Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/1998
09/03/1998WO1998038597A2 Data-conversion method for a multibeam laser writer for very complex microlithographic patterns
09/03/1998WO1998038549A1 Optical proximity correction method for intermediate-pitch features using sub-resolution scattering bars
09/03/1998WO1998038508A1 System for detecting amine and other basic molecular contamination in a gas
09/03/1998WO1998038261A1 Adhesive, liquid crystal device, method of manufacturing liquid crystal device, and electronic apparatus
09/03/1998WO1998038001A1 Laser apparatus having improved via processing rate
09/03/1998WO1998028786A3 Method of manufacturing a glass-covered semiconductor device and a glass-covered semiconductor device
09/03/1998DE19754664A1 Transparent conductive composition suitable for low temperature sintering without vacuum equipment
09/03/1998DE19730759C1 Vertical power MOSFET
09/02/1998EP0862352A2 A heating element with a diamond sealing material
09/02/1998EP0862260A2 Charge pump circuit
09/02/1998EP0862224A1 Semiconductor device
09/02/1998EP0862222A1 Semiconductor device and process for manufacturing the same
09/02/1998EP0862221A1 Semiconductor device
09/02/1998EP0862220A1 Semiconductor switching device and a power converter using the same and a drive method therefor
09/02/1998EP0862218A1 An improved-q inductor with multiple metalization levels
09/02/1998EP0862212A2 A tape carrier package
09/02/1998EP0862209A2 Process for manufacturing a metal-ceramic substrate and metal-ceramic substrate
09/02/1998EP0862208A2 Semiconductor device and method of manufacturing the same
09/02/1998EP0862207A1 Method of forming a DRAM trench capacitor
09/02/1998EP0862206A2 Etching of contact holes of a semiconductor device
09/02/1998EP0862204A1 Method for fabricating a capacitor for a semiconductor structure
09/02/1998EP0862203A1 Method for fabricating a semiconductor memory capacitor
09/02/1998EP0862202A1 Method for making a semiconductor device with a planarizing SOG layer and apparatus used in the same method
09/02/1998EP0862201A2 Method of manufacturing a thin film transistor
09/02/1998EP0862200A1 Method for recovering impurities on a silicon wafer and apparatus therefor
09/02/1998EP0862134A2 Chip card and fabrication method
09/02/1998EP0862126A2 Ion implantation process simulation device realizing accurate interpolation of ion implatation profiles and simulation method therefor
09/02/1998EP0861928A1 Effusion cell for Si and molecular beam epitaxy system
09/02/1998EP0861921A1 Deposition of titanium nitride films
09/02/1998EP0861920A1 Method for depositing titanium nitride
09/02/1998EP0861503A1 Semiconductor interlayer staggered contact structure
09/02/1998EP0861502A1 Carrier tape with adhesive and protective walls
09/02/1998EP0861487A1 Time optimal trajectory for cluster tool robots
09/02/1998EP0861457A1 Method of monitoring a photolithographic process
09/02/1998EP0861338A1 Surface treatment method and device therefor
09/02/1998EP0781419A4 Method and device for making connection
09/02/1998EP0778837B1 Preparation of metalorganic compounds
09/02/1998EP0758489B1 Voltage breakdown resistant monocrystalline silicon carbide semiconductor devices, and methods of fabricating same
09/02/1998EP0670103B1 Local hardening method of an adhesive for a semiconductor integrated circuit
09/02/1998EP0419461B1 Wafer handling system with bernoulli pick-up
09/02/1998CN1192265A Passive gas substrate thermal conditioning apparatus and method
09/02/1998CN1192055A Method of producing semiconductor member and method of producing solar cell
09/02/1998CN1192053A MOSFET and manufacturing method thereof
09/02/1998CN1192051A Semiconductor devices and manufacturing method
09/02/1998CN1192050A Semiconductor devices
09/02/1998CN1192049A Refractory metal capped low resistivity metal conductor lines and vias formed using PVD and CVD
09/02/1998CN1192046A Lead frame, semiconductor device, and process for manufacturing semiconductor device
09/02/1998CN1192045A Semiconductor device and method for fabricating the same
09/02/1998CN1192044A Thin membrane semiconductor integrated circuit and its manufacturing method
09/02/1998CN1192043A Improved scribe and break of hard-to-scribe materials
09/02/1998CN1192041A Method of manufacturing semiconductor device
