| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/15/1998 | US5807790 Selective i-line BARL etch process |
| 09/15/1998 | US5807789 Method for forming a shallow trench with tapered profile and round corners for the application of shallow trench isolation (STI) |
| 09/15/1998 | US5807788 Method for selective deposition of refractory metal and device formed thereby |
| 09/15/1998 | US5807787 Method for reducing surface leakage current on semiconductor intergrated circuits during polyimide passivation |
| 09/15/1998 | US5807786 Amorphous silicon layer with thin protective coating during patterning |
| 09/15/1998 | US5807785 Low dielectric constant silicon dioxide sandwich layer |
| 09/15/1998 | US5807784 Device isolation methods for a semiconductor device |
| 09/15/1998 | US5807783 Surface mount die by handle replacement |
| 09/15/1998 | US5807782 Method of manufacturing a stacked capacitor having a fin-shaped storage electrode on a dynamic random access memory cell |
| 09/15/1998 | US5807780 High frequency analog transistors method of fabrication and circuit implementation |
| 09/15/1998 | US5807779 Forming openings in source and drains regions |
| 09/15/1998 | US5807778 Method of manufacturing shallow trench source EPROM cell |
| 09/15/1998 | US5807777 Stacked layers |
| 09/15/1998 | US5807776 Method of forming dynamic random access memory circuitry and dynamic random access memory |
| 09/15/1998 | US5807775 Method for forming a double walled cylindrical capacitor for a DRAM |
| 09/15/1998 | US5807774 Simple method of fabricating ferroelectric capacitors |
| 09/15/1998 | US5807773 Self-aligned gate fabrication process for silicon carbide static induction transistors |
| 09/15/1998 | US5807772 Method for forming semiconductor device with bottom gate connected to source or drain |
| 09/15/1998 | US5807771 Radiation-hard, low power, sub-micron CMOS on a SOI substrate |
| 09/15/1998 | US5807770 Fabrication method of semiconductor device containing semiconductor active film |
| 09/15/1998 | US5807769 Methods of making thin film transistors |
| 09/15/1998 | US5807767 Technique for attaching die to leads |
| 09/15/1998 | US5807766 Process for attaching a silicon chip to a circuit board using a block of encapsulated wires and the block of wires manufactured by the process |
| 09/15/1998 | US5807765 Surface passivation with alumina |
| 09/15/1998 | US5807761 Method for real-time in-situ monitoring of a trench formation process |
| 09/15/1998 | US5807760 Method of despositing an aluminum-rich layer |
| 09/15/1998 | US5807759 Method of fabricating a contact structure for a raised source/drain MOSFET |
| 09/15/1998 | US5807728 Thin film transistor for antistatic circuit and method for fabricating the same |
| 09/15/1998 | US5807660 Avoid photoresist lifting by post-oxide-dep plasma treatment |
| 09/15/1998 | US5807648 Photo-Mask having optical filtering layer on transparent substrate uncovered with photo-shield pattern and process of fabrication |
| 09/15/1998 | US5807647 Method for determining phase variance and shifter stability of phase shift masks |
| 09/15/1998 | US5807611 Forming protective ceramic coating |
| 09/15/1998 | US5807607 Using an organosilicon or organometallic compound; gelation |
| 09/15/1998 | US5807508 Copper oxide, polymer composite |
| 09/15/1998 | US5807495 Bi-based dielectric thin films, and compositions and method for forming them |
| 09/15/1998 | US5807493 Microetching method for copper or copper alloy |
| 09/15/1998 | US5807469 For integrated circuits |
| 09/15/1998 | US5807453 Fabrication of leads on semiconductor connection components |
| 09/15/1998 | US5807439 Apparatus and method for improved washing and drying of semiconductor wafers |
| 09/15/1998 | US5807432 Process for producing diamond covered member |
| 09/15/1998 | US5807165 Method of electrochemical mechanical planarization |
| 09/15/1998 | US5807062 Arrangement for handling wafer-shaped objects |
| 09/15/1998 | US5806753 Application of low temperature metallurgical paste to form a bond structure to attach an electronic component to a carrier |
| 09/15/1998 | US5806574 For semiconductor wafers |
| 09/15/1998 | US5806544 Carbon dioxide jet spray disk cleaning system |
| 09/15/1998 | US5806543 For cleaning substrates during semiconductor fabrication |
| 09/15/1998 | US5806286 Packing structure for container for semiconductor wafer and packing method for container |
| 09/15/1998 | US5806193 Tilt and movement apparatus using flexure and air cylinder |
| 09/15/1998 | US5806138 Cleaning apparatus for cleaning a semiconductor wafer |
| 09/15/1998 | US5806137 Washing of wafers and wafer washing and drying apparatus |
| 09/15/1998 | US5806126 Apparatus for a brush assembly |
