Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/1998
07/21/1998US5783101 High etch rate residue free metal etch process with low frequency high power inductive coupled plasma
07/21/1998US5783100 Interruption and deflection of ions using filter; silicon selectivity
07/21/1998US5783099 Etch-ending point measuring method for vapor etch process
07/21/1998US5783098 Decapsulator and method for decapsulating plastic encapsulated device
07/21/1998US5783097 Wet etching using photoresist mask
07/21/1998US5783055 Multi-chamber sputtering apparatus
07/21/1998US5783036 Method for dry etching metal films having high melting points
07/21/1998US5783025 Optical diebonding for semiconductor devices
07/21/1998US5783023 Gas injector for use in semiconductor etching process
07/21/1998US5783022 Apparatus and methods for wafer debonding using a liquid jet
07/21/1998US5782997 Metal connectors on semiconductors
07/21/1998US5782990 Method for washing objects
07/21/1998US5782986 Process for metals removal using beta-diketone or beta-ketoimine ligand forming compounds
07/21/1998US5782984 Aqueous claner containing hydrogen fluoride nd hydrogen peroxide
07/21/1998US5782979 Substrate holder for MOCVD
07/21/1998US5782978 Coating device with movable fluid supply nozzle and rotatable substrate holder
07/21/1998US5782665 Fabricating array with storage capacitor between cell electrode and dark matrix
07/21/1998US5782517 Semiconductor handling apparatus
07/21/1998US5782399 Method and apparatus for attaching spherical and/or non-spherical contacts to a substrate
07/21/1998US5782362 Wafer cassette in wafer carrier
07/21/1998US5782361 Thin-plate supporting container
07/21/1998US5782356 Container for storing and transporting fragile objects
07/21/1998CA2195602A1 Method of protecting light sensitive regions of integrated circuits
07/16/1998WO1998031055A1 Nitride semiconductor device
07/16/1998WO1998031053A1 Semiconductor storage device
07/16/1998WO1998031052A1 Semiconductor device and method for manufacturing the same
07/16/1998WO1998031050A1 Improved active matrix esd protection and testing scheme
07/16/1998WO1998031049A1 Laser based method and system for integrated circuit repair or reconfiguration
07/16/1998WO1998031048A1 Semiconductor manufacturing without undercutting conductive lines
07/16/1998WO1998031046A2 Testing station for semiconductor wafers or wafer fragments
07/16/1998WO1998030937A1 Articulated platform mechanism for laser pattern generation on a workpiece
07/16/1998WO1998030854A1 Thermal processing apparatus and process
07/16/1998WO1998030731A1 Method and apparatus for reducing deposition of material in the exhaust pipe of a reaction furnace
07/16/1998WO1998030667A1 Semiconductor wafer cleaning composition and method with aqueous ammonium fluoride and amine
07/16/1998WO1998030647A1 Reducing void formation in curable adhesive formulations
07/16/1998WO1998030465A1 Integrated circuit tray with self aligning pocket
07/16/1998WO1998030356A1 Polymeric polishing pad having photolithographically induced surface pattern(s) and methods relating thereto
07/16/1998DE19738166A1 Gallium arsenide metal-semiconductor FET with gate electrode
07/16/1998DE19735358A1 Alignment correction method
07/16/1998DE19733171A1 Semiconductor memory especially DRAM
07/16/1998DE19732237A1 Multilayer wafer having several SOI regions
07/16/1998DE19732236A1 Capillary tube for wire bonding apparatus
07/16/1998DE19732048A1 Submicron field oxide region production
07/16/1998DE19729179A1 Encapsulation of a semiconductor assembly with lead frame to form a semiconductor package
07/16/1998DE19722164A1 Semiconductor device evaluation
07/16/1998DE19700839A1 Teststation für Halbleiterwafer bzw. Bruchstücke von Halbleiterwafern Test station for semiconductor wafers or fragments of semiconductor wafers
07/16/1998DE19700290A1 Mikromechanische Halbleiteranordnung und Verfahren zur Herstellung einer mikromechanischen Halbleiteranordnung A micromechanical semiconductor arrangement and method of manufacturing a micromechanical semiconductor arrangement
07/16/1998CA2529996A1 Nitride semiconductor device
07/16/1998CA2276737A1 Reducing void formation in curable adhesive formulations
07/16/1998CA2248002A1 Articulated platform mechanism for laser pattern generation on a workpiece
07/16/1998CA2222053A1 Circuit board adhesives for soldering environments
07/15/1998EP0853345A1 METHOD FOR FORMING CdTe FILM AND SOLAR BATTERY USING THE FILM
07/15/1998EP0853343A2 Semiconductor memory device having novel layout pattern
07/15/1998EP0853342A1 Plug-in type electronic control unit, connecting structure between wiring board and plug member, connecting unit between electronic parts and wiring board, and electronic parts mounting method
07/15/1998EP0853338A1 Improvements in or relating to semiconductor devices
07/15/1998EP0853337A1 Method and mold for manufacturing semiconductor device, semiconductor device, and method for mounting the device
07/15/1998EP0853336A2 Method forming preferred orientation-controlled platinum films using nitrogen
07/15/1998EP0853335A2 Slurry and process for the mechano-chemical polishing of semiconductor devices
07/15/1998EP0853334A1 Optoelectronic material, device using the same, and method for manufacturing the same
07/15/1998EP0853333A1 Apparatus for controlling backside gas pressure beneath a semiconductor wafer
07/15/1998EP0853332A1 Apparatus for processing wafers
07/15/1998EP0853331A2 Back sputtering shield
07/15/1998EP0853330A2 Ionized PVD source to produce uniform low-particle deposition
07/15/1998EP0853254A2 Liquid crystal display
07/15/1998EP0853243A2 Method and apparatus for detecting defects in wafers
07/15/1998EP0853136A1 Aluminum or aluminum alloy sputtering target
07/15/1998EP0853134A1 Method for obtaining a coating with a uniform distribution of reactants
07/15/1998EP0853110A1 CMP slurry with high selectivity
07/15/1998EP0852983A1 Brazing parts forming device used for soft soldering of semiconductor chips
07/15/1998EP0852897A1 Method for surface mounting a heatsink to a printed circuit board
07/15/1998EP0852814A1 Quantum well mos transistor and methods for making same
07/15/1998EP0852813A2 Integrated circuit device with embedded flash memory and method for manufacturing same
07/15/1998EP0852812A1 Semiconductor memory circuitry
07/15/1998EP0852809A1 Metal stack for integrated circuit having two thin layers of titanium with dedicated chamber depositions
07/15/1998EP0852808A1 Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors
07/15/1998EP0852807A1 Method of electrically connecting a semiconductor chip to at least one contact surface
07/15/1998EP0852806A1 Apparatus and method for making laminated electrical and electronic devices
07/15/1998EP0852774A1 Chip module
07/15/1998EP0852768A1 Method and apparatus for optimization of standard cell libraries
07/15/1998EP0852743A1 Process for producing surfactant having a low metal ion level and developer produced therefrom
07/15/1998EP0852628A1 Process chamber with inner support
07/15/1998EP0852617A1 Apparatus and methods for active programmable matrix devices
07/15/1998EP0852615A1 Chemical mechanical polishing composition and process
07/15/1998EP0826131A4 Unibody crucible
07/15/1998EP0752165B1 Quantum-layer structure
07/15/1998EP0742904A4 Method of making a micromechanical silicon-on-glass tuning fork gyroscope
07/15/1998EP0662019A4 Method for making a ceramic metal composite.
07/15/1998CN1187906A Electrically erasable ROM cell array and method of producing same
07/15/1998CN1187904A Process for producing ceramic multilayer substrate
07/15/1998CN1187903A Electron-beam processed films for microelectronics structures
07/15/1998CN1187694A Semiconductor memory and its making method
07/15/1998CN1187693A Structure of silicon on insulation layer of dynamic RAM and making method thereof
07/15/1998CN1187691A Semiconductor integrated circuit and its making method
07/15/1998CN1187690A Method for evaluating semiconductor device
07/15/1998CN1187688A Simulation method in lithographic process
07/15/1998CN1187687A Silicon on insulator substrate with improved insulation patterns
07/15/1998CN1187496A Novel amide-or imide-introduced copolymer, preparation thereof and photoresist comprising same
07/15/1998CN1187406A New chemical mechanical polishing process for layers of isolating material based on silicon derivatives or silicon
07/14/1998US5781721 Method and apparatus for testing cache RAM residing on a microprocessor
07/14/1998US5781693 Gas introduction showerhead for an RTP chamber with upper and lower transparent plates and gas flow therebetween