| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/11/1998 | US5793074 Metal oxide semiconductor capacitors having uniform C-V characteristics over an operating range and reduced susceptibility to insulator breakdown |
| 08/11/1998 | US5793073 Semiconductor thin film sensor device with (110) plane |
| 08/11/1998 | US5793072 Non-photosensitive, vertically redundant 2-channel α-Si:H thin film transistor |
| 08/11/1998 | US5793070 Reduction of trapping effects in charge transfer devices |
| 08/11/1998 | US5793068 Compact gate array |
| 08/11/1998 | US5793059 Static random access memory cell and method of fabricating the same |
| 08/11/1998 | US5793058 Multi-gate offset source and drain field effect transistors and methods of operating same |
| 08/11/1998 | US5793057 Conductive amorphous-nitride barrier layer for high dielectric-constant material electrodes |
| 08/11/1998 | US5793052 Dual stage following method and apparatus |
| 08/11/1998 | US5793050 Ion implantation system for implanting workpieces |
| 08/11/1998 | US5793048 Curvilinear variable axis lens correction with shifted dipoles |
| 08/11/1998 | US5793047 Photoelectric conversion apparatus and X-ray image pickup apparatus |
| 08/11/1998 | US5793022 Adaptive temperture controller and method of operation |
| 08/11/1998 | US5792823 Polyvinyl acetals based on a vinyl acetate-vinyl alcohol copolymer and p-hydroxybenzaldehyde protected by 2,3-dihydro-4h-pyran; photoresists; radiation transparent; heat resistance; dry etching resistance |
| 08/11/1998 | US5792710 Mixtures of gases containing, as a main component, boron trichloride, and an auxiliary component of hydrogen bromide |
| 08/11/1998 | US5792708 Reactive ion etching, isotropic etching to remove the polysilicon residue formed at the lower level |
| 08/11/1998 | US5792707 Global planarization method for inter level dielectric layers of integrated circuits |
| 08/11/1998 | US5792706 Interlevel dielectric with air gaps to reduce permitivity |
| 08/11/1998 | US5792705 Forming conductive metal lines on semiconductor substrates, then depositing dielectric layers which are baked and cured, then etched to form passivated metal lines and seamless dielectric filled spaces |
| 08/11/1998 | US5792704 Method for fabricating wiring in semiconductor device |
| 08/11/1998 | US5792703 Self-aligned contact wiring process for SI devices |
| 08/11/1998 | US5792702 Method for forming a film over a spin-on-glass layer by means of plasma-enhanced chemical-vapor deposition |
| 08/11/1998 | US5792700 Semiconductor processing method for providing large grain polysilicon films |
| 08/11/1998 | US5792699 Method for reduction of reverse short channel effect in MOSFET |
| 08/11/1998 | US5792697 Method for fabricating a multi-stage ROM |
| 08/11/1998 | US5792696 Nonvolatile memory device and manufacturing method thereof |
| 08/11/1998 | US5792695 Connecting two-layer electrode wiring film containing silicide and polysilicon(thick) films with impurity diffusing area while keeping contact resistance uniformly low, for electrically programmable read only memory computers |
| 08/11/1998 | US5792694 Method for fabricating a semiconductor memory cell structure |
| 08/11/1998 | US5792693 Method for producing capacitors having increased surface area for dynamic random access memory |
| 08/11/1998 | US5792692 Various depositions techniques such as low pressure chemical, plasma enhanced, atomospheric pressure or subatmospheric pressure vapor deposition and anisotropic reactive ion etching for twin hammer shaping |
| 08/11/1998 | US5792691 Method of manufacturing semiconductor memory device having a capacitor |
| 08/11/1998 | US5792690 Growing insulator layer on substrate, forming trenches, depositing conductive layer, etching, growing oxide layer, silicide spacers, patterning, doping, annealing |
| 08/11/1998 | US5792689 Using single photoresist mask for making bottom electrodes, for increased capacitance, improved cell density, efficiency |
| 08/11/1998 | US5792688 Method to increase the surface area of a storage node electrode, of an STC structure, for DRAM devices, via formation of polysilicon columns |
| 08/11/1998 | US5792687 Increasing bit line contact and capacitor node contact in dynamic random access memory |
| 08/11/1998 | US5792685 Three-dimensional device layout having a trench capacitor |
| 08/11/1998 | US5792684 Allows memory devices, with self-aligned contact structure, and logic devices to be built simultaneously |
| 08/11/1998 | US5792681 Fabrication process for MOSFET devices and a reproducible capacitor structure |
| 08/11/1998 | US5792680 Photolithography |
| 08/11/1998 | US5792679 Implanting mobility enhancing species into first region of low mobility semiconductor material, selectively oxidizing |
| 08/11/1998 | US5792678 Method for fabricating a semiconductor on insulator device |
| 08/11/1998 | US5792673 For semiconductor surface coating films |
| 08/11/1998 | US5792672 Photoresist strip method |
| 08/11/1998 | US5792671 Method of manufacturing semiconductor device |
| 08/11/1998 | US5792670 Method of manufacturing double polysilicon EEPROM cell and access transistor |
| 08/11/1998 | US5792596 Pattern forming method |
| 08/11/1998 | US5792594 Metallization and termination process for an integrated circuit chip |