09/02/1998CN1192040A Refractory metal capped low resistivity metal conductor lines and vias formed using PVD and CVD
09/02/1998CN1192039A Method of manufacturing semiconductor device
09/02/1998CN1191993A Radiation sensitive composition adapted for roller coating
09/02/1998CN1191992A Radiation-sensitive composition adapted for roller coating
09/02/1998CN1191891A Rinsing solution
09/01/1998US5802270 Integrated circuit having an embedded digital signal processor and externally testable signal paths
09/01/1998US5802007 Semiconductor device having redundancy controlling circuit for selectively connecting signal paths to pin
09/01/1998US5802001 Burn-in checking apparatus for semiconductor memory device
09/01/1998US5802000 Highly integrated semiconductor device having stepwise bit lines
09/01/1998US5801993 Nonvolatile memory device
09/01/1998US5801971 Form simulation device and its simulating method by the use of the Monte Carlo method
09/01/1998US5801965 Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices
09/01/1998US5801961 Power management system for a semiconductor processing facility
09/01/1998US5801960 Layout method of wiring pattern for semiconductor integrated circuit
09/01/1998US5801936 Semiconductor module for a power conversion device
09/01/1998US5801927 Ceramic package used for semiconductor chips different in layout of bonding pads
09/01/1998US5801916 Pre-patterned contact fill capacitor for dielectric etch protection
09/01/1998US5801915 For holding a substrate in a process chamber
09/01/1998US5801836 Doped layers of silicon carbide; reduced risk of voltage breakdown
09/01/1998US5801835 Surface position detection apparatus and method
09/01/1998US5801832 Method of and device for repetitively imaging a mask pattern on a substrate using five measuring axes
09/01/1998US5801816 Projection exposure apparatus
09/01/1998US5801815 Projection exposure apparatus
09/01/1998US5801586 Circuit for supplying a reference level to a differential sense amplifier in a semiconductor memory
09/01/1998US5801576 Semiconductor integrated circuit device having a hierarchical power source configuration
09/01/1998US5801573 Protected switch having a power semiconductor device
09/01/1998US5801570 Semiconductor intergrated circuit with MOS transistors compensated of characteristic and performance deviations and deviation compensation system therein
09/01/1998US5801546 Interconnect architecture for field programmable gate array using variable length conductors
09/01/1998US5801538 Test pattern group and a method of measuring an insulation film thickness utilizing the same
09/01/1998US5801528 Semiconductor element evaluating apparatus
09/01/1998US5801452 Multi chip module including semiconductor wafer or dice, interconnect substrate, and alignment member
09/01/1998US5801451 Semiconductor device including a plurality of input buffer circuits receiving the same control signal
09/01/1998US5801449 Process and substrate for connecting an integrated circuit to another substrate by means of balls
09/01/1998US5801447 Flip chip mounting type semiconductor device
09/01/1998US5801445 Electrode interposed between insulation film and wire which is bonded thereto; crack prevention
09/01/1998US5801444 Multilevel electronic structures containing copper layer and copper-semiconductor layers
09/01/1998US5801443 Semiconductor device with short circuit prevention and method of manufacturing thereof
09/01/1998US5801441 Microelectronic mounting with multiple lead deformation and bonding
09/01/1998US5801434 TAB tape and semiconductor device including TAB tape
09/01/1998US5801433 Semiconductor device with smaller package
09/01/1998US5801429 Semiconductor device
09/01/1998US5801427 Accurate pattern configuration
09/01/1998US5801426 Field effect transistor with improved source/drain diffusion regions having an extremely small capacitance
09/01/1998US5801425 Semiconductor device having a wiring layer including a TISI2, film of the C49 or C54 structure
09/01/1998US5801424 MOSFET with reduced leakage current
09/01/1998US5801423 Semiconductor device
09/01/1998US5801421 Electrostatic discharge protection circuit
09/01/1998US5801419 High frequency MOS device
09/01/1998US5801418 High voltage power integrated circuit with level shift operation and without metal crossover