Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/1998
09/22/1998US5811348 Method for separating a device-forming layer from a base body
09/22/1998US5811347 Nitrogenated trench liner for improved shallow trench isolation
09/22/1998US5811346 Silicon corner rounding in shallow trench isolation process
09/22/1998US5811345 Planarization of shallow- trench- isolation without chemical mechanical polishing
09/22/1998US5811344 Method of forming a capacitor of a dram cell
09/22/1998US5811343 Oxidation method for removing fluorine gas inside polysilicon during semiconductor manufacturing to prevent delamination of subsequent layer induced by fluorine outgassing dielectric
09/22/1998US5811342 Method for forming a semiconductor device with a graded lightly-doped drain structure
09/22/1998US5811341 Differential amplifier having unilateral field effect transistors and process of fabricating
09/22/1998US5811340 Metal oxide semiconductor field effect transistor and method of manufacturing the same
09/22/1998US5811339 Etching second polysilicon layer to form an opening, oxidizing polysilicon to oxide layer that expanded in volume narrowing the opening
09/22/1998US5811338 Method of making an asymmetric transistor
09/22/1998US5811337 Method of fabricating a semiconductor read-only memory device for permanent storage of multi-level coded data
09/22/1998US5811336 Method of forming MOS transistors having gate insulators of different thicknesses
09/22/1998US5811335 Semiconductor electronic device with autoaligned polysilicon and silicide control terminal
09/22/1998US5811334 Wafer cleaning procedure useful in the manufacture of a non-volatile memory device
09/22/1998US5811333 Method of roughening a polysilicon layer of a random crystal structure included in a semiconductor device
09/22/1998US5811332 Method of fabricating a capacitor structure for a semiconductor memory device
09/22/1998US5811331 Formation of a stacked cylindrical capacitor module in the DRAM technology
09/22/1998US5811330 Forming first conductive layer over insulating layer, etching first aperture in conductive layer, depositing second insulating and second conductive layers, selectively etching second aperture in second layer through first aperture
09/22/1998US5811329 Method of forming CMOS circuitry including patterning a layer of conductive material overlying field isolation oxide
09/22/1998US5811328 Electro-optical device and thin film transistor and method forming the same
09/22/1998US5811327 Method and an apparatus for fabricating a semiconductor device
09/22/1998US5811326 Method for manufacturing thin film transistor
09/22/1998US5811325 Method of making a polysilicon carbon source/drain heterojunction thin-film transistor
09/22/1998US5811324 Method for manufacturing thin film transistor
09/22/1998US5811323 Process for fabricating a thin film transistor
09/22/1998US5811319 Methods of forming electrodes on gallium nitride group compound semiconductors
09/22/1998US5811318 Method for manufacturing a liquid crystal display
09/22/1998US5811317 Underfill thermosetting resin is not completely cured therfore, solder joints and die do not experience much stress
09/22/1998US5811316 Method of forming teos oxide and silicon nitride passivation layer on aluminum wiring
09/22/1998US5811315 Method of forming and planarizing deep isolation trenches in a silicon-on-insulator (SOI) structure
09/22/1998US5811314 Magnetic ink and method for manufacturing and sifting out of defective dice by using the same
09/22/1998US5811283 Silicon on insulator (SOI) dram cell structure and process
09/22/1998US5811223 Forming patterns by use of positive photoresist film patterns and negative photoresist film patterns formed on adjacent dies, detecting difference in dimension between patterns
09/22/1998US5811222 Projecting an image onto photosensitive material covering semiconductor substrate, then projecting a second image which partially overlaps the first
09/22/1998US5811211 Peripheral edge exposure method
09/22/1998US5811208 Phase shift mask and method of producing the same
09/22/1998US5811195 Corrosion-resistant aluminum article for semiconductor processing equipment
09/22/1998US5811181 Ferroelectric thin film, ferroelectric thin film covering substrate and manufacturing method of ferroelectric thin film
09/22/1998US5811153 Solutions containing reaction product of metal alkoxides, acetates or beta-diketone complexes with alcohols, carboxylic anhydrides, glycols, beta-diketones or dicarboxylic acid monoesters
09/22/1998US5811132 Mold for semiconductor packages
09/22/1998US5811022 Inductive plasma reactor
09/22/1998US5811020 Non-photolithographic etch mask for submicron features
09/22/1998US5810994 Method for fabricating silicon-on-insulator device wafer
09/22/1998US5810964 Chemical mechanical polishing device for a semiconductor wafer
09/22/1998US5810959 Thermocompressing bonding method and thermocompressing bonding apparatus
09/22/1998US5810945 Method of fabricating an electronic micropatterned electrode device
09/22/1998US5810942 Aerodynamic aerosol chamber
09/22/1998US5810940 Method for cleaning semiconductor wafers
09/22/1998US5810937 Using ceramic wafer to protect susceptor during cleaning of a processing chamber
09/22/1998US5810936 Plasma-inert cover and plasma cleaning process and apparatus employing same
09/22/1998US5810935 Apparatus for transferring a wafer
09/22/1998US5810933 Wafer cooling device
09/22/1998US5810931 High aspect ratio clamp ring
09/22/1998US5810930 Photo-chemical vapor deposition apparatus having exchange apparatus of optical window and method of exchanging optical window therewith
09/22/1998US5810929 Pyrogenic wet thermal oxidation of semiconductor wafers
09/22/1998US5810926 Method and apparatus for applying atomized adhesive to a leadframe for chip bonding
09/22/1998US5810924 Low defect density/arbitrary lattice constant heteroepitaxial layers
09/22/1998US5810923 Method for forming oxide thin film and the treatment of silicon substrate
09/22/1998US5810549 Independent linear dual-blade robot and method for transferring wafers
09/22/1998US5810538 Semiconductor manufacturing equipment and method for carrying wafers in said equipment
09/22/1998US5810537 Isolation chamber transfer apparatus
09/22/1998US5810062 Two stage valve for charging and/or vacuum relief of pods
09/22/1998US5810031 Ultra high purity gas distribution component with integral valved coupling and methods for its use
09/22/1998US5810028 Washing apparatus for disc-like workpieces
09/22/1998US5809832 For use in a substrate processing system
09/22/1998US5809633 Method for producing a smart card module for contactless smart cards
09/22/1998CA2158958C Magnetic roller gas gate employing transonic sweep gas flow
09/22/1998CA2061622C Sub-micron device fabrication
09/22/1998CA2041495C Cvd apparatus containing single u-shaped discharge electrode held in parallel with a substrate
09/17/1998WO1998041071A1 Hybrid module assembling method and apparatus
09/17/1998WO1998041070A1 Method for forming metal conductor models on electrically insulating supports
09/17/1998WO1998040912A1 Chip arrangement and method for the production of the same
09/17/1998WO1998040911A1 Methods for chemical mechanical polish of organic polymer dielectric films
09/17/1998WO1998040910A1 Wiring forming method for semiconductor device and semiconductor device
09/17/1998WO1998040909A2 Method of forming etched structures comprising implantation steps
09/17/1998WO1998040791A1 Positioning device having two object holders
09/17/1998WO1998040789A1 Positive photoresists containing novel photoactive compounds
09/17/1998WO1998040695A1 Apparatus for measuring height of bonding wire
09/17/1998WO1998040453A1 Alkanolamine semiconductor process residue removal composition and process
09/17/1998WO1998040387A1 Novel copper(i) precursors for chemical deposit in gas phase of metallic copper
09/17/1998WO1998027576A3 Power management system for a semiconductor processing facility
09/17/1998WO1998020543A3 Method for making a thin film on a support and resulting structure
09/17/1998DE4143616C2 Semiconductor arrangement with self-aligned contact windows
09/17/1998DE19810546A1 Notch-free marked wafer production
09/17/1998DE19810545A1 Wafer with mirror polished bevelled edge
09/17/1998DE19809564A1 Silicon carbide semiconductor device
09/17/1998DE19741972C1 Silicon-on-Isolator cells, e.g. for IGBT, MOS controlled thyristor, FET power semiconductor
09/17/1998DE19710559A1 Sensor especially mass flow sensor
09/17/1998DE19703059A1 Vorrichtung und Verfahren zur Halterung und zum Schutz von Halbleiter-Wafern Apparatus and method for supporting and protecting semiconductor wafers
09/16/1998EP0865163A1 High-voltage tolerant input buffer in low-voltage technology
09/16/1998EP0865154A2 Method and apparatus for reducing noise in a low current oscillator
09/16/1998EP0865088A2 Epitaxial wafer having a gallium nitride epitaxial layer deposited on semiconductor substrate and method for preparing the same
09/16/1998EP0865083A2 Electrode for semiconductor device and method of manufacturing it
09/16/1998EP0865081A2 Process for fabricating electronic elements
09/16/1998EP0865080A2 MOS-gated semiconductor devices
09/16/1998EP0865079A2 A method for removing redeposited veils from etched platinum surfaces
09/16/1998EP0865078A1 Method of depositing nanometre scale particles
09/16/1998EP0865077A1 Method for the formation of a thin metal silicide layer on a Si substrate, and use thereof in detector applications
09/16/1998EP0865076A2 Electrode structure for transistors, non-volatile memories and the like and method for fabricating said electrode
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