Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1998
08/04/1998US5788560 Backing pad and method for polishing semiconductor wafer therewith
08/04/1998US5788458 Method and apparatus for vertical transfer of a semiconductor wafer cassette
08/04/1998US5788454 Semiconductor wafer processing system
08/04/1998US5788453 System for transporting a semiconductor wafer
08/04/1998US5788448 Processing apparatus
08/04/1998US5788447 Substrate processing apparatus
08/04/1998US5788425 Flexible system for handling articles
08/04/1998US5788304 Transportation, storage semiconductive material; fluoropolymer overcoating
08/04/1998US5788143 Method of making an electrical interconnect assembly
08/04/1998US5788141 In a horizontal direction
08/04/1998US5788082 Wafer carrier
08/04/1998US5787976 For thermally coupling a heat source to a heat sink
08/04/1998US5787595 Method and apparatus for controlling flatness of polished semiconductor wafer
08/04/1998US5787581 Methods of making semiconductor connection components with releasable load support
08/04/1998US5787580 Method for making radio-frequency module by ball grid array package
08/04/1998US5787578 Annealing, ultrasonic removal
08/04/1998US5787575 Method for plating a bond finger of an intergrated circuit package
08/04/1998CA2136581C Gallium oxide thin films
08/04/1998CA2114255C Magnetic transfer device
08/04/1998CA2055400C Method of forming crystal
07/1998
07/30/1998WO1998033362A1 Plasma device
07/30/1998WO1998033218A1 Semiconductor diodes having low forward conduction voltage drop and low reverse current leakage
07/30/1998WO1998033217A1 Semiconductor device and method for manufacturing thereof
07/30/1998WO1998033216A1 Method for producing vertical chip connections
07/30/1998WO1998033213A1 Method for manufacturing semiconductor device
07/30/1998WO1998033211A1 Method for casing integrated circuits
07/30/1998WO1998033210A1 Vibrating template method of placing solder balls on the i/o pads of an integrated circuit package
07/30/1998WO1998033209A1 Method for obtaining a thin film, in particular semiconductor, comprising a protected ion zone and involving an ion implantation
07/30/1998WO1998033208A1 Method and device for cleaning substrate surfaces
07/30/1998WO1998033207A1 Alcohol vapor dryer system
07/30/1998WO1998033206A1 Method for forming a silicide region on a silicon body
07/30/1998WO1998033205A1 Device and method for fixing and protecting semiconductor wafers
07/30/1998WO1998033200A1 Modulator for plasma-immersion ion implantation
07/30/1998WO1998033199A2 Ion accelerator for use in ion implanter
07/30/1998WO1998033197A1 Method and apparatus for run-time correction of proximity effects in pattern generation
07/30/1998WO1998033132A1 Routing method removing cycles in vertical constraint graph
07/30/1998WO1998033096A1 Method and apparatus for the production of a structure by focused laser radiation on a photosensitively coated substrate
07/30/1998WO1998032893A2 Wafer support system
07/30/1998WO1998032595A1 Flexible skin incorporating mems technology
07/30/1998WO1998032546A1 Method for passivation of a metallization layer
07/30/1998DE19803021A1 Pattern examination method for IC chips
07/30/1998DE19802541A1 Semiconductor device especially MESFET
07/30/1998DE19713172A1 Semiconductor component with edges coated for separation from wafer
07/30/1998DE19710798C1 Mask production from membrane-covered single crystal silicon@
07/30/1998DE19702531A1 In-plane-gate transistor production by CMOS compatible process
07/30/1998DE19702294A1 Modulator für die Plasmaimmersions-Ionenimplantation Modulator for plasma immersion ion implantation
07/30/1998DE19702186A1 Verfahren zur Gehäusung von integrierten Schaltkreisen A process for Gehäusung of integrated circuits
07/30/1998CA2249573A1 Method and apparatus for run-time correction of proximity effects in pattern generation
07/29/1998EP0855764A2 Ceramic member-electric power supply connector coupling structure
07/29/1998EP0855748A1 Heterojunction field effect transistor and method of fabricating the same
07/29/1998EP0855747A1 Vertical pnp transistor
07/29/1998EP0855742A1 Semiconductor integrated circuit device produced from master slice and having operation mode easily changeable after selection on master slice