| 08/11/1998 | US5792593 Redepositing starting material on sidewall of foundation during etch of starting material |
| 08/11/1998 | US5792592 Photosensitive liquid precursor solutions and use thereof in making thin films |
| 08/11/1998 | US5792590 Pattern formation method |
| 08/11/1998 | US5792586 Positive resist composition comprising a novolac resin made from a cycloalkyl substituted phenol |
| 08/11/1998 | US5792585 Mixture containing low molecular weight novolak and quinonediazide sensitizer; sensitivity, resolution, heat resistance |
| 08/11/1998 | US5792581 Method of correcting pattern data for drawing photomask to overcome proximity effects |
| 08/11/1998 | US5792580 Method of aligning reticle pattern |
| 08/11/1998 | US5792562 Electrostatic chuck with polymeric impregnation and method of making |
| 08/11/1998 | US5792522 High density plasma physical vapor deposition |
| 08/11/1998 | US5792324 Sputtering with an inert gas, reactive etching to form a by-product and reactive sputtering; covering power; reduction of sputtering bias voltage; decreasing mechanical and electrostatic stresses on target |
| 08/11/1998 | US5792314 Exposing resin to mixture of fluorine compound gas, steam, and ozone, exciting the gas mixture, gasifying the resin |
| 08/11/1998 | US5792305 Fixture for decapsulating plastic encapsulated electronic device packages |
| 08/11/1998 | US5792304 Method of holding substrate and substrate holding system |
| 08/11/1998 | US5792293 Preventing the green sheet deforming by conveying with a carrier film or plates, sintering |
| 08/11/1998 | US5792275 Converting original film into film susceptible to aerosl cleaning, removing film with aerosol jet |
| 08/11/1998 | US5792274 Remover solution containing salt of hydrofluoric acid with metal-free base, water soluble organic solvent, water and,optionally, a corrosion inhibitor |
| 08/11/1998 | US5792273 Secondary edge reflector for horizontal reactor |
| 08/11/1998 | US5792272 Plasma enhanced chemical processing reactor and method |
| 08/11/1998 | US5792259 Substrate processing apparatus and air supply method in substrate processing apparatus |
| 08/11/1998 | US5792258 High-frequency induction heater and method of producing semiconductor single crystal using the same |
| 08/11/1998 | US5792257 Method for protecting the susceptor during epitaxial growth by CVD and a device for epitaxial growth by CVD |
| 08/11/1998 | US5792254 Production of diamond film |
| 08/11/1998 | US5792226 Air current controlling device and clean room adopting the same |
| 08/11/1998 | US5791895 Apparatus for thermal treatment of thin film wafer |
| 08/11/1998 | US5791851 Apparatus for transfer of workpieces into and out of a coating chamber |
| 08/11/1998 | US5791709 Semiconductor manufacturing apparatus having suctorial means for handling wafers |
| 08/11/1998 | US5791552 For attaching a chip carrying assembly to a daughter board assembly |
| 08/11/1998 | US5791550 Method and apparatus for wire bonding |
| 08/11/1998 | US5791549 Ultrasonic single-point bonder for semiconductor device fabrication |
| 08/11/1998 | US5791486 Integrated circuit tray with self aligning pocket |
| 08/11/1998 | US5791484 Assembly of chip parts |
| 08/11/1998 | US5791406 Cooling device for electrical or electronic components having a base plate and cooling elements and method for manufacturing the same |
| 08/11/1998 | US5791369 Pressure type flow rate control apparatus |
| 08/11/1998 | US5791358 Rinse trough with improved flow |
| 08/11/1998 | US5791357 Support jig for thin circular objects |
| 08/11/1998 | US5791045 Process for the production of a diamond heat sink |
| 08/11/1998 | CA2094656C Device manufacture involving lithographic process |
| 08/11/1998 | CA2094439C Fully automated and computerized conveyor based manufacturing line architecture adapted to pressurized sealable transportable containers |
| 08/11/1998 | CA2090096C Semiconductor device having polysilicon thin-film |
| 08/10/1998 | WO1998044067A1 Circuit connecting material, and structure and method of connecting circuit terminal |
| 08/10/1998 | CA2226419A1 Monoblock structure of stacked components |
| 08/10/1998 | CA2221835A1 Optical pellicle adhesion system |
| 08/06/1998 | WO1998034451A1 Methods and compositions for ionizing radiation shielding |
| 08/06/1998 | WO1998034447A1 Printed wiring board and its manufacturing method |
| 08/06/1998 | WO1998034445A1 Method and apparatus for metallizing high aspect ratio silicon semiconductor device contacts |
| 08/06/1998 | WO1998034287A1 Vialess integrated inductive elements for electromagnetic applications |
| 08/06/1998 | WO1998034285A1 Light emitting element, semiconductor light emitting device, and method for manufacturing them |
| 08/06/1998 | WO1998034276A1 Method and device for sealing ic chip |
| 08/06/1998 | WO1998034275A1 Semiconductor device incorporating mos element and method for manufacturing the same |
| 08/06/1998 | WO1998034274A1 Self-aligned process for fabricating a passivating ledge in a heterojunction bipolar transistor |
| 08/06/1998 | WO1998034273A1 Ball arranging substrate for forming bump, ball arranging head, ball arranging device, and ball arranging method |
| 08/06/1998 | WO1998034272A1 Thin titanium film as self-regulating filter for silicon migration into aluminum metal lines |
| 08/06/1998 | WO1998034270A1 Double window exhaust arrangement for wafer plasma processor |