Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2013
07/31/2013CN102194677B Method for manufacturing clearance wall of semiconductor apparatus
07/31/2013CN102187432B Method for depositing conformal amorphous carbon film by plasma-enhanced chemical vapor deposition (pecvd)
07/31/2013CN102186890B Fluorine-containing sulfonates having polymerizable anions and manufacturing method therefor, fluorine-containing resins, resist compositions, and pattern-forming method using same
07/31/2013CN102165571B Methods for fabricating MOS devices having highly stressed channels
07/31/2013CN102160161B Adjustable thermal contact between an electrostatic chuck and a hot edge ring by clocking a coupling ring
07/31/2013CN102150239B High density helicon plasma source for wide ribbon ion beam generation
07/31/2013CN102148255B Grid-control schottky junction field effect transistor with tunneling dielectric layer and formation method
07/31/2013CN102148248B High voltage metal oxide semiconductor element and manufacturing method
07/31/2013CN102138218B Resin composition, gate insulating layer and organic thin film transistor
07/31/2013CN102132211B Manufacturing method for substrate for mask blank, mask blank, photo mask, and semiconductor device
07/31/2013CN102130010B Method of filling large deep trench with high quality oxide for semiconductor devices
07/31/2013CN102129984B Dry etching method of silicon compound film
07/31/2013CN102123941B Microfine structure and process for producing same
07/31/2013CN102117768B Method for manufacturing multi-slot PN junction capacitor with multi-electrode ultra-low inductance
07/31/2013CN102104037B Luminous device with integrated circuit and manufacturing method thereof
07/31/2013CN102104021B Wafer dicing method
07/31/2013CN102097461B Substantially lattice matched semiconductor materials and associated methods
07/31/2013CN102096224B Liquid crystal display device and method of fabricating the same
07/31/2013CN102082097B Trench metal oxide semiconductor field effect transistor, a method for fabricating same and power conversion system
07/31/2013CN102074463B Method for manufacturing potential dividing rings of planar high voltage transistor and structures of potential dividing rings
07/31/2013CN102054859B Bipolar semiconductor device and manufacturing method
07/31/2013CN102017138B Die stacking system and method
07/31/2013CN102002323B Adhesive film with dicing sheet and method of manufacturing the same
07/31/2013CN101999174B Apparatus for manufacturing thin film solar cell
07/31/2013CN101996933B Method for manufacturing top copper interconnection layer
07/31/2013CN101970905B Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assembly
07/31/2013CN101937874B Method of creating asymmetric field-effect-transistors
07/31/2013CN101903988B Etching agent, etching method and liquid for preparing etching agent
07/31/2013CN101807586B TFT-LCD (Thin Film Transistor Liquid Crystal Display) array substrate and manufacturing method thereof
07/31/2013CN101796160B Copper CMP composition containing ionic polyelectrolyte and method
07/31/2013CN101764058B Method for forming ultrathin controllable metal silicide
07/31/2013CN101740418B Component mounting apparatus and component mounting method
07/31/2013CN101718487B Method and device for rapidly drying cleaned silicon wafers
07/31/2013CN101713067B Film formation method and film formation apparatus
07/31/2013CN101651100B Film forming method and film forming apparatus
07/31/2013CN101649485B Method for producing a single crystal of semiconductor material
07/31/2013CN101599457B Luminous devices, packages and systems containing the same, and fabricating methods thereof
07/31/2013CN101533767B Semiconductor device, metal-insulator-metal capacitor and method for manufacturing same
07/31/2013CN101506325B Compositions and methods for cmp of semiconductor materials
07/31/2013CN101275065B Lapping liquid
07/31/2013CN101217185B Organic light emitting diode display device and method of fabricating the same
07/31/2013CN101152919B Mask shell, mask box, pattern trasscription mehod and method for manufacturing display device
07/30/2013US8498911 Particle generation factor determining system, charging method and storage medium
07/30/2013US8498042 Multi-layer sheet for use in electro-optic displays
07/30/2013US8497980 Holding apparatus, exposure apparatus, exposure method, and device manufacturing method
07/30/2013US8497775 Use of gamma hardened RFID tags in pharmaceutical devices
07/30/2013US8497584 Method to improve bump reliability for flip chip device
07/30/2013US8497575 Semiconductor packaging system with an aligned interconnect and method of manufacture thereof
07/30/2013US8497569 Package substrates and semiconductor packages having the same
07/30/2013US8497566 Capacitors including conductive TiOxNx
07/30/2013US8497565 Multiple electrode layer backend stacked capacitor
07/30/2013US8497564 Method for fabricating a decoupling composite capacitor in a wafer and related structure
07/30/2013US8497558 System and method for wafer level packaging
07/30/2013US8497553 Semiconductor device
07/30/2013US8497544 Repairing defects in a nonvolatile semiconductor memory module utilizing a heating element
07/30/2013US8497537 Semiconductor device with ferro-electric capacitor
07/30/2013US8497534 Chip package with heavily doped regions and fabrication method thereof
07/30/2013US8497531 Integrated MOS gas or humidity sensor having a wireless transceiver
07/30/2013US8497530 Semiconductor structures including dual fins
07/30/2013US8497509 Method of manufacturing a semiconductor device
07/30/2013US8497508 Semiconductor device and manufacturing method thereof
07/30/2013US8497507 Array substrate for liquid crystal display device and method of fabricating the same
07/30/2013US8497503 Manufacture of photovoltaic devices
07/30/2013US8497420 Thick-film pastes containing lead- and tellurium-oxides, and their use in the manufacture of semiconductor devices
07/30/2013US8497391 Insulating film material, method of film formation using insulating film material, and insulating film
07/30/2013US8497218 Silicon carbide semiconductor device and method for producing the same
07/30/2013US8497217 Film forming apparatus and film-forming method
07/30/2013US8497215 Edge deletion of thin-layer solar modules by etching
07/30/2013US8497214 Semiconductor device manufacturing method
07/30/2013US8497213 Plasma processing method
07/30/2013US8497212 Filling narrow openings using ion beam etch
07/30/2013US8497211 Integrated process modulation for PSG gapfill
07/30/2013US8497210 Shallow trench isolation chemical mechanical planarization
07/30/2013US8497209 Oxidation-stabilized CMP compositions and methods
07/30/2013US8497208 Semiconductor device and method for manufacturing the same
07/30/2013US8497207 Methods of forming semiconductor devices including landing pads formed by electroless plating
07/30/2013US8497206 Method of processing backside copper layer for semiconductor chips
07/30/2013US8497205 Semiconductor device manufacturing method, wiring and semiconductor device
07/30/2013US8497204 Method for reducing dielectric overetch when making contact to conductive features
07/30/2013US8497203 Semiconductor structures and methods of manufacture
07/30/2013US8497202 Interconnect structures and methods of manufacturing of interconnect structures
07/30/2013US8497201 Self-assembly pattern for semiconductor integrated circuit
07/30/2013US8497199 Method for fabricating a thin film formed with a uniform single-size monolayer of spherical AZO nanoparticles
07/30/2013US8497198 Semiconductor process
07/30/2013US8497197 Method for manufacturing a high-performance semiconductor structure with a replacement gate process and a stress memorization technique
07/30/2013US8497196 Semiconductor device, method for fabricating the same and apparatus for fabricating the same
07/30/2013US8497195 Method for radiation hardening a semiconductor device
07/30/2013US8497194 Methods of forming doped regions in semiconductor substrates
07/30/2013US8497193 Method of thermally treating silicon with oxygen
07/30/2013US8497192 Method of manufacturing a semiconductor device and substrate processing apparatus
07/30/2013US8497191 Selective epitaxial growth method using halogen containing gate sidewall mask
07/30/2013US8497190 Process for treating a semiconductor-on-insulator structure
07/30/2013US8497189 Processing method for wafer
07/30/2013US8497188 Method for producing bonded wafer
07/30/2013US8497187 Method for manufacturing SOI wafer and SOI wafer
07/30/2013US8497186 Semiconductor devices and methods for forming patterned radiation blocking on a semiconductor device
07/30/2013US8497185 Method of manufacturing semiconductor wafer, and composite base and composite substrate for use in that method
07/30/2013US8497184 Method for manufacturing semiconductor device
07/30/2013US8497183 Devices having a cavity structure and related methods
07/30/2013US8497182 Sidewall thin film electrode with self-aligned top electrode and programmable resistance memory