07/29/1998EP0855741A1 Component arrangement having magnetic field controlled transistor
07/29/1998EP0855740A1 Semiconductor device
07/29/1998EP0855739A1 Tapered dielectric etch process for moat etchback
07/29/1998EP0855738A2 Method of depositing a platinum film for capacitor electrode
07/29/1998EP0855737A2 Integrated processing for an etch module using a hard mask technique
07/29/1998EP0855736A2 Apparatus for and method of cleaning object to be processed
07/29/1998EP0855735A2 A high temperature, high flow rate chemical vapor deposition apparatus and related methods
07/29/1998EP0855734A1 Method of focused ion beam (FIB)etching enhanced with 1,2-diiodoethane
07/29/1998EP0855624A2 Apparatus and method for exposure
07/29/1998EP0855623A2 Projection exposure method and apparatus
07/29/1998EP0855621A2 Manufacturing method and apparatus for semiconductor device
07/29/1998EP0855620A1 Positive photoresist composition
07/29/1998EP0855614A1 Thin film device having coating film, liquid crystal panel, electronic apparatus and method of manufacturing the thin film device
07/29/1998EP0855594A2 Method for the determination of the generation life and dotation profile by simultaneous measurement of high-low frequency voltage and capacitance in metal-insulator-semiconductor structures
07/29/1998EP0855454A1 Microetching composition for copper or copper alloy
07/29/1998EP0855453A1 Methods and apparatus for cleaning using a chlorine containing gas plasma
07/29/1998EP0855452A1 Process and apparatus for depositing titanium layers
07/29/1998EP0855451A1 Wiring film, sputter target for forming the wiring film and electronic component using the same
07/29/1998EP0855399A2 Precursor with alkylaminosilylolefin ligands to deposit copper and method for same
07/29/1998EP0855088A1 Process for producing trench insulation in a substrate
07/29/1998EP0855087A1 Semiconductor processing using vapor mixtures
07/29/1998EP0855071A1 Enhanced security semiconductor device, semiconductor circuit arrangement, and method of production thereof
07/29/1998EP0854964A1 Vacuum actuated mechanical latch
07/29/1998EP0854829A1 300 mm SHIPPING CONTAINER
07/29/1998EP0854759A1 Flip chip underfill system and method
07/29/1998EP0755568B1 Vacuum microelectronic device and methodology for fabricating same
07/29/1998EP0733129B1 Process for producing and adhesive bond between copper layers and ceramics
07/29/1998EP0563264B1 Leadless pad array chip carrier
07/29/1998EP0349633B1 Polysilicon thin film process
07/29/1998CN1189244A Method of manufacturing monolithic linear optocoupler
07/29/1998CN1189243A Method for curing spin-on-glass film utilizing electron beam radiation
07/29/1998CN1189240A Low Inductance large area coil for inductively coupled plasma source
07/29/1998CN1189234A 半导体存储器 Semiconductor memory
07/29/1998CN1189087A Method for mounting optical semiconductor device on supporting substrate and their two formed component
07/29/1998CN1189086A IC terminal frame processing system
07/29/1998CN1188991A Semiconductor device and method for manufacturing same
07/29/1998CN1188989A Read only memory array and method of manufacturing the array
07/29/1998CN1188988A 电介质组合物和集成电路装置 The dielectric composition and the integrated circuit device
07/29/1998CN1188987A Integrated circuit device and process for its manufacture
07/29/1998CN1188986A Integrated circuit device and process for its manufactur
07/29/1998CN1188984A Metal substrate having IC chip and carrier mounting
07/29/1998CN1188982A Semiconductor device and method for producing same
07/29/1998CN1188981A Method of manufacturing semiconductor article
07/29/1998CN1188821A Process and apparatus for controlling the oxygen content in silicon wafers heavily doped with antimony or arsenic
07/29/1998CN1188820A Anodizing processing apparatus and method associated with the same
07/28/1998US5787269 Process simulation apparatus and method for selecting an optimum simulation model for a semiconductor manufacturing process
07/28/1998US5787190 Method and apparatus for pattern recognition of wafer test bins
07/28/1998US5787092 Test chip circuit for on-chip timing characterization
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