| 09/15/1998 | CA2121819C Device fabrication entailing plasma-derived x-ray delineation |
| 09/15/1998 | CA2103411C Electron beam lithography with reduced charging effects |
| 09/15/1998 | CA2094437C Dispatching apparatus with a gas supply distribution system for handling and storing pressurized sealable transportable containers |
| 09/11/1998 | WO1998039804A1 Columnar-grained polycrystalline solar cell substrate and improved method of manufacture |
| 09/11/1998 | WO1998039802A1 Method for manufacturing semiconductor integrated circuit device |
| 09/11/1998 | WO1998039801A1 Thin film ferroelectric capacitors having improved memory retention through the use of essentially smooth bottom electrode structures |
| 09/11/1998 | WO1998039800A1 Strontium bismuth niobate tantalate ferroelectric thin film |
| 09/11/1998 | WO1998039799A1 Post-treating method for plasma etching |
| 09/11/1998 | WO1998039798A1 Methods and apparatus for removing photoresist mask defects_in a plasma reactor |
| 09/11/1998 | WO1998039797A1 Semiconductor and method relating to semiconductors |
| 09/11/1998 | WO1998039796A1 Plating system for semiconductor materials |
| 09/11/1998 | WO1998039795A1 Method of checking for the presence of connection balls |
| 09/11/1998 | WO1998039793A2 Semiconductor processing furnace heating control system |
| 09/11/1998 | WO1998039689A1 Lithographic projection apparatus with off-axis alignment unit |
| 09/11/1998 | WO1998039688A1 Method for producing a structured layer |
| 09/11/1998 | WO1998039638A1 Standard for calibrating and checking a surface inspection device and method for the production thereof |
| 09/11/1998 | WO1998039610A1 Semiconductor processing furnace heating subassembly |
| 09/11/1998 | WO1998039609A1 Semiconductor processing furnace |
| 09/11/1998 | WO1998039495A1 Multipurpose processing chamber for chemical vapor deposition processes |
| 09/11/1998 | WO1998039270A1 Hot pressed silicon carbide wafer and method of using it as a dummy wafer |
| 09/11/1998 | WO1998029897A3 Well boosting threshold voltage rollup |
| 09/11/1998 | CA2283396A1 Semiconductor and method relating to semiconductors |
| 09/11/1998 | CA2283334A1 Columnar-grained polycrystalline solar cell substrate and improved method of manufacture |
| 09/11/1998 | CA2281763A1 Strontium bismuth niobate tantalate ferroelectric thin film |
| 09/11/1998 | CA2251219A1 Thin film ferroelectric capacitors having improved memory retention through the use of essentially smooth bottom electrode structures |
| 09/10/1998 | DE19801439A1 Silicon epitaxial layer growth apparatus |
| 09/10/1998 | DE19758452A1 Metal-ceramic substrate for electrical circuit |
| 09/10/1998 | DE19709255A1 Standard zur Kalibrierung und Überprüfung eines Oberflächeninspektions-Gerätes und Verfahren zur Herstellung des Standards Standard for calibration and testing of a surface inspection device and method for the preparation of the standard |
| 09/10/1998 | DE19705530A1 Low resistance contact formation method for semiconductor metallisation layer |
| 09/09/1998 | EP0863554A2 Field-effect transistor |
| 09/09/1998 | EP0863552A1 GaAs-based mosfet, and method of making same |
| 09/09/1998 | EP0863549A2 Semiconductor device comprising a wiring substrate |
| 09/09/1998 | EP0863548A2 Mounting assembly of integrated circuit device and method for production thereof |
| 09/09/1998 | EP0863547A2 Gate unit for a hard-driven GTO |
| 09/09/1998 | EP0863546A1 Pseudo-fuse and its use in a circuit for setting a bistable flip-flop |
| 09/09/1998 | EP0863545A2 Monocrystalline ceramic electrostatic chuck |
| 09/09/1998 | EP0863544A2 Substrate for use in wafer attracting apparatus and manufacturing method thereof |
| 09/09/1998 | EP0863543A2 Through-the-substrate investigation of flip-chip IC's |
| 09/09/1998 | EP0863542A2 III-V epitaxial wafer production |
| 09/09/1998 | EP0863541A1 Method for the production of a semiconductor single crystalline substrate having a chamfer and a protecting film |
| 09/09/1998 | EP0863540A1 Process for treating a polished semiconductor wafer just after completion of its polishing |
| 09/09/1998 | EP0863539A1 Insulator-compound semiconductor interface-structure and methods of fabrication |
| 09/09/1998 | EP0863538A2 Coating apparatus and coating method |
| 09/09/1998 | EP0863536A2 Method and apparatus for substrate processing |
| 09/09/1998 | EP0863495A1 Display device |
| 09/09/1998 | EP0863470A1 Architectural power estimation method and apparatus |
| 09/09/1998 | EP0863440A2 Projection exposure apparatus and device manufacturing method |
| 09/09/1998 | EP0863438A1 Method of and apparatus for processing photoresist, method of evaluating photoresist film, and processing apparatus using the evaluation method |
| 09/09/1998 | EP0863426A1 Liquid crystal display device |