A1 Vialess integrated inductive elements for electromagnetic applications
08/06/1998CA2278838A1 Methods and compositions for ionizing radiation shielding
08/06/1998CA2251190A1 Method and device for sealing ic chip
08/06/1998CA2228605A1 Method for measuring epitaxial film thickness of multilayer epitaxial wafer
08/05/1998EP0856923A2 Method of manufacturing semiconductor device
08/05/1998EP0856893A2 Structure and device for selecting design options in an integrated circuit
08/05/1998EP0856892A2 MOSFET and manufacturing method thereof
08/05/1998EP0856891A2 Semiconductor integrated circuit device
08/05/1998EP0856890A1 Application specific integrated circuit comprising dummy elements
08/05/1998EP0856889A2 Semiconductor device mount structure and semiconductor device mounting method
08/05/1998EP0856887A1 Process for forming a morphological edge structure to seal integrated electronic devices, and corresponding device
08/05/1998EP0856886A1 Process for forming an edge structure to seal integrated electronic devices, and corresponding device
08/05/1998EP0856885A2 Method and apparatus for reducing the first wafer effect
08/05/1998EP0856884A2 Low temperature via and trench fill process by means of CVD of Cu followed by PVD of Cu
08/05/1998EP0856883A2 Method for forming a metal contact
08/05/1998EP0856882A2 Stand-off pad for supporting a wafer on a substrate support chuck and method of fabricating same
08/05/1998EP0856881A2 Joint structure of metal member and ceramic member and method of producing the same
08/05/1998EP0856880A2 A method for the heat treatment of group II-VI semiconductors
08/05/1998EP0856879A1 Method for fabricating a semiconductor memory capacitor
08/05/1998EP0856878A2 Method of manufacturing a semiconductor structure comprising a precious metal
08/05/1998EP0856877A1 Process for forming integrated circuits using multistep plasma etching
08/05/1998EP0856876A2 Method of manufacturing a bonding substrate
08/05/1998EP0856875A2 Vacuum processing apparatus and operating method therefor
08/05/1998EP0856874A2 Wafer processing apparatus and method, wafer convey robot, semiconductor substrate fabrication method, and semiconductor fabrication apparatus
08/05/1998EP0856873A2 Wafer processing apparatus, wafer processing method, and SOI wafer fabrication method
08/05/1998EP0856872A2 Charged-particle-beam exposure apparatus
08/05/1998EP0856794A1 Method and apparatus for performing operative testing on an integrated circuit
08/05/1998EP0856595A2 Process for removing silicon-containing coatings
08/05/1998EP0856594A1 Apparatus for plasma treatment of substrates
08/05/1998EP0856593A1 A method and apparatus for enhancing sidewall coverage during sputtering in a chamber having an inductively coupled plasma
08/05/1998EP0856376A1 Article comprising fine-grained solder compositions with dispersoid particles
08/05/1998EP0856197A2 Novel shallow trench isolation technique
08/05/1998EP0856196A1 Semiconductor component with foreign atoms introduced by ion implantation and process for producing the same
08/05/1998EP0856070A1 Plasma chamber with separate process gas and cleaning gas injection ports
08/05/1998EP0698288B1 Process for producing vertically connected semiconductor components
08/05/1998EP0677207B1 Single crystal silicon on quartz
08/05/1998CN1189922A Photodetector involving a mosfet having a floating gate
08/05/1998CN1189921A Tunnelling device and method of producing a tunnelling device
08/05/1998CN1189920A Insulating film for use in semiconductor device
08/05/1998CN1189919A Method of producing a read-only storage cell arrangement
08/05/1998CN1189918A Method of mfg. a pic(power integrated circuit) device, and a pic device manufactured by such a method
08/05/1998CN1189859A Plasma enhanced chemical processing reactor and method
08/05/1998CN1189760A Printed circuit board and electronic components
08/05/1998CN1189699A Field-effect transistor and its mfg. method
08/05/1998CN1189698A Thin-film transistor and its mfg. method, array substrate and liquid crystal display
08/05/1998CN1189697A Semiconductor device having improved transistor structure and capable of greatly reducing its occupied area and method of manufacturing the same
08/05/1998CN1189696A Transistor, transistor array, method for manufacturing transistor array, and nonvolatile semiconductor memory
08/05/1998CN1189695A Integrated circuit and process for its manufacture
08/05/1998CN1189694A Semiconductor device having N mos and P mos transmistors on common substrate
08/05/1998CN1189692A Interconnection system in semiconductor device
08/05/1998CN1189691A Semiconductor device and manufacturing method and testing method of same
08/05/1998CN1189689A Improved polytetrafluoroethyelen thin film chip carrier
08/05/1998CN1189688A Process for fabricating semiconductor device without separation between silicide layer and insulating layer
08/05/1998CN1189687A Semiconductor device with capacity cell and its prodn. method
08/05/1998CN1189686A Method for forming multilevel interconnects in semiconductor device
08/05/1998CN1189685A Fabrication process of semiconductor device
08/05/1998CN1189684A Method of manufacturing EB mask for electron beam image drawing and device for manufacturing EB mask
08/05/1998CN1189672A Circuit arrangement for generating increased output voltage
08/05/1998CN1189451A On-site manufacture of ultra-high-purity hydrogen peroxide
08/05/1998CN1039464C Semiconductordevice and method for mfg. the same
08/04/1998US5790751 Rapid thermal heating apparatus including a plurality of light pipes and a pyrometer for measuring substrate temperature
08/04/1998US5790750 Profiled substrate heating utilizing a support temperature and a substrate temperature
08/04/1998US5790451 Memory cell, memory device and method of fabricating the same
08/04/1998US5790436 Realistic worst-case circuit simulation system and method
08/04/1998US5790414 Automatic routing method and automatic routing apparatus
08/04/1998US5790366 High temperature electrode-barriers for ferroelectric and other capacitor structures
08/04/1998US5790365 Method and apparatus for releasing a workpiece from and electrostatic chuck
08/04/1998US5790258 Position detecting device
08/04/1998US5790257 Alignment device for an exposure system using a CCD camera
08/04/1998US5790253 Method and apparatus for correcting linearity errors of a moving mirror and stage
08/04/1998US5790252 Method of and apparatus for determining residual damage to wafer edges
08/04/1998US5790239 Illumination optical apparatus containing an optical integrator and projection exposure apparatus using the same
08/04/1998US5789971 Protection circuit and method for power transistors, voltage regulator using the same
08/04/1998US5789968 Controllable semiconductor switch
08/04/1998US5789937 Impedence self-adjusting driver circuit
08/04/1998US5789933 Method and apparatus for determining IDDQ
08/04/1998US5789932 Integrated circuit
08/04/1998US5789906 Reference voltage generating circuit and method
08/04/1998US5789878 Dual plane robot
08/04/1998US5789851 Field emission device
08/04/1998US5789843 Electrostatically levitated conveyance apparatus and electrode thereof for electrostatic levitation
08/04/1998US5789820 Method for manufacturing heat radiating resin-molded semiconductor device
08/04/1998US5789819 Low dielectric constant material for electronics applications
08/04/1998US5789818 Structure with selective gap fill of submicron interconnects
08/04/1998US5789816 Multiple-chip integrated circuit package including a dummy chip
08/04/1998US5789810 Semiconductor cap
08/04/1998US5789809 Thermally enhanced micro-ball grid array package
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