Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1999
12/07/1999US5998000 Silicon nitride circuit board
12/07/1999US5997999 Sintered body for manufacturing ceramic substrate
12/07/1999US5997963 The process chamber can be used to contain gas reactants for steps such as etching, doping, or growing materials in making integrated electronic, optical or micromechanical devices on the wafer substrate
12/07/1999US5997962 Subjecting a target object, such as a semiconductor wafer or an lcd substrate, to a plasma process, such as an etching process or the like.
12/07/1999US5997958 Fabrication of quantum electronic devices such as single electron transistors and memory devices.
12/07/1999US5997824 Disposing harmful components of gases and a mixture thereof which are generated during the manufacturing of a semiconductor device.
12/07/1999US5997757 Method of forming connection hole
12/07/1999US5997754 Method of fabricating multi-layered wiring
12/07/1999US5997713 Silicon etching process for making microchannel plates
12/07/1999US5997704 Sputtering target for depositing ferroelectric film, method for preparing the same, and method for preparing a DRAM using the same
12/07/1999US5997699 Insitu faceting during deposition
12/07/1999US5997687 Plasma processing apparatus
12/07/1999US5997659 Method of treatment of devices based on semiconductor and dielectric materials
12/07/1999US5997658 Aqueous stripping and cleaning compositions
12/07/1999US5997656 Semiconductor wet processing equipment having integrated input and emergency output port units and a method of controlling the loading and unloading of lots in the same
12/07/1999US5997653 Method for washing and drying substrates
12/07/1999US5997651 Heat treatment apparatus
12/07/1999US5997649 Stacked showerhead assembly for delivering gases and RF power to a reaction chamber
12/07/1999US5997642 Method and apparatus for misted deposition of integrated circuit quality thin films
12/07/1999US5997635 Method for fabricating a single-crystal semiconductor
12/07/1999US5997634 Method of forming a crystalline phase material
12/07/1999US5997620 Polishing composition
12/07/1999US5997588 Semiconductor processing system with gas curtain
12/07/1999US5997398 Semiconductor wafer storage apparatus and semiconductor device fabricating apparatus using said apparatus
12/07/1999US5997392 Slurry injection technique for chemical-mechanical polishing
12/07/1999US5997388 Apparatus for removing marks from integrated circuit devices
12/07/1999US5997255 Method for pumping a chamber using an in situ getter pump
12/07/1999US5997235 Swap out plate and assembly
12/07/1999US5997175 Method for determining the temperature of a semi-transparent radiating body
12/07/1999US5996877 Stepwise autorotation of wire bonding capillary
12/07/1999US5996805 Lead frame casing
12/07/1999US5996595 Semiconductor wafer cleaning system
12/07/1999US5996594 Post-chemical mechanical planarization clean-up process using post-polish scrubbing
12/07/1999US5996437 Precision motion stage with single guide beam and follower stage
12/07/1999US5996420 Manifold systems and methods for delivering samples of microelectronic device processing gases to gas analyzers
12/07/1999US5996390 Method for manufacturing vacuum chamber
12/07/1999US5996353 Semiconductor processing system with a thermoelectric cooling/heating device
12/07/1999US5996242 Drying apparatus and method
12/07/1999US5996241 Semiconductor wafer processing system with immersion module
12/07/1999US5996221 Method for thermocompression bonding structures
12/07/1999US5996218 Method of forming an electrostatic chuck suitable for magnetic flux processing
12/07/1999US5996212 Method of manufacturing a body having a structure of layers
12/07/1999CA2159242C Process for manufacturing semiconductor device and semiconductor wafer
12/02/1999WO1999062124A1 Method for producing schottky diodes
12/02/1999WO1999062120A1 A capacitor array arrangment for improving capacitor array matching
12/02/1999WO1999062119A1 Rf shielded electronic device
12/02/1999WO1999062118A1 Method for making a micromodule and a storage medium comprising such a micromodule
12/02/1999WO1999062116A1 Semiconductor device and process for manufacturing the same
12/02/1999WO1999062115A1 Electrostatic chuck having an electrical connector with housing
12/02/1999WO1999062114A1 Method and contact point for producing a wire bonding connection
12/02/1999WO1999062113A2 Method for producing schottky diodes
12/02/1999WO1999062112A1 Method for producing schottky diodes
12/02/1999WO1999062111A1 Etching method
12/02/1999WO1999062110A1 Post-etching alkaline treatment process
12/02/1999WO1999062109A1 Method of forming cobalt disilicide contacts by chemical vapor deposition
12/02/1999WO1999062108A2 Methods for forming self-planarized dielectric layer for shallow trench isolation
12/02/1999WO1999062107A1 Batch end effector for semiconductor wafer handling
12/02/1999WO1999062106A2 Method of producing a structured surface
12/02/1999WO1999062099A1 Gas distributor for a semiconductor process chamber
12/02/1999WO1999062069A1 Magnetoresistive random access memory and method for reading/writing digital information to such a memory
12/02/1999WO1999061956A1 Compounds for photoresist and resin composition for photoresist
12/02/1999WO1999061680A1 Gas manifold for uniform gas distribuition and photochemistry
12/02/1999WO1999061678A1 A substrate handling and processing system and method
12/02/1999WO1999061675A1 Method and apparatus for increasing wafer throughput between cleanings in semiconductor processing reactors
12/02/1999WO1999061573A1 Cleaning fluid and cleaning method for component of semiconductor-treating apparatus
12/02/1999WO1999061540A1 Cmp slurry containing a solid catalyst
12/02/1999WO1999061531A1 Molecular coatings
12/02/1999WO1999061497A1 Water soluble negative-working photoresist composition
12/02/1999WO1999061350A2 Substrate transfer shuttle having a magnetic drive
12/02/1999WO1999061320A1 Stackable cassette for use with wafer cassettes
12/02/1999WO1999061200A1 Method and device for carrying out working steps on miniaturised modules
12/02/1999WO1999060888A1 Cleaning rotary brush
12/02/1999WO1999054908A8 Crystalline gas distributor for semiconductor plasma etch chamber
12/02/1999WO1999044229A9 A method for generating electrical conducting or semiconducting structures in two or three dimensions, a method for erasing the same structures and an electric field generator/modulator for use with the method for generating
12/02/1999DE19924583A1 Infrared (IR) spectroscopy inspection of semiconductor wafers
12/02/1999DE19924182A1 Carrier for wafers or magnetic disks of high functional density, used during manufacture and transport
12/02/1999DE19923609A1 Reduction objective useful in projector for deep ultraviolet microlithography in chip manufacture
12/02/1999DE19923388A1 Halbleiterspeicherbauelement mit SOI (Silizium auf Isolator) Struktur und Verfahren für dessen Herstellung A semiconductor memory device having SOI (silicon on insulator) structure and method for its preparation
12/02/1999DE19922397A1 Kühl-/Heizvorrichtung für Halbleiterverarbeitungsflüssigkeiten Cooling / heating apparatus for semiconductor processing liquids
12/02/1999DE19922291A1 Verfahren zur Herstellung eines Halbleiterbauelements A process for producing a semiconductor device
12/02/1999DE19919406A1 Low cost high quality shallow isolation trench production in a silicon substrate
12/02/1999DE19919404A1 Shallow isolation trenches or oxide isolation regions are formed in a silicon substrate
12/02/1999DE19901894A1 DRAM memory with nodal capacitor structure
12/02/1999DE19840508A1 Separating individual semiconductor chips from composite wafer
12/02/1999DE19825399A1 Contour preparing for PN-junctions in semiconductor bodies
12/02/1999DE19825381A1 Handling thin, large diameter silicon wafers during semiconductor processing
12/02/1999DE19824566C1 GaP-Halbleiteranordnung und Verfahren zur Herstellung derselben GaP semiconductor device and method of manufacturing the same
12/02/1999DE19824400A1 Circuit track contacting device for connecting tracks via contact hole
12/02/1999DE19824030A1 Katadioptrisches Projektionsobjektiv mit adaptivem Spiegel und Projektionsbelichtungsverfahren A catadioptric projection objective with adaptive mirror and projection exposure method
12/02/1999DE19823962A1 Verfahren zur Herstellung eines Einkristalls A process for producing a single crystal
12/02/1999DE19823943A1 Circuit arrangement for burn in system for testing chips using board
12/02/1999DE19823904A1 Hochebene Halbleiterscheibe aus Silicium und Verfahren zur Herstellung von Halbleiterscheiben Plateau semiconductor wafer of silicon and process for producing semiconductor wafers
12/02/1999DE19823826A1 MRAM-Speicher sowie Verfahren zum Lesen/Schreiben digitaler Information in einen derartigen Speicher MRAM memory, as well as methods for reading / writing digital information in such a memory
12/02/1999DE19823623A1 Verfahren und Kontaktstelle zur Herstellung einer elektrischen Verbindung A method and contact point for making an electrical connection
12/02/1999DE19823223A1 Three-step etching of contact via
12/02/1999DE19823035A1 Integrated circuit manufacturing method
12/02/1999DE19822749A1 Metal-containing layers produced especially for diffusion barriers, contact layers and/or anti-reflection layers in CMOS circuits, DRAM memory chips or embedded DRAM chips
12/02/1999DE19822360A1 Surface defect energy determination e.g. semiconductor doping profile
12/02/1999DE19821800A1 CCD camera quality checking system for products employing plan and side view image processing
12/02/1999CA2336482A1 Cmp slurry containing a solid catalyst